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Technical Data for Alicat MB-Series Mass Flow Meters
10 SCCM full scale through 20 SLPM of full scale
Standard Specifi cations (Consult Alicat for available options.)
SENSOR PERFORMANCE
Mass Flow Accuracy at calibration conditions
High Accuracy Option
Bidirectional option
Repeatability (2σ) ±(0.1% of reading + 0.02% of full scale)
Flow Measurement Range 0.01–100% of full scale
Temperature Sensitivity
Pressure Sensitivity
Operating Temperature Range -10–60°C (expanded range available)
Temperature Accuracy ±0.75°C
Operating Pressure full scale 160 PSIA (additional options available)
Pressure Accuracy above 1 atm ±0.5% of reading
Pressure Accuracy below 1 atm ±0.07 PSIA
Totalizer Volume Uncertainty ±0.5% of reading additional uncertainty
Sensor Response Time <1 ms
Typical Indication Response Time
Typical Warm-Up Time <1 s
Stated accuracy is after tare under equilibrium conditions.
Extreme gas behavior (especially near state boundaries) can introduce additional fl ow uncertainties.
Indication response time includes user adjustable averaging up to 255 ms.
1
1
1
±0.6% of reading or ± 0.1% of full scale, whichever is greater
±0.5% of reading or ± 0.1% of full scale, whichever is greater
No additional uncertainties
Mass fl ow zero shift: ±0.01% of full scale per °C from tare temperature
Mass fl ow span shift: ±0.01% of reading per °C from 25°C
Mass fl ow zero shift: ±0.01% of full scale per atm from tare pressure
Mass fl ow span shift: ±0.1% of reading per atmosphere from calibration conditions
2
<10 ms (fl ow rate dependent)
Tel: 888-290-6060
www.alicat.com/mb
MECHANICAL
Minimum Operating Pressure
Maximum Operating Pressure
11.5 PSIA common mode pressure (lower operating pressures available)
Di erential pressure must exceed 1 PSID
Damage possible above 175 PSIA common mode pressure
Damage possible above 75 PSID di erential pressure
Ingress Protection IP40 (consult Alicat for weatherproofi ng options)
Humidity Range 0–95%, non-condensing
Wetted Materials
303 / 304 stainless steel, Viton®, heat-cured silicone rubber, glass-reinforced polyamide,
heat-cured epoxy, aluminum, gold, silicon, glass
COMMUNICATIONS
Digital I/O Options Serial over Micro-USB B
Digital Data Update Rate 40 Hz at 19200 baud
Display Update Rate 10 Hz
Battery Life (contrast dependent)
Monochrome screen: 18 hours, 14 hours backlit
Color TFT: 8 hours
DOC-SPECS-MB-MID
REV 0, October 09, 2019
1 of 2
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Technical Data for Alicat MB-Series Mass Flow Meters
10 SCCM full scale through 20 SLPM of full scale
FEATURES
STP Reference Conditions 25°C and 1 atm (default), user confi gurable
NTP Reference Conditions 0°C and 1 atm (default), user confi gurable
Monochrome LCD or Color TFT Display
with integrated touchpad
Gas Select™
property calculations across the operating temperature and pressure ranges for highest accuracy.
COMPOSER™ 20 user defi nable gas mixes.Each mix may have up to 5 gases with 0.01% precision.
RANGE-SPECIFIC TECHNICAL DATA
Full scale fl ow Pressure drop at full scale fl ow³ Process connections⁴ Mount tap size
10–50 SCCM . PSID M5 female thread (10-32 compatible)
100 SCCM–20 SLPM . PSID ⁄” NPT female 2× 8-32 UNC 0.350 in [8.89 mm]
Default valve venting air to atmosphere. Lower pressure drops available,
please see our WHISPER-Series mass fl ow meters at www.alicat.com/mwb.
Consult Alicat for available process connection options, such as:
compression, face seal, push-to-connect, BSPP, SAE, or Swagelok (including tube, VCO, and VCR).
Shipped with Buna-N O-Ring face seal to ⁄” female NPT fi ttings.
Simultaneously displays mass fl ow, volumetric fl ow, pressure and temperature
98 user selectable gases stored internally. Each gas optimized to match NIST’s REFPROP 10 gas
5
2× 8-32 UNC 0.175 in [4.45 mm]
Tel: 888-290-6060
www.alicat.com/mb
H
Process
Connection
MICRO
USB
POWER
SWITCH
W
MassFlow
ARE
FLO
E
+13.49+22.7
+0.0 +0.0
CCM SCCMMEN
Controls
Light
Switch
A
B
D
F
C
Representative Example
100 SCCM
G
DIMENSIONS
Full scale fl ow Weight Height Width Depth A B C E F G
10–50 SCCM
100 SCCM–20 SLPM
DOC-SPECS-MB-MID
≈ 1.1 lb 5.713 in 2.375 in 1.050 in 0.336 in 0.525 in 0.125 in 0.925 in 0.150 in 2.225 in
≈ 0.5 kg 145.11 mm 60.33 mm 26.67 mm 8.53 mm 13.34 mm 3.18 mm 23.50 mm 3.81 mm 56.52 mm
≈ 1.1 lb 5.713 in 2.375 in 1.050 in 0.350 in 0.525 in 0.125 in 0.925 in 0.150 in 2.225 in
≈ 0.5 kg 145.11 mm 60.33 mm 26.67 mm 8.89 mm 13.34 mm 3.18 mm 23.50 mm 3.81 mm 56.52 mm
REV 0, October 09, 2019
2 of 2