Agilent Technologies B2201A User Manual 2

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Agilent B2200A

Femto Leakage Switch Mainframe

Agilent B2201A

14ch Low Leakage Switch Mainframe

User’s Guide

Agilent Technologies

Notices

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number

B2200-90000

Edition

Edition 1, October 2004 Edition 2, July 2005

Agilent Technologies, Inc. 5301 Stevens Creek Blvd Santa Clara, CA 95051 USA

Warranty

The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose. Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Tec hn ol og y L i c e ns es

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as applicable in any technical data.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or subcontract, Software is delivered and licensed as “Commercial computer software” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as

DECLARATION OF CONFORMITY

According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014

Manufacturer’s Name:

Agilent Technologies International sarl

Manufacturer’s Address: Supplier’s Address:

Rue de la Gare 29 CH - 1110 Morges Switzerland

Declares under sole responsibility that the product as originally delivered Product Name:

Femto Leakage Switch Mainframe

Femto Leakage Switch Module

14ch Low Leakage Switch Mainframe

14ch Low Leakage Switch Module

Model Number:

Agilent B2200A

Agilent B2210A

Agilent B2201A

Agilent B2211A

Product Options:

This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries the CE marking accordingly:

Low Voltage Directive (73/23/EEC, amended by 93/68/EEC) EMC Directive (89/336/EEC, amended by 93/68/EEC)

and conforms with the following product standards EMC Standard

IEC 61326:2002 / EN 61326:1997 +A1:1998 +A2:2001 +A3:2003 CISPR 11:1997 / EN 55011:1998

IEC61000-4-2:1995 / EN61000-4-2:1995 IEC 61000-4-3:1995 / EN61000-4-3:1995 IEC 61000-4-4:1995 / EN61000-4-4:1995 IEC 61000-4-5:1995 / EN61000-4-5:1995 IEC 61000-4-6:1996 / EN61000-4-6:1996 IEC 61000-4-11:1994 / EN61000-4-11:1994

Canada: ICES-001:1998 Australia/New Zealand: AS/NZS 2064.1

Limit

Group 1 Class A 4 kV CD, 8 kV AD 3 V/m, 80-1000 MHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground 3 V, 0.15-80 MHz 1 cycle, 100%

The product was tested in a typical configuration with Agilent Technologies test systems.

Safety

IEC 61010-1:2001 / EN 61010-1:2001 Canada: CSA C22.2 No. 1010.1:1992, NRTL/C

Supplementary Information: This DoC applies to above-listed products placed on the EU market after:

September 26, 2006

Date

Toshiyuki Kawaji

QA Manager Agilent Technologies

• Herstellerbescheinigung

GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19

• Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION Lpa < 70 dB operator position normal operation per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada.

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in domestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive Annex I, this product is classed as a “Monitoring and Control instrumentation” product.

Do not dispose in domestic household waste. To return unwanted products, contact your local Agilent office, or see

www.agilent.com/environment/product/ for more information.

Microsoft, Windows, Windows NT, Visual C++, and Visual Basic are registered trademarks of Microsoft Corporation. Borland C++ Builder is registered trademark of International, Inc. LabWindows and LabVIEW are registered trademarks of National Instruments Corporation. All other trademarks are the property of their respective owners.

Safety Summary

The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture, and intended us e of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent B2200 complies with INST ALLATION CATEGOR Y II for mains input and

INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 1010-1.

Agilent B2200 is INDOOR USE products.

• GROUND THE INSTRUMENT This is Safety Class I instrument. To minimize shock hazard, the instrument

chassis and cabinet must be connected to an electrical ground. The power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards.

• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes.

Operation of any electrical instrument in such an environment constitutes a definite safety hazard.

• KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers. Component

replacement and internal adjustments must be made by qualified maintenance personnel. Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.

• DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person, capable of

rendering first aid and resuscitation, is present.

• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards, do not install substitute

parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.

• DANGEROUS PROCEDURE WARNINGS Warnings, such as example below, precede potentially dangerous procedures

throughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument.

Use extreme caution when handling, testing, and adju sti n g.

Safety Symbols

The general definitions of safety symbols used on equipment or in man uals are listed below.

Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have this symbol when insrument is on.

Affixed to product containing static sensitive devices--use anti-static handling procedures to prevent electrostatic discharge damage to compone nt.

Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which normally includes all exposed metal structures.

Indicates earth (ground) terminal. Alternating current. Direct current. ON (Supply). OFF (Supply). STANDBY (Supply).

CAT 1

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I.

condition or the like, which, if not correctly performed or adhered to, could result in injury or death to personal.

practice, condition or the like, which, i f not correctly perfor med or adhered to , could result in damage to or destruction of part or all of the product.

In This Manual

This manual is a user’s guide for Agilent B2200A/B2201A Switch Mainframe, and consists of the following chapters:

• Introduction Describes an overview and specifications of the Agilent B2200 series.

• Installation Describes how to install the Agilent B2200 and how to setup the input/output.

• Front Panel Operation Explains the front panel operation and the switch control functions of the

Agilent B2200, also provides the reference information of the front panel keys and display.

•Programming Explains the programming examples that control the Agilent B2200.

• SCPI Command Reference Describes the all commands of the Agilent B2200 SCPI commands.

• VXIplug&play Driver Describes the all functions of the Agilent B2200 VXIplug&play driver.

• Error Messages Lists and describes the error messages for the Agilent B2200.

Text Co nventions

The following text conventions are used in this manual:

Screen Text Represents text that appears on screen of the controller.

Italic Refers to a related document, or is used for emphasis.

Contents

1. Introduction

Agilent B2200 Series. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Front Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Switch Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

Switch Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12

Supplemental Information for B2200A/B2210A . . . . . . . . . . . . . . . . . . . . . . . 1-13

Supplemental Information for B22 01A/ B 2211A . . . . . . . . . . . . . . . . . . . . . . 1-14

Accessories and Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

2. Installation

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Storage and Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Inspection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

Installing the B2200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

To Set the GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

To Connect the GPIB Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

To Install the Switch Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

To Install the Blank Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Agilent B2200 User’s Guide, Edition 2

Contents

Self-Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Output Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Output Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Connector Plates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

To Make Connections to DUT Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

To Make Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15

To Mount Connectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Input Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

Measurement Cable Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

3. Front Panel Operation

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

To Initialize Agilent B2200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Enable Light Pen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Change Channel Configuration Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Change Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

To Change Connection Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

To Control Switch Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

To Open All Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Save/Load Setup Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Use Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

To Use Ground Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

To Use Couple Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Display Firmware Revision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Display Module Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Read Error Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

To Set Beeper. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Agilent B2200 User’s Guide, Edition 2

Contents

To Set GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

To Set Remote Display Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

To Return to Local Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Switch Control Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 -12

Channel Configuration Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

Ground Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Couple Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

Display Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

LED Matrix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

LCD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

Front Panel Keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25

Function key group. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26

Edit key group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29

Setup Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 -30

Setup Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

Selftest Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34

4. Programming

Programming Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

SCPI Command Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Fundamental Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Switch Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Programming Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

Connecting Input-Output Paths . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Using Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Using Ground Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

Agilent B2200 User’s Guide, Edition 2

Contents

Using Couple Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

Saving Input/Output Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

Defining Comment for Internal Memory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Capacitance Compensation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Capacitance Compensation Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

To Create Compensation Data File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

To Perform Measurement and Compensation . . . . . . . . . . . . . . . . . . . . . . . . . 4-27

5. SCPI Command Reference

Common Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Commands Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

*CLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

*ESE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

*ESR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

*IDN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

*OPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

*RST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

*SRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

*STB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

*TST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

*WAI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

Subsystem Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

:DIAGnostic:TEST:CARD:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

:DIAGnostic:TEST:CARD[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

:DIAGnostic:TEST:CARD:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

:DIAGnostic:TEST:FRAMe:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

:DIAGnostic:TEST:FRAMe[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

:DIAGnostic:TEST:FRAMe:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24

[:ROUTe]:AGND:C HANnel:DISable:CARD. . . . . . . . . . . . . . . . . . . . . . . . . 5-24

Agilent B2200 User’s Guide, Edition 2

Contents

[:ROUTe]:AGND:C HANnel:DISable[:LIST] . . . . . . . . . . . . . . . . . . . . . . . .5-25

[:ROUTe]:AGND:C HANnel:ENABle:CARD. . . . . . . . . . . . . . . . . . . . . . . . . 5-25

[:ROUTe]:AGND:C HANn el:ENABle[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . 5-26

[:ROUTe]:AGND:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

[:ROUTe]:AGND[:STATe]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28

[:ROUTe]:AGND:UNUSED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

[:ROUTe]:BIAS:CHANn el:DISab le:CARD . . . . . . . . . . . . . . . . . . . . . . . . . .5-30

[:ROUTe]:BIAS:CHANnel:DISable[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30

[:ROUTe]:BIAS:CHANn el:ENABle:CARD . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

[:ROUTe]:BIAS:CHANnel:ENABle[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

[:ROUTe]:BIAS:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

[:ROUTe]:BIAS[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

[:ROUTe]:CLOSe:CARD? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34

[:ROUTe]:CLOSe[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34

[:ROUTe]:CONNection:RULE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-35

[:ROUTe]:CONNection:SEQuence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36

[:ROUTe]:COUPle:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37

[:ROUTe]:COUPle:PORT:DETect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-38

[:ROUTe]:COUPle[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 -39

[:ROUTe]:FUNCtion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 -40

[:ROUTe]:OPEN:CARD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40

[:ROUTe]:OPEN[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-41

[:ROUTe]:SYMBol:CHANnel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-42

[:ROUTe]:SYMBol:PORT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-43

:SYSTem:BEEP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-44

:SYSTem:CCONfig? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-44

:SYSTem:CDEScription? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-45

:SYSTem:CPON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-46

:SYSTem:CTYPe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-47

:SYSTem:DISPlay:LCD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-47

:SYSTem:DISPlay:LED. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-48

:SYSTem:DISPlay:STRing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-48

Agilent B2200 User’s Guide, Edition 2

Contents

:SYSTem:ERRor? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-49

:SYSTem:KLC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-49

:SYSTem:MEMOry:COMMent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-50

:SYSTem:MEMOry:DELete . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-50

:SYSTem:MEMOry:LOAD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-51

:SYSTem:MEMOry:SAVE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-51

:SYSTem:PEN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-52

:SYSTem:VERSion? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-52

Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-53

Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-53

Status Byte Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-55

Service Request Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-57

Standard Event Status Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-58

Standard Event Status Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-59

Output Queue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-60

6. VXI plug&play Driver

System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Installing VXIplug&play Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

Driver Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

agb220xa_biasChanCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

agb220xa_biasChanList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

agb220xa_biasChanList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

agb220xa_biasPort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

agb220xa_biasState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

agb220xa_close . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

agb220xa_closeCard_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

agb220xa_closeList . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

agb220xa_closeList_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

agb220xa_cmd. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Agilent B2200 User’s Guide, Edition 2

Contents

agb220xa_cmdData_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

agb220xa_cmdInt. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

agb220xa_cmdInt16Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

agb220xa_cmdInt16_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

agb220xa_cmdInt32Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

agb220xa_cmdInt32_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

agb220xa_cmdReal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

agb220xa_cmdReal64Arr_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

agb220xa_cmdReal64_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

agb220xa_cmdString_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

agb220xa_compenC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

agb220xa_connRuleSeq. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

agb220xa_couplePort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

agb220xa_coupleState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

agb220xa_dcl . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

agb220xa_detectCouplePort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 -20

agb220xa_error_message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

agb220xa_error_query . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

agb220xa_errorQueryDetect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

agb220xa_errorQueryDetect_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

agb220xa_esr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-23

agb220xa_func . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

agb220xa_groundChanCard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

agb220xa_groundChanList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

agb220xa_groundChanList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-25

agb220xa_groundPort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

agb220xa_groundState. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

agb220xa_init. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27

agb220xa_opc_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 -27

agb220xa_openCard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

agb220xa_openList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

agb220xa_openList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-29

Agilent B2200 User’s Guide, Edition 2

Contents

agb220xa_readStatusByte_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

agb220xa_reset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

agb220xa_revision_query . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

agb220xa_selectCompenFile. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

agb220xa_self_test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31

agb220xa_testClear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31

agb220xa_testExec_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

agb220xa_timeOut. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

agb220xa_timeOut_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33

agb220xa_unusedPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33

7. Error Messages

Standard SCPI Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Command Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7

Device-Dependent Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8

Query Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

B2200 Specific Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

B2200 Channel Related Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

B2200 Card/Mode/Port Related Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12

Agilent B2200 User’s Guide, Edition 2

1 Introduction

Introduction

This chapter describes the basic functions and features of the Agilent B2200A/B2201A (Agilent B2200 series), and consists of the following sections:

• “Agilent B2200 Series”

• “Front Panel”

• “Rear Panel”

• “Switch Modules”

• “Specifications”

• “Accessories and Options”

1-2 Agilent B2200 User’s Guide, Edition 2

Agilent B2200 Series

Agilent B2200 series is a switching matrix designed for semiconductor dc characteristics measurement applications. The Agilent B2200 series has 14 input ports and four card slots fo r th e switch mod ules (plu g-in cards), and can configure a 12, 24, 36, or 48 outputs switching matrix. The Agilent B2200A/B2201A supports the following dedicated switch module.

• Agilent B2210A fA Leakage Switch Module Dedicated for the Agilent B2200A mainframe.

• Agilent B2211A 14ch Low Leakage Switch Module Dedicated for the Agilent B2201A mainframe.

NOTE Mixed configuration of the switch modules is not supported.

Basic functions of the Agilent B2200 series are listed below.

Introduction

Agilent B2200 Series

• SMU inputs (for source monitor units): 8 ports

• AUX inputs (multipurpose inputs): 6 ports

• Outputs: 12, 24, 36, or 48 ports

• Connection setup and status monitor on the front panel

• Status display on the LED matrix display

• Connection setup by the Light pen

• Automatic control through GPIB interface

• Auto ground function

• Self-test, relay function test

• Relay cleaning

Agilent B2200 User’s Guide, Edition 2 1-3

Introduction Front Panel

Front Panel

The Agilent B2200 series provides the front panel keys, the LCD, and the LED matrix display for the status monitor and connection setup.

• Line switch Used to turn the Agilent B2200 on or off.

•LCD Used to monitor the status and set the connection. See Chapter 3 for the details.

• Front panel keys Used to set the Agilent B2200. See Chapter 3 for the details.

• LED matrix display Displays the status of the matrix switches. Also used to set the matrix connection

with the light pen.

• SMU Input Inputs for the source monitor unit (SMU). Eight input ports. Up to four kelvin

inputs are available. Triaxial BNC connector.

• AUX Input Multipurpose inputs. Six input ports. Coaxial BNC connector. CMH and CML

terminals are the input ports for the capacitance measurement. The input port 12 (AUX Input 12 ) i s the d efaul t gro un d input port. If you assign

the port as the ground input port, this ground port will be internally connected to the ground when the ground mode is s et to O N. In t h is cas e, op en t his conn ect or.

•Light Pen Connector for the Agilent 16443A Light pen. Used to set the matrix connection

with the LED matrix display.

CAUTION For the SMU Input terminals, the maximum measurement voltage/current/voltage

between terminals are ±200 V/1 A/300 V, respectively. And for the AUX Input terminals, they are ±100 V/0.5 A/100 V.

Do not apply an input signal over these limits to the input terminals. If you do, the Agilent B2200 will be damaged. If you use a bias source that has current limit capability, set the bias source current limit.

1-4 Agilent B2200 User’s Guide, Edition 2

Figure 1-1 Front Pane l View

Introduction Front Panel

Agilent B2200 User’s Guide, Edition 2 1-5

Introduction Rear Panel

Rear Panel

The Agilent B2200 series has four card slots for the switch modules, the GPIB interface and so on.

• Card slots For the Agilent B2200A mainframe, the Agilent B2210A cards are installed. For the Agilent B2201A mainframe, the Agilent B2211A cards are installed. Mixed configuration of the switch modules is not supported.

• GPIB interface Use an Agilent 82357A USB/GPIB interface or Agilent 10833A/B/C/D GPIB

cable to connect to an external computer or equipment.

• Serial number You need this serial number when using the Agilent Technologies telephone

assistance program.

• LINE input receptacle AC power cable is connected to this receptacle.

1-6 Agilent B2200 User’s Guide, Edition 2

Figure 1-2 Rear Panel View

Introduction

Rear Panel

Agilent B2200 User’s Guide, Edition 2 1-7

Introduction Switch Modules

Switch Modules

The Agilent B2200A and B2201A support the dedicated switch module, Agilent B2210A and B2211A, respectively.

By installing the modules, the module inputs will be connected internally to the front panel input connectors. And 12 output connectors will face the rear panel. The type of the output connectors is the triaxial BNC. Up to six kelvin outputs are available.

Image of the output terminals and the block diagram of the switch module are shown in Figure 1-3 and Figure 1-4.

Figure 1-3 Switch Module Output Terminals

WARNING Do not touch the force and guard terminals of the output connectors while the

Agilent B2200 is turned on. Dangerous voltages up to the maximum input voltage may be present at the output connectors.

NOTE Mixed configuration of the switch modules is not supported.

1-8 Agilent B2200 User’s Guide, Edition 2

Figure 1-4 Switch Module B lock Diagram

Introduction

Switch Modules

Input

3 4

7 8

9 10

Output

2345

678

10 11 12

12 13 CMH 14 CML

Agilent B2200 User’s Guide, Edition 2 1-9

Introduction Specifications

Specifications

This section lists specifications and supplemental information for the Agilent B2200 series.

• “General Specifications”

• “Switch Modules”

• “Supplemental Informati on for B22 00 A/B 221 0A”

• “Supplemental Informati on for B22 01 A/B 2211A”

The specifications are the performance standards or limits against which these u nits have been tested. The supplemental information is not warranted, but provides useful information ab out functions and performance.

If not noted otherwise, the conditions for specifications and supplemental information are as follows:

T e mp erature: 23 °C ± 5 °C Humidity: 5 % to 60 % R.H.

1-10 Agilent B2200 User’s Guide, Edition 2

General Specifications

Introduction

Specifications

Temperature range:

Humidity range: Operating: 5 % to 70 % R.H., non-condensing

Altitude: Operating: 0 to 2,000 m (6,500 ft)

Regulatory compliance:

Power requirement:

Number of slots: 4 slots for 48 mm height switch module Dimensions: B2200A/B2201A: 430 mm W × 320 mm H × 600 mm D

Weight: B2200A/B2201A: appr oximat el y 14.0 kg

Operating: 5 °C to 35 °C Storage: − 20 °C to 70 °C

Storage: < 80 % R.H. at 35 °C, < 60 % R.H. at 65 °C, non-condensing (B2200A/B2210A)

< 80 % R.H. at 65 °C, non-condensing (B2201A/B2211A)

Storage: 0 to 15 ,240 m (50,000 ft) Safety: CSA C22.2 No. 1010.1/IEC 1010-1

EMC: CISPR 11 Group 1 class A&EN50082-1

90 to 264 V (continuous), 47 to 63 Hz, 2 A/200 VA maximum

B2210A/B2211A: 395 mm W × 48 mm H × 500 mm D

B2210A: approximately 5.0 kg B2211A: approximately 3.5 kg

Number of ports: SMU input: 8 triaxial ports (with Guard)

AUX input: 6 coaxial ports (two ports for capacitance measurement) Output: 12 triaxial ports (with Guard), maximum 48 ports

Agilent B2200 User’s Guide, Edition 2 1-11

Introduction Specifications

Switch Modules

Table 1-1 lists the specifications when the switch module is installed in the mainframe. In the table, the conditions are as follows:

Conditions: 23 °C ± 5 °C, 5 % to 60 % R.H.

Table 1-1 Agilent B2210A/B2211A Switch Module Specifications

B2210A B2211A

Max. current rating (A)

SMU input 1.0 1.0 AUX input 0.5 0.5

Max. voltage rating (V)

SMU input, channel to common 200 200 SMU input, channel to channel 300 300 AUX input, channel to common 100 100 AUX input, channel to channel 100 100

Closed channel residual resistance (Ω)

SMU input 0.6 0.6 AUX input 1.5 1.5

Channel isolation resistance (Ω)

SMU input

AUX input

5 × 10

The Agilent B2200A mainframe supports the Agilent B2210A module. The Agilent B2201A mainframe supports the Agilent B2211A module. Mixed configuration of the switch modules is not supported.

1-12 Agilent B2200 User’s Guide, Edition 2

Specifications

Supplemental Information for B2200A/B2210A

Offset current 1 < 10 fA (typical 3 fA) (SMU input) IM noise (RMS) Channel crosstalk capacitance < 1 pF/channel (SMU input)

Offset voltage < 50 µV (SMU input)

Settling time Bandwidth (at -3dB) 30 MHz (SMU input) Guard capacitance Additional C measurement error

0.6 fA (SMU input)

< 3 pF/channel (AUX input)

< 80 µV (AUX input)

2.0 seconds

< 145 pF (SMU input)

< ± 1 % + 0.2 pF (SMU input)

Introduction

1. When the voltage applied to all input-output channels is 0 V.

2. Measured by the Agilent 4156C with the integration time setting 100 PL C. When the voltage applied to all other input-output paths is 0 V.

3. The time until the measurement value settles to within 50 fA of the final value. When the applie d voltage is 10 V.

4. When four modules have been installed in the mainframe. And when only one input-output path is made.

5. For the measurement less than 1000 pF at the frequency 1 kHz to 1 MHz, using the Agilent 4284A with 3 m cable. After the compensation using the capacitance compensation algorithm (a function of VXIplug&play driver).

Agilent B2200 User’s Guide, Edition 2 1-13

Introduction Specifications

Supplemental Information for B2201A/B2211A

Offset current 1 < 50 fA (SMU input) IM noise (RMS) Channel crosstalk capacitance < 0.5 pF/channel (SMU input)

Offset voltage < 80 µV (SMU input)

Settling time Bandwidth (at -3dB) 30 MHz (SMU input) Guard capacitance Additional C measurement error

5 fA (SMU input)

< 3 pF/channel (AUX input)

< 100 µV (AUX input)

2.0 seconds

< 145 pF (SMU input)

< ± 1 % + 0.2 pF (SMU input)

1. When the voltage applied to all input-output paths is 0 V.

2. Measured by the Agilent 4156C with the integration time setting 100 PLC. When the voltage applied to all other input-output paths is 0 V.

3. The time until the measurement value settles to within 300 fA of the final value. When the applie d voltage is 10 V.

4. When four modules have been installed in the mainframe. And when only one input-output path is made.

1-14 Agilent B2200 User’s Guide, Edition 2

Introduction

Accessories and Options

Agilent B2200 is furnished with the following accessories.

• Power cable, 1 ea.

• Operation summary sheet, 1 ea.

• Manual CD-ROM, 1 ea.

• Software CD-ROM, 1 ea. Stores the Agilent B2200 VXIplug&play driver. The Agilent B2200 VXIplug&play driver supports Windows XP Professional,

Windows 2000, Windows NT 4.0, Windows 98, and Windows 95.

• Moisture-proof and dehumidifying packing kit, 1 set

Table 1-2 lists the options and accessories available for the Agilent B2200.

Agilent B2200 User’s Guide, Edition 2 1-15

Introduction Accessories and Options

Table 1-2 Options and Accessories

Model

Number

B2200A fA Leakage Switch Mainframe

B2201A 14ch Low Leakage Switch Mainframe

B2210A fA Leakage Switch Module (for B2200A) B2211A 14ch Low Leakage Switch Module (for B2201A)

16443A Light pen 16493H GNDU cable (between 41501/4142 and 16495F/G)

16493J Interlock cable

16493K Kelvin triaxial cable

16493L GNDU cable (between E5260/E5270 and 16495F/G)

16493N GNDU cable for Kelvin connection

Option Item Description

B2200A-UK6 Commercial cal. certificate w/ test data

B2200A-ABA Manual set, English

B2200A-ABJ Manual set, Japanese

B2201A-UK6 Commercial cal. certificate w/ test data

B2201A-ABA Manual set, English

B2201A-ABJ Manual set, Japanese

16493H-001 1.5 m length 16493H-002 3 m length

(between E5260/E5270/4155/4156 and 16495F/G) 16493J-001 1.5 m length 16493J-002 3 m length 16493J-003 5 m length

(between B2200 inputs and E5260/E5270/4156/41501)

16493K-001 1.5 m length 16493K-002 3 m length

16493L-001 1.5 m length 16493L-002 3 m length 16493L-003 5 m length

(between B2200 inputs and E5260/E5270/41501/4142)

1-16 Agilent B2200 User’s Guide, Edition 2

Introduction

Accessories and Options

Model

Number

16494A Triaxial cable

16494B Kelvin tria xial cable

16494C Kelvin tria xial cable

16494F CMU Input cable, 2 m

16495E Half size blank plate

16495F Half size connector plate with 12×triaxial, intlk, GNDU

16495G Full size connector plate with 24×triaxial, intlk, GNDU

Option Item Description

16494A-001 1.5 m length 16494A-002 3 m length 16494A-003 80 cm length 16494A-005 4 m length

(between B2200 inputs and 4142B, between B2210/B2211

outputs and 16495F/G) 16494B-001 1.5 m length 16494B-002 3 m length 16494B-003 80 cm length

(between B2210/B2211 outputs and B2220A) 16494C-001 1.5 m length 16494C-002 3 m length 16494C-005 4 m length

(between B2200 CMH/CML and 4-terminal pairs connectors)

16495F-001 Bulkhead feedthrough connectors (female to female) 16495F-002 Connectors to contacts for soldering

16495G-001 Bulkhead feedthrough connectors (female to female) 16495G-002 Connectors to contacts for soldering

Agilent B2200 User’s Guide, Edition 2 1-17

Introduction Accessories and Options

1-18 Agilent B2200 User’s Guide, Edition 2

2 Installation

Installation

This chapter describes requirements to install Agilent B2200 and the tasks for installation, and is organized into the following three sections:

• “Requirements”

• “Inspection”

• “Installing the B2200”

• “Self-Test”

• “Output Connections”

• “Input Connections”

• “Measurement Cable Length”

• “Maintenance”

WARNING The maximum input voltage of the Agilent B2200 is ±200 V. And dangerous

voltages may be present at the output terminals. To prevent electric shock, you must observe the following safety precautions when using the Agilent B2200.

• Use a three-conductor ac power cable to connect cabinet (if used) and the Agilent B2200 to an electric ground (safety ground).

• If you need to touch the force and guard terminals of the output connector, turn off the Agilent B2200 and discharge any capacitors whenever possible.

• Warn workers around the B2200 about dangerous conditions.

2-2 Agilent B2200 User’s Guide, Edition 2

Installation

Requirements

This section describes the following requirements for the Agilent B2200.

• “Power Requirements”

•“Power Cable”

• “Operating Environment”

• “Storage and Shipping Environment”

Power Requirements

CAUTION Before applying ac line power to the Agilent B2200, ensure that the correct power

cable is used.

The Agilent B2200 can operate f rom any sin gle-phase ac power sour ce supplyi ng 90 to 264 V in the frequency range from 47 to 63 Hz. The maximum power consumption is 2 A/200 VA.

Power Cable

In accordance with international safety standards, this instrument is equipped with a three-wire power cable. When connected to an appropriate ac power outlet, this cable grounds the instrument frame. The type of power cable shipped with each instrument depends on the country of destination. See the following table for the part numbers of the power cables available.

If the plug on the cable does not fit the power outlet, or the cable is to be attached to a terminal block, cut the cable at the plug end and re-wire it. This work should be performed by a qualified electrician all local electrical codes being strictly observ ed.

The color coding used in the cable will depend on the cable supplied. If a new plug is to be connected, it must meet local safety requirements and include the following features:

• Adequate load-carrying capacity.

• Ground connection.

• Cable clamp.

Agilent B2200 User’s Guide, Edition 2 2-3

Installation Requirements

• Plug: BS 1363/A, 250 V, 10 A

• Cabl e : 8120-4420, 8120-1351

• Plug: NEMA 6-15P, 250 V, 10 A

• Cabl e : 8120-3996, 8120-0698

• Plug: JIS C 8303, 125 V, 12 A

• Cabl e : 8121-0743, 8120-4753

• Plug: AS 3112, 250 V , 10 A

• Cable: 8120-4419, 8120-1369

• Plug: SEV 1011, 250 V, 1 0 A

• Cable: 8120-2104

• Plug: Israel SI 32, 250 V, 1 0 A

• Cable: 8120-5182

• Plug: CEE 7 sheet VII, 250 V, 10 A

• Cable: 8120-4519, 8120-1689

• Plug: SR 107-2-D1, 250 V, 10 A

• Cable: 8120-2956

• Plug: IRAM 207310A, 250 V, 10 A

• Cable: 8120-6870

• Plug: NEMA 5-15P, 125 V, 10 A

• Cable: 8120-6825, 8120-1378, 8120-1395

• Plug: IS 1293 and IS 6538, 250 V, 10 A

• Cable: 8121-1582, 8120-4211

• Plug : CEI 23-16, 250 V, 10 A

• Cable: 8120-6978

• Plug: GB 1002 figure 3 , 250 V, 10 A

• Cabl e : 8120-8376

• Plug : CS 0017:2003, 250 V, 10 A

• Cable: 8120-8871, 8120-0674, 8121-1638

• Plug: SANS 164-1, 250 V, 10 A

• Cable: 8121-0564, 8120-4211

• Plug: CNS 10917-2, 125 V, 10 A

• Cable: 8121-1635, 8120-6825

2-4 Agilent B2200 User’s Guide, Edition 2

Installation

Requirements

WARNING For protection from electrical shock, the power cable ground must not be

defeated.

Operating Environment

The Agilent B2200 must be operated within the following environmental conditions:

• T emp e rature: 5 °C to 35 °C

• Humidity: 5 % to 70 % R.H., non-condensing

• Altitude: 0 m to 2,000 m

Storage and Shipping Environment

The Agilent B2200 should be stored or shipped in environments within the following limits:

• Temperature: -20 °C to 70 °C

•Humidity: B2200A/B2210A:

< 80 % R.H. (at 35 °C), < 60 % R.H. (at 65 °C), non-condensing B2201A/B2211A:

< 80 % R.H. (at 65 °C), non-condensing

• Altitude: 0 m to 15,240 m

CAUTION When storing the Agilent B2200

Protect the Agilent B2200 from temperature extremes to prevent condensation from forming inside the Agilent B2200. If condensation occurs, the Agilent B2200 may damage or may not satisfy the specifications. If the Agilent B2200 was placed at the high temperature and high humi dity environment long ti me, the Agile nt B2200 may degrade its performance.

NOTE When shipping the Agilent B2200

The Agilent B2200 must be packed in the certain packing materials for protection from damage when it is shipped. Cover the Agilent B2200 by using the moisture-proof and dehumidifying packing material (furnished), and pack it by using packing materials such as carton box and cushioning materials.

Agilent B2200 User’s Guide, Edition 2 2-5

Installation Inspection

Inspection

CAUTION Before Opening Packing Materials

The Agilent B2200 contains the condensation sensitive electronic parts. The condensation will have a negative impact on the Ag ilent B2200 to operate no rmally.

Do not open the packing materials, and leave the Agilent B2200 to acclimate it to the installation environment (temperature and humidity). If it is opened without enough acclimation, the Agilent B2200 may damage.

When you op en the box tha t contains t he Agilent B2200, check the following:

1. Before unpacking any components, inspect all boxes for any signs of damage that might have occurred during shipment such as:

•Dents

• Scratches

•Cuts

• Water marks

2. When you open the boxes that contain the Agilent B2200, check the components against the contents lists that are attached to the boxes.

If anything is wrong, notify your local Agilent Technologies sales office.

2-6 Agilent B2200 User’s Guide, Edition 2

Installation

Installing the B2200

This section describes how to install the Agilent B2200.

1. See “Requirements” on page 2-3, and determine the installation location.

2. Unpack the Agilent B2200 and place it at the installation site.

3. Plug the power cable into the Line input receptacle at the rear panel.

4. Plug the power cable into the power receptacle.

5. Perform the self-test. See “Self-Test” on page 2-10.

6. If you control the Agilent B2200 by using an external computer: Set the GPIB address. See “To Set the GPIB Address” on page 2-8 and “To

Connect the GPIB Cable” on page 2-8.

7. If you have to add or replace the switch module: Turn the Agilent B2200 off, remove the power cable, and install the switch

module. See “To Install the Switch Module” on page 2-9 and “To Install the Blank Panel” on page 2-9.

NOTE Plug-in module is shipped from the factory after the specifications are confirmed.

Agilent can guarantee that the modules will function and that the module performance is designed to meet its speci ficat ion s. However, if you have any trouble, contact your nearest Agilent Technologies service center.

If you require that the modules be guaranteed to their specifications (for ISO compliance, etc.), then you must perform a calibration on the instrument (modules and mainframe together). For calibration, contact your nearest Agilent Technologies service center.

Agilent B2200 User’s Guide, Edition 2 2-7

Installation Installing the B2200

To Set the GPIB Address

Every device on the GPIB bus must have a unique address. If you need to change the GPIB address, turn the Agilent B2200 on and perform the following procedure. The new GPIB address is recognized only at power on. The Agilent B2200 leaves the factory with the GPIB address set to 22.

1. Press the

2. Move the cursor to CONFIG, then press the

3. Move the cursor to ADDRESS, then press the

Menu key.

Enter key.

Enter key. The f ollowing message

will appear on the LCD. XX will be 0 to 30. GPIB Address = XX

4. Press the arrow key (up or down) to specify the desired GPIB address, then pr ess the

Enter key.

5. Press the

Enter key twice.

6. Turn the Agilent B2200 off, and then turn it on again.

To Connect the GPIB Cable

To connect the instrument with a computer or peripheral device via GPIB (IEEE Std. 488), connect an GPIB cable between the GPIB connector on the instrument rear panel and the GPIB connector on the peripheral device.

Including the controller, a total of 15 GPIB interfaces can be connected on the same GPIB bus. The following are rules for connecting GPIB interfaces:

• If total number of interfaces ≤ 10: Max. total cable length = number of interfaces × 2 m.

• If total number of interfaces > 10: Max. total cable length = 20 m.

• Maximum cable length between interfaces is 4 m.

• Star connection and cascade connection are allowed. Loop connection is not allowed.

2-8 Agilent B2200 User’s Guide, Edition 2

Installation

Installing the B2200

To Install the Switch Module

WARNING To prevent electrical shock, turn off the mainframe and remove the power

cable before starting the instruction.

CAUTION Be careful about the mo dul e pins u sed f or internal connection to the Agilent B2200.

The pins can be damaged easily. Use clean handling and anti-static procedures when removing, configuring, and

installing the switch modules. The modules contain components that can be damaged by static electricity.

The following procedure explains the module installation and removal.

1. Turn off the Agilent B2200, then wait at least 10 seconds before you remove or install a module.

2. Loosen the screws on both the left and right edges of a blank panel or a module attached to the slot you want to install a new module.

3. Remove the blank panel or the module.

4. Align the new module with the left and right slot guide rails. Then the component side should be facing up.

5. Push the module into the slot until you feel it seat firmly into the connector at the back of the slot.

6. Screw in the screws on the left and right edges of the module.

7. Execute the self-test and the relay test. See “Self-Test” on page 2-10.

To Install the Blank Panel

CAUTION To prevent thermal damage to th e module, be sure that blank panels are installed in

all unused slots.

If the blank panel is not installed to cover an unused slot, install the blank panel as follows:

1. Align the blank panel over the unused slot.

2. Screw in the screws on the left and right edges of the blank panel.

Agilent B2200 User’s Guide, Edition 2 2-9

Installation Self-Test

Self-Test

NOTE To confirm the specifications

The self-test and diagnostics checks the operation of the mainframe and the modules. However they cannot confirm if the Agilent B2200 satisfies its specifications.

For verifying the specifications, contact your nearest Agilent Technologies Service Center. Trained service personnel will perform calibration (performance verification).

It is recommended to perform calibration once a year at least.

The following procedure performs the self-test and diagnostics.

1. Turn on the Agilent B2200. The controller test will be performed. If the Agilent B2200 fails the test, contact

your nearest Agilent Technologies Service Center.

2. Press the

Shift key and the Menu key in this order. Self-test menu will appear on

the LCD.

SELF_TEST Controller test RELAY_TEST Relay te st KEY Front panel interface test BEEPER Beeper test LED LED matrix test PEN Light pen test GPIB GPIB test

3. Move the cursor to the test item to perform, then press

4. To start the test, move the cursor to EXECUTE, then press T o display the previous test result, move the cursor to RESULT, then press

Enter key.

Enter

key. For the details of each test, see “Selftest Menu” on page 3-34.

2-10 Agilent B2200 User’s Guide, Edition 2

Installation

Output Connections

This section describes how to connect the Agilent B2200 outputs to prober, connector plate, test fixture, and so on (DUT interface).

• “Output Connectors”

• “Connector Plates”

• “To Make Connections to DUT Interface”

• “To Make Interlock Circuit”

• “To Mount Connectors”

NOTE Output Connections

If you do not use the connector plate for the connection between the output and the DUT interface, see “To Mount Connectors” on page 2-18.

WARNING Turn off the Agilent B2200 and all instruments connected. And do not turn

them on until the connection described in this section is completed. If you ignore this warning, you may be exposed to dan gerous voltage.

Output Connectors

The Agilent B2200 output connectors are the triaxial BNC connector. The input signals appears at the output as shown in Figure 2-1 when input-output switching path is made. Figure 2-1 shows signals appear on the output connectors with non-Kelvin connection. If you make Kelvin connection, the signal of the even output connectors is Sense, not Force.

Figure 2-1 Output Connector and Out pu t Si gn al

Signal (force)

GUARD

(a) When SMU is connected

Agilent B2200 User’s Guide, Edition 2 2-11

GND

Signal (force)

GND

(b) When AUX is connected

Installation Output Connections

Connector Plates

Connector plates (Table 2-2) are used for the conn ection between the Agile nt B2200 outputs and the DUT interface (prober and so on). To connect to the connector plate, use the cable shown in Table 2-3.

Table 2-2 Connector Plate

Agilent Model No. Description

16495F Half size connector plate

16495F-001 has 12 triaxial thro ugh connectors (female to female), an Intlk connector, and a GNDU connector (triaxial through, female to female). The back of the Intlk connector is designed for soldering.

16495F-002 has 12 triaxial connectors, an Intlk connector, and a GNDU connector. The back of each connector is designed for soldering.

16495G Full size connector plate

16495G-001 has 24 triaxial through connectors (female to female), an Intlk connector, and a GNDU connector (triaxial through, female to female). The back of the Intlk connector is designed for soldering.

16495G-002 has 24 triaxial connectors, an Intlk connector, and a GNDU connector. The back of each connector is designed for soldering.

16495E Blank plate

This plat e is used to c over openings when you made too big openings for mounting the connector plate. You will use this plate to cover openings if you mount the half size connector plate in openings made for the full size connector plate.

Table 2-3 Output Cable

Agilent Model No. Description

16494A Triaxial cable (for non-Kelvin connection) 16494B Kelvin Triaxial cable (for Kelvin connection)

NOTE Installing Connector Plate

To install the connector plate, refer to Agilent 16495 Installatio n Guide.

2-12 Agilent B2200 User’s Guide, Edition 2

Installation

Output Connections

For Kelvin connection, use Kelvin triaxial cable listed in Table 2-3. To make a Kelvin output port (1, 3, 5, 7, 9 and 11), couple two E5252A output po rt s as fo l lo ws:

Kelvin Output Port Output Port Number

1 1 (Force) and 2 (Sense) 3 3 (Force) and 4 (Sense) 5 5 (Force) and 6 (Sense) 7 7 (Force) and 8 (Sense) 9 9 (Force) and 10 (Sense)

11 11 (Force) and 12 (Sense)

To Make Connections to DUT Interface

This section describes for the connections between the DUT interface and the connectors connected to the Agilent B2200 output cables. See Table 2-4.

NOTE Low-Noise Coaxial Cable

For the extended measurement paths over the connector plate, use low-noise coaxial cable (Agilent part number 8121-1191). This cable can maximize the guard effects and minimize the impression of the external noise.

Figure 2-2 shows the cutting example of this cable. Key point is the isolation between the conductive layer and the center conductor. So, cut and trim the end of the cable as shown in this figure by using a cutter and so on.

Figure 2-2 Coaxial Cable Cutting Example

Cover here using sleeve

Insulator (black)

Outer conductor (for Guard signal)

Conductive layer (black)

Agilent B2200 User’s Guide, Edition 2 2-13

min 2 mm

Center conductor (for Force/Sense signal)

approx. 10 to 15 mm

Insulator (clear)

Installation

Output Connections

Table 2-4 Connection to the DUT Interface

Kelvin connections non-Kelvin connections This connection is available only for the

Kelvin connectors. This connection can cancel effects of cable

resistance by connect sense line and force line as close as possible to DUT terminal.

Common

Guard

Force

Triaxial connector

Common

Guard

Insulator

Plate

Coaxial cable

Sense

to DU

Following connection is for the Kelvin connectors. For the triaxial connectors, ignore SENSE terminal, and make connection only for FORCE terminal. Measurement data will include residual resistance from the connection cable.

Common

Guard

Force

Triaxial connector

Common

Guard

Sense

Insulator

Plate

Coaxial cable

Wi re

to DU

CAUTION Never connect the guard terminal to any output, including circuit common, chassis

ground, or the guard terminal of any other unit. Doing so may result in an emergency condition.

For highly accurate current forcing and measurements while minimizing leakage, surround all force and sense lines from SMU by a guard as far as possi ble, and make cables stable by taping.

For reducing capacitance measurement error, tape the cables to any grounded materials such as sh ielding box . If you use probe card, ground ing the p robe card al so reduces capacitance measurement error.

2-14 Agilent B2200 User’s Guide, Edition 2

To Make Interlock Circuit

The interlock circuit is to prevent electric shock when touching measurement terminals. You must install an interlock circuit on shielding box to prevent dangerous voltages when door of the shielding box is open.

Figure 2-3 shows the pin assignments of the interlock connector.

Figure 2-3 Interlock Connector Pin Assignments

Installation

Output Connections

WARNING Dangerous voltages of up to the maximum voltage of SMUs may be present at

force, guard, and sense terminals when the interlock terminals are shorted.

To Install Interlock Circuit

Install the interlock circuit as follows.

1. Mount two mechanical switches on your shielding box, so that the switches close when the door of the shielding box is closed, and open when the door is opened. For the recommended parts and the dimensio ns of the switch, see Figure 2-4 and Figure 2-5.

2. Use wire to connect the two switches in series between pin number 1 and 2 (or

3) of the interlock co nnector. See Figure 2-3.

For example, Agilent 4155/4156 is connected to the interlock circuit, it cannot force more than ±40 V when the doo r is open. When door is closed, it can force more than ±40 V.

Agilent B2200 User’s Guide, Edition 2 2-15

Installation Output Connections

Figure 2-4 Dimensions of Interlock Switch (Agilent part number 3101-0302)

2.8

Max 9

Switch off

15.2

Switch on

Units: mm

UGI01011,85x60

4.3

10.3

2.8

59.4

2.8

8.1

2.8

COM

37.8

3.1

10.3

22.2

27.8

4.75

6.35

3.1

5.5

15.9

6.5

Figure 2-5 Dimensions of Interlock Switch (Agilent part number 3101-3241)

10.2 4.3

27.5

3.2

Switch off Switch on

2.0

10.9

3.1

15.9

18.8

3.4

Units: mm

UGI01012,85x60

27.8 6.8

To Install LED Circuit

To install LED circuit on your shield in g box, do followin g:

1. Mount LED on your shielding box. For the recommended parts and the dimensions of the LED, see Figure 2-6.

2. Use wire to connect the LED between pin 4 and pin 5 (or 6) of the interlock connector. See Figure 2-3.

2-16 Agilent B2200 User’s Guide, Edition 2

The 4155/4156 semiconductor parameter analyzer's Intlk connector provides the interlock signal and a LED drive signal. If a LED is connected between pin 4 and pin 5 (or 6) of the interlock connector, the LED lights to indicate high voltage output when more than ±40 V is forced from an SMU in the 4155/4156.

Figure 2-6 Dimensions of LED (Agilent part number 1450-0641)

Installation

Output Connections

5.6

Units: mm

Cathode(-)

Anode(+)

To Connect Interlock Circuit to Instrument

Before beginning the measurement, connect the interlock circuit to the instrument’s interlock connector as follows.

• For the instruments which has a BNC-Type interlock connector:

1. Get the following parts.

• Agilent 16493J Interlock cable, 1 ea.

• Agilent 16435A Interlock cable adapter, 1 ea.

2. Connect the 16493J interlock cable between the interlock circuit and the 16435A adapter.

3. Connect the BNC cable (furnished with the adapter) between the ad apter and the instrument’s interlock connector.

• For Agilent 4155/4156/E5260/E5270: Connect the 16493J interlock cable between the interlock circuit and the

instrument’s interlock connector. You can connect it directly without using any adapter.

Agilent B2200 User’s Guide, Edition 2 2-17

Installation Output Connections

NOTE To Check Interlock Circuit

If you use the 4155/4156, you can easily check the interlock circuit as follows:

1. Connect the Intlk connector of the 4155/4156 to your interlock circuit.

2. Press

3. In the CALIB/DIAG field, select DIAG secondary softkey.

4. In the CATEGORY field, select I/O PERIPH secondary softkey.

5. Move pointer to the 403 (INT.) Interlock LED field.

6. Select EXECUTE secondary softkey.

7. Confirm the following:

To stop the interlock test, select STOP secondary softkey.

System front-panel key, then select CALIB/DIAG primary softkey to

display the SYSTEM: SELF-CALIBRATION/DIAGNOSTICS page.

• LED turns on within 1 sec from when interlock circuit is shorted.

• LED turns off within 1 sec from when interlock circuit is open.

To Mount Connectors

This section provides the information needed to mount connectors for the Agilent B2200 output cable connections on the shielding panel. See this section if you do not use the connector plate.

1. Get the appropriate parts for your situation. Refer to Table 2-5.

2. Make holes and mount the connectors. Refer to Table 2-6. For kelvin connections, use the Kelvin cables. The Kelvin cable requires the

kelvin triaxial connector which has two connector holes and three screw holes.

3. Make an interlock circuit as shown in “To Make Interlock Circuit” on page 2-15.

4. Make cable connections to the DUT interface. Refer to “To Make Connections to DUT Interface” on page 2-13.

2-18 Agilent B2200 User’s Guide, Edition 2

Table 2-5 Recommended Parts

Description Agilent Part No.

Interlock Connector (6 pin, female) 1252-1419C Switch 3101-0302 or 3101-3241 LED (V

@ 2.1 V @ IF = 10 mA) 1450-0641

Wire 8150-5680 Triaxial Connector (female) 1250-2457 Low Noise Coaxial Cable 8121-1191

Table 2-6 Dimensions of Connector Holes

Triaxial Connector (in mm) Interlock Connector (in mm)

Installation

Output Connections

10.3

∅11.3

. 5

Kelvin Triaxial Connector (in mm)

14 11 11 14

10.3

2 − ∅11.3 ∅3.2 2 − M3 x 0.5

1.8

8.2

2.8

Agilent B2200 User’s Guide, Edition 2 2-19

Installation Input Connections

Input Connections

This section explains how to connect instruments to the Agilent B2200.

WARNING Turn off all instruments that will be connected to the Agilent B2200. And do

not turn them on until the connection described in this section is completed. If you ignore this warning, you may be expo sed to dangerous voltage.

The Agilent B2200 input connector has eight SMU input connectors and six AUX input connectors. Table 2-7 shows cables used to connect the instrument for typical applications using the Agilent B2200.

You can make the Kelvin connections when using the E5260/E5270/4142/4156 SMU or 41501 HPSMU. Then use cables as follows:

• Agilent 16493K Kelvin triaxial cable for Agilent E5260/E5270/4156/41501

• Agilent 16494B Kelvin triaxial cable for Agilent 4142B

To connect the Kelvin triaxial cable to the Agilen t B2200 input, use pairs (couple ports) of the SMU input connectors (1&2, 3&4, 5&6, or 7&8). The input signal for each Kelvin input is as follows:

• Odd input port number: Force

• Even input port number: Sense

Ground Unit (GNDU) can sink over 1 A. For the measurement over 1 A, connect the GNDU to the connector plate directly by using the Agilent 16493H GNDU cable.

If you never perform the measurement over 1 A, you can connect the GNDU to the Agilent B2200 inputs. Then use the Agilent 16493N GNDU cable. This cable requires the Kelvin connection.

CAUTION Make sure current to the GNDU is less than 1 A if you connect GNDU to the

Agilent B2200 inputs. The maximum input current of the Agilent B2200 is 1A.

2-20 Agilent B2200 User’s Guide, Edition 2

Table 2-7 B2200 Input Connections

Installation

Input Connections

Application

DC Measurement

Instrument

Agilent

Model No.

4155 MPSMU SMU1 to 8 16494A triaxial cable

4156 HRSMU SMU1 to 8 16493K Kelvin triaxial cable or

41501 HPSMU SMU1 to 8 16493K Kelvin triaxial cable or

4142B SMU SMU1 to 8 16494B Kelvin triaxial cable or

Output

Connector

VSU AUX1 to 6 BNC cable

VMU AUX1 to 6 BNC cable

Intlk − 16493J interlock cable

VSU AUX1 to 6 BNC cable

VMU AUX1 to 6 BNC cable

Intlk − 16493J interlock cable

MPSMU SMU1 to 8 16494A triaxial cable

PGU AUX1 to 6 BNC cable

GNDU SMU1 to 8 16493N GNDU Kelvin cable

VSU AUX1 to 6 BNC cable

VMU AUX1 to 6 BNC cable

GNDU SMU1 to 8 16493HN GNDU Kelvi n cable

Intlk − 16435A interlock cable adapter

B2200

Input

Connector

(for direct connection to connector plate)

16494A triaxial cable

(for direct connection to connector plate)

16494A triaxial cable

− 16493H GNDU cable (for direct connection to connector plate)

16494A triaxial cable

− 16493H GNDU cable (for direct connection to connector plate)

and 16493J interlock cable (for direct connection to Connector Plate)

Cable Required

Agilent B2200 User’s Guide, Edition 2 2-21

Installation Input Connections

Application

DC Measurement

C Measurement

Pulse Input Pulse

Bias Input Power

Agilent

Model No.

E5260/ E5270

C Meter High, Low CMH/CML 16494F CMU cable for 4 terminal pairs

Generator

Supply

Instrument

Output

Connector

SMU SMU1 to 8 16493K Kelvin triaxial cable or

GNDU SMU1 to 8 16493N GNDU Kelvin cable

Interlock − 16493J interlock cable

Output AUX1 to 6 BNC cable

In the table above,

• CMH/CML connectors are a pair of the AUX inputs.

• The Agilent B2200 does n ot have the interlock connect or. Connect directly from instrument to the connector plate which has an interlock connector.

B2200

Input

Connector

16494A triaxial cable

− 16493H GNDU cable (for direct connection to connector plate)

(for direct connection to connector plate)

Cable Required

• The Agilent 41422A/41423A (HCU/HVU) of the Agilent 4142B cannot be used with the Agilent B2200.

• To connect instrument output that uses banana pl ug to the AUX co nnecto r, use the dual banana plug to BNC adapter (Agilent part number 1251-2277).

2-22 Agilent B2200 User’s Guide, Edition 2

Installation

Measurement Cable Length

This section describes how to calculate the total guard capacitance when using an SMU (source monitor un it). W hen us ing an SMU, the length of measurement cables is limited by the guard capacitance of the cables. The guard capacitance means the capacitance between the signal line (Force or Sense) and the Guard line.

T ab le 2-8 lists the guard capacitance for each element of the Agilent B2200’s measurement environment.

When using the 4155/4156/4142B/E5260/E5270, the maximum limit of the guard capacitance is approximately 900 pF. So, you add the following and total must be less than 900 pF:

• Guard capacitance of cable from SMU to B2200 inputs.

• Guard capacitance of mainframe and modules.

• Guard capacitance of cable from B2200 outputs.

• Guard capacitance of cable from connector plate to DUT.

• Other capacitances, such as for probe card. The following is an example to calculate the guard capacitance of a measurement

environment:

Installed Plug-in card s: Four B2210As (145 pF + 8 pF × 3) Input Cable: 16494A-003 (75 pF) Output Cable: 16494A-001 (130 pF) Cable from Connector

Plate to DUT: 8121-1191, 1 m (130 pF) Probe Card: Guard Capacitance approximately 10 pF (example)

In this environment, the total guard capacitance (Cg-total) is as follows.

Cg-total = 145+(8×3)+75+130+130+10 pF = 514 pF < 900 pF

Even if you use other instruments, you can use the table for reference about the measurement cable length and capacitance.

Agilent B2200 User’s Guide, Edition 2 2-23

Installation Measurement Cable Length

Table 2-8 Guard Capacitances of B2200 Measurement Environment (Typical)

Connection Agilent Model/Part No.

from SMU to B2200 inputs

mainframe and modules

from B2200 outputs to connector plate or probe card interface

16494A-003 (for non-Kelvin) 80 cm 75 pF 16494A-001 (for non-Kelvin) 1.5 m 130 pF 16494B-003 (for Kelvin, 4142B) 80 cm 90 pF 16493K-001 (for Kelvin) 1.5 m 150 pF B2210A (only 1 card is installed) − 145 pF B2210A (more 1 card) − 8 pF/extra card B2211A (only 1 card is installed) − 145 pF B2211A (more 1 card) − 8 pF/extra card 16494A-001 (for non-Kelvin) 1.5 m 130 pF 16494A-002 (for non-Kelvin) 3 m 240 pF 16494A-003 (for non-Kelvin) 4 m 340 pF 16494B/C-001 (for Kelvin) 1.5 m 140 pF 16494B/C-002 (for Kelvin) 3 m 260 pF

Cable

Length

Guard

Capacitance

16494C-003 (for Kelvin) 4 m 340 pF

from connector plate to DUT

probe card interface B2220A − 70 pF

Agilent Part No. 8121-1191 X m 130 pF per m

2-24 Agilent B2200 User’s Guide, Edition 2

Installation

Maintenance

Maintenance should be performed periodically to keep t he B2 200 i n g ood condition.

Calibration

Calibration must be performed periodically so that the instruments satisfy the specifications, and keep a good condition. It is recommended to perform a calibration once a year at least. For calibration, contact your nearest Agilent Technologies Service Center. Trained service personnel will perform calibration (performance verification).

Cleaning

Before performing cleaning, turn off the instrument, and disconnect power cable from the rear panel. Use a dry cloth to clean the external case parts.

To prevent electrical shock, do not perform cleaning when the instrument is turned on, and do not use a wet cloth.

Agilent B2200 User’s Guide, Edition 2 2-25

Installation Maintenance

2-26 Agilent B2200 User’s Guide, Edition 2

3 Front Panel Operation

Front Panel Operation

This chapter explains the front panel operation and the switch control functions of the Agilent B2200, also provides the reference information of the front panel keys and display.

• “Operation”

• “Switch Control Functions”

• “Display Functions”

• “Front Panel Keys”

• “Setup Menus”

3-2 Agilent B2200 User’s Guide, Edition 2

Operation

This section describes operations of the Agilent B2200.

• “To Initialize Agilent B22 00”

• “To Enable Light Pen”

• “To Change Channel Configuration Mode”

• “To Change Connection Rule”

• “To Change Connection Sequence”

• “To Control Switch Condition”

• “To Open All Switches”

• “To Save/Load Setup Data”

• “To Use Bias Mode”

• “To Use Ground Mode”

Front Panel Operation

Operation

• “To Use Couple Mode”

• “To Display Firmware Revision”

• “To Display Module Information”

• “To Read Error Message”

• “To Set Beeper”

• “To Set GPIB Ad dress”

• “To Set Remote Display Mode”

• “To Return to Local Mode”

NOTE About moving cursor, selecting value, and changing display

Use the right/left arrow key to move the cursor to the desired function name. Use the up/down arrow key to select the value for the setup item.

The

Enter key makes the setup effective, and returns the display to the previous

menu or displ ay. The

Exit key returns t he d ispla y to t he pr evi ou s menu or display without making the

setup effective.

Agilent B2200 User’s Guide, Edition 2 3-3

Front Panel Operation Operation

To Initialize Agilent B2200

1. Press the Shift key and the Local key. Then the LCD will display NO.

2. Press the arrow key to displays YES, then press the Agilent B2200, or press the

To Enable Light Pen

Turn the Agilent B2200 off, and connect the light pen to the Light Pen connector at the right down corner of the front panel. After that, perform the fo llowing pro cedure to enable the light pen.

1. Press the

2. Press the arrow key to move the cursor to PEN, then press the

3. Press the arrow key to display ENABLE, then press the light pen, or press the

NOTE Light Pen

You can control the Agilent B2200 functions and the switch connections by using the front panel keys. And the Agilent B2200 allows you to use the Agilent 16443A Light Pen to control the switch connections.

Pointing a LED on the LED matrix by using the light pen controls the setting of the switch specified by the LED.

To Change Channel Configuration Mode

Enter key to initialize the

Exit key to cancel initialization.

Menu key. The setup menu will be displayed on the LCD.

Enter key.

Enter key to enable the

Exit key to cancel changing the setup.

1. Press the Shift key and the Bias Mode key. The LCD displays the present setting (AUTO or NORMAL).

2. Press the arrow key to select the mode, then press the

Enter key. The LCD

displays NO.

3. Press the arrow key to display YES, then press the

Enter key. Or press the Exit

key to cancel this operation.

Changing the channel configuration mode resets the Agilent B2200.

3-4 Agilent B2200 User’s Guide, Edition 2

Front Panel Operation

Operation

To Change Connection Rule

1. Press the Rule key. The LCD displays the present setting (FREE or SINGLE).

2. Press the arrow key to select the connection rule, then press the press the

Exit key to cancel this operation.

Enter key. Or

To Change Connection Sequence

1. Press the Shift key and the Rule key. The LCD displays the present setting (Break_Before_Make, Make_Before_Break, or No_Sequence).

2. Press the arrow key to select the connection sequence, then press the Or press the

Exit key to cancel this operation.

Enter key.

To Control Switch Condition

If you use the light pen, you do not need the following instruction to control the switch condition.

1. If you are NOT watching the orange-blink-LED on the LED matrix, press the

Open/Close key. The blink-LED will appear.

2. Press the arrow keys to move the blink-point.

3. Press the The green-LEDs indicate the switches that are closed now.

4. Repeat 2 and 3 until the switch setup is completed. Blinking of LED will be stopped by pressing the front panel key other than the

Open/Close, Fast, or arrow keys.

Open/Close key to open/close the switch specified by the blink-LED.

NOTE When Kelvin cables are connected to Outputs

For the Kelvin outputs, the input-output paths must be controlled as shown below.

• For the input couple port: Control the switches to connect the input couple port to the Kelvin output.

• For the single input port: Control the switches to connect the input port to two ports of the Kelvin output.

If you do not comply with this note, leakage current between the Kelvin paths will cause measurement error.

Agilent B2200 User’s Guide, Edition 2 3-5

Front Panel Operation Operation

To Open All Switches

1. Press the Open All key.

2. Press the arrow key to display YES, then press the

NOTE Status after this operation

When the bias mode is ON, the bias-enabled output ports will be connected to the input bias port.

When the ground mode is ON, the ground-enabled input/output ports will be connected to the input ground port.

To Save/Load Setup Data

The Agilent B2200 provides the internal memory used to save the setup condition. Eight setup conditions can be saved into the memory.

To save the setup

1. Press the Shift key and the Load Memory key.

2. Press the arrow key to select the internal memory (01 to 08).

3. Press the operation.

Wait until the save operation is completed. Then, the LCD disp lay s th e statu s and setup conditions.

Enter key to save the setup. Or press the Exit key to cancel this

Enter key.

To load the setup

1. Press the Load Memory key.

2. Press the arrow key to select the internal memory (01 to 08).

3. Press the operation. Wait until the load operation is completed. Then, the LCD displays the status and setup conditions.

3-6 Agilent B2200 User’s Guide, Edition 2

Enter key to load the setup. Or press the Exit key to cancel this

Front Panel Operation

To Use Bias Mode

Bias mode cannot be set to ON when the ground mode is ON.

1. Change the bias-enabled output ports.

Operation

a. Press the b. Move the cursor to SET, then press the c. Move the cursor to DISABLE, then press the

Shift key and the Port Function key.

Enter key.

The LCD displays one of the bias-en abled output port numbers which can be changed to the bias-disabled. Or if there is no bias-enabled output port, the LCD displays Channel: No Channel. Press the arrow k ey to s elect the output port to be changed to the bias-disabled, then press the

d. Move the cursor to ENABLE, then press the

Enter key.

The LCD displays one of the bias-disabled output port numbers which can be changed to the bias-enabled. Or if there is no bias-disabled output ports, the LCD displays Channel: No Channel. Press the arrow key to select the output port to be changed to the bias-enabled, then press the

e. Repeat c and d until th e bias-enabled po rt setup is completed. After that,

press the

2. Press the

Exit key more than once to display the status and setup conditions.

Bias Mode key to set the bias mode ON. Pressing th e key aga in sets th e

mode OFF.

3. Change the bias port (default setting: 10). a. When the bias mode is ON, press the

Port Function key. The blink-cursor

appears on the first line of the LCD.

Enter key.

b. Press the right/left arrow key to move the cursor on the input port number

(01 to 14) that will be set to the input bias port.

c. Press the up/down key to display B, then press the

Enter key.

Agilent B2200 User’s Guide, Edition 2 3-7

Front Panel Operation Operation

To Use Ground Mode

Ground mode cannot be set to ON when the bias mode is ON.

1. Change t he ground-e nabled output ports. a. Press the

b. Move the cursor to SET, then press th e c. Move the cursor to ENABLE, then press the

Shift key and the Open All key.

Enter key.

The LCD displays one of the ground-disabled output port numbers which can be changed to the ground-enabled. Or if there is no ground-disabled output ports, the LCD displays Channel: No Channel. Press the arrow key to select the output port to be changed to the ground-enabled, then press

Enter key.

the

d. Move the cursor to DISABLE, then press the

Enter key.

The LCD displays one of the ground -enabled o utput por t numbers which can be changed to the ground-disabled. Or if there is no ground-enabled output port, the LCD displays Channel: No Channel. Press the arrow key to select the port to be changed to the ground-disabled, then press the

e. Repeat c and d until th e ground-enabled port set up is co mpleted. After that,

press the

2. Press the

Exit key more than once to display the status and setup conditions.

Shift key and the Couple Mode key to set the ground mode ON.

Performing this operation again sets the mode OFF.

3. Change the ground port (default setting: 12). a. When the ground mode is ON, press the

Port Function key. The blink-cursor

appears on the first line of the LCD.

Enter key.

b. Press the right/left arrow key to move the cursor on the input port number

(01 to 14) that will be set to the input ground port.

c. Press the up/down key to display G.

4. Change the ground-enabled input ports (multiple ports can be set). Repeat a and b for the all ground-enabled input ports, then press the

Enter key.

a. Press the right/left arrow key to move the cursor on the input port number

(01 to 08) that will be set to the ground-enabled input port. b. Press the up/down key to display -. Open the ground-enabled input ports to prevent the instrument from damage.

3-8 Agilent B2200 User’s Guide, Edition 2

Front Panel Operation

Operation

To Use Couple Mode

1. Press the Couple Mode key to set the couple mode ON. Pressing the key again sets the mode OFF.

2. Perform the input couple port detection. a. Press the

b. Move the cursor to SCAN, then press the c. Press the arrow key to display YES, then press the d. Press the

Menu key. The setup menu will be displayed on the LCD.

Enter key. The LCD displays NO.

Enter key.

Exit key.

3. Change the couple ports (multiple ports can be set). a. When the couple mode is ON, press the

Port Function key. The blink-cursor

appears on the first line of the LCD.

b. Press the right/left arrow key to move the cursor on the input port number

(01 to 14) that will be set to the input couple port. c. Press the up/down key to display C. d. Repeat b and c for the all couple ports, then press the

Enter key.

To Display Firmware Revision

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to CONFIG, then press the

3. Move the cursor to REVISION, then press the is displayed.

Enter key.

Enter key. The firmware revision

To Display Module Information

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to CONFIG, then press the

3. Move the cursor to UNIT, then press the displayed.

4. Press the arrow keys to display another module information item.

Agilent B2200 User’s Guide, Edition 2 3-9

Enter key.

Enter key. The module information is

Front Panel Operation Operation

To Read Error Message

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to ERROR, then press the

3. Move the cursor to DISPLAY, then press the

Enter key.

Enter key to display the message.

4. Press the arrow keys to read another error message. A maximum of four error messages can be stored.

To clear error buffer

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to ERROR, then press the

3. Move the cursor to CLEAR, then press the

4. Press the arrow key to display YES, then press the buffer, or press the

Exit key to cancel operation.

Enter key.

Enter key. The LCD displays NO.

Enter key to clear the error

To Set Beeper

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to BEEP, then press the

3. Press the arrow keys to select the beep ON or OFF.

4. Press the

Enter key to make the setup effective, or press the Exit key to cancel

changing the setup.

Enter key.

To Set GPIB Address

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to CONFIG, then press the

3. Move the cursor to ADDRESS, then press the

4. Press the arrow keys to set the GPIB address.

5. Press the

Enter key to make the setup effective, or press the Exit key to cancel

changing the setup. To be effective the new address, reboot the Agilent B2200.

3-10 Agilent B2200 User’s Guide, Edition 2

Enter key.

Front Panel Operation

Operation

To Set Remote Display Mode

This instruction enables or disables the data display in the GPIB remote condition. See “RMT_DSPL” on page 3-33.

LCD

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to RMT_DSPL, then press the

3. Move the cursor to LCD, then press the

Enter key.

4. Press the arrow keys to set the remote display mode ON or OFF.

5. Press the

Enter key to make the setup effective, or press the Exit key to cancel

changing the setup.

LED matrix

1. Press the Menu key. The setup menu will be displayed on the LCD.

2. Move the cursor to RMT_DSPL, then press the

3. Move the cursor to LED, then press the

Enter key.

4. Press the arrow keys to set the remote display mode ON or OFF.

5. Press the

Enter key to make the setup effective, or press the Exit key to cancel

changing the setup.

To Return to Local Mode

Press the Local key. If the front panel keys are locked, send the :SYST:KLC command from an external computer, then press the

Local key.

Agilent B2200 User’s Guide, Edition 2 3-11

Front Panel Operation Switch Control Functions

Switch Control Functions

This section introduces the switch control functions of the Agilent B2200.

• “Channel Configuration Mode”

• “Connection Rule”

• “Connection Sequence”

•“Bias Mode”

• “Ground Mode”

• “Couple Mode”

3-12 Agilent B2200 User’s Guide, Edition 2

Front Panel Operation

Switch Control Functions

Channel Configuration Mode

The Agilent B2200 provides the two channel configuration modes, Normal and Auto. The configuration mode defines the way to control multiple switch modules installed in the mainframe.

Normal Each module is considered independently. So each module is

always a 12 output switching matrix. The switch control functions need to be defined for each

module.

Auto Default mode at Power O n or *RST command.

To use this mode, the same type o f module m us t be installed in the mainframe from slot number 1 contin uousl y (slot s 1 to 2; or slots 1 to 3; or slots 1 to 4).

The installed modules are treated as one switching matrix. For example, if the modules are installed in slots 1 to 3, the Agilent B2200 works as a 36 output switching matrix.

The switch control functions are available for the switching matrix.

Agilent B2200 User’s Guide, Edition 2 3-13

Front Panel Operation Switch Control Functions

Connection Rule

Connection rule is used to specify if an input or output port can have multiple connections. For each module installed in the mainframe (for auto configuration mode, installed modules are treated as one module), you can specify one of the following connection rules:

Single: Each input port can be connected to only one output port, and

each output port can be connected to only one input port. So, existing connection to a port will be disconnected when a new connection is made.

If normal configuration mode is set to the Agilent B2200 with multiple modules, an input/output path is effective for each module. For example, if normal configuration mode is set to the Agilent B2200 with two modules, and single rule is set to both modules, the following connection is possible.

Input

Close Open

Module 1 Output

2 1233

Module 2 Output

Free: Each input port can be connected to multiple output ports, and

each output port can be connected to multiple input ports.

CAUTION If the Free connection rule has been specified, ensure multiple input ports are not

connected to the same output port. Such configuration s can cause damage.

3-14 Agilent B2200 User’s Guide, Edition 2

Front Panel Operation

Switch Control Functions

Connection Sequence

NOTE This is only for modules that are set to the single connection rule. Refer to

“Connection Rule” on page 3-14.

Connection sequence specifies the open/close sequence of the relays when changing from an existing connection to a new connection.

You can select one of the three connection sequences shown in Table 3-1 for each module installed in the Agilent B2200.

When an existing connection is changed to a new connection, the relays are opened/closed as follows:

Table 3-1 Connection Sequ ence

Connection

Sequence

Break Before Make 1. Disconnect previous route.

2. Wait for relays to open.

3. Connect new route.

Make Before Break 1. Connect new route.

2. Wait for relays to close.

3. Disconnect previous route.

No Sequence 1. Disconnect previous route.

2. Connect new route.

Relay Operation

Agilent B2200 User’s Guide, Edition 2 3-15

Front Panel Operation Switch Control Functions

Bias Mode

Bias mode is useful for connecting the same input to multiple channels (output ports) simultaneously. And the connections will be kept until the other input port connection will be changed.

When the bias mode is ON, the input bias port is connected to all bias enabled output ports that are not connected to any other input ports. You cannot directly control which output ports are connected to the input bias port:

• If another input port is disconnected from a bias enabled output port, the output port is automatically connected to the input bias port.

• If another input port is connected to a bias enabled output port, the output port is automatically disconnected from the input bias port.

• Bias disable d output ports are never connected to the input bias port when the bias mode is ON.

• You can independently set the bias port and control the bias mode for each module when the configuration mode is normal.

When the bias mode is OFF, the input bias port is th e same as the other input ports, so relays can be controlled directly to connect to output ports.

Figure 3-1 shows an example. Input 2 is the input bias port. When the bias mode is turned ON, all bias enabled output ports (that are not connected to oth er input po rts ) are connected to the input bias port. So, the output ports that are connected to input port 1 and 3 are not connected to the input bias port.

Figure 3-1 Example of Bias Mode

Input 01

Bias port

Output port

Input 02

Input 03

Input 14

Open

3-16 Agilent B2200 User’s Guide, Edition 2

Connects to bias port

Connects to input 01

Connects to input 03

Front Panel Operation

Switch Control Functions

NOTE Connection rule cannot be specified for the input bias port, which can always be

connected to multiple output ports. Connection sequence (to connect input bias port to output ports) is always

Break-Before-Make. Bias mode cannot be set to ON when the ground mode is ON. If the bias input port and a couple port have been assig ned to the same i nput port , the

bias mode and the couple mode cannot be used in parallel.

Agilent B2200 User’s Guide, Edition 2 3-17

Front Panel Operation Switch Control Functions

Ground Mode

Ground mode operation is similar to the bias mode operation. The ground mode is useful for connecting the same input to multiple channels (output ports) and the unused input ports simultaneously. And the connections will be kept until the other input port connection will be changed. The ground mode is especially useful for settling the potential of the unused input/output paths.

If you assign the input port 12 (AUX Input 12) as the ground port, open the input port 12. This ground port will be internally connected to the ground when the ground mode is set to ON.

When the ground mode is ON, the input ground port is connected to all ground enabled input ports (unused ports) and the ground enabled output ports that are not connected to any other input ports. You cannot directly control which output ports are connected to the input ground port:

• If another input port is disconnected from a ground enabled output port, the output port is automatically connected to the input ground port.

• If another input port is connected to a ground enabled output port, the output port is automatically disconnected from the input ground port.

• Ground d isa bled outpu t ports are never con nected to the inp ut ground p ort when the ground mode is ON.

• You can independently set the ground p ort and control the ground m ode for each module when the configuration mode is normal.

When the ground mode is OFF, the input ground port is the same as the other input ports, so relays can be controlled directly to connect to output ports.

NOTE Connection rule cannot be specified for the input ground port, which can always be

connected to multiple output ports. Connection sequence (to connect input ground port to output ports) is always

Break-Before-Make. Ground mode cannot be set to ON when the bias mode is ON. The input ground port and a ground enabled input port cannot be assigned to the

same input port. If the ground input port and a couple p ort have been assi gned to the s ame input port,

the ground mode and the couple mode cannot be used in parallel. If a ground enabled input port and a couple port have been assigned to the same

input port, the ground mode and the couple mode cannot be used in parallel.

3-18 Agilent B2200 User’s Guide, Edition 2

CAUTION Opening the ground enabled input ports

Open the ground enabled input ports (unused input ports). If any equipment is connected to the ground enabled input ports, turning the ground mode ON may cause damage in the equipment.

Front Panel Operation

Switch Control Functions

Agilent B2200 User’s Guide, Edition 2 3-19

Front Panel Operation Switch Control Functions

Couple Mode

Couple mode is useful for making the Kelv in connections. When the couple mode is ON, the input couple ports will be connected to the output couple ports. For the available couple ports, see Table 3-2.

• For the couple port connections, the odd/even number of the input port will be connected to the odd/even number of the o utput port respectively. Then the even number is always the odd number plus 1.

• You can independently specify the same or different couple ports and control the couple mode for each module when the configuration mode is normal.

Table 3-2 Input Couple Port Numbers and Output Couple Port Numbers

Available input couple port No.

1 SMU 1, 2 1 and 2, 3 and 4, . . . , 11 and 12 3SMU 3, 4 5SMU 5, 6 7SMU 7, 8

9 AUX 9, 10 11 AUX 11, 12 13 AUX 13, 14

For example, if you specify the SMU input 1 for the couple port and set the couple mode ON, the input 1 will be connected to an odd number of the output port and the input 2 will connected to the next number of the output port. And if you specify to connect the input 1 to the output 10, the input 1 will be con nected to the output 9 and the input 2 will be connected to the output 10.

NOTE If the bias input port and a couple port have been assig ned to the same i nput port , the

bias mode and the couple mode cannot be used in parallel. If the ground input port and a couple p ort have been assi gned to the s ame input port,

the ground mode and the couple mode cannot be used in parallel.

Input ports A v ailable output couple port No .

(for normal configuration mode) 1 and 2, 3 and 4, . . . , 47 and 48

(for auto configuration mode)

(CMH, CML)

If a ground enabled input port and a couple port have been assigned to the same input port, the ground mode and the couple mode cannot be used in parallel.

3-20 Agilent B2200 User’s Guide, Edition 2

NOTE Couple Port Detection Function

The Agilent B2200 provides the function to detect the input ports that connect the Kelvin triaxial cable and set the ports as the couple port automatically. See “SCAN” on page 3-32

Front Panel Operation

Switch Control Functions

Agilent B2200 User’s Guide, Edition 2 3-21

Front Panel Operation Display Functions

Display Functions

The Agilent B2200 provides LED matrix, LCD, and 18 front panel keys for front panel operation. This section explains the display of the LED matrix and the LCD.

• “LED Matrix”

•“LCD”

LED Matrix

Agilent B2200 has four blocks of 14 × 12 LED matrix. They display the switch condition of the switch modules installed in the slot 1 to slot 4. See Table 3-3.

Also LEDs labeled Card 1 to Card 4 are located above the LED matrices. They indicate the status of the module installed in the slot 1 to 4, respectively. See Table 3-4.

Table 3-3 LED Matrix

LED color Explanation

Green The switch has been closed to connect the output channel to the

Red The switch has been closed to connect the output channel to the

Orange The LED also blinks. The switch condition can be changed by the

- The LED lights out. The switch has been opened.

Table 3-4 Card 1/2/3/4 LED

LED color Explanation

Red The switch module has failed the selftest or the diagnostics.

Green The switch module has operated normally.

- The LED lights out. No switch module has been installed in this

3-22 Agilent B2200 User’s Guide, Edition 2

input port.

input bias port or the input ground port.

Open/Close key.

slot.

LCD

The LCD displays the setup information and the status information as shown in Table 3-5. Display example is sho wn in Figur e 3-2.

Figure 3-2 LCD Display Example

01 02 03 04 05 06 07 08 09 10 11 12 13 14 Shift

Front Panel Operation

Display Functions

G-

The first line shows the input port status, couple port, bias port, ground port, or ground enabled port.

The second line shows the instrument status and the mode status. The example of Figure 3-2 notifies you the following information.

• Input 5 and 6 are a couple port.

• Input 12 is the input ground port.

• Input 4 and 7 are the ground enabled input port.

• Channel configuration mode is auto.

• Couple mode is ON.

• Ground mode is ON.

• Connection rule is free.

• Connection sequence is break before make.

FREE

GndLock Error GndBias

BBM

SequenceRule

Agilent B2200 User’s Guide, Edition 2 3-23

Front Panel Operation Display Functions

Table 3-5 LCD Display Items

Label Description

01 to 14 Port function assigned to the input ports 1 to 14. B (bias port), C (couple port),

G (ground port), - (ground enabled port), or blank (no function).

Shift Shift key status indicator. The triangle mark appears when the sub key is active.

Remote Remote status indicator. The triangle mark appears when the Agilent B2200 is in

the GPIB remote condition.

Lock Key status indicator. The triangle mark appears when the front panel keys are

locked by an external computer.

Error Error status indicator. The triangle mark appears when any error has occurred.

Card# Slot number of the switch module to be monitored. Displays A when the channel

configuration mode is Auto. In the auto mode, the modules installed in the mainframe from slot n umber 1 continuou sly will be co ntro lled as on e modul e. Or displays 1 to 4 when the channel configuration mode is Normal. The module can be selected by the

Card Selection key.

Bias Bias mode status indicator. The triangle mark appears when the mode is ON.

Couple Couple mode status indicator. The triangle mark appears when the mode is ON.

Gnd Ground mode status indicator. The triangle mark appears when the mode is ON.

Rule Connection rule, FREE (plural route mode) or SINGLE (single route mode).

Sequence Connection sequence, BBM (Break Before Make), MBBR (Make Before Break), or

NO_SEQ (No Sequence).

NOTE In the remote mode and the default setting, only the Remote, Lock, and Error

indicators are available. To display all information, set the RMT_DSPL function ON. Refer to “RMT_DSPL ” on page 3-33.

3-24 Agilent B2200 User’s Guide, Edition 2

Front Panel Keys

The Agilent B2200 provides LED matrix, LCD, and 18 front panel keys for front panel operation. The front panel keys are used to ch ange th e instrument settings, the switch conditions, and so on.

Function Edit

Local Sets the Agilent B2200 to the local condition.

Front Panel Operation

Front Panel Keys

Reset (Shift+Local)

Used to reset the Agilent B2200. Displays the following message. Press the arrow key to set YES, and then press the

Enter key to reset the instrument.

Menu Displays the setup menu. See “Setup Menu” on page 3-30.

Selftest

Displays the selftest menu. See “Selftest Menu” on page 3-34.

(Shift+Menu)

Agilent B2200 User’s Guide, Edition 2 3-25

Front Panel Operation Front Panel Keys

Function key group

The Function key group is used to change the input ports and modes.

Function Edit

Port Function Enters into the port function selection mode. In this mode, the arrow keys, Fast key,

Exit key, and Enter key are available. Other keys will work to exit this mode.

In this mode, move cursor right or left to specify the input port, and press the up or down arrow key to select the port function , B (bias port), C (coup le port), G (ground port), or - (ground enable port). The port function can be selected when the corresponding port o peration m ode (bias m ode, coupl e mode, or ground mode) is set to ON. The bias mode and the ground mode cannot be set to ON simultaneously.

Bias Ch (Shift+ Port Function)

Displays the following menu.

SET VIEW

• SET displays the following menu. The following functions are used to set the bias-enabled or bias-disabled channel (output port).

ENABLE DISABLE

The function displays the following message for example. And then press Enter to bias-enable or bias-disable the channel.

Channel: 01

If there is no enabled or disabled channel, the following message will appear.

Channel: No Channel

• VIEW displays the following message for example, and is used to see the bias status of the channel.

Channel 01: ENAB LE D

3-26 Agilent B2200 User’s Guide, Edition 2

Bias Mode Sets the bias mode ON or OFF.

When the bias mode is set to ON, the LCD shows which input port is the bias port, and the input bias port will be connected to the bias-enabled channels that are not connected to other input port. And LEDs will be turned red t o show the bias port connections.

Front Panel Operation

Front Panel Keys

Ch Mode (Shift+ Bias Mode)

Sets the channel configuration mode AUTO or NORMAL. Changing the mode will reset the Agilent B2200 settings.

Couple Mode Sets the couple mode ON or OFF.

When the couple mode is set to ON, the LCD shows which input ports are the couple port.

Gnd Mode (Shift+ Couple Mode)

Sets the ground mode ON or OFF. When the ground mode is set to ON, the LCD shows which input port is the ground

port, and the input ground port will be connected to the ground-enabled channels that are not connected to other input port. And LEDs will be turned red to show the ground port connections. The ground enabled input ports are also connected to the input ground port. Nothing must be connected to the ground enabled input ports.

Rule Displays the following message. Selects the connection rule FREE (plural route

connections) or SINGLE (single route connection).

FREE

Sequence (Shift+Rule)

Displays the following message. Selects the connection sequence Break_Before_Make, Make_Before_Break, or No_Sequence.

Break_Before_Make

Load Memory Displays the following message. Used to select the Agilent B2200 setup data stored

in the internal memory, and loads the data.

Settings: 01 [ ]

Save Memory (Shift+ Load Memory)

Displays the following message. Used to select the internal memory to store the Agilent B2200 setup data, and stores the data. Up to eight setup data can be saved.

Settings: 01 [ ]

Open All Displays the following message. Press the arrow key to set YES, and then press the

Enter key to open all relays.

Agilent B2200 User’s Guide, Edition 2 3-27

Front Panel Operation Front Panel Keys

Gnd Ch (Shift+Open All)

Displays the following menu.

SET VIEW

• SET displays the following menu. The following functions are used to set the ground-enabled or ground-disabled channel (output port).

ENABLE DISABLE

The function displays the following message for example. And then press Enter to ground-enable or ground-disable the channel.

Channel: 01

If there is no enabled or disabled channel, the following message will appear.

Channel: No Channel

• VIEW displays the following message for ex ample, and is u sed to see the grou nd status of the channel.

Channel 01: ENAB LE D

3-28 Agilent B2200 User’s Guide, Edition 2

Front Panel Operation

Front Panel Keys

Edit key group

The Edit key group is used to select the switch module to be monitored, move the cursor in the display, make the setup value effective, return to the previous menu or display, and so on.

Function Edit

Card Selection Selects the switch module to be monitored on the LCD. The Card# status indicator

will change the slot number (card number) when the This key is not effective when the Card# indicator shows A (auto configuration

mode).

Shift Enables the sub key function. The sub key label has been printed on the front panel

above the key. The label color is blue.

Card Selection key is pr essed.

Exit Returns the display to the previous menu or display without making the setup

effective.

Enter Makes the setup effective, and returns the display to the previous menu or display.

Fast Used with the arrow key . Pr essing the

Fast key and an arrow key speeds u p changing

the setting value.

arrow keys Moves the cursor on the display, displays another selection for a setup message, or

changes the value of the digit specified by the cursor. For the LED matrix, moves the blink-LED.

Open/Close When no blink-LED is on the LED matrix, enters into the LED matrix based switch

control mode. The blink-LED will appear. In this mo de, the ar row keys and

Fast key

are available. Other keys will work to exit this mode. When the blink-LED is on the LED matrix, changes the condition, open or close, of

the switch specified by the blink-LED.

Agilent B2200 User’s Guide, Edition 2 3-29

Front Panel Operation Setup Menus

Setup Menus

This section explains the followin g setup menus disp layed by pressin g the Menu key

Selftest key.

• “Setup Menu”

• “Selftest Menu”

Setup Menu

Press the Menu key. The setup menu will be displayed on the LCD as shown in the following example. The setup menu is used to change the GPIB address, detect the couple port automatically, and so on.

[Hardware Configuration] CONFIG SCAN ERROR RMT_DSPL BEEP >

[Hardware Configuration]

<SCAN ERROR RMT_DSPL BEEP PEN

Press the arrow key to move the cursor to the desired function name. Then, press the

Enter key. The setup message or the sub menu will be displayed. To return to the

previous menu, press the

3-30 Agilent B2200 User’s Guide, Edition 2

Exit key.

Function Tree The setup menu provides the following functions.

• CONFIG

• ADDRESS Sets the GPIB address.

• REVISION Displays the firmware revision.

• UNIT Displays the module information of each slot.

• SCAN Detects and sets the input couple ports automatically.

• ERROR

• DISPLAY Displays the error code and error message.

• CLEAR Clears the error buffer.

• RMT_DSPL

• LCD Selects on or off for the LCD display in the remote mode.

• LED Selects on or off for the LED matrix in the remote mode.

• BEEP Selects on or off for the beeper.

• PEN E nables or disables the l ight pen.

Front Panel Operation

Setup Menus

Agilent B2200 User’s Guide, Edition 2 3-31

Front Panel Operation Setup Menus

CONFIG Displays the sub menu that provides the following functions.

• ADDRESS Displays the following message.

GPIB Address = Address

Press the arrow key to set the desired GPIB address. Then , press the make the setup effective, or press the

• REVISION Displays the following message.

X.XX.XX

where X.XX.XX shows the firmware revision. To return to the previous menu, press the

• UNIT Displays the following message.

Slot#: model, X

where # is 1, 2, 3, or 4, model is the model number of the module, X is th e revision of the module.

To display another message, press the arrow key. To return to the previous menu, press the

SCAN Displays the following mes sage.

Enter key to

Exit key to cancel changing the setup.

Exit key.

Press the arrow key to set YES. Then, press the couple ports automatically, or press the

Exit key to cancel this operation. The input

Enter key to detect and set the inpu t

couple ports will be the input ports the Kelvin cable is connected.

3-32 Agilent B2200 User’s Guide, Edition 2

ERROR Displays the sub menu that provides the following functions.

• DISPLAY Displays the error code and error message, or No Error.

Front Panel Operation

Setup Menus

To return to the previous menu, press the

Exit key.

• CLEAR Displays the following message. Press the arrow key to s et YES. Then, press the

Enter key to clear the error buffer, or press the Exit key to cancel this operation.

RMT_DSPL Displays the sub menu that provides the following functions.

• LCD Displays the following message. Press the arrow key to set ON (displays all

status information in the GPIB remote mode) or OFF (displays Remote, Lock, and Error only). Then, press the

Exit key to cancel changing the setup.

the

Enter key to make the setup effective, or press

OFF or ON

• LED Displays the following message. Press the arrow key to set ON (enables LED

matrix in the GPIB remote mode) or OFF (disables it). Then, press the to make the setup effective, or press the

Exit key to cancel changing the setup.

Enter key

ON or OFF

BEEP Displays the following message. Press the arrow key to set the beeper ON or OFF.

Then, press the

Enter key to make the setup effective, or press the Exit key to cancel

changing the setup.

ON or OFF

PEN Displays the following message. Press the arrow key to enable or disable the light

pen. Then, press the

Enter key to make the setup effective, or press the Exit key to

cancel changing the setup.

DISABLE or ENABLE

Agilent B2200 User’s Guide, Edition 2 3-33

Front Panel Operation Setup Menus

Selftest Menu

Press the Shift key and the Menu key. The selftest menu is displayed. The menu is used to execute the selftest and diagnostics.

[Execute Diagnostics] SELF_TEST RELAY_TEST KEY BEEPER >

[Execute Diagnostics]

<KEY BEEPER LED PEN GPIB

Press the arrow key to move the cursor to the desired function name. Then, press the

Enter key. The setup message or the sub menu will be displayed. To return to the

previous menu, press the

Function Tree This menu provides the following functions.

• SELFTEST Executes the controller test or displays test result.

• RELAY_TEST Executes the relay test or displays test result.

Exit key.

• KEY Executes the front panel interface test or displays test result.

• BEEPER Executes the beeper test or displays test result.

• LED Executes the LED matrix test or displays test result.

• PEN Executes the ligh t pen test or displays test result.

• GPIB Executes the GPIB test or displays test result.

3-34 Agilent B2200 User’s Guide, Edition 2

SELF_TEST Displays the sub menu that provides the following functions.

• EXECUTE Starts the controller test. Wait until PASS or FAIL is displayed. Then press the

Exit key to return to the previous menu.

• RESULT

Front Panel Operation

Setup Menus

Displays the test result. Press the

Exit key to return to the previous menu.

RELAY_TEST Displays the sub menu that provides the following functions.

Before starting the relay test, disconnect cables from the input conn ectors. And open the outputs (end of cable is OK). For the Kelvin cable, disconnect it from the output connectors.

• EXECUTE Displays the following message.

Slot1

Press the up or down arrow key to s elect the mo dule to be tested. Then press the

Enter key to start the relay test, or press the Exit key to cancel this operation.

Number of modules is 2 or more, the relay test will be automatically completed. However, if the only one module is installed, the following message will appear.

Connect IV1 and 2. Press [Enter].

Then connect a cable between the input 1 and 2, and press After that, change the cable connection as shown in the displayed message and

repeat this for the other i npu t conn ect ions (input 3 and 4, 5 and 6, 7 and 8, 9 and 10, 11 and 12, 13 and 14). Do not forget to open the connectors other than the specified pair.

Enter key.

• RESULT Displays the following message (example). Press the up or down arrow key to

display the test result for each module. Press the

Exit key to return to the

previous menu.

Slot1: Not performed yet

Agilent B2200 User’s Guide, Edition 2 3-35

Front Panel Operation Setup Menus

KEY Displays the sub menu that provides the following functions.

• EXECUTE Displays the following message.

DIAG:KEY Press any key.

Press any front panel key and confirm the LCD display. For example, if you press the

Port Function key, the following message must be displayed.

DIAG:KEY [Port Function]

Continue this for all keys. After that, press the

Enter key twice for the normal

operation. The test result will be PASS. If you find any wrong response, press the

Exit key twice. The test result will be

FAIL. Finally, press the

Exit key to return to the previous menu.

• RESULT Displays the test result. Press the

Exit key to return to the previous menu.

BEEPER Displays the sub menu that provides the following functions.

• EXECUTE Starts the beeper test, and displays the following message.

DIAG:BEEP Is beeper making 2 sounds?

Press the

Enter key if the beeper works correctly. The test result will be recorded

as PASS. If you find any problem, press the

Exit key. The test result will be recorded as

FAIL. Finally, press the

Exit key to return to the previous menu.

• RESULT Displays the test result. Press the

Exit key to return to the previous menu.

3-36 Agilent B2200 User’s Guide, Edition 2

LED Displays the sub menu that provides the following functions.

• EXECUTE Starts the LED matrix test, and displays the following message.

DIAG:LED All LED in Orange?

Front Panel Operation

Setup Menus

Press the

Enter key if the all LEDs are lighted in orange. The test result will be

recorded as PASS. If you find any problem, press the

Exit key. The test result will be recorded as

FAIL. Finally, press the

Exit key to return to the previous menu.

• RESULT Displays the test result. Press the

Exit key to return to the previous menu.

PEN Displays the sub menu that provides the following functions.

Before starting the light pen test, connect the light pen to the Agilent B2200.

• EXECUTE Starts the light pen test, and displays the following message.

DIAG:PEN Point any cross point

Point the light pen to the point you desire and confirm the LCD display. For example, if you point the input 5-to-output 10 cross point of the Agilent B2200 in the auto configuration mode, the following message must be displayed.

SLOT: 0 INPUT: 5 OUTPUT:10

Continue this for all cross points. After that, press the

Enter key for the normal

operation. The test result will be recorded as PASS. If you find any wrong response, press the

Exit key. The test result will be

recorded as FAIL. Finally, press the

Exit key to return to the previous menu.

• RESULT Displays the test result. Press the

Exit key to return to the previous menu.

Agilent B2200 User’s Guide, Edition 2 3-37

Front Panel Operation Setup Menus

GPIB Displays the sub menu that provides the following functions.

• EXECUTE Displays the following message.

Open GPIB, then press [Enter]

Disconnect the cable from the GPIB connector on the rear panel, and open it. Press the

Enter key to start the GPIB test, and wait until PASS or FAIL is

displayed. Then press the

• RESULT Displays the test result. Press the

Exit key to return to the previous menu.

3-38 Agilent B2200 User’s Guide, Edition 2

4 Programming

Programming

This chapter describes the automatic control programming of the Agilent B2200.

•“Programming Basics” Explains the commands for the fundamental switch control of the Agilent

B2200.

• “Programming Examples” Provides some examples of the programming.

• “Capacitance Compensation” Explains how to use the capacitance compensation routine. The routine is a

function of the Agilent B2200 VXIplug&play driver.

For the details about SCPI commands, see Chapter 5. For the details about VXIplug&play driver, see Chapter 6.

4-2 Agilent B2200 User’s Guide, Edition 2

Agilent Technologies B2201A User Manual 2

Specifications and Main Features

Frequently Asked Questions

User Manual

1 Introduction

Agilent B2200 Series

Front Panel

Rear Panel

Switch Modules

Specifications

General Specifications

Switch Modules

Supplemental Information for B2200A/B2210A

Supplemental Information for B2201A/B2211A

Accessories and Options

2 Installation

Requirements

Power Requirements

Power Cable

Operating Environment

Storage and Shipping Environment

Inspection

Installing the B2200

To Set the GPIB Address

To Connect the GPIB Cable

To Install the Switch Module

To Install the Blank Panel

Self-Test

Output Connections

Output Connectors

Connector Plates

To Make Connections to DUT Interface

To Make Interlock Circuit

To Mount Connectors

Input Connections

Measurement Cable Length

Maintenance

Calibration

Cleaning

3 Front Panel Operation

Operation

To Initialize Agilent B2200

To Enable Light Pen

To Change Channel Configuration Mode

To Change Connection Rule

To Change Connection Sequence

To Control Switch Condition

To Open All Switches

To Save/Load Setup Data

To Use Bias Mode

To Use Ground Mode

To Use Couple Mode

To Display Firmware Revision

To Display Module Information

To Read Error Message

To Set Beeper

To Set GPIB Address

To Set Remote Display Mode

To Return to Local Mode

Switch Control Functions

Channel Configuration Mode

Connection Rule

Connection Sequence

Bias Mode

Ground Mode

Couple Mode

Display Functions

LED Matrix

Front Panel Keys

Function key group

Edit key group

Setup Menus

Setup Menu

Selftest Menu

4 Programming