Alcatel Vacuum Technology Adixen ATP 150, Adixen ATP 100, Adixen ATP 900, Adixen ATP 80 C, Adixen ATP 150 C User Manual

...

ATP SERIES

POMPES TURBOMOLECULAIRES

TURBOMOLECULAR PUMPS

Réalisation/Publication: Alcatel Vacuum Technology France - Manuel Utilisateur - Ed 11 - Date : 03/2007 - Référence : 102710 *102710*

Manuel utilisateur

User’s manual

Alcatel Vacuum Technology, as part of the Alcatel-Lucent Group, has been supplying vacuum pumps, helium and hydrogen leak detection systems, plasma sensors, vacuum measurement for several years. Thanks to its complete range of products, the company has become an essential player in multiple applications : instrumentation, Research & Developement, industry and semiconductors.

Alcatel Vacuum Technology has launched Adixen, its new brand name, in recognition of the company’s international standing in vacuum position. With both ISO 9001 and 14001 certifications, the French company is an acknowlegded expert in service and support, and Adixen products have the highest quality and environmental standards.

With 45 years of experience, AVT today has a worldwide presence, through its international network that includes a whole host of experienced subsidiaries, distributors and agents. The first step was the founding of Alcatel Vacuum Products (Hingham- MA) in the United States, thirty years ago, reinforced today by 2 others US subsidiaries in Fremont (CA) and Tempe (AZ). In Europe, AVTF-France headquarters and its subsidiaries, Alcatel Hochvakuumtechnik (Germany), Alcatel Vacuum Technology UK (Scotland), Alcatel Vacuum Technology Benelux (Netherlands), Alcatel Vacuum Systems (Italy) and more recently Adixen Sensistor AB in Sueden (in 2007) form the foundation for the European partner network. In Asia, our presence started in 1993 with Alcatel Vacuum Technology (Japan), and has been strengthened with Alcatel Vacuum Technology Korea (in 1995), Alcatel Vacuum Technology Taiwan (in

2001), Alcatel Vacuum Technology Singapore, Alcatel Vacuum Technology Shanghai (China) (in 2004) This organization is rounded off by more than 40 represensatives based in a variety of continents.

GB 02834 – Ed 04 – March- 2007

Thus, whatever the circumstances, the users of Adixen products can always rely on quick support of our specialists in Vacuum Technology.

ATP Series Turbomolecular Pumps

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GB 00393 - Edition 10 - March 00

Welcome

Dear Customer,

You have just purchased an Alcatel turbomolecular pump. We would like to thank you and are proud to count you as one of our customers.

This product has benefited from Alcatel's many years of experience in the field of turbomolecular pump design.

In order to ensure the best possible performance of the equipment and your complete satisfaction in using it, we advise you to read this manual carefully before any intervention on your pump and to pay particular attention to the equipment installation and start-up section.

APPLICATIONS:

• INDUSTRY Cryogenics, Freeze drying, Vacuum drying, etc.

• I

NSTRUMENTATION

Mass spectrometry, surface analysis, etc.

• R

ESEARCH AND DEVELOPMENT

Ultra-high vacuum systems, Particle accelerators, etc.

• V

ARIOUS SEMICONDUCTOR PROCESSES

DVANTAGES:

The reliable and sturdy design of ATP pumps ensures performance suited to the fields of application concerned.

Alcatel Vacuum Technology France - ATP User’s Manual

MANUAL REFERENCE: 102 710

DITION: 11 - April 2007

GB 00394 - Edition 10 - March 00

Contents

ATP User’s Manual

Introduction

■

Introduction to the ATP range and

its associated ACT controllers . . . . . . . . . . .

■ A 10

■ Turbomolecular pump operating principle . . . . ■ A 20

■ The differents versions . . . . . . . . . . . . . . . ■ A 30

■ ACT controllers control modes. . . . . . . . . . . ■ A 40

■ Accessories. . . . . . . . . . . . . . . . . . . . . . ■ A 50

■ Integrable controllers . . . . . . . . . . . . . . . . ■ A 60

■ Technical characteristics of pumps . . . . . . . . ■ A 70

■ Dimensions of pumps . . . . . . . . . . . . . . . . ■ A 80

■ Controller technical characteristics. . . . . . . . . ■ A 90

■ Integrable controller technical characteristics

type Board and Brick. . . . . . . . . . . . . . . .

■ A 100

■ Integrable controller technical characteristics

type OEM Board . . . . . . . . . . . . . . . . . .

■ A 110

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GB 00394 - Edition 10 - March 00

Contents

ATP User’s Manual

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Start-up

■

Safety instructions . . . . . . . . . . . . . . . . . . ■ B 10

■ Pump connections to an installation . . . . . . . . ■ B 20

■ Mechanical connections. . . . . . . . . . . . . . . ■ B 30

■ Water cooling connection . . . . . . . . . . . . . ■ B 40

■ ACT 200 T and 600 T electrical connections. . ■ B 50

■ ACT 200 T and 600 T «Remote Control»

connector wiring . . . . . . . . . . . . . . . . . . .

■ B 60

■ ACT 200 T and 600 T controller start-up . . . . ■ B 70

■ ACT 1000 T electrical connections . . . . . . . . ■ B 80

■ ACT 1000 T «Remote Control»

connector wiring . . . . . . . . . . . . . . . . . . .

■ B 90

■ ACT 1000 T controller start-up. . . . . . . . . . . ■ B 100

■ RS 232 or RS 485 serial link wiring . . . . . . . ■ B 110

■ Detailed description of RS commands

ACT 200 T and 600 T . . . . . . . . . . . . . .

■ B 120

■ Functions of integrable controllers

type Board and Brick . . . . . . . . . . . . . . . .

■ B 130

■ Functions of integrable controller

type OEM Board . . . . . . . . . . . . . . . . . .

■ B 140

GB 00394 - Edition 10 - March 00

Contents

ATP User’s Manual

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Operation

■

First pump start-up / Safety instructions . . . . . . ■ C 10

■ Turbomolecular pump operation

in a pumping application. . . . . . . . . . . . . .

■ C 20

■ Controlling the pump using the controller

front panel . . . . . . . . . . . . . . . . . . . . . .

■ C 30

■ Displaying the data concerning

ACT 200 T and 600 T pumping . . . . . . . . .

■ C 40

■ ACT 200 T and 600 T «Remote Control»

connector «Ext. safety» contact operation. . . . .

■ C 50

■ Controlling the pump using

communication software. . . . . . . . . . . . . . .

■ C 61

Maintenance

■

Diagnosis and troubleshooting

ACT 200 T and 600 T . . . . . . . . . . . . . .

■ D 10

■ Diagnosis and troubleshooting ACT 1000 T. . . ■ D 20

■ ATP 80/100/150/400

Maintenance frequency . . . . . . . . . . . . . . .

■ D 30

■ ATP 900 Maintenance frequency . . . . . . . . . ■ D 40

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ATP User’s Manual

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Operation sheets

■

Precautions before maintenance . . . . . . . . . . ■ E 10

■ ATP 80/100 Pumps lubrication . . . . . . . . . . ■ E 20

■ ATP 150/400/900 Pumps lubrication . . . . . . ■ E 30

■ ATP 80/100 bearing replacement . . . . . . . . ■ E 40*

■ ATP 150/400/900 bearing replacement . . . . ■ E 50*

■ Cleaning parts . . . . . . . . . . . . . . . . . . . . ■ E 60*

■ Pump running-in for ATP 80/100/150/400 . . ■ E 70

■ Maintenance counters for

ACT 200 T and 600 T controllers . . . . . . . .

■ E 80

■ ATP 900 pump running-in . . . . . . . . . . . . . . ■ E 90

■ Maintenance counters for

ACT 1000 T controllers . . . . . . . . . . . . . .

■ E 100

Appendix

■

Pumping curves. . . . . . . . . . . . . . . . . . . . ■ G 10

Maintenance

components

■

Maintenance parts. . . . . . . . . . . . . . . . . . ■ F 10

* These chapters are included into the ball bearing replacement manual delivered with the speciﬁc tool.

G 00396 - Edition 09 - February 99

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Chapter A

Alcatel Vacuum Technology France- ATP User’s Manual

ATP User’s Manual

Introduction

■ Introduction to the ATP range and

its associated ACT controllers . . . . . . . . . . . . . .

■ A 10

■ Turbomolecular pump operating principle . . . . . . ■ A 20

■ The differents versions. . . . . . . . . . . . . . . . . . . ■ A 30

■ ACT controllers control modes . . . . . . . . . . . . . ■ A 40

■ Accessories . . . . . . . . . . . . . . . . . . . . . . . . . ■ A 50

■ Integrable controllers . . . . . . . . . . . . . . . . . . . ■ A 60

■ Technical characteristics of pumps . . . . . . . . . . . ■ A 70

■ Dimensions of pumps . . . . . . . . . . . . . . . . . . . ■ A 80

■ Controller technical characteristics . . . . . . . . . . . ■ A 90

■ Integrable controller technical characteristics

type Board and Brick . . . . . . . . . . . . . . . . . .

■ A 100

■ Integrable controller technical characteristics

type OEM Board . . . . . . . . . . . . . . . . . . . . .

■ A 110

A 10

Introduction to the ATP range and its associated ACT controllers

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- Ceramic ball bearings lubricated with grease;

- Adjustable rotation speed between 6000 and 27000 rpm;

- Natural convection, air or water cooling;

- "C" version for corrosive application with nitrogen purge;

- "HPC" high pressure version for semiconductor applications.

ATP turbomolecular

pumps

ACT Controllers

Main characteristics

- Alphanumeric display;

- Membran keyboard;

- Monitoring of testing and troubleshooting parameters;

- Dry contact interface for status signals;

- Optocoupled control inputs;

- RS 232/485 serial links;

- Operation at all voltages between 85 and 264 V, 50/60 Hz.

The range of ACT controllers offers ﬂexible use and interfacing:

5 turbomolecular pump models from 80 to 900 l/s

3 controller models type ACT

A 10

Introduction to the ATP range and its associated ACT controllers

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The different products

available

The pumps ATP 80 ATP 100 ATP 150 ATP 400 ATP 900

ATP 80 C ATP 100 C ATP 150 C ATP 400 C ATP 900 C

Intake ﬂange

DN 63 ISO-K DN 100 ISO-K DN 100 ISO-K DN 160 ISO-K DN 200 ISO-K

DN 63 CF-F DN 100 CF-F DN 100 CF-F DN 160 CF-F DN 200 CF-F

natural convection

Cooling type

air x x x x x

water x x x x x

The pumps

ATP 400 HPC ATP 900 HPC

Intake ﬂange

DN 100 ISO-K DN 200 ISO-K DN 160 ISO-K DN 200 CF-F

Water cooling x x

The controllers ACT 200 T ACT 600 T ACT 1000 T

Cable length 1 m / 1,5 m 1 m / 1,5 m 3.5 m / 5 m

3.5 m / 5 m 3.5 m / 5 m 10 m

10 m / 20 m 10 m / 15 m / 20 m

Electronic boards to be

inserted in a rack x x

A 20

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Turbomolecular pump operating principle

The turbomolecular pump in an installation

Functional diagram

In molecular operation, the gas molecules of the vacuum system arrive at the pump intake. They are trapped between the rotating disks of the rotor and the stationary disks of the stator and carried to the exhaust of the pump.

At the turbomolecular pump exhaust, the gases are evacuated to the atmosphere by a primary pump. Since the ATP compression rate is set by the design, the ATP limit pressure is given by that of the primary pump used.

The ceramic ball bearings

lubricated with grease enable

the pump to be ﬁtted in any

position.

Inlet

Rotor

Stator

Dynamic

seal

Exhaust

Motor

INLET

PRESSURE

Secondary pumping

Chamber

to be

pumped

Secondary vacuum

Primary pumping

Primary vacuum

ATMOSPHERIC PRESSURE

A 30

The different versions: Standard, "C" Corrosive, etc.

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Standard Version

Pumping of clean, non-

corrosive gases

As for the entire range, the pump rotation speed is adjustable, making it possible to produce the optimum pumping characteristics for the customer's application. There are two different types of speed:

- the nominal speed which corresponds to the maximum rotation speed of the pump, or 27000 rpm;

- the reduced speed, or STANDBY speed, adjustable between 6000 and 27000 rpm.

The inverted dynamic seal creates a high compression rate between the bearings and the pump exhaust and thus minimizes the quantity of corrosive gases in contact with the bearings.

When used with a gas purge for high ﬂow rate applications, the dynamic seal can, on its own, provide excellent protection for ultravacuum applications.

"C" Version

Corrosive applications

Inlet

Exhaust

2 Purge

A 30

The different versions: "HPC" High Pressure Corrosive

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These pumps are specially designed for high ﬂow rate applications in semiconductor applications. They provide:

- increased bearing protection;

- effective bearing protection when the purge is stopped during equipment calibration;

- a reduction in the purge gas ﬂow rate;

- a long bearing service life in the presence of corrosive gases.

The pumps can be heated by the water circuit to prevent condensation of the process gases (water circuit temperature ≤ 65°C).

"HPC" Version

Corrosive version for

semiconductor

applications

Inlet

Exhaust

Water circuit

N2 Purge

A 40

ACT controllers control modes

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Local mode control

The front panel of the unit comprises:

Remote controls

The remote control

The remote control with the REMOTE CONTROL connector

is used:

- for the remote control of the START, STOP, STANDBY functions;

- to replicate the monitoring parameters available in the form of dry contacts.

The RS232 serial link is used to control and monitor the pump using a computer.

The RS485 serial link allows many pump installation in a network.

The wiring characteristics are given on B 110.

Parameter selection and conﬁguration keys

Manual control keys

Parameter and message LCD display

Pump status indicator lights

START

STOP

ENTER STAND BY

ACT 200 T

FAULT

RS 232 / 485

TURBO PUMP CABLE

REMOTE CONTROL

RS 232 serial link

RS 485 serial link

A 40

ACT controllers control modes

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GB 00400 - Edition 02 - February 99

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The ACT 600 T and

ACT 1000 T controllers are

1/2 rack units

START STOP

STATUS STAND BY

ENTER

ACT 600 T

FAULT

A 50

Alcatel Vacuum Technology France - ATP User’s Manual

Accessories

This ﬁlter protects the pump against solid particles. Mesh size 6 mm.

This ﬁlter stops particles ≥ 20 microns and is used in the event of high densities of dust or risks of implosion when pumping tubes or lamps.

Bake-out collar

Compact ﬁlter

Screen ﬁlter

Air reﬁll

electrovalve system

This accelerates degassing and reduces the pressure lowering times.

This is used to reﬁll the pump with air after stopping pumping or for a power supply cut.

GB 00401 - Edition 02 - February 99

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Pump accessories

Exhaust

Venting valves

DN 25 DN 40

Powered and controlled by the ACT

101923*

controlled by the ACT

240V 50/60Hz 063177 063478 220V 50/60Hz 056994 063191 200V 50/60Hz 063176 063480 115V 50/60Hz 063089 063099 100V 50/60Hz 063175 063479

* ATP 900 only

Filter Inlet ﬂange

P/N DN 63 DN 100 DN 160 DN 200

ISO-K 063000 056844 056942 063158

CF-F 063115 056845 056928 063159

Filter Inlet ﬂange

P/N DN 63 DN 100 DN 160 DN 200

ISO-K 063214 063215 063216 062911

P/N

Pump type

ATP 80 ATP 100 ATP 150 ATP 400 ATP 900

200/240V

056934 056934 063028 101926 063324

50/60Hz

100/115V

063180 063180 063181 101927 063323

50/60Hz

A 50

Accessories

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Reduction ﬂanges

Power supply cable

Connection cable between the pump and the controller.

Cable length

ACT 200 T

P/N

1 m

1.5 m

3.5 m 5 m 10 m 15 m 20 m

105185

A458759

101956 101957 101958

A458477

ACT 600 T

105086

A458885

101812 101810 101811 105303

A458478

105086

A458885

101812 101810 101811

A458478

ACT 1000 T

Flange DN 1 / DN 2 P/N

S.S.**ALU*

Material

●

063268 063269 063270 063267 062900 068912 062901 068911 062902 062904 062905 062906 062903 062725 062907 062909 062908 062910 066659 066660

63 ISO-K / 25 ISO-KF 63 ISO-K / 40 ISO-KF 63 ISO-K / 50 ISO-KF 63 ISO-K / 63 CF-F 100 ISO-K / 40 ISO-KF 100 ISO-K / 40 ISO-KF 100 ISO-K / 50 ISO-KF 100 ISO-K / 50 ISO-KF 100 ISO-K / 63 ISO-K 160 ISO-K / 50 ISO-KF 160 ISO--K / 63 ISO-K 160 ISO-K / 100 ISO-K 160 CF-F / 100 CF-F 200 ISO-K / 63 ISO-K 200 ISO-K / 100 ISO-K 200 ISO-K / 100 ISO-K 200 ISO-K / 160 ISO-K 200 ISO-K / 160 ISO-K 200 ISO-K / 250 ISO-K 200 CF-F / 250 CF-F

* ALU: Aluminium ** S.S.: Stainless Steel

A 60

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Integrable controllers

ACT 200 T Brick

ACT 200 T Board

Electronic boards can be substitued to the box version of the controller ACT 200 T when the pump has to be integrated in a complex installation or equipment. They provide the functions of speed variator, logic control (controlled by serial link or dry contacts) and power supply (ACT 200 T Brick only) and all the necessary securities. The Board version must be supplied with DC.

ACT 200 T Board

ACT 200 T Brick

ACT 600 T Brick

ACT 600 T Board

Also, theses electronic boards can be substitued to the box version of the controller ACT 600 T.

ACT 600 T Board

ACT 600 T Brick

Connect the integrable controllers to the pump by ordering separately the connection cable (see A 50 page 2).

Controller

ACT 200 T

Part Number

Board Brick

101933 103517

ACT 600 T

102018 103997

A 60

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GB 00402 - Edition 03 - March 00

Integrable controllers

OEM Board

The integrable controller “OEM Board” (derivated from CFV 100 former controller range) is a simple PC Board which can easily integrated in an installation. It can drive both ATP 80 and ATP 100 pumps, in local or by remote control.

OEM Board: P/N. P0022E4

Power supply cable

OEM Board / ATP 80-100

To connect the PC Board , it is necessary to separately order speciﬁc connection cable.

Cable lenght

P/N

0,5 m 2,5 m 3,5 m 5 m 10 m

A458755 A458369 A458425 A458423 A458424

Accessories

Some accessoiries can be connected to the OEM Board to extand some functions.

OEM Board accessories

P/N

Time meter 5 V Time meter 10 V Outside light kit Interface kit

062761 062320 062939 062969

A 70

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Technical characteristics of pumps

Model characteristics 80 100 150 400 900

Inlet ﬂange DN 63 ISO-K 63 CF-F 100 ISO-K 100 CF-F 100 ISO-K 100 CF-F 160 ISO-K 160 CF-F 200 ISO-K 200 CF-F

N2 l/s 80 100 140 400 900

Pumping speed He l/s 50 60 100 300 540

H2 l/s 40 40 80 250 300 N2 8x10

8x10

7x10

1x10

Compression rate He 2500 2500 1.2x10

1.5x10

2x10

H2 300 300 1x10

1x10

2x10

Rotation speed rpm 27000 Reduced speed rpm from 6000 Sound level

dBA ≤ 53

Start-up time

(0 to 27000) 1min45s 1min45s 2min 3min 3min

Exhaust ﬂange ISO-KF DN 25 DN 25 DN 25 DN 40 DN 40

Standard version characteristics ATP 80 ATP 100 ATP 150 ATP 400 ATP 900

Limit pressure* measured acc. to Pneurop standard mbar 5x10

-9

5x10

-9

5x10

-10

8x10

-10

5x10

-10

Maximum pressure at inlet in continuous operation**

mbar 1x10

-1

1x10

-1

1x10

-1

2x10

-2

1x10

-2

Maximum permissible pressure at exhaust** mbar 2x10

-1

3x10

-1

4x10

-1

2x10

-1

3x10

-1

Maximum ambient temperature*

°C 50

Flange drying temperature

°C 120 120 100 100 100

natural cooling kg 3 4.3 3 4.3

Weight air cooling kg 4 5.3 4 5.3 6.5 9 17.5 18.5

water cooling kg 3.4 4.4 3.5 4.7 6.5 9 17 18

Recommended primary pump Pascal 2005 Pascal 2005 Pascal 2005 Pascal 2015 Pascal 2021

* For a water-cooled pump with CF-F ﬂange and exhaust pressure < 1.10-2mbar. ** The two maximum pressures cannot occur at the same time

Standard version

A 70

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Technical characteristics of pumps

Model characteristics 80 100 150 400 900

Inlet ﬂange DN 63 ISO-K 63 CF-F 100 ISO-K 100 CF-F 100 ISO-K 100 CF-F 160 ISO-K 160 CF-F 200 ISO-K 200 CF-F

N2 l/s 80 100 140 400 900

Pumping speed He l/s 50 60 100 300 540

2 l/s 40 40 80 250 300

2 8x10

8x10

7x10

1x10

Compression rate He 2500 2500 1.2x10

1.5x10

2x10

2 300 300 1x10

1x10

2x10

Rotation speed rpm 27000 Reduced speed rpm from 6000 Sound level

dBA ≤ 53

Start-up time

(0 to 27000) 1min45s 1min45s 2min 3min 3min

Exhaust ﬂange ISO-KF DN 25 DN 25 DN 25 DN 40 DN 40

Corrosive version «C»

Corrosives versions Characteristics ATP 80 C ATP 100 C ATP 150 C ATP 400 C ATP 900 C

Limit pressure* without purge meas. according to Pneurop standard

mbar 5x10

-9

5x10

-9

5x10

-10

8x10

-10

5x10

-10

Limit pressure* with purge meas. according to Pneurop standard

mbar 5x10

-8

5x10

-8

1x10

-7

1x10

-7

1x10

-7

N2 purge ﬂow rate SCCM 50 Maximum pressure at inlet

in continuous operation** mbar

1x10

-1

1x10

-1

5x10

-1

2x10

-2

1x10

-2

Maximum permissible pressure at exhaust**

mbar

2x10

-1

3x10

-1

4x10

-1

2x10

-1

1x10

-1

Maximum ambient temperature*

°C 40 40 40 40 50

Flange drying temperature

°C 120 120 120 100 100

purge ﬂange

ISO-KF DN 16

Weight

air cooling kg 4 5.3 4 5.3 6.5 9.1 17.7 water cooling kg 3.4 4.4 3.5 4.7 6.5 9.2 17.2

Recommended primary pump 2005 C2 2005 C2 2021 C2 2033 C2 2063 C2

* For a water-cooled pump with CF-F ﬂange and exhaust pressure < 1.10-2mbar. ** The two maximum pressures cannot occur at the same time

A 70

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Technical characteristics of pumps

«HPC» version

HPC version characteristics ATP 400 HPC ATP 900 HPC

Inlet ﬂange DN

100 ISO-K 160 ISO-K 200 ISO-K 200 CF-F

l/s 325 380 700

Pumping speed Ar l/s 365 430 785

6 l/s 365 430 785

N2 7x10

1x10

Compression rate Ar 700 2x10

SF6 100 200

Limit pressure without purge meas. according to Pneurop standard

mbar 5x10

-8

5x10

-8

Limit pressure with purge meas. according to Pneurop standard

mbar 8x10

-6

5x10

-5

2 purge ﬂow rate SCCM 50

Maximum pressure at inlet in continuous operation*

mbar 1x10

-1

2x10

-2

Maximum permissible pressure at exhaust* mbar 6x10

-1

4x10

-2

Rotation speed rpm 27000 Reduced speed rpm from 6000 Start-up time (0 to 27000) 2 min Maximum ambient temperature °C

Water circuit temperature °C ≤ 65 Noise level

dBA ≤ 53

Weight kg 9 8.5 17.7 Recommended primary pump 2063 C2 or ADP81 Exhaust ﬂange ISO-KF DN 40 Purge ﬂange ISO-KF DN 16 Max N2 ﬂux with 2063CP+

SCCM

340 400 450

* The two maximum pressures cannot occur at the same time

A 80

Dimensions of pumps

ATP 80, ATP 100

Alcatel Vacuum Technology France - ATP User’s Manual

GB 00404 - Edition 03 - March 00

1/6

65°

80,6

Ø 129,5

N equidistant

holes diam. 8,6

on diam. D

A°

95,4

Ø 12,1

119,9

1,8

24,1

118

102

Ø 55,8

49,5

67,7

77,3

73,6

Ø 113

45,3

Ø F

Ø 113

26,2

Ø F

Inlet flange R H C F N D A° DN 63 ISO-K 130 151,5 102 95 - - DN 63 CF-F 145 166,5 117 113,5 8 92,1 7,5° DN 100 ISO-K 103 124,5 75 130 - - DN 100 CF-F 123 144,5 95 148,5 16 130,2 18,75°

DN 25

ISO-KF

Water Inlet/Outlet

(Any direction)

For tube diam. 4/6

Electrical connector

DN 25

ISO-KF

PURGE

DN 16 ISO-KF

CF-F

ISO-K

A 80

Dimensions of pumps

ATP 150

Alcatel Vacuum Technology France - ATP User’s Manual

GB 00404 - Edition 03 - March 00

2/6

30°

86,6

Ø 149,7

60°

123

210,7

Ø 132

49,8

87,4

85,4

91,5

Ø 12,1

26,2

18,75°

175,9

97 122,1

116

35,5

13,4

103,2 134

15,5

221,7

Ø 132

Ø 148,5 Ø 130

17,2

20°

45°

Grease

DN 25

ISO-KF

PURGE

DN 16 ISO-KF

DN 25 ISO-KF

DN 100 ISO-K

DN 100 CF-F

Water Inlet/Outlet

(Any direction)

For tube diam.4/6

105

16 equidistant

holes diam. 8,6

on diam.130,2

A 80

Dimensions of pumps

ATP 400

Alcatel Vacuum Technology France - ATP User’s Manual

GB 00404 - Edition 03 - March 00

3/6

30°

45°

20°

86,6

60°

ø 189,5

106,1

A°

13,4

122,1

15,5

81,3

175,9

91,5

Ø 12,1

26,2

17,2

Ø 189,5

Ø F

Inlet flange R H C F E N T D A° DN 100 ISO-K 181,6 247,4 146,9 130 12 - - - DN 100 CF-F 183,1 248,9 148,4 148,5 16 16 8,6 130,2 3,75° DN 160 ISO-K 151,1 216,9 116,4 180 12 - - - DN 160 CF-F 168,1 233,9 133,4 198 16 20 8,6 181,1 6° ASA 6" 161,1 225,9 125,4 279,4 19 8 20,6 241,3 22,5°

DN 40 ISO-KF

Grease

ISO-K

CF-F - ASA

Water Inlet/Outlet

(Any direction) For tube diam. 4/6

N equidistants

holes diam. T

on diam. D

A 80

Dimensions of pumps

ATP 900

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GB 00404 - Edition 03 - March 00

4/6

30°

45°

20°

Ø 240

60°

118,2

Ø F

235,1

134

A°

124,2

Ø 12,1

26,2

Ø F

83,6

81,3

13,4

168

17,8

15,5

Ø 240

Inlet flange R H C F E N T D A° DN 200 ISO-K 145,8 211,5 118,5 240 12 - - - DN 200 CF-F 165,8 231,5 138,5 253,2 20 24 8,6 231,9 7,5° ASA 6" 177,8 243,5 150,4 279,4 19 8 20,6 241,3 22,5°

DN 40 ISO-KF

PURGE

DN 16 ISO-KF

DN 40 ISO-KF

Grease

ISO-K

CF-F - ASA

Water Inlet/Outlet

(Any direction) For tube diam. 4/6

N equidistant

holes diam. T

on diam. D

A 80

Dimensions of pumps

ATP 400 HPC

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GB 00404 - Edition 03 - March 00

5/6

30°

45°

20°

86,6

114,4

114,9

A°

11,5 85,1

Inlet flange R H C F E N T D A°

DN 100 ISO-K 181,6 247,4 148,4 130 12 - - - DN 100 CF-F 183,1 248,9 148,4 148,5 16 16 8,6 130,2 3,75° DN 160 ISO-K 151,1 216,9 116,4 180 12 - - - DN 160 CF-F 168,1 233,9 133,4 198 16 20 8,6 181,1 6° ASA 6" 161,1 225,9 125,4 279,4 19 8 20,6 241,3 37,5°

DN 40

ISO-KF

Grease

CF-F - ASA

60°

H15,5

Ø 189,5

Ø F

106,1

DN 40

ISO-KF

ISO-K

81,3

Water Inlet/Outlet

(Any direction)

For tube diam. 4/6

N equidistant

holes diam. T

on diam. D

A 80

Dimensions of pumps

ATP 900 HPC

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6/6

30°

45°

20°

60°

150,1

A°

70,811,5

8,5

Ø 260

Ø 240

Ø F

118,2

15,5

81,3

86,6

149,6

Inlet flange R H C F E N T D A° DN 200 ISO-K 145,8 211,5 118,5 240 12 - - - DN 200 CF-F 165,8 231,5 138,5 253,2 20 24 8,6 231,9 7,5° ASA 6" 177,8 243,5 150,4 279,4 19 8 20,6 241,3 22,5°

DN 40 ISO-KF

PURGE

DN 16 ISO-KF

PURGE

DN 16 ISO-KF

DN 40 ISO-KF

Grease

ISO-K

CF-F - ASA

Water Inlet/Outlet

(Any direction) For tube diam. 4/6

N equidistant

holes diam. T

on diam. D

A 90

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1/2

Controller technical characteristics

Electrical characteristics

ACT 200T and ACT 600T

Dimensions

ACT 200T

ACT 600T

Characteristics ACT 200T ACT 600T

Weight kg 2.6 4 Dimensions HxLxP mm 128.4x107x220 128.4x213x245 Nominal voltage 85-132 V et170-264V 48/63 Hz Maximum current 5.8 A / 3 A Maximum power W 100 300 Ambient operating temperature T ≤ 50°C

Customer mains circuit breaker rating

10 A

122.4

128.4

START STOP

107

91.4

FAULT

ACT 200T

STAND BYENTER

Ø 3

217 3

112,5

Ø3

ACT 600T

198.1

PREVIOUS ENTER

START

FAULT

213

112,5

242

122.4

STAND BYSTATUSSTOP

128.4

A 90

Controller technical characteristics

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Electrical characteristics

ACT 1000T

Dimensions

ACT 1000T

Characteristics ACT 1000T

Weight kg 8.5 Dimensions HxLxP mm 132.5x219x453 Power supply

100-120 V 200-240 V

50/60 Hz

Maximum power W 800 Ambient operating temperature T ≤ 50°C

Customer mains circuit breaker rating 16 A

112.5

100

54.75

122.4

453

408

109.5

M 4

219

132.5

STARTSTART

PREVIOUSPREVIOUS

ACT 1000 TACT 1000 T

STATUSSTATUSSTOPSTOP

FAULTFAULT

STAND BYSTAND BY

++ ENTERENTER

A 100

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Integrable

Brick & Board

controller

technical characteristics

ACT 200 T Brick

Dimensions

(Board + Power supplying)

Nominal voltage: 115/230 V - 48/63 Hz Maximum current: 5.8 A / 3 A Maximum power: 100 W

Power supplying of

ACT 200 T Brick

ON/OFF

Fuses T250V/3.15A (5x20)

RS232 RS485

Subd

9pts male

Pump

link

Mains

235

RS232/485

TURBO PUMP CABLE

40.64 83

1 0

Marche/Arrêt

Fusibles T250V/3.15A (5x20)

Entrée secteur

103

RS 232

SUBD 9pts

RS485

mâle

Liaison pompe

A 100

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Integrable

Brick & Board

controller

technical characteristics

Power supplying of

ACT 200 T Board

Dimensions

Connector : type Molex Series 30-69 P.N. 09 - 91 0700 equipped with 7 contacts P.N. 08 - 050 - 0106

DC voltage necessary to supply the board: + 72 V / 1.4 A ± 1 V + 15 V / 0.25 A ± 100 mV + 5 V / 0.4 + 50 mV / - 100 mV

Functions of these integrable controllers (see B 130).

Pump at speed Pump starting Fault Stand by

Green Yellow

Red

Yellow

Power supply

connector

Speed setting

Serial link

setting

Input/Output connector

Holes diam 3

ACT 200 T Board

It can be installed in an Europe size rack: Height: 100 mm - Depth: 180 mm Outside depth: 210 mm

90.17

Trou de fixation Ø 3

Connecteur Entrées/Sorties

R15

Réglage

vitesse

160.02

Paramétrage liaison série

Rouge

Connecteur

alimentation

Verte

Jaune

Vn Démarrage Défaut Stand by

+ 72V 0 V + 15 V + 5 V

0 V GND

A 100

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Integrable

Brick & Board

controller

technical characteristics

ACT 600 T Brick

Dimensions

(Board + Power supplying)

ON/OFF

Fuses T250V/6.3A (5x20)

RS232/RS485

Subd 9pts male

Pump link

Mains

Power supplying of

ACT 600 T Brick

Nominal voltage: 115/230 V - 48/63 Hz Maximum current: 5.8 A / 3 A Maximum power: 300 W

145

235

50.845.7

Marche/Arrêt

103

RS 232/RS485

SUBD 9pts mâle

Liaison pompe

RS232/485

TURBO PUMP CABLE

Entrée secteur

Fusibles T250/6.3A (5x20)

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A 100

Integrable

Brick & Board

controller

technical characteristics

Power supplying of

ACT 600 T Board

Dimensions

Connector : type Molex Series 30-69 P.N. 09 - 91 0700 equipped with 7 contacts P.N. 08 - 050 - 0106

Voltages delivered by the board: + 72 V / 4 A ± 1 V + 15 V / 0.25 A ± 100 mV + 5 V / 0.4 A + 50 mV / - 100 mV

Functions of these integrable controllers (see B 130).

Pump at speed Pump starting Fault Stand by

Green Yellow

Red

Yellow

ACT 600 T Board

It can be installed in an Europe size rack: Height: 100 mm - Depth: 180 mm Outside depth: 210 mm

Power supply

connector

Speed setting

Serial link

setting

Input/Output

connector

Holes diam 3

90.17

Trou de fixation Ø 3

J10

Connecteur

Entrées/Sorties

160.02

J5 R 15

Paramétrage

liaison série

Réglage

vitesse

Connecteur

alimentation

Verte

Jaune

Rouge

Jaune

Vn Demarrage Défaut Stand by

+ 72V 0 V + 15 V + 5 V

0 V GND

A 110

Integrable

OEM Board

controller

technical characteristics

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Power supplying of

OEM Board

A terminal plug with 7 pins, allows to supply the board 110 - 115 - 200 - 220 - 240 V AC, 50/60 Hz.

Secure the power line with an external time-delay fuse depending on the power supply: 1 A for 100 / 115 V

0.5 A for 200 / 220 / 240 V

Functions of these integrable controllers (see B 140).

Installed with M3 screws x 6, or in sliding rail (in Alcatel unit): Dimensions: 213 x 98 mm.

Encombrements

Holes diam Ø 3,2

Power on

Fault

< 27000 tr/mn = 27000 tr/mn

START

STOP

+12V

ST1

321

ST2

J5 J6

+5V

97.5

92.7

Power supply

Terre

Pump cable

240V 220V 200V 115V 100V

20.3

86.3

213.2

86.3

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Chapter B

Alcatel Vacuum Technology France- ATP User’s Manual

ATP User’s Manual

Start-up

■ Safety instructions . . . . . . . . . . . . . . . . . . . . . ■ B 10

■ Pump connections to an installation . . . . . . . . . . ■ B 20

■ Mechanical connections . . . . . . . . . . . . . . . . . ■ B 30

■ Water cooling connection . . . . . . . . . . . . . . . . ■ B 40

■ ACT 200 T and 600 T electrical connections . . . ■ B 50

■ ACT 200 T and 600 T «Remote Control»

connector wiring . . . . . . . . . . . . . . . . . . . . . .

■ B 60

■ ACT 200 T and 600 T controller start-up . . . . . . ■ B 70

■ ACT 1000 T electrical connections . . . . . . . . . . ■ B 80

■ ACT 1000 T «Remote Control»

connector wiring . . . . . . . . . . . . . . . . . . . . . .

■ B 90

■ ACT 1000 T controller start-up . . . . . . . . . . . . . ■ B 100

■ RS 232 or RS 485 serial link wiring . . . . . . . . . ■ B 110

■ Detailed description of RS commands

ACT 200 T and 600 T. . . . . . . . . . . . . . . . . .

■ B 120

■ Functions of integrable controllers

type Board and Brick . . . . . . . . . . . . . . . . . . .

■ B 130

■ Functions of integrable controller

type OEM Board . . . . . . . . . . . . . . . . . . . . .

■ B 140

B 10

Safety instructions

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GB 00409 - Edition 01 - March 97

• Our equipment can be stored without special precautions (ambient temperature between 5 and 40° C)

provided that the running-in procedure speciﬁed in the manual is observed for the ﬁrst operation of the pump.

• The seal kits must be stored away from heat and light (direct sunlight and ultraviolet radiation) in order to prevent any hardening of the elastomers.

• Our products are designed to comply with current EEC regulations. Any modiﬁcation of the product made by the user is liable to lead to non-compliance with the regulations, or even to put into doubt the EMC (electromagnetic compatibility) performance and the safety of the product. ALCATEL declines any responsibility for such operations.

Unpacking

Storage

Installation

Start-up

To keep your product in the clean condition in which it left our factory, we recommend to unpack the pump only on its assembly site.

It is advisable to keep the packaging.

Before switching on the pump, the user should study the manual and follow the safety instructions listed in the compliance certiﬁcate booklet supplied with the pump.

B 10

Safety instructions

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Installation

Start-up

(continued)

• Before any maintenance operations on a product performed by a maintenance technician who has not received safety training (EMC, electrical safety, chemical pollution, etc.), isolate the product from the various energy sources (electricity, compressed air, etc.).

• The EMC performance of the product is obtained on the condition that the installation complies with EMC rules. In particular, in disturbed environments, it is essential to:

- use shielded cables and connections for interfaces,

- stabilize the power supply line with meshing from the power supply source to a distance of 3 m from the product inlet.

• The units containing control circuits are designed to guarantee normal safety conditions taking their normal operating environment into account (use in rack). In speciﬁc cases of use on tables, make sure that no objects enter the ventilation openings or block the openings when handling the units.

• Certain controllers can be conﬁgured to start up automatically after a power cut. In this case, it is the user's responsibility to take all the precautions required to prevent the risks resulting from this type of operation.

• When switching off an item of equipment containing loaded capacitors at over 60 VDC or 25 VAC, take precautions concerning the access to the connector pins (single-phase motors, equipment with mains ﬁlter, frequency converter, monitoring unit, etc.).

• When handling the equipment, use the devices provided for this purpose (hoisting rings, handle, etc.).

GB 00409 - Edition 01 - March 97

B 10

Safety instructions

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Installation

Start-up

(continued)

• Risk of toppling over: although compliance with EEC safety regulations is guaranteed (normal range ± 10°), it is recommended to take precautions against the risk of toppling over during handling, installation and operation.

• The performance and the operational safety of this product are guaranteed provided that it is used in normal operating conditions.

• The vacuum pump is also a compressor: incorrect use may be dangerous.

Study the user manual before starting up the pump.

• The access to the rotor of a turbomolecular pump with an unconnected intake is dangerous. Similarly, if the pump is not switched on, it may be driven by another pump in operation (risk of cuts).

• Make sure that the parts or chambers connected to the intake of our pumps withstand a negative pressure of 1 bar in relation to the atmospheric pressure.

• The leaktightness of the products is guaranteed when they leave the factory for normal operating conditions. It is the user's responsibility to maintain the level of leaktightness particularly when pumping dangerous gases.

B 20

Pump connections to an installation

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The pump can operate in

any position

The connection of the pump

to the installation must be

sufficiently rigid.

For this, reduce the following as much as possible:

- dimensions a and b and the ﬂexibility of the connection plate;

- the overhang c between the pump and its anchor point.

The equipment attachment devices should be sufficiently rigid to prevent potential risks in the event of failure of a rotary component or a violent shock

on the pump (exceptional phenomena). For this, use the rotary ﬂange attachment holes. If the intake ﬂange is attached with grips, use:

- at least 3 grips for secondary pump ≤ 150 l/s;

- at least 6 grips for secondary pump > 150 l/s.

The dimensions of the connection parts should be studied carefully:

Spacer

Support plate

bellows

rigid support

In.

Some examples of unrecommended connection:

Connect the vent electrovalve accessory on the pump. Connect the pump to primary pumping circuit*.

B 30

Mechanical connections

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GB 00411 - Edition 01 - March 97

Exhaust

Purge

for C and HPC models

A ﬁltered dry nitrogen supply with the following characteristics is required:

- Dew point < 22°C

- Dust < 1µm

- Oil < 0.1ppm

- Absolute pressure of 1 to 1.3 bar.

Connect the nitrogen pipe to the DN16 purge ﬁtting*. A built-in safety valve controls the pressure and guarantees a ﬂow rate of 50 SCCM.

Install the screen ﬁlter or compact ﬁlter accessory on the pump; connect the pump to the i

nstallation*.

Inlet

Ambient operating

temperature

Air or natural convection cooled ATP: 0°C < T < 35°C; Water-cooled ATP: 0°C < T < 50°C.

* Different connection accessories can be found in the ALCATEL catalog.

Remove the protective parts blocking the intake, exhaust (and, if applicable, purge) openings; these components prevent foreign bodies from entering the pump during transport and storage. It is dangerous to leave them on the pump in operation.

B 40

Water cooling connection

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Water characteristics

Connection

Connect the cooling circuit with a rigid stainless steel or copper pipe (int. diam. 4 mm ext. diam. 6 mm) (supplied by customer).

The water ﬂow rate is

0.2 to 1 l/min for water at 15°C at an ambient temperature of 25°C.

It is recommended to use cooling water with the following characteristics:

- pH between 7.5 and 11

- Hardness < 7 milli-équivalent/dm

- Resistivity > 1500 Ω.cm

- Solid pollution < 100 mg/dm

- Max pressure = 7 bars

- Temperature: 10 < T < 25°C (Std and C) and 0 < T ≤ 65°C (HPC).

B 50

ACT 200 T and 600 T electrical connections

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If the controller is remote controlled, make the various connections on the REMOTE CONTROL connector (see B 60).

If the controller unit is used in local mode: the pump can only

operate if the plug is connected

to the REMOTE CONTROL connector.

(Connector plug delivered with the controller).

Connect the RS232/485 serial link cable to the connector

(cable supplied by customer)

Fuse access

REMOTE CONTROL

connector plug

(factory wiring)

Wiring viewed on soldered side

Connect the controller to the pump using the cable ordered.

Connect

the controller to

the mains using the cable

supplied.

(Mains with earth

connection)

Connect the fan (ATP air cooled)

Connect the

electrical venting valve

(voir B 60).

Power supply

Delayed fuses ACT 200T 3.15 A 250 V ACT 600T 6.3 A 250 V

Display contrast setting

RS 232 / 485

TURBO PUMP CABLE

REMOTE CONTROL

15 1

30 16

44 41 39 31

B 60

ACT 200 T and 600 T "Remote Control" connector wiring

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GB 00414 - Edition 03 - February 99

When the units containing the control circuits are equipped with dry contact outputs, it is the customer's responsibility to use the outputs in compliance with safety regulations.

The control by voltage

The inputs are considered to be activated if the AC or DC voltage applied is between 5 and 30 Volts: (DB 44 contacts, female connector)

Wiring supplied by customer

38 34 3236 31

37 35 33

42 39

++--+-

~=~=~=~

5 to 30 V

383942 34 3236 31

37 35 33

These inputs can be controlled by external contacts using the following wiring :

Principle of the input

controlled by voltage

When a voltage is applied on these inputs, the pump is running (see terminal plug wiring). The wiring of an external contact allows to signal an external safety when the contact is opened (i.e. emergency stop).

When a voltage is applied on these inputs, the Remote is validated. The opening of an external wired contact allows Local mode (pump control using front panel keypad).

When a voltage is applied on these inputs, the pump rotates at reduced speed. The opening of an external wired contact allows pump rotation at nominal speed.

When a voltage is applied on these inputs, the pump starts up and accelerates to reach its nominal or reduced speed (depending on set parameters). The opening of an external wired contact allows pump stopping.

Ext. Safety

31 - 32

REMOTE Mode

33 - 34

STANDBY Mode

35 - 36

Start/Stop

37 - 38

+ 15 V 50 mA

0 V

Sub D 44 Pts ACT female con.

External contacts wired by the customer

B 60

ACT 200 T and 600 T "Remote Control" connector wiring

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Signaling using

output contacts:

These are dry contacts (250VAC-1A), their function is to replicate the data concerning the pump operating status.

When the output contact is closed, this indicates:

44 - 43 Used to monitor the selected parameter in

the “Set Analog output“ menu (see B 70).

A 0-10V analog output is used to monitor variations in certain pump parameters (speed, temperature, etc.) This data can be used to plot curves.

1 - 2 The pimp is in running-in mode. 5 - 6 The pump is operating 7 - 8 Copy of Start command.

This contact can be used to drive the roughing pump (see C 50).

9 - 10 The standby mode is selected. 11 - 12 No faults are signalled. 13 - 14 The pump has reached its nominal speed.

15 - 30 The venting valve ﬁtted in the pump is closed

(accessory).

15 14 13 12 11 10 9 8 7

44 43

42 41 40 39

OV(-) OV + 15 V Max 50 mA

10V(+)

B 70

ACT 200 T and ACT 600 T controller start-up

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GB 00415 - Edition 02 - Feburary 99

Enter the sub-menus by pressing

The controller performs a self-test and identiﬁes the pumps to which it can be connected.

The initialization time is approximately 12 seconds.

Display initialization

Indicator light test: they are lit in succession.

The equipment is identiﬁed : the programs versions are displayed.

The pump operation time and the speed are displayed.

ATP 80/100

VV:1.10 VE:1.10

52H ORPM

READY TO START!

■■■■■■■■■■■■■■■■

FAULT

Conﬁgure the parameters for the application using the various menus

Parameter setting

access

Selection

Validation

• used to access the parameter setting mode.

• used to exit the various menus without validating the functions.

• used to move in the menus, or from one parameter to another.

• used to select or adjust the value of the selected parameter.

• used to validate the selection of a menu, parameter or value.

• used to exit the menus and return to the pump parameter display (on ACT 600 T ).

The parameter setting keys

➧ Access the

parameter programming.

➧ Select a running-in

cycle;

➧ Start the cycle.

Once the various electrical connections have been made, set the main switch on the rear panel to "I".

➧ Display the monitored

parameters.

➧ List the faults and the

alerts.

DISPLAY SETUP

RUNNING IN

ENTER

STATUS

B 70

ACT 200 T and ACT 600 T controller start-up

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Conﬁguring the controller

DISPLAY

SETUP

RUNNING IN

Enter the access code

Conﬁgure the 0-10V output

Modify the STANDBY speed

Give the authorization to restart the pump after a power cut

Activate or disactivate the buzzer

Select the temperature measurement unit

Set the serial link parameters

Modify the time before starting up the pump

Modify the time before opening the venting valve

Modify the venting valve opening time

Program the maximum operating time before regreasing the bearings

Ball bearings life time counter

Modify the access code

Enter the access code and validate

SPEED: 6.75V = 27000rpm I motor:

ATP 80/100: 2.5A / 10V ATP 150/400: 5.1A / 10V

θ.PUMP: 0.1V per 1°C θ.CONT: 0.1V per 1°C

6000 to 27000 rpm

YES or NO

ON or OFF

°C or °F

RS232/RS485/NETWORK (see sub-menus folio 3 & 4) 0 to 240mn 59s

0 to 59mn 59s

M=0 (1000 to 15000 h) M=1 (1000 to 30000 h) M=2 (1000 to 45000 h)

(3 times the maintenance time) (see E 80)

0 to 50000 hours

0 to 65535

Speed

12000

°C

RS232

0mn 0s

0mn 1s

M=0

5000h

0 h

ACCESS CODE

SET ANALOG-OUT

STANDBY SPEED

AUTO-STARTING

BUZZER

TEMPERATURE UNIT

SET SERIAL LINK

SET START DELAY

TIME TO VENTING

VENTING TIME

MAINTENANCE

TIME BEARING

NEW CODING

Factory

conﬁguration

ENTER

B 70

ACT 200 T and ACT 600 T controller start-up

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Serial link setting

Transimission speed . . . . . .

Parity . . . . . . . . . . . . . . . .

Data length . . . . . . . . . . . .

Number of STOP bits . . . . . .

Authorizes or does not authorize the echo of characters received on the link Data separating

character . . . . . . . . . . . . .

Number of controller in a

multiple link . . . . . . . . . . . .

Authorizes transmission at pre-set intervals on the serial link, if ON, Set the transmission interval

Parity . . . . . . . . . . . . . . . .

Data length . . . . . . . . . . . .

Number of STOP bits . . . . . .

Data separating

character. . . . . . . . . . . . . .

Number of controller in a

multiple link . . . . . . . . . . . .

None None Even Odd 8 bits 7 or 8

1 bit 1 or 2

44 (comma) 0 to 255

0 0 to 255

SPEED PARITY DATA-BITS STOP-BITS ECHO

SEPARATOR

ADDRESS

SET DATA LOGGER

PARITY DATA-BITS STOP-BITS SEPARATOR

ADDRESS

RS 232

RS 485

NETWORK

Return to Temperature menu folio 2

SET SERIAL LINK

RS 232

RS 232 RS 485

NETWORK

Serial link selection

Default Setting values

values

9600 bauds 1200 2400 4800 9600

None None Even Odd 8 bits 7 or 8

1 bit 1 or 2

ON ON or OFF

44 (comma) 0 to 255

0 0 to 255

OFF ON or OFF

0mn1s 0 to 4mn59s

or 255 s

ENTER

B 70

ACT 200 T and ACT 600 T controller start-up

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Serial link setting

(continued)

Number of controller in a sequence in the case of the

multiple link . . . . . . . . . . . .

0 0 to 255

ADDRESS

RS 232 RS 485

NETWORK

Return to Temperature menu folio 2

B 80

ACT 1000T electrical connections

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RS 232 / 485

TURBO PUMP CABLE

DRY CONTACTS

REMOTE CONTROL

Connect the RS232 serial link cable to the connector

(cable supplied by customer).

Connect the

venting valve

accessory (see B 90)

If the unit is remote controlled,

make the various

connections on the

REMOTE CONTROL

terminal block

(see B 90).

Connect the controller to the pump

using the cable

(separately

ordered).

Connect the controller to the mains using the cable supplied. (Mains with earth connection)

Connect the fan (ATP air cooled).

B 90

ACT 1000 T "Remote Control" connector wiring

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0 -10 V analog output:

The control contacts

Ext. safety

1 - 2

Start/Stop

3 - 4

REMOTE mode

5 - 6

STANDBY mode

7 - 8

Analog output

9 - 10

When the contact is closed, an external safety device is signalled: the motor is stopped and the controller generates a fault. This contact must be opened for the pump to operate.

When the contact is closed, the pump is started up and accelerates to reach its nominal or reduced speed (depending on parameter settings). If the contact is open, the pump is no longer powered.

When the contact is closed, the remote control mode is selected. If the contact is open, the local mode is selected (control using the front panel keypad).

When the contact is closed, the reduced speed rotation mode is selected.

Used to monitor the selected parameter (see ANALOG OUT menus).

When the units containing the control circuits are equipped with dry contact outputs, it is the customer's responsibility to use the outputs in compliance with safety regulations.

GND

GND GND GND

1 2

11 12 13 14 15 16 17 18 19 20

3 4 5 6 7 8 9 10

B 90

ACT 1000 T "Remote Control" connector wiring

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Signaling using output

contacts

These are dry contacts: (250VAC-1A) their function is to copy the data concerning the pump operating status.

Shut-off

valve

11 - 12

Air inlet valve

13 - 14

Speed 15 - 16

Fault 17 - 18

Start 19 - 20

The contact is opened when a functional fault appears or when the "STOP" control is activated. In the latter case, the pump is reset to atmospheric pressure.

The contact can be used to control a secondary shut-off valve in order to retain the pressure in the chamber when the pump is reset to atmospheric pressure

Venting valve control and power supply (12V).

The contact is closed when the pump reaches the selected speed.

The contact is open if a fault appears and the motor is stopped.

The contact is closed when the "START" control is activated. The contact can used to control a primary shut-off valve.

GND

1 2

11 12 13 14 15 16 17 18 19 20

3 4 5 6 7 8 9 10

GND GND GND

B 100

ACT 1000 T controller start-up

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Enter the sub-menus by pressing

The controller performs a self-test and identiﬁes the pump to which it is connected.

The initialization time is approximately 4 seconds.

Display initialization

The equipment is identiﬁed, the program version is displayed.

Indicator light test: they are lit in succession.

The working screen is displayed.

ACT 1000 T V2.XX

------------------------------

----------------

CHECKING PROCEDURE

SEP/20/95 12:24:54 ROT. SPEED 0 RPM Θ1 PUMP 21°C

■■■■■■■■■■■■■■■■■■■■■

FAULT

Conﬁgure the parameters for the application using the various menus.

Parameter setting

access

Selection

Validation

• used to access the parameter setting mode.

• used to exit the various menus without validating the functions.

• used to move in the menus, or from one parameter to another.

• used to select or adjust the value of the selected parameter.

• used to validate the selection of a menu, parameter or value.

• used to exit the menus and return to the pump parameter display

The parameter setting keys

➧ Access

the parameter programming (see folio 2).

Once the various electrical connections have been made, set the main switch on the rear panel to "I".

➧ Display and/or select

the parameters to be monitored (see folio 4).

DISPLAY PARAMETERS

ENTER

STATUS

B 100

ACT 1000 T controller start-up

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Programming

the parameters

* At power-up, the storage mode disappears automatically.

PARAMETERS

Modify the date

Modify the STANDBY speed

Modify the time before starting up the pump

Modify the maximum bearing operating time

Modify the RS232 serial link

Conﬁgure the 0-10V output

Return to the factory conﬁguration (Alcatel reserved)

Modify the time before opening the air inlet valve

Modify the air inlet valve opening time

Change to storage mode (the timer is blocked).

6000 to 27000 tr/mn

0 to 59mn 59s

M=0 (5000 to 15000 h) M=1 (5000 to 30000 h) M=2 (5000 to 45000 h) (see details folio 3)

θ.PUMP 0.1V per 1°C 6,75V = 27000 tr/mn θ.CONV 0.1V per 1°C Current 10V for 15000mA

0 to 59mn 59s

0 to 59mn 59S

ON / OFF

12000

0mn 0s

5000 h

TEMP.

ON*

DATE

SPEED

START DELAY

BEARING MAINT

LIMIT

RS 232

AN.OUT Θ1 PUMP

SPEED

Θ CONV

I.MOTOR

RESET CONTROLLER

BEARING

AIR INLET DELAY

OPEN

STOCK

Factory

conﬁguration

ENTER

B 100

ACT 1000 T controller start-up

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Serial link setting

RS232

Transmission speed

Data lenght

Parity

Number of STOP bits

Number of controller in a multiple link

Authorizes or does not authorize the echo of characters received on the link

Data separating character

Authorizes transmission at pre-set intervals on the serial link

300 600 1200 2400 4800 9600

7 or 8

None Even Odd

1 or 2

00 to 999

ON or OFF

1 to127

ON or OFF

0 to 240mn 59 s

9600

8 bits

None

1 bit

(comma)

OFF

SPEED

DATA

PARITY

STOP

ADDRESS

ECHO

SEPARATOR

DATA LOG START

DELAY

Factory

Conﬁguration

Return to AN.OUT menu folio 2

ENTER

B 100

ACT 1000 T controller start-up

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Conﬁguring the display

screen

DISPLAY

in revolutions/minute

in mA

of the pump (°C) of the controller (°C)

of the bearings (hours) of the controller (hours)

The date and time

The rotation speed

The motor current consumption

The temperature

The operating time

DATE

SPEED

CURRENT TEMP Θ1 PUMP

Θ CONV

SERVICE BEARINGS

CONTROLLER

ENTER

B 110

RS 232 or RS 485 serial link wiring

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At the ﬁrst power-up, the user ﬁnds the default conﬁguration. The serial link parameters can be modiﬁed by accessing the corresponding unit menu.

The default conﬁguration of the serial link is as follows:

■ Type: RS 232

■ Transmission speed: 9600 baud

■ Data length: 8 bits

■ Parity: NONE

■ Stop bit: 1

RS232/485 connector

wiring

Connection examples:

RS232 type serial link with a single controller

Multiple RS232 serial link:

several units (up to 255) can be controlled on a single link.

RS485 serial link connection:

DB 9 contacts, male connector.

See B 120 for the command and message reception syntax.

The multiple link is obtained by creating a loop:

Connect terminals 7 and 8 when the controller is at the end of the line.

(Reception data) RD

(Data set ready) DSR

TD (Transmission data)

DTR (Data terminal ready)

GND (Ground)

12345

6789

V(+) (RS 485)

V(-) (RS 485)

561

FAULT

START

ENTER STAND BY

STOP

ACT 200 T

1/10

B 120

Alcatel Vacuum Technology France - ATP User’s Manual

GB 00420 - Edition 03 - March 00

Detailed description of RS commands

(valid from V1.10 version variable drives)

Conventions applicable

to the syntax of all

commands:

Status values

Error messages

ADR

Syntax

Result

BRK

Syntax

Result

adr = address, from 000 to 255 <CR> Carriage Return (ascii 13) <LF> Line Feed (ascii 10); between square brackets:

this character is not compulsory.

ok : command executed correctly

Err0 : adjustment error (out of bounds) Err1 : command error (syntax) Err2 : parameter error (e.g. non-hexadecimal character) Err3 : context error Err4 : checksum error

Specifies the address of the device for networking.

#adrADRaaa<CR>[<LF>]

adr = address of the device before the command aaa = new address of the device condition : 000 ≤ aaa ≤ 255

#aaa,ok or Err2

This command is used to allocate a specific number to each of the products making up a network (loop for RS 232 or parallel for RS 485).

Note : it is important to note down the number

allocated to each device.

Stop the pump by braking (ATP 80/100 series only)

#adrBRK<CR>[<LF>]

#adr,ok

This command is used to brake the motor electrically, which is particulary effective at high speed. It is currently only available for the variable drive unit of the ACT 200T Board or ACT 200T cabinet.

2/10

B 120

Alcatel Vacuum Technology France - ATP User’s Manual

Detailed description of RS commands

GB 00420 - Edition 03 - March 00

CYC

Syntax

Result

CKS

Syntax

Result

Enables or disables reply strings checksum

#adrCKSON<CR>[<LF>]

Enables ascii character checksum at the end of a reply string

or #adrCKSOFF<CR>[<LF>]

Disables ascii character checksum at the end of a reply string

#adr,ok,S for CKSON #adr,ok for CKSOFF

This feature allows the user to test if there is any transmit error with a reply string. S is a character whose ascii value is the checksum, on 7 bits, of all the character ascii values from the beginning of the reply string to the character before S. The 8th bit of S (MSB, Most Significant Bit) is always 1.

Starts the specified running-in cycle

#adrCYC1<CR>[<LF>] to start running-in program 1, or #adrCYC2<CR>[<LF>] to start running-in program 2

#adr,ok

Running-in program 1 should be executed after a pump maintenance operation (change of bearings). At the end of the program, the pump maintenance parameters are updated and the «maintenance requested» alert can be cleared. Program 2 is used after regreasing (ATP series only), or after prolonged storage (ATH 20/40 only).

3/10

B 120

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Detailed description of RS commands

GB 00420 - Edition 03 - March 00

DLI

Syntax

Result

Operation

■ First pump start-up /

Safety instructions . . . . . . . . . . . . . . . . . . . . .

■ C 10

■ Turbomolecular pump operation

in a pumping application . . . . . . . . . . . . . . . .

■ C 20

■ Controlling the pump using the controller

front panel. . . . . . . . . . . . . . . . . . . . . . . . . .

■ C 30

■ Displaying the data concerning

ACT 200 T and 600 T pumping . . . . . . . . . . .

■ C 40

■ ACT 200 T and 600 T «Remote Control»

connector «Ext. safety» input operation . . . . . . . .

■ C 50

■ Controlling the pump using

communication software . . . . . . . . . . . . . . . . .

■ C 61

C 10

First pump start-up Safety instructions

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The pumps are designed so as not to present a

thermal risk for the user's safety. However, speciﬁc operating conditions can generate temperatures which require particular care to be taken by the user (external surfaces > 70°C).

Avoid moving or causing a shock on a pump in

operation. There is a risk of seizing if the pump rotates in an axis perpendicular to its axis of rotation.

First pump start-up

Safety instruction

for use

When the pump is new, or after a prolonged shut-down of 3 months or more (under normal storage conditions), Alcatel recommend operating the pump at atmospheric pressure for 10 minutes (inlet and exhaust open to atmosphere) in order to ensure a slow rotation and grease re-distribution in the pump ball-bearings. For this operation, inlet and pump exhaust are open to atmosphere.

The access to the rotor of a turbomolecular pump

with an unconnected inlet is dangerous.

C 20

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Turbomolecular pump operation in a pumping application

Example of a 1 valve

assembly

Start-up:

- start up ATP water cooling system;

- open the E1 valve;

- start up the primary pump (PPM);

- start up the ATP, when the pressure in the chamber is ≤ 1 mbar.

Stop:

- close E1;

- stop the primary pump;

- stop the ATP;

- stop the cooling system.

The chamber and pipes are

at atmospheric pressure,

the pumps are switched off,

the valves are closed

Chamber to be

evacuated

When the pump is new, or after a prolonged shutdown of 3 months or more (under normal storage conditions), Alcatel recommend operating the pump at atmospheric pressure for 10 minutes (inlet and exhaust open to atmosphere) in order to ensure a slow rotation and grease re-distribution in the pump ball-bearings.

Enceinte à vider

ATP

PPM

C 20

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Turbomolecular pump operation in a pumping application

Example of a 3 valve

assembly

The chamber and pipes are

at atmospheric pressure,

the pumps are switched off,

the valves are closed

Pre-evacuation of the chamber:

- start up the PPM (primary pump);

- start up the ATP water cooling system;

- open the E2 valve.

The pressure in the chamber ≤ 1mbar, the secondary pumping can be started up:

- close E2;

- open E1 and E3;

- start up the nitrogen purge*;

- start up the ATP.

The chamber is at

atmospheric pressure,

the pumps are operating,

the valves E2 and E3 are

closed, the purge and water

circuits are operating.

Pre-evacuation of the chamber:

- close E1;

- open E2. The pressure in the chamber is ≤ 1mbar:

- close E2;

- open E1;

- open E3.

* N2 purge only for "C" and "HPC" models

Chamber to be

evacuated

Enceinte à vider

ATP

PPM

C 20

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Turbomolecular pump operation in a pumping application

To reach the vacuum limit quickly, the ATP can be baked. In this case, the temperature on the pump inlet ﬂange must be monitored:

T < 120°C.

Bake-out collar (accessory)

operation:

Reﬁll the chamber with air

Shut off the pumps by closing the E3 valve (E1 remains open) and open an air inlet on the chamber.

Stop pumping

The pumps are shut off by closing the valves.

- close the E3 valve;

- with the ATP and PPM rotating, allow the N

2 purge* to

ﬂow approximately 1 hour after pumping corrosive gases*;

- Stop the ATP;

- Close the E1 valve;

- Stop the PPM. The ATP will be reﬁlled with air if the accessory is ﬁtted and the relevant menus are programmed (see B 70 or B 100);

- stop the water cooling circuit.

Dome

Inlet flange

Bake-out collar

ATP Exhaust

T < 200 °C

Dome

T < 120 °C

C 30

Controlling the pump using the controller front panel

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The pump is started up to reach the selected speed.

The orange rising speed indicator light comes on. When the pump reaches its selected speed, the orange indicator light goes off and the green indicator light comes on.

The speed selection indicator light comes on. The pump regulates its speed to reach the value of the programmed reduced speed (see B 70

or B 100

)

The rotation speed monitoring indicator lights go off. The pump motor is no longer powered, the pump decelerates.

FAULT

Red lit

The pump is faulty. This fault is accompanied by an audible signal (if it is programmed).

Orange lit

The pump rotation speed is lower than the selected speed.

Orange lit

Standby mode selected

Orange ﬂashing

Running-in procedure activated

Start-up the pump by

pressing

Stop the pump by

pressing

Select the reduced speed

rotation mode by

pressing

Rotation indicator lights:

Green ﬂashing

The pump rotation speed is higher than the selected speed (decrease of the selected speed during operation).

Green lit

The pump has reached the selected speed.

START

STAND

STOP

C 30

Controlling the pump using the controller front panel

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The valve is automatically controlled during a voluntary stoppage of the pump if a value other than zero has been programmed in the "Venting Time" menu. During the entry of air, the pump can be started up but the valve will be closed beforehand. In the event of a power cut, the valve is opened immediately, without delay, even if it has been programmed at a value other than zero.

It is possible to control the start-up of another pump before the start-up of the turbomolecular pump. Simply program a time other than zero in the "SET START DELAY" menu. When START is pressed, the backing pump is started up and the ATP is controlled after the delay.

Air inlet valve

accessory

Delayed start-up

C 40

Displaying the data concerning ACT 200 T and ACT 600 T pumping

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Successive display of last 10 faults

• number of hours of operation when the fault appeared

• record number (1 to 10)

• fault title

Successive display of last 10 alerts

• number of hours of operation when the alert appeared

• record number (1 to 10)

• alert title

Bearing data

• operating time passed

• maximum number of hours authorized before regreasing or replacing the bearings

Displaying the data

concerning the pumping

400H FAULT 1

D01:EXTERNAL SAFETY

420H WARNING 1

W01:ATH MAINTENANCE

DISPLAY

DISPLAY SETUP

RUNNING IN

STATUS VER

FAULT

WARNING BEARINGS

STATUS VER FAULT

WARNING

WARNING BEARINGS

STATUS VER FAULT WARNING

BEARINGS

ATP 20°C 1.50A ACT 36°C 24000

STATUS

STATUS VER FAULT

WARNING BEARINGS

Time passed

ATP 80 / 100

VV:1.10 VE:1.10

STATUS

VER

VER FAULT

WARNING BEARINGS

Display of the equipment and the program version

MAINTENANCE : 0

450H/5000H

Pump and controller status

• pump temperature

• pump motor current

• controller temperature

• pump rotation speed

ENTER

C 50

ACT 200 T and ACT 600 T "Remote Control" connector "Ext. safety" input operation

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This input, which can be used to control an external contact safety device for the ACT controllers, is controlled in 2 different ways depending on the value given to the SET START DELAY parameter accessible in the conﬁguration menus.

The external safety input is controlled continuously. If the “external safety” contact is open, it displays the fault "EXTERNAL SAFETY", lights up the red fault indicator light and inhibits the pump start-up. The output contact 7-8 is kept open.

• Before pressing on "START", the external safety input is not controlled.

• After pressing on "START" and during a delay

- of 4 seconds if SET START DELAY > 4 s

- or between 1 and 4s if SET START DELAY ≤ 4 s the external safety input is not controlled.

• After this delay, this input is handled by the ACT. If the “external safety” contact is open, it displays the fault "EXTERNAL SAFETY", lights up the red fault indicator light, opens the output contact 7-8 and inhibits the pump start-up. This contact can be used to control the roughing pump (see wiring example, following page).

If SET START DELAY = 0

If SET START DELAY ≠ 0

Note: In "REMOTE" mode, after an external fault, the pump must be set to the "STOP" status before starting up again.

35 33

34 3236 31

External safety

C 50

ACT 200 T and ACT 600 T "Remote Control" connector "Ext. safety" input operation

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Wiring example to control a roughing pump

ACT

Remote control

ATH

PPM

GB 00429 - Edition 01 - February 99

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C 61

Controlling the pump using communication software

Alcatel Vacuum Technology France - ATP User’s Manual

Connect the controller

to the micro-computer

(or terminal)

These instructions are validated for ACT 200/200T/600T, cabinet, Board and Brick version.

Realize the necessary connections (see B 110).

RS 232/485

Communication software is compatible with

Windows 3.11,

95 et Windows NT (™ Microsoft).

It require 2 Mo RAM. Communication ports 1 to 4 must be available.

This application is available on CDRom or Floppy disk 3”1/2. Consult us.

PC system requirements

RS 232 / 485

TURBO PUMP CABLE

REMOTE CONTROL

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Chapter D

Alcatel Vacuum Technology France- ATP User’s Manual

ATP User’s Manual

Maintenance

■ Diagnosis and troubleshooting

ACT 200 T and 600 T . . . . . . . . . . . . . . . . .

■ D 10

■ Diagnosis and troubleshooting ACT 1000 T . . . . ■ D 20

■ ATP 80/100/150/400

Maintenance frequency. . . . . . . . . . . . . . . . . .

■ D 30

■ ATP 900 Maintenance frequency . . . . . . . . . . . ■ D 40

D 10

Diagnosis and troubleshooting ACT 200 T and ACT 600 T

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No event occurs after

power on:

• No display;

• Indicators does not light.

Incoherent display

Inoperative Keyboard

(At starting or during

the pumping)

No light switches on

The pump isn’t running

(pump seizing)

No messages

• No mains current in the unit.

•

Defective power cable.

• Fuses.

Defective lights.

Cell seizing.

The controller is not powered.

The display is different from «Ready to start !»

The pump can be used without indicators.

No message. Check the pump status. 200T : Imax = 1.2 A 600T : Imax = 0.8 A Rotation speed : 0 rpm The controller temperature is increasing and the warning «ACT TEMP» can appear (65°C)

• Change the power cable.

• Check the fuses.

• Call the ALCATEL Customer Service.

• Check the pump rotation (manually).

• Make the pump maintenance.

• Call the ALCATEL Customer Service.

INCIDENT CAUSE CONSEQUENCE REMEDY

The "FAULT" signal ﬂashes; If the buzzer is selected "ON", it is activated; The controller doesn’t stop the pump.

The "FAULT" signal lights on; If the buzzer is selected "ON", it is activated; The controller stops the pump.

Default type:

"Warning" Wxx

"Fault" Dxx

D 10

Diagnosis and troubleshooting ACT 200 T and ACT 600 T

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WO1 :

GREASING

WO2 :

PUMP MAINTEN.

WO3 :

ACT TEMP.

W04 :

PUMP TEMP.

The authorized limit for ball bearing maintenance time has been reached. (M=0 or M=1)

Pump maintenance time will be reached.

The controller temperature is high between:

- 60 and 70°C for ACT 600 T;

- 65 and 75°C for ACT 200 T; but does not exceed the authorized limit.

Pump temperature is between 75 and 85°C.

Bearing must be changed.

• Regrease the pump and initialize the maintenance counter (see E 80).

• Call the ALCATEL Customer Service.

• Check the controller cooling circuit:

- Internal fan for ACT 600T;

- Ventilation for ACT 200T.

• Check the pump ventilation.

INCIDENT CAUSE CONSEQUENCE REMEDY

D 10

Diagnosis and troubleshooting ACT 200 T and ACT 600 T

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INCIDENT CAUSE CONSEQUENCE REMEDY

D01 :

EXT SAFETY

D02 :

DLY SOFTWARE

D03 :

ACT TEMP.

D04 :

PUMP TEMP.

D05 :

HALL SENSORS

D06 :

START FAULT

D07 :

PUMP CURRENT

D08 :

NO CONNECT

D09 :

HIGH PRESS.

The external security contact on the REMOTE CONTROL connector is activated.

Soft counter default.

Controller temperature exceeds the authorized limit 70°C for ACT 600T or 75°C for ACT 200T

The pump motor temperature exceeds the authorized limit 85°C.

Not used.

Motor overcurrent or Hall sensor default.

Pump not connected.

Not used.

The controller stops the motor. The pump can’t restart.

Starting current too high.

The pump can’t start up.

• Test the external safety devices (contact 31 - 32);

• Repair the fault and press START to restart

(see B 60)

• Reinitialize the controller with the main switch (0/1);

•

If the fault happens again, call

the ALCATEL Customer Service.

• Check that the cooling circuit is operating correctly:

- Internal fan for ACT 600T;

- Ventilation for ACT 200T.

• Check that the cooling circuit is operating correctly;

• Reduce the working pressure or the ﬂowrate.

•

If the fault happens again, call

the ALCATEL Customer Service.

• Reinitialize the controller with the main switch (0/1);

•

If the fault happens again, call

the ALCATEL Customer Service.

• Check the cable connection.

D 20

Diagnosis and troubleshooting ACT 1000 T

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The "FAULT" indicator lights, the air inlet valve and/or the "FAULT" contact on the "Remote Control" connector are activated.

In the following table, we use the signs:

Y Relay contact open; N Relay contact closed;

■■ "FAULT" indicator lit on;

■ "FAULT" indicator lit off.

When a defect

appears

■

■■

INCIDENT CAUSE CONSEQUENCE REMEDY

No event occurs

after power on:

• No display;

• Indicators does not light.

D00 :

SEIZED PUMP

D01 :

POWER

OVERHEAT

D03 :

MOTOR

CONTROL

OVERHEAT

D04 :

HALL SENSOR

• No mains current in the unit.

•

Defective power

cable.

• Fuses.

Cell seized.

Overheat signal by the «powered» sensor in the unit.

Overheat signal by the «dimmer switch» sensor in the unit.

• Hall sensor default.

• Motor out of order.

•

Pump no connected.

The controller is not powered.

Check the pump status: 0RPM.

The controller stops temporarily the motor. Valves are not affected.

The controller stops the motor. Valves are affected and the pump can’t restart.

• Change the power cable.

• Check the fuses.

• Call the Alcatel Customer Service.

• Check the pump rotation (manually).

• Make the pump maintenance.

• Call the Alcatel Customer Service.

• Check the controller cooling circuit (Air admissions and fan).

• Call the Alcatel Customer Service.

• Check the controller cooling circuit (Air admissions and fan).

• Reduce the working pressure or the ﬂowrate.

• Call the Alcatel Customer Service.

• Check the cable connection.

• Call the Alcatel Customer Service.

FAULT

17-18

13-14 & 11-12

D 20

Diagnosis and troubleshooting ACT 1000 T

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■■

■

■■

■

■■

D05 :

OVERCURRENT

OR SENSOR

D06 :

EXT. SAFETY

D21 :

PUMP OVERHEAT

D22 :

CONTROLLER

OVERHEAT

D23 :

HOT PUMP

D24 :

BEARINGS MUST

BE CHANGED

D26 :

NO CONNECT

• Motor overcurrent or hall sensors default.

• Motor out of order.

Pump no connected.

The external security contact on the connector is activated.

Pump overheat.

Overheat signal by the «management» sensor in the unit. T > 60°C.

Pump temperature exceeds 75°C.

The bearing life time has been reached.

• Temperature probe

failure.

•

Pump no connected.

•

Sensor no connected.

The controller stops the motor. Valves are affected and pump can’t restart.

The controller stops the motor. Valves are not affected.

Fault is displayed (message).

The «fault» signal ﬂashes.

The controller stops the motor. Valves are not affected.

• Check the cable connection.

• Call the Alcatel Customer Service.

• Test the external safety devices (contact 1 - 2);

• Repair the fault and press START to restart.

• Check the pump cooling.

• Reduce the working pressure or the ﬂowrate.

• Check the controller cooling circuit (Air admissions and fan).

• Reduce the working pressure or the ﬂowrate.

• Call the Alcatel Customer Service.

• Check the pump cooling.

• Reduce the pressure or the ﬂow.

• If the default is still present the D21 appears.

• Change the emergency bearings;

• Call the Alcatel Customer Service.

• Check the cable controller electrical connection.

• Call the Alcatel Customer Service.

INCIDENT CAUSE CONSEQUENCE REMEDY

FAULT

17-18

13-14 & 11-12

D 20

Diagnosis and troubleshooting ACT 1000 T

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GB 00432 - Edition 01 - March 97

■

■■

D27 :

DATE AND TIME

D28 :

DISABLE EEPROM

WRITE

D29 :

INPUT POWER

D30 :

EEPROM

CHECKSUM

D37 :

GREASING

BEARING

• Converter memory

problem.

• STOCK Parameter

activated.

Writing memory problem on the management card.

• Mains power failure.

• Problem on the 72V power supply.

Reading memory problem on the management card.

The bearing relubricated time has been reached.

The controller supplies power to the pump but the display is incorrect.

The controller supplies power to the pump but the data are not saved.

The pump is not powered and generate power to the controller. The defect appears brieﬂy before the power cut.

The controller stops the motor.

The «fault» signal ﬂashes.

• Access the DATE menu and update the new date.

• Reinitialize the controller with the main switch (0/1)

• Call the Alcatel Customer Service.

• Reinitialize the controller with the main switch (0/1)

• Call the Alcatel Customer Service.

• Contacter le Service Client.

• Check the cable connection to the pump and controlle.

• Check the fuses.

• Call the Alcatel Customer Service.

• Make the relubrication and reinitialize the maintenance counter.

INCIDENT CAUSE CONSEQUENCE REMEDY

FAULT

17-18

13-14 & 11-12

D 20

Diagnosis and troubleshooting ACT 1000 T

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INCIDENT CAUSE CONSEQUENCE REMEDY

When the controller is started up, the pump cannot be identiﬁed.

Converter power supply problem.

The microprocessor is running on itself: it is not able to control the operating sequency.

The micro board is not working.

The controller is help up.

The controller is blocked.

The controller is not working.

Momentaneaously, the controller is not working.

• Call the ALCATEL Customer Service.

• If the speed is zero when the message appears, wait for the message disappiars and try again the starting procedure.

• If the speed is not zero, wait for running stops and start again the pump.

• If the message continues, call the ALCATEL Customer Service.

ACT 1000 T V2.X

-------------

PUMP MEMORY FAULT

ACT 1000 T V2.X

-------------

WDOG CONVERTER

■■■■■■■■■■■■■■■■■■■

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D 30

Alcatel - High Vacuum Technology - ATP User’s Manual

ATP 80, ATP 100, ATP 150, ATP 400 Maintenance frequency

Pump curve:

ATP 80 - ATP 80 C ATP 100 - ATP 100 C ATP 150 - ATP 150 C ATP 400 - ATP 400 C

ATP 400 HPC

Use of the pump

Housing temperature

measuring point

Intervals for relubrication and the ball bearings replacement depend on the type of process used.

16000

14000

12000

10000

8000

6000

4000

Relubrication schedule (hours)

2000

10 20 30 40 50

Housing temperature (°C)

In continuous operation, at ultimate pressure, no process. In cycle less than 1 hour, at maximum inlet pressure, no process. In cycle less than 1 hour, at maximum inlet pressure, with chlorinated or ﬂuorine process.

Example

For use at 20°C housing temperature, in continuous operation, at ultimate pressure, the maintenance frequency is 13000h (t).

t 13000h 1

lubrication

M*=0

t x 2 26000h 2nd

lubrication

M*=1

t x 3 39000h Disassemble the pump, replace

M*=2

and condition the ball bearings

ATP 150 ATP 400

ATP 80 ATP 100

*Maintenance counter

Intervals for relubrication and the ball bearings replacement depend on the type of process used.

*Maintenance counter

D 40

ATP 900 Maintenance frequency

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Pump curve:

ATP 900 - ATP 900 C

ATP 900 HPC

Housing temperature

measuring point

10000

9000

8000

7000

6000

5000

4000

3000

Relubrication schedule (hours)

2000

10 20 30 40 50

Housing temperature (°C)

ATP 900

Example

For use at 20°C housing temperature, in continuous operation, at ultimate pressure, the maintenance frequency is 8000h (t).

Use of the pump

t 8000h 1stlubrication

M*=0

t x 2 16000h 2ndlubrication

M*=1

t x 3 24000h Disassemble the pump, replace

M*=2

and condition the ball bearings

GB 00435 - Edition 08 - February 98

Chapter E

Alcatel Vacuum Technology France- ATP User’s Manual

ATP User’s Manual

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Operation sheets

■ Precautions before maintenance . . . . . . . . . . . . ■ E 10

■ ATP 80/100 Pumps lubrication . . . . . . . . . . . . ■ E 20

■ ATP 150/400/900 Pumps lubrication. . . . . . . . ■ E 30

■ ATP 80/100 bearing replacement . . . . . . . . . . ■ E 40*

■ ATP 150/400/900 bearing replacement . . . . . ■ E 50*

■ Cleaning parts . . . . . . . . . . . . . . . . . . . . . . . ■ E 60*

■ Pump running-in for ATP 80/100/150/400. . . . ■ E 70

■ Maintenance counters for

ACT 200 T and 600 T controllers. . . . . . . . . . .

■ E 80

■ ATP 900 pump running-in . . . . . . . . . . . . . . . . ■ E 90

■ Maintenance counters for

ACT 1000 T controllers . . . . . . . . . . . . . . . . .

■ E 100

* These chapters are included into the ball bearing replacement manual delivered with the specific tool.

E 10

Precautions before maintenance

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It is important to isolate the machine from the electrical power supply source before any intervention inside the equipment (for maintenance reasons).

Before any maintenance operation, check the pumping conditions of the installation: toxicity, possible corrosion of the pumped gases. Depending on the case, we recommend:

- to purge the pumping installation with dry nitrogen before any intervention;

- to wear gloves, goggles and breathing masks, if necessary;

- to ventilate the room well and disassemble the equipment under a fume hood.

After a complete maintenance operation, it is recommended to perform a helium leaktightness test.

Similarly, follow all the safety instructions concerning start-up.

E 20

ATP 80 and ATP 100 Pumps lubrication

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The ﬁrst lubrication required for the correct operation of ATP pumps is performed in the factory. Subsequent lubrications should be performed according to the procedure below and according to a frequency deﬁned as a function of processes used (see scales D 30).

Only use the ALCATEL grease contained in the lubrication syringe (refer to the maintenance component references F 10).

Avoid introducing foreign matter into the pump during these operations. Lubrication must be performed with the pump switched off.

PUMPING CELL

Lubrication of bearing on the pumping cell side:

black jumper.

Lubrication of bearing opposite the pumping cell side:

red jumper.

INLET

EXHAUST

The ATP contains two bearings which must both be reloaded with grease at each relubrication period. The syringe is equipped with two jumpers with different widths and colours (red and black) used to proportion

the grease accurately for each pump bearing.

Use of the lubrication

syringe

E 20

ATP 80 and ATP 100 Pumps lubrication

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Remove the end cap by removing the two attachment screws. Remove the compression spring and the adjustment sleeve

(asymmetrical part, mark the direction for assembly).

Introduce the syringe equipped with its needle into

the bearing and remove the red jumper.

Always position the syringe needle between two balls of the bearing so as not to damage the bearing.

Distribute the dose of grease in 2 diametrically opposed points, until the syringe plunger comes to a stop against the black jumper.

Introduce the lubrication syringe needle into the drilled screw located at the center of the rotor until it comes to a stop against the screw head. Keep the syringe pressed down to the bottom of its housing throughout the operation. Remove the black jumper from the syringe and introduce the grease until the plunger comes to a stop.

Remove the syringe.

Reassemble the adjustment sleeve (taking care with

the direction), the spring and the end cap with its o-ring.

The relubrication operation is complete.

Execute the pump running-in: see E 70.

Bearing lubrication

Bearing opposite the pumping cell

Bearing on pumping

cell side

Disconnect the pump from the installation.

End cap

E 30

Alcatel Vacuum Technology France - ATP User’s Manual

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ATP 150, ATP 400 and ATP 900 Pumps lubrication

1/2

Only use the ALCATEL grease contained in the lubrication syringe (refer to the maintenance component references F 10).

Avoid introducing foreign matter into the pump during these operations. Lubrication must be performed with the pump switched off.

PUMPING CELL

Lubrication of bearing on the pumping cell side:

black jumper.

Lubrication of bearing opposite the pumping cell side:

red jumper.

INLET

EXHAUST

the grease accurately for each pump bearing.

Use of the lubrication

syringe

Alcatel Vacuum Technology Adixen ATP 150, Adixen ATP 100, Adixen ATP 900, Adixen ATP 80 C, Adixen ATP 150 C User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Welcome

Introduction

Start-up

Operation

Maintenance

Operation sheets