Agilent Technologies B2201A User Manual 2

Agilent B2200A

Femto Leakage Switch Mainframe

Agilent B2201A

14ch Low Leakage Switch Mainframe

User’s Guide

Agilent Technologies

Notices

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number

B2200-90000

Edition

Edition 1, October 2004 Edition 2, July 2005

Agilent Technologies, Inc. 5301 Stevens Creek Blvd Santa Clara, CA 95051 USA

Warranty

The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose. Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Tec hn ol og y L i c e ns es

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as applicable in any technical data.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or subcontract, Software is delivered and licensed as “Commercial computer software” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as

DECLARATION OF CONFORMITY

According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014

Manufacturer’s Name:

Agilent Technologies International sarl

Manufacturer’s Address: Supplier’s Address:

Rue de la Gare 29 CH - 1110 Morges Switzerland

Declares under sole responsibility that the product as originally delivered Product Name:

Femto Leakage Switch Mainframe

Femto Leakage Switch Module

14ch Low Leakage Switch Mainframe

14ch Low Leakage Switch Module

Model Number:

Agilent B2200A

Agilent B2210A

Agilent B2201A

Agilent B2211A

Product Options:

This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries the CE marking accordingly:

Low Voltage Directive (73/23/EEC, amended by 93/68/EEC) EMC Directive (89/336/EEC, amended by 93/68/EEC)

and conforms with the following product standards EMC Standard

IEC 61326:2002 / EN 61326:1997 +A1:1998 +A2:2001 +A3:2003 CISPR 11:1997 / EN 55011:1998

IEC61000-4-2:1995 / EN61000-4-2:1995 IEC 61000-4-3:1995 / EN61000-4-3:1995 IEC 61000-4-4:1995 / EN61000-4-4:1995 IEC 61000-4-5:1995 / EN61000-4-5:1995 IEC 61000-4-6:1996 / EN61000-4-6:1996 IEC 61000-4-11:1994 / EN61000-4-11:1994

Canada: ICES-001:1998 Australia/New Zealand: AS/NZS 2064.1

Limit

Group 1 Class A 4 kV CD, 8 kV AD 3 V/m, 80-1000 MHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground 3 V, 0.15-80 MHz 1 cycle, 100%

The product was tested in a typical configuration with Agilent Technologies test systems.

Safety

IEC 61010-1:2001 / EN 61010-1:2001 Canada: CSA C22.2 No. 1010.1:1992, NRTL/C

Supplementary Information: This DoC applies to above-listed products placed on the EU market after:

September 26, 2006

Date

Toshiyuki Kawaji

QA Manager Agilent Technologies

• Herstellerbescheinigung

GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19

• Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION Lpa < 70 dB operator position normal operation per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada.

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in domestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive Annex I, this product is classed as a “Monitoring and Control instrumentation” product.

Do not dispose in domestic household waste. To return unwanted products, contact your local Agilent office, or see

www.agilent.com/environment/product/ for more information.

Microsoft, Windows, Windows NT, Visual C++, and Visual Basic are registered trademarks of Microsoft Corporation. Borland C++ Builder is registered trademark of International, Inc. LabWindows and LabVIEW are registered trademarks of National Instruments Corporation. All other trademarks are the property of their respective owners.

Safety Summary

The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture, and intended us e of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent B2200 complies with INST ALLATION CATEGOR Y II for mains input and

INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 1010-1.

Agilent B2200 is INDOOR USE products.

• GROUND THE INSTRUMENT This is Safety Class I instrument. To minimize shock hazard, the instrument

chassis and cabinet must be connected to an electrical ground. The power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards.

• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes.

Operation of any electrical instrument in such an environment constitutes a definite safety hazard.

• KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers. Component

replacement and internal adjustments must be made by qualified maintenance personnel. Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.

• DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person, capable of

rendering first aid and resuscitation, is present.

• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards, do not install substitute

parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.

• DANGEROUS PROCEDURE WARNINGS Warnings, such as example below, precede potentially dangerous procedures

throughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument.

Use extreme caution when handling, testing, and adju sti n g.

Safety Symbols

The general definitions of safety symbols used on equipment or in man uals are listed below.

Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have this symbol when insrument is on.

Affixed to product containing static sensitive devices--use anti-static handling procedures to prevent electrostatic discharge damage to compone nt.

Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which normally includes all exposed metal structures.

Indicates earth (ground) terminal. Alternating current. Direct current. ON (Supply). OFF (Supply). STANDBY (Supply).

CAT 1

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I.

condition or the like, which, if not correctly performed or adhered to, could result in injury or death to personal.

practice, condition or the like, which, i f not correctly perfor med or adhered to , could result in damage to or destruction of part or all of the product.

In This Manual

This manual is a user’s guide for Agilent B2200A/B2201A Switch Mainframe, and consists of the following chapters:

• Introduction Describes an overview and specifications of the Agilent B2200 series.

• Installation Describes how to install the Agilent B2200 and how to setup the input/output.

• Front Panel Operation Explains the front panel operation and the switch control functions of the

Agilent B2200, also provides the reference information of the front panel keys and display.

•Programming Explains the programming examples that control the Agilent B2200.

• SCPI Command Reference Describes the all commands of the Agilent B2200 SCPI commands.

• VXIplug&play Driver Describes the all functions of the Agilent B2200 VXIplug&play driver.

• Error Messages Lists and describes the error messages for the Agilent B2200.

Text Co nventions

The following text conventions are used in this manual:

Screen Text Represents text that appears on screen of the controller.

Italic Refers to a related document, or is used for emphasis.

Contents

1. Introduction

Agilent B2200 Series. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Front Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Switch Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

Switch Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12

Supplemental Information for B2200A/B2210A . . . . . . . . . . . . . . . . . . . . . . . 1-13

Supplemental Information for B22 01A/ B 2211A . . . . . . . . . . . . . . . . . . . . . . 1-14

Accessories and Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

2. Installation

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Storage and Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Inspection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

Installing the B2200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

To Set the GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

To Connect the GPIB Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

To Install the Switch Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

To Install the Blank Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Agilent B2200 User’s Guide, Edition 2

Contents

Self-Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Output Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Output Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Connector Plates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

To Make Connections to DUT Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

To Make Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15

To Mount Connectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Input Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

Measurement Cable Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

3. Front Panel Operation

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

To Initialize Agilent B2200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Enable Light Pen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Change Channel Configuration Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Change Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

To Change Connection Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

To Control Switch Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

To Open All Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Save/Load Setup Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Use Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

To Use Ground Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

To Use Couple Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Display Firmware Revision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Display Module Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Read Error Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

To Set Beeper. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Agilent B2200 User’s Guide, Edition 2

Contents

To Set GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

To Set Remote Display Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

To Return to Local Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Switch Control Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 -12

Channel Configuration Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

Ground Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Couple Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

Display Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

LED Matrix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

LCD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

Front Panel Keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25

Function key group. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26

Edit key group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29

Setup Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 -30

Setup Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

Selftest Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34

4. Programming

Programming Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

SCPI Command Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Fundamental Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Switch Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Programming Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

Connecting Input-Output Paths . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Using Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Using Ground Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

Agilent B2200 User’s Guide, Edition 2

Contents

Using Couple Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

Saving Input/Output Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

Defining Comment for Internal Memory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Capacitance Compensation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Capacitance Compensation Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

To Create Compensation Data File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

To Perform Measurement and Compensation . . . . . . . . . . . . . . . . . . . . . . . . . 4-27

5. SCPI Command Reference

Common Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Commands Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

*CLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

*ESE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

*ESR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

*IDN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

*OPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

*RST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

*SRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

*STB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

*TST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

*WAI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

Subsystem Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

:DIAGnostic:TEST:CARD:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

:DIAGnostic:TEST:CARD[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

:DIAGnostic:TEST:CARD:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

:DIAGnostic:TEST:FRAMe:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

:DIAGnostic:TEST:FRAMe[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

:DIAGnostic:TEST:FRAMe:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24

[:ROUTe]:AGND:C HANnel:DISable:CARD. . . . . . . . . . . . . . . . . . . . . . . . . 5-24

Agilent B2200 User’s Guide, Edition 2

Contents

[:ROUTe]:AGND:C HANnel:DISable[:LIST] . . . . . . . . . . . . . . . . . . . . . . . .5-25

[:ROUTe]:AGND:C HANnel:ENABle:CARD. . . . . . . . . . . . . . . . . . . . . . . . . 5-25

[:ROUTe]:AGND:C HANn el:ENABle[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . 5-26

[:ROUTe]:AGND:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

[:ROUTe]:AGND[:STATe]. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28

[:ROUTe]:AGND:UNUSED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

[:ROUTe]:BIAS:CHANn el:DISab le:CARD . . . . . . . . . . . . . . . . . . . . . . . . . .5-30

[:ROUTe]:BIAS:CHANnel:DISable[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30

[:ROUTe]:BIAS:CHANn el:ENABle:CARD . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

[:ROUTe]:BIAS:CHANnel:ENABle[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

[:ROUTe]:BIAS:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

[:ROUTe]:BIAS[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

[:ROUTe]:CLOSe:CARD? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34

[:ROUTe]:CLOSe[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34

[:ROUTe]:CONNection:RULE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-35

[:ROUTe]:CONNection:SEQuence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36

[:ROUTe]:COUPle:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37

[:ROUTe]:COUPle:PORT:DETect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-38

[:ROUTe]:COUPle[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 -39

[:ROUTe]:FUNCtion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 -40

[:ROUTe]:OPEN:CARD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40

[:ROUTe]:OPEN[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-41

[:ROUTe]:SYMBol:CHANnel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-42

[:ROUTe]:SYMBol:PORT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-43

:SYSTem:BEEP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-44

:SYSTem:CCONfig? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-44

:SYSTem:CDEScription? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-45

:SYSTem:CPON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-46

:SYSTem:CTYPe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-47

:SYSTem:DISPlay:LCD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-47

:SYSTem:DISPlay:LED. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-48

:SYSTem:DISPlay:STRing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-48

Agilent B2200 User’s Guide, Edition 2

Contents

:SYSTem:ERRor? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-49

:SYSTem:KLC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-49

:SYSTem:MEMOry:COMMent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-50

:SYSTem:MEMOry:DELete . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-50

:SYSTem:MEMOry:LOAD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-51

:SYSTem:MEMOry:SAVE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-51

:SYSTem:PEN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-52

:SYSTem:VERSion? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-52

Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-53

Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-53

Status Byte Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-55

Service Request Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-57

Standard Event Status Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-58

Standard Event Status Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-59

Output Queue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-60

6. VXI plug&play Driver

System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Installing VXIplug&play Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

Driver Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

agb220xa_biasChanCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

agb220xa_biasChanList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

agb220xa_biasChanList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

agb220xa_biasPort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

agb220xa_biasState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

agb220xa_close . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

agb220xa_closeCard_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

agb220xa_closeList . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

agb220xa_closeList_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

agb220xa_cmd. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Agilent B2200 User’s Guide, Edition 2

Contents

agb220xa_cmdData_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

agb220xa_cmdInt. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

agb220xa_cmdInt16Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

agb220xa_cmdInt16_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

agb220xa_cmdInt32Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

agb220xa_cmdInt32_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

agb220xa_cmdReal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

agb220xa_cmdReal64Arr_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

agb220xa_cmdReal64_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

agb220xa_cmdString_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

agb220xa_compenC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

agb220xa_connRuleSeq. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

agb220xa_couplePort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

agb220xa_coupleState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

agb220xa_dcl . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

agb220xa_detectCouplePort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 -20

agb220xa_error_message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

agb220xa_error_query . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

agb220xa_errorQueryDetect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

agb220xa_errorQueryDetect_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

agb220xa_esr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-23

agb220xa_func . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

agb220xa_groundChanCard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

agb220xa_groundChanList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

agb220xa_groundChanList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-25

agb220xa_groundPort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

agb220xa_groundState. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

agb220xa_init. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27

agb220xa_opc_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 -27

agb220xa_openCard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

agb220xa_openList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

agb220xa_openList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-29

Agilent B2200 User’s Guide, Edition 2

Contents

agb220xa_readStatusByte_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

agb220xa_reset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

agb220xa_revision_query . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

agb220xa_selectCompenFile. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

agb220xa_self_test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31

agb220xa_testClear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31

agb220xa_testExec_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

agb220xa_timeOut. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

agb220xa_timeOut_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33

agb220xa_unusedPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33

7. Error Messages

Standard SCPI Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Command Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7

Device-Dependent Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8

Query Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

B2200 Specific Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

B2200 Channel Related Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

B2200 Card/Mode/Port Related Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12

Agilent B2200 User’s Guide, Edition 2

1 Introduction

Introduction

This chapter describes the basic functions and features of the Agilent B2200A/B2201A (Agilent B2200 series), and consists of the following sections:

• “Agilent B2200 Series”

• “Front Panel”

• “Rear Panel”

• “Switch Modules”

• “Specifications”

• “Accessories and Options”

1-2 Agilent B2200 User’s Guide, Edition 2

Agilent B2200 Series

Agilent B2200 series is a switching matrix designed for semiconductor dc characteristics measurement applications. The Agilent B2200 series has 14 input ports and four card slots fo r th e switch mod ules (plu g-in cards), and can configure a 12, 24, 36, or 48 outputs switching matrix. The Agilent B2200A/B2201A supports the following dedicated switch module.

• Agilent B2210A fA Leakage Switch Module Dedicated for the Agilent B2200A mainframe.

• Agilent B2211A 14ch Low Leakage Switch Module Dedicated for the Agilent B2201A mainframe.

NOTE Mixed configuration of the switch modules is not supported.

Basic functions of the Agilent B2200 series are listed below.

Introduction

Agilent B2200 Series

• SMU inputs (for source monitor units): 8 ports

• AUX inputs (multipurpose inputs): 6 ports

• Outputs: 12, 24, 36, or 48 ports

• Connection setup and status monitor on the front panel

• Status display on the LED matrix display

• Connection setup by the Light pen

• Automatic control through GPIB interface

• Auto ground function

• Self-test, relay function test

• Relay cleaning

Agilent B2200 User’s Guide, Edition 2 1-3

Introduction Front Panel

Front Panel

The Agilent B2200 series provides the front panel keys, the LCD, and the LED matrix display for the status monitor and connection setup.

• Line switch Used to turn the Agilent B2200 on or off.

•LCD Used to monitor the status and set the connection. See Chapter 3 for the details.

• Front panel keys Used to set the Agilent B2200. See Chapter 3 for the details.

• LED matrix display Displays the status of the matrix switches. Also used to set the matrix connection

with the light pen.

• SMU Input Inputs for the source monitor unit (SMU). Eight input ports. Up to four kelvin

inputs are available. Triaxial BNC connector.

• AUX Input Multipurpose inputs. Six input ports. Coaxial BNC connector. CMH and CML

terminals are the input ports for the capacitance measurement. The input port 12 (AUX Input 12 ) i s the d efaul t gro un d input port. If you assign

the port as the ground input port, this ground port will be internally connected to the ground when the ground mode is s et to O N. In t h is cas e, op en t his conn ect or.

•Light Pen Connector for the Agilent 16443A Light pen. Used to set the matrix connection

with the LED matrix display.

CAUTION For the SMU Input terminals, the maximum measurement voltage/current/voltage

between terminals are ±200 V/1 A/300 V, respectively. And for the AUX Input terminals, they are ±100 V/0.5 A/100 V.

Do not apply an input signal over these limits to the input terminals. If you do, the Agilent B2200 will be damaged. If you use a bias source that has current limit capability, set the bias source current limit.

1-4 Agilent B2200 User’s Guide, Edition 2

Figure 1-1 Front Pane l View

Introduction Front Panel

Agilent B2200 User’s Guide, Edition 2 1-5

Introduction Rear Panel

Rear Panel

The Agilent B2200 series has four card slots for the switch modules, the GPIB interface and so on.

• Card slots For the Agilent B2200A mainframe, the Agilent B2210A cards are installed. For the Agilent B2201A mainframe, the Agilent B2211A cards are installed. Mixed configuration of the switch modules is not supported.

• GPIB interface Use an Agilent 82357A USB/GPIB interface or Agilent 10833A/B/C/D GPIB

cable to connect to an external computer or equipment.

• Serial number You need this serial number when using the Agilent Technologies telephone

assistance program.

• LINE input receptacle AC power cable is connected to this receptacle.

1-6 Agilent B2200 User’s Guide, Edition 2

Figure 1-2 Rear Panel View

Introduction

Rear Panel

Agilent B2200 User’s Guide, Edition 2 1-7

Introduction Switch Modules

Switch Modules

The Agilent B2200A and B2201A support the dedicated switch module, Agilent B2210A and B2211A, respectively.

By installing the modules, the module inputs will be connected internally to the front panel input connectors. And 12 output connectors will face the rear panel. The type of the output connectors is the triaxial BNC. Up to six kelvin outputs are available.

Image of the output terminals and the block diagram of the switch module are shown in Figure 1-3 and Figure 1-4.

Figure 1-3 Switch Module Output Terminals

WARNING Do not touch the force and guard terminals of the output connectors while the

Agilent B2200 is turned on. Dangerous voltages up to the maximum input voltage may be present at the output connectors.

NOTE Mixed configuration of the switch modules is not supported.

1-8 Agilent B2200 User’s Guide, Edition 2

Figure 1-4 Switch Module B lock Diagram

Introduction

Switch Modules

Input

3 4

7 8

9 10

Output

2345

678

10 11 12

12 13 CMH 14 CML

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Introduction Specifications

Specifications

This section lists specifications and supplemental information for the Agilent B2200 series.

• “General Specifications”

• “Switch Modules”

• “Supplemental Informati on for B22 00 A/B 221 0A”

• “Supplemental Informati on for B22 01 A/B 2211A”

The specifications are the performance standards or limits against which these u nits have been tested. The supplemental information is not warranted, but provides useful information ab out functions and performance.

If not noted otherwise, the conditions for specifications and supplemental information are as follows:

T e mp erature: 23 °C ± 5 °C Humidity: 5 % to 60 % R.H.

1-10 Agilent B2200 User’s Guide, Edition 2

General Specifications

Introduction

Specifications

Temperature range:

Humidity range: Operating: 5 % to 70 % R.H., non-condensing

Altitude: Operating: 0 to 2,000 m (6,500 ft)

Regulatory compliance:

Power requirement:

Number of slots: 4 slots for 48 mm height switch module Dimensions: B2200A/B2201A: 430 mm W × 320 mm H × 600 mm D

Weight: B2200A/B2201A: appr oximat el y 14.0 kg

Operating: 5 °C to 35 °C Storage: − 20 °C to 70 °C

Storage: < 80 % R.H. at 35 °C, < 60 % R.H. at 65 °C, non-condensing (B2200A/B2210A)

< 80 % R.H. at 65 °C, non-condensing (B2201A/B2211A)

Storage: 0 to 15 ,240 m (50,000 ft) Safety: CSA C22.2 No. 1010.1/IEC 1010-1

EMC: CISPR 11 Group 1 class A&EN50082-1

90 to 264 V (continuous), 47 to 63 Hz, 2 A/200 VA maximum

B2210A/B2211A: 395 mm W × 48 mm H × 500 mm D

B2210A: approximately 5.0 kg B2211A: approximately 3.5 kg

Number of ports: SMU input: 8 triaxial ports (with Guard)

AUX input: 6 coaxial ports (two ports for capacitance measurement) Output: 12 triaxial ports (with Guard), maximum 48 ports

Agilent B2200 User’s Guide, Edition 2 1-11

Introduction Specifications

Switch Modules

Table 1-1 lists the specifications when the switch module is installed in the mainframe. In the table, the conditions are as follows:

Conditions: 23 °C ± 5 °C, 5 % to 60 % R.H.

Table 1-1 Agilent B2210A/B2211A Switch Module Specifications

B2210A B2211A

Max. current rating (A)

SMU input 1.0 1.0 AUX input 0.5 0.5

Max. voltage rating (V)

SMU input, channel to common 200 200 SMU input, channel to channel 300 300 AUX input, channel to common 100 100 AUX input, channel to channel 100 100

Closed channel residual resistance (Ω)

SMU input 0.6 0.6 AUX input 1.5 1.5

Channel isolation resistance (Ω)

SMU input

AUX input

5 × 10

The Agilent B2200A mainframe supports the Agilent B2210A module. The Agilent B2201A mainframe supports the Agilent B2211A module. Mixed configuration of the switch modules is not supported.

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Specifications

Supplemental Information for B2200A/B2210A

Offset current 1 < 10 fA (typical 3 fA) (SMU input) IM noise (RMS) Channel crosstalk capacitance < 1 pF/channel (SMU input)

Offset voltage < 50 µV (SMU input)

Settling time Bandwidth (at -3dB) 30 MHz (SMU input) Guard capacitance Additional C measurement error

0.6 fA (SMU input)

< 3 pF/channel (AUX input)

< 80 µV (AUX input)

2.0 seconds

< 145 pF (SMU input)

< ± 1 % + 0.2 pF (SMU input)

Introduction

1. When the voltage applied to all input-output channels is 0 V.

2. Measured by the Agilent 4156C with the integration time setting 100 PL C. When the voltage applied to all other input-output paths is 0 V.

3. The time until the measurement value settles to within 50 fA of the final value. When the applie d voltage is 10 V.

4. When four modules have been installed in the mainframe. And when only one input-output path is made.

5. For the measurement less than 1000 pF at the frequency 1 kHz to 1 MHz, using the Agilent 4284A with 3 m cable. After the compensation using the capacitance compensation algorithm (a function of VXIplug&play driver).

Agilent B2200 User’s Guide, Edition 2 1-13

Introduction Specifications

Supplemental Information for B2201A/B2211A

Offset current 1 < 50 fA (SMU input) IM noise (RMS) Channel crosstalk capacitance < 0.5 pF/channel (SMU input)

Offset voltage < 80 µV (SMU input)

Settling time Bandwidth (at -3dB) 30 MHz (SMU input) Guard capacitance Additional C measurement error

5 fA (SMU input)

< 3 pF/channel (AUX input)

< 100 µV (AUX input)

2.0 seconds

< 145 pF (SMU input)

< ± 1 % + 0.2 pF (SMU input)

1. When the voltage applied to all input-output paths is 0 V.

2. Measured by the Agilent 4156C with the integration time setting 100 PLC. When the voltage applied to all other input-output paths is 0 V.

3. The time until the measurement value settles to within 300 fA of the final value. When the applie d voltage is 10 V.

4. When four modules have been installed in the mainframe. And when only one input-output path is made.

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