Agilent Technologies 979 Replacement Manual
Model 979 Helium
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
3
FIELD SERVICE
COMPONENT REPLACEMENT
Mass Spectrometer
Leak Detector
MANUAL
DRAFT 1/27/0
Manual No. 699909976
Revision B
January 2003
Model 979 Helium Mass Spectrometer Leak Detector
Model 979 Helium Mass Spectrometer
Leak Detector
DRAFT 1/27/03
Alconox is a registered trademark of Alconox, Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Scotch-Brite is a trademark of 3M.
Loctite and PST are registered trademarks of Loctite Corporation
Teflon is a registered trademarks of E. I. du Pont de Nemours and Company.
Copyright 2003
Varian Vacuum Technologies
D
eclaration o
fC
ity
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
We/Wir/Nous/Nosotros/Wij/Noi: Varian, Inc.
Varian Vacu um Technologies
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Model 979 Helium Mass Spectrometer Leak Detector
onform
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
89/336/EEC. . . . . . . . . . . . . . . . . . . . . . Electromagnetic Compatibility Directive
EN61326:1997. . . . . . . . . . . . . . . . . . . Measurement Control and Laboratory Equipment EMC Requirements
Frederick C. Campbell
Operations Manager
Varian Vacuum Technologies
Lexington, Massachusetts, USA
June 2002
Model 979 Helium Mass Spectrometer Leak Detector
Warranty
Products manufactured by Seller are warrant ed against defects in materials and workmanship for
twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of
the purchase price of the Product. I tems expe ndable in normal us e are not cover ed by this warr anty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations
of Seller under this warranty shall cease in th e event of abuse, acc ident, altera tion, misuse , or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty peri od, Customer shall be charged at the then current prices for part s, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statut o r y o r otherwise; an d , e xc e p t as stated here in , Seller shall have no liab ili ty under any warranty, express or implied (eith er in f act or by oper ation of l aw), st atuto ry or other wis e. Sta tements made
by any person, including repr esentatives of Seller, which are inconsistent or i n conflict with th e terms of
this warranty shall not be binding upon Sel ler unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly afte r occurrence of cir cumstances giving rise the reto,
and must be received within the applica ble warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written author ization f rom Sell er or it s auth orized repr esenta tive fo r the re turn and instru ctions as
DRAFT 1/27/03
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, not withstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibili ty for
determining the cause and nature of failure, and Seller’s determina tio n w ith regard the reto shall be
final.
If it is found that Seller’s Product has been returned without caus e and i s still s ervice able, Customer will
be notified and the Product returned at Customer expense; in addition, a charge for testing and examination may be made on Products so returned.
ii
Model 979 Helium Mass Spectrometer Leak Detector
l
Items Not Covered Under Warranty
Examples of items not normally covered under warranty include ion sources, TC gauges, O-rings,
spectrometer tube cleaning and overhaul, mechanical pump oils, vacuum system overhauls, and
obvious abuse or customer error. These items are considered normal maintenance for this type of
equipment.
3/1/00
Hazard and Safety Information
Some common international symbols used in this manual and the equipment itself are
shown below.
OFF Power Switch Position Earth Ground
ON Power Switch Position Hot Surface
AC – Alternating Current Dangerous Voltage, Risk of
Electrical Shock
This manual uses the following standard safety protocols:
NOTE The notes contain important information taken from the text.
CAUTION The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
WARNING The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
DRAFT 1/27/03
iii
Solvents
Model 979 Helium Mass Spectrometer Leak Detector
Operators and service personnel must be aware of all hazards associated with this
equipment. They must know how to recognize hazardous and potentially hazardous
conditions, and know how to avoid them. The consequences of unskilled, improper, or
careless operation of the equipment can be serious. This product must only be operat ed and
maintained by trained personnel. Every operator or service person must read and
thoroughly understand operation/maintenance manuals and any additional information
provided by Varian Vacuum Technologies. All warning and cautions should be read
carefully and strictly ob served. Consult lo cal, state, and national agencies r egarding specif ic
requirements and regulati ons. Address any safety, operation, and/or maintenance questions
to your nearest Varian Vacuum Technologies office.
CAUTION The mechanical components of leak detectors are typically
cleaned with alcohol, methanol, or other solvents. When
heated, sprayed, or exposed to high-temperature equipment,
these solvents become flammable and explosive, causing
serious injury or death. Do not use th ese solvents near a
high-temperature source. Ventilate the working area with a
blower and work in a large, well-ventilated room.
DRAFT 1/27/03
Alcohol, methanol, or other solvents are irritants, narcotics,
depressants and/or carcinogens. Their inhalation and/or
ingestion may produce serious side effects. Prolonged or
continued contact with the skin will result in absorption
through the skin and moderate toxicity. Always ensure that
cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.
CAUTION Do not clean any aluminum parts with Alconox
not compatible with aluminum and will cause damage.
NOTE During reassembly, always use Loctite
(teflon-impregnated pipe thread compound) on pipe threads.
PST
®
. Alconox is
iv
Model 979 Helium Mass Spectrometer Leak Detector
Equipment, General
WARNING Equipmen t ti gh tness is guaranteed for n o rm a l operating
CAUTION The performance and operating safety of this equipment can
CAUTION Always allow at least 4 inches of clearance adjacent to the
Power and Static
conditions when the equipment le aves the factory. It is the
user’s responsibility to maintain the level of tightness
particularly when pumping dangerous products.
only be guaranteed if it is operated acc ording to normal
conditi o ns of use.
ventilation holes at the front, back and bottom of the equipment
enclosure.
WARNING Disconnect power from the 979 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
CAUTION Varian strongly recommends the use of surge protect ion to
improve the immunity of the 979 Series leak detectors against
unidirectional transients caused by the following phenomena:
❑ Switching phenomena in the power network ( e.g., switchi ng
of capacitor banks)
❑ Faults in the power network
❑ Indirect lightning strokes
CAUTION Many components of the 979 are static sensitive devices.
Varian Vacuum Technologies recommends that you wear a
grounding device when performing any maintenance on the
979 and especially when performing maintenance of static
sensitive parts.
DRAFT 1/27/03
v
Model 979 Helium Mass Spectrometer Leak Detector
WARNING This equipment is designed to meet current EEC regulations:
LVD (Low Voltage Directive, 73/23/EEC) and EMC
(Electromagnetic Compatibility, 89/336/EEC Directive) for
Installation Category II , Pollution Degree II environment for
Industrial, Scientific, Measuring and Process Control electrical
equipment.
❑ Any modifications on the part of the user are liable to cause
non-compliance with regulations or affect the EMC
performance and the safety of the product. Varian Vacuum
Technologies cannot be held responsibl e for consequences
resulting from such intervention.
❑ The equipment can be damaged by incorrect mains AC
supply voltages, the Radio Frequency (RF) and Electrostatic
Discharge (ESD) energy inputs that can exceed the
maximum ratings, operating in very hig h temperatures or
without adequate ventilation, immersion in liquids, and
physical abuse.
❑ All electrical connections must be perf ormed by a qualified
electrician and must comply with national and local codes.
DRAFT 1/27/03
❑ Ensure that the electrical installation conforms with your
local safety requirements.
❑ Electrical installati on must include the appropriate branch
circuit (at least 2 0 A) w i th a lo n g ti me de lay and a relia b le
earth ground. Do not use an extension cord.
❑ Use only the power cord that was provided with your leak
detector. The use of extension cords is not recommended
and could result in damage to the equipment and los s of
warranty.
❑ To avoid electric shock, connect the product power cord to
a grounded power receptacle. A protective ground
connection by way of the grounding condu ctor in the power
cord is essential for safe operation.
❑ Before powering the unit the first time, verify that the unit is
configured to operate for the local mains supply voltage.
❑ Opening the enclosure may expose hazardous voltages.
Always disconnect the power cord and inter face cables
before opening the enclosure. Do not touch the power
inlet’s contacts for at least 10 seconds after disconnecting
the power cord.
vi
Model 979 Helium Mass Spectrometer Leak Detector
CAUTION This equipment generates , uses, and can radiate RF energy and
if not installed and used in accordance with the instructional
manual, may cause harmful interference to radio
communications.
When this equipment is operated in a commerci al environment
operation is subject to the foll owin g two conditions:
❑ This equipment may not cause harmful interference, and
❑ This equipment must accept any interference received,
including interference (RF and ESD) that may cause
undesired operation.
This equipment may need to be res et after RF and/or ES D events
by cycling the Power Switch/Circuit Breaker on the back panel
of the unit.
Operation of this equipment i n a residential ar ea is also likely t o
cause harmful radio communications interference in which
case the user will be required to correct the interference at his
own expense.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques that are more important in leak detector servicing than in general vacuum
work:
CAUTION Do not use sili c o ne oil or silicon e grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox
not compatible with aluminum and will cause damage.
NOTE Normally, it is unnecessary to use vacuum grease. However, if
it must be used, avoid silicone types, and use it sparingly .
Apiezon
Technologies Part No. 695400004).
®
L grease is recommended (Varian Vacuum
®
. Alconox is
DRAFT 1/27/03
vii
O-ring Care
When removing, checking or replacing O-rings:
Model 979 Helium Mass Spectrometer Leak Detector
NOTE Varian Vacuum Technologies recommends replacing all
O-rings during routine maintenan ce or during any maintenance
procedure requiring that O-rin gs be removed.
CAUTION Remove O-rings carefully with your fin gers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
❑ Wipe all O-rings clean with a lint-free cloth before
installatio n to en s u re th at no foreign ma t te r is present to
impair the se al .
❑ Do not use grease or other substance on O-rings that will
come in contact with the spectrometer tube.
❑ Do not use alcohol, methanol or other solvents on O-rings.
To do so causes deterioration and reduces their ability to
hold a vacuum.
❑ If applicable, apply a small amount of Apiezon
and wipe the O-rings “shiny” dry.
®
L grease
DRAFT 1/27/03
NOTE Due to the effective cleaning nature of VacuSolv solvent and
its residue-free properties, Varian Vacuum T echnologies’
Component and Spectrometer Tube Cleaning Kit
(Part Number 670029096), used in accordance with the kit
instructions, is recommended for cleaning the spectrometer
tube components. The kit can also be used for fine cleaning
other parts in the leak de tector’s vacuum system such as valves
and fittings. No rinsing steps or high-t emperature d ry in g is
required following cleaning wit h VacuSolv. Although
appropriate precaution s are advised, VacuSolv is co mpa tible
with most materials and does not contain toxic chemicals or
CFCs (chlorofluorocarbons).
viii
Model 979 Helium Mass Spectrometer Leak Detector
Spectrometer Tube
CAUTION The spectrometer tube operates at a very high vacuum
produced by the high vacuum pump. Service of the
spectrometer tube requires that this vacuum be vented to the
atmosphere.
CAUTION Do not use grease or ot her subs ta nce on O-ri ngs that will c ome
in contact with the spectrometer tube.
CAUTION If the spectro m e te r tu b e magnet com e s in co n ta c t w i th a
magnetic surface, the magnet may lose its gauss, causing the
spectrometer tube to lose sensitivity.
WARNING Store the Ion Source in a cool, dry area in a ti ghtly sealed
container. Wash hands thoroughly after handling the Ion
Source and especially befo re smoking or eating.
Gross Leak Option
If the Gross Le ak o pt ion is installe d :
CAUTION The Gross Leak is calibrated at the fact ory and if any alteration
is made, the Gross Leak must be returned to the factory for
recalibration. F or ret urns , cont act Varian Vacuum Technologies
Customer Service at 1-800-8VARIAN.
DRAFT 1/27/03
ix
Pumps
Model 979 Helium Mass Spectrometer Leak Detector
WARNING To avoid injury, use proper lifting techniques when moving
pumps. Your system may have pumps that require two people
to move them safely.
WARNING The vacuum pumps are also compressors; incorrect operation
may be dangerous. Study the “Mechanical Pump Operation
Manual” enclosed with your pump before starting the pumps.
The pumps are designed to prevent any thermal risk for user
safety. However, specific operating conditions may generate
temperatures >70 °C.
Hot oil will burn the skin. Service of the pumps in this area
must be performed by authorized personnel onl y. Stand back
from mechanical pump before starting.
CAUTION Check the oil level often. Do not allow oil-based mechanical
pumps to run when oil level is below LOW mark. Damage to
pumps can occur if operated with no oil.
DRAFT 1/27/03
WARNING To avoid injury, wait until the turbo pump is completely
stopped before disconnecting it from the vacuum system.
x
Model 979 Helium Mass Spectrometer Leak Detector
Varian Services
The following are just a f ew of the many se rvi ces that Varian offers i ts cust omers . Pleas e see
our catalog, or contact us to learn of the se rvi ces tha t a re avai labl e. Conta ct Varian Vacuum
Technologies Customer Service at 1-8 00-8VARIAN for details.
❑ Rebuilt spectrometer tubes are available on an exchange basis.
❑ NIST-traceable calibrated leak testi ng and verification services.
Contacting Varian Vacuum Technologies
In the United States, you can contact Varian Vacuum Technologies Customer Service at
1-800-8VARIAN.
Internet users:
❑ Send email to Customer Service & Technical Support at
vpl.customer.support@varianinc.com
❑ Visit our web site at www.varianinc. com/vacuum
❑ Order on line at www.evarian.com
See the back cover of this manual for a listing of our sales and service offices.
Tools Required for Component Replacement
The following tools are required for component replacement
❑ Phillips screwdriver ❑ 9-16Wrench
❑ Slotted screwdriver ❑ 13-16 Wrench
❑ Long slotted screwdriver ❑ 11-32 Nut driver
❑ Crescent wrench ❑ 5-64 Allenwrench
❑ PLCC chip extracting device,
such as an AMP 821903-5
❑ A non-metal device for removing O-rings
Materials (not Parts) Required for Component Replacement
❑
Powder-free butyl or
polycarbonate gloves
❑ VacuSolv or similar solvent
DRAFT 1/27/03
❑ Clean, non-magnet ic surface ❑ Cotton swabs
❑ Lint-free wipes ❑ Loctite PST 565 Thread Sealant
xi
Preface
This manual contains information for field replacement of components of the Model 979
Mass Spectrometer Heli um Leak Detect or. It is organ ized so that simila r items or procedures
are included in a section. The manual moves from a brief overview of the leak detector to
specific replac ement procedur es to c ali brati on and tuning pr ocedu res t hat mus t be run a ft er
the replacement of certain componen ts. Photographs are liberally used to help document
procedures. An appendix provides Assembly Drawings and Bills of Materials for reference.
The specific sections included in the manual are:
Model 979 Helium Mass Spectrometer Leak Detector
Preface
Section 1 “System Overview”
Section 2 “Cleaning the Test Port”
Section 3 “Removing the Covers
from the 979”
Section 4 “The Internal Calibrated Leak”
Section 5 “Spectrometer Tube Assembly”
Section 6 “Test Port Thermocouple Gauge”
DRAFT 1/27/03
Section 7 “TheVarianPlatform”
Section 8 “Internal High Speed Turbo and
Mechanical Pumps”
Contains information relevant to the remainder
of the manual.
A brief overview of the 979.
How to clean the test port.
How to open individual sections or all of the
979 covers.
Detailed steps for removing and replacing the
calibrated leak.
Spectrometer tube assembly procedures from
replacement as an assembly to replacement of
individual components. This section also
includes a full overhaul procedure.
How to access and replace the test port
thermocouple gauge.
Procedures to access and replace the printed
circuit boards that make up the Varian Platform.
Replacement of the turbo pump and the
mechanical pumps.
xii
Section 9 “Calibration and Manual Tuning”
Section 10 “Leak Checking for Reliability”
Section A “Assembly Drawings and
Bills of Materials”
Section B “979 COM Cable” 979 COM Cable sketch and pinout assignments .
Section C “979 Spare Parts List” A table of the 979 Spare Parts List with ordering
Procedures that must be completed after
replacement of certain components.
General information regarding testing for leaks
after component replacement.
Assembly drawings and Bills of Materials for
reference.
numbers.
Model 979 Helium Mass Spectrometer Leak Detector
DRAFT 1/27/03
xiii
Model 979 Helium Mass Spectrometer Leak Detector
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Model 979 Helium Mass Spectrometer Leak Detector
Table of Contents
Warranty .............................................................................................................................................ii
Preface ..............................................................................................................................................xii
Section 1. System Overview ...........................................................................................................1-1
1.1 Front Panel Displays and Controls ......................................................................................1-1
1.1.1 Key Switch ..................................................................................................................1-2
1.2 Rear Panel...........................................................................................................................1-3
1.2.2 System Control and Communication Panel ................................................................1-3
1.3 Inside the Model 979............................................................................................................1-4
1.3.1 Inside Front View ........................................................................................................1-4
1.3.2 Side View — Card Cage Side.....................................................................................1-5
1.3.3 Side View — Calibrated Leak, Valve Block Side ........................................................1-6
1.3.4 Rear View....................................................................................................................1-6
Section 2. Cleaning the Test Port ...................................................................................................2-1
Section 3. Removing the Covers from the 979 ...............................................................................3-1
3.1 Opening the Front Panel .....................................................................................................3-1
3.2 R emoving the Front Panel...................................................................................................3-3
3.3 Removing the Rear Panel....................................................................................................3-5
3.4 R emoving the Side Panel ....................................................................................................3-6
3.5 R eplacing All Covers and Panels.........................................................................................3-7
3.5.1 Replacing the Side Panel............................................................................................3-7
3.5.2 Replacing the Rear Panel...........................................................................................3-7
3.5.3 Replacing the Front Panel...........................................................................................3-7
Section 4. The Internal Calibrated Leak ..........................................................................................4-1
4.1 Recalibrating the Internal Calibrated Leak ..........................................................................4-1
4.2 Replacing the Internal Calibrated Leak................................................................................4-1
4.2.1 Removing the Valve Block Coil and Plunger Assembly..............................................4-2
4.2.2 Removing the Internal Calibrate Leak.........................................................................4-6
4.2.3 Replacing the Internal Calibrated Leak.......................................................................4-9
4.2.4 Examining and Cleaning the Valve Block Coil and Plunger Assembly.....................4-11
4.2.4.1 Examining and Cleaning the Cal Leak Valve Block .....................................4-11
4.2.4.2 Examining and Cleaning the Coil and Plunger Assembly ............................4-12
4.2.4.3 Examining and Cleaning the Valve Stem and End Cap ...............................4-13
4.2.5 Replacing the Coil and Plunger Assembly................................................................4-14
DRAFT 1/27/03
Section 5. Spectrometer Tube Assembly ........................................................................................5-1
5.1 Spectrometer Tube Exchange ............................................................................................5-1
5.1.1 Removing the Spectrometer Tube Assembly for Complete Exchange.......................5-1
5.1.2 Examining and Cleaning the Centering Ring and O-Ring...........................................5-5
5.2 Reinstalling the Spectrometer Tube.....................................................................................5-6
5.3 R emoving the Button Thermocouple from the Spectrometer Tube .....................................5-7
xv
Model 979 Helium Mass Spectrometer Leak Detector
5.4 Replacing the Button Thermocouple..................................................................................5-10
5.5 Removing the Ion Source ..................................................................................................5-12
5.6 Replacing the Ion Source...................................................................................................5-15
5.7 Removing the Preamplifier.................................................................................................5-17
5.8 Replacing the Preamplifier.................................................................................................5-19
5.9 S pectrometer Tube Overhaul .............................................................................................5-20
5.9.1 Removing the Spectrometer Tube Assembly as Part of Overhaul............................5-21
5.9.2 Removing the Magnet Assembly from Spectrometer Tube as Part of Overhaul ......5-25
5.9.3 Removing the Button Thermocouple as part of Spectrometer Tube Overhaul.........5-26
5.9.4 Removing the Ion Source as part of Spectrometer Tube Overhaul..........................5-27
5.9.5 Removing the Preamplifier as Part of Spectrometer Tube Overhaul........................5-30
5.9.6 Removing the Deflecting Magnetic Pole Pieces as Part of
Spectrometer Tube Overhaul.............................................................................................5-31
5.9.7 Examining and Cleaning the Spectrometer Parts.....................................................5-32
5.10 Reassembling the Spectrometer Tube ............................................................................5-35
5.10.1 Replacing the Deflecting Magnetic Pole Pieces......................................................5-35
5.10.2 Replacing the Preamplifier as Part of Spectrometer Tube Overhaul......................5-35
5.10.3 Replacing the Ion Source as Part of Spectrometer Tube Overhaul........................5-36
5.10.4 Replacing the Button Thermocouple as Part of Spectrometer Tube Overhaul.......5-39
5.10.5 Replacing the Magnet Assembly.............................................................................5-40
5.10.6 Re-Installing the Spectrometer Tube ......................................................................5-43
Section 6. Test Port Thermocouple Gauge .....................................................................................6-1
6.1 R emoving the Test Port Thermocouple Gauge ..................................................................6-1
6.2 Replacing the Test Port Thermocouple Gauge....................................................................6-3
Section 7. The Varian Platform .......................................................................................................7-1
7.1 Location of Circuit Boards ...................................................................................................7-1
7.2 Removing the Card Stack from the Card Cage ................................................................... 7-3
7.2.1 Removing the Connections from the Front of the Boards...........................................7-4
7.2.2 Removing the Connections from the Back of the Boards ...........................................7-5
7.2.3 Removing the CPU Board Power Connection ............................................................7-6
7.2.4 Removing the Card Stack...........................................................................................7-7
7.3 Replacing a Board ...............................................................................................................7-8
7.4 Replacing the Card Stack into the Card Cage.....................................................................7-9
7.5 Replacing the Turbo Controller Board ...............................................................................7-10
7.5.1 Removing the Turbo Controller Board ......................................................................7-11
7.5.2 Installing the Turbo Controller Board ........................................................................7-12
7.6 The Touch Screen and Control Panel Assemblies ............................................................7-12
7.6.1 Removing the Touch Screen Assembly....................................................................7-13
7.6.2 Replacing the Touch Screen Assembly....................................................................7-15
7.6.3 Removing the Control Panel Assembly.....................................................................7-16
7.6.4 Replacing the Control Panel Assembly.....................................................................7-17
DRAFT 1/27/03
xvi
Model 979 Helium Mass Spectrometer Leak Detector
Section 8. ...................................................... Internal High Speed Turbo and Mechanical Pumps 8-1
8.1 Removing the Turbo Pump .................................................................................................8-1
8.1.1 Moving the Spectrometer Tube Assembly ..................................................................8-2
8.1.2 Removing the Turbo-to-Spec Tube Manifold ..............................................................8-4
8.1.3 Removing the Power and Valve Block Connections...................................................8-5
8.2 Replacing the Turbo Pump ..................................................................................................8-6
8.2.1 Examining and Cleaning Centering Rings, O-rings and the Manifold.........................8-6
8.2.2 Replacing the Turbo Pump .........................................................................................8-7
8.2.3 Replace the Turbo-to-Spec Tube Manifold.................................................................8-8
8.2.4 Replacing the Spectrometer Tube ..............................................................................8-9
8.3 Replacing the Mechanical Pumps......................................................................................8-10
8.3.1 Examining and Cleaning the Centering Ring and O-Ring.........................................8-13
8.3.2 Replacing the Mechanical Pumps.............................................................................8-14
8.4 Changing the Mechanical Pump Fluid ...............................................................................8-14
8.5 Replacing Tip Seals in Dry Mechanical Pumps .................................................................8-14
Section 9. Calibration and Manual Tuning ......................................................................................9-1
9.1 Calibrate the 979 .................................................................................................................9-1
9.2 M anual Tuning.....................................................................................................................9-2
9.2.1 Manual Tuning using the Front Panel Touch Screen..................................................9-2
9.2.2 Manual Tuning using the Serial Port...........................................................................9-4
9.3 Gauge Calibration Procedures.............................................................................................9-6
9.3.1 System Pressure Gauge Calibration Procedure.........................................................9-7
9.3.1.1 Vacuum (Low Pressure) Calibration ...............................................................9-7
9.3.1.2 Atmospheric Calibration ................................................................................. 9-8
9.3.2 Test Port Pressure Thermocouple Gauge C alibration Procedure...............................9-8
9.3.2.1 Vacuum (Low Pressure) Calibration ...............................................................9-9
9.3.2.2 Atmospheric Calibration ................................................................................. 9-9
Section 10. Leak Checking for Reliability ....................................................................................... 10-i
10.1 General Suggestions for Leak Checking .........................................................................10-i
Appendix A. Assembly Drawings and Bills of Materials ..................................................................A-1
Appendix B. 979 COM Cable ..........................................................................................................B-1
Appendix C. 979 Spare Parts List .................................................................................................. C-1
Index .................................................................................................................................................. 1
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Model 979 Helium Mass Spectrometer Leak Detector
List of Figures
Figure Description Page
1-1 979 Front Panel Displays and Controls ..............................................................................1-1
1-2 979 Rear Panel...................................................................................................................1-3
1-3 979 System Control and Communication Panel .................................................................1-3
1-4 979 Interior: Front View.......................................................................................................1-4
1-5 979 Interior: Side View Card Cage .....................................................................................1-5
1-6 979 Interior: Side View Valve Block and Internal Calibrated Leak......................................1-6
2-1 Test Port with Blank-Off Flange Cap ..................................................................................2-1
2-2 Centering Ring with O-ring..................................................................................................2-2
2-3 O-ring and Centering Ring on Test Port .............................................................................2-3
2-4 Test Port with Connected Device........................................................................................2-3
3-1 979 Front Panel ..................................................................................................................3-1
3-2 Molex Connector on Touch Panel Assembly......................................................................3-2
3-3 Front Panel Ground Strap...................................................................................................3-3
3-4 Ground Strap Removal from Front Panel ...........................................................................3-3
3-5 Rear Panel Removal...........................................................................................................3-5
3-6 Side Panel Removal ...........................................................................................................3-6
3-7 Front Panel PCB Harness Connector. ................................................................................3-8
4-1 979 Side View: Removal of Valve Block Coil and Plunger Assembly.................................4-1
4-2 979 Side View.....................................................................................................................4-2
4-3 End Cap and Valve Stem....................................................................................................4-3
4-4 Valve Stem with End Cap Removed...................................................................................4-3
4-5 Valve Stem Removal ..........................................................................................................4-4
4-6 V7 Valve Block Power Connector Removal........................................................................4-4
4-7 Slotted Post on Coil and Plunger Assembly .......................................................................4-5
4-8 Securing the Coil to Loosen Plunger Assembly..................................................................4-5
4-9 979 Side View: End Cap, Valve Stem, and Coil and Plunger Assembly Removed............4-6
4-10 Elbow Flat Secured with Crescent Wrench.........................................................................4-7
4-11 Loosening Leak with Open W rench....................................................................................4-7
4-12 Removal of Calibrated Leak................................................................................................4-8
4-13 Elbow after Removal of Calibrated Leak.............................................................................4-9
4-14 Connecting Leak with Open Wrench ................................................................................4-10
4-15 Calibrated Leak Strap Replacement.................................................................................4-10
4-16 Top of Plunger..................................................................................................................4-12
4-17 Bottom of Plunger.............................................................................................................4-13
4-18 Placement of Plunger Assembly into Coil.........................................................................4-14
4-19 Coil and Plunger Assembly Replacement.........................................................................4-15
4-20 Positioning Valve Stem onto Coil and Plunger Assembly.................................................4-15
4-21 End Cap Replacement......................................................................................................4-16
5-1 Spectrometer Tube and Turbo Pump .................................................................................5-2
5-2 Ground Cable and Screw for Removing Connectors..........................................................5-3
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Model 979 Helium Mass Spectrometer Leak Detector
5-3 Wing Nut Under Shelf.........................................................................................................5-3
5-4 NW-25 Quick Clamp on Turbo-to-Spec Tube Manifold......................................................5-4
5-5 O-ring Inspection ................................................................................................................5-5
5-6 Button TC, Spectrometer Tube, and Turbo Pump..............................................................5-7
5-7 Connector Removal............................................................................................................5-8
5-8 Phillips Screws on Button TC Assembly.............................................................................5-8
5-9 Flange Cap and Center Post on Button TC Assembly .......................................................5-9
5-10 Sensing Wire ....................................................................................................................5-10
5-11 Flange Cap Grooves.........................................................................................................5-11
5-12 Ion Source, Spectrometer Tube, and Turbo Pump...........................................................5-12
5-13 Ion Source Removal ......................................................................................................... 5-13
5-14 Alignment Pin.................................................................................................................... 5-14
5-15 Alignment Hold and Ground Slit Plate in Ion Source Cavity.............................................5-14
5-16 Ion Source Insertion..........................................................................................................5-15
5-17 Alignment of Flange Cap Grooves with Ion Source Center Legs .....................................5-16
5-18 Spectrometer Tube and Turbo Pump ...............................................................................5-17
5-19 Preamplifier Removal ....................................................................................................... 5-18
5-20 Preamplifier Slot and Alignment Pin ................................................................................. 5-19
5-21 Alignment of Flange Cap Grooves with Preamplifier Legs...............................................5-19
5-22 Spectrometer Tube and Turbo Pump ...............................................................................5-21
5-23 Ground Cable and Screw ................................................................................................. 5-22
5-24 Wing Nut under Shelf........................................................................................................5-22
5-25 NW-25 Quick Clamp on Turbo-to-Spec Tube M anifold ....................................................5-23
5-26 Magnet Body Bracket Screws . ..........................................................................................5-24
5-27 Spectrometer Tube Magnet Assembly Slotted Screws ....................................................5-25
5-28 Sliding the Magnet Assembly off the Spectrometer Tube.................................................5-25
5-29 Phillips Screws on Button TC Assembly...........................................................................5-26
5-30 Flange Cap, Center Post, and Button TC.........................................................................5-26
5-31 Button TC w ith Flange Cap and Sensing Wire .................................................................5-27
5-32 Removal of Ion Source from Spectrometer Tube.............................................................5-28
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5-33 Ion Source and Alignment Pin .......................................................................................... 5-28
5-34 Ion Source Cavity .............................................................................................................5-29
5-35 Ground Slit Plate...............................................................................................................5-29
5-36 Removal of Preamplifier ...................................................................................................5-30
5-37 Deflecting Magnetic Pole Piece Slotted Screws...............................................................5-31
5-38 O-ring Removal from Deflecting Magnetic Pole Piece......................................................5-31
5-39 Removal of Second Deflecting Magnetic Pole Piece........................................................5-32
5-40 Discolored Ground Slit Plate.............................................................................................5-32
5-41 Discolored Deflecting Magnetic Pole Piece......................................................................5-33
5-42 VacuSolv Cleaning Wipes ................................................................................................5-33
5-43 O-ring Inspection ..............................................................................................................5-34
5-44 Replace the Preamplifier ..................................................................................................5-35
5-45 Flange Cap Grooves Aligned with Preamplifier Legs.......................................................5-36
5-46 Insertion of Ground Slit Plate in Ion Source Cavity...........................................................5-36
5-47 Properly Inserted Ground Slit Plate ..................................................................................5-37
5-48 Ion Source Alignment Pin ................................................................................................. 5-38
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Model 979 Helium Mass Spectrometer Leak Detector
5-49 Flange Cap Grooves Aligned with Ion Source Legs .........................................................5-38
5-50 Button TC..........................................................................................................................5-39
5-51 Flange Cap Grooves Aligned with Button TC Center Post Key........................................5-40
5-52 Magnet Assembly Bracket Screws ...................................................................................5-40
5-53 Set Screw and GA Pole Piece ..........................................................................................5-41
5-54 Screws for Mounting Magnet Assembly to Spectrometer Tube........................................5-42
6-1 Test Port Thermocouple Gauge, P lug, and Valve Block....................................................6-2
6-2 Test Port Thermocouple Gauge O-ring and Backing Ring ................................................6-2
6-3 Test Port Thermocouple Gauge O-Ring amd Backing Ring...............................................6-3
7-1 979 Interior: Side View of Card Cage .................................................................................7-1
7-2 979 Circuit Boards in Card Cage........................................................................................7-2
7-3 Card Cage Bracket and Connectors on Front of Boards....................................................7-3
7-4 Shared Power Cable...........................................................................................................7-4
7-5 Connectors on Rear of Boards ...........................................................................................7-5
7-6 Wire to CPU Power Connection..........................................................................................7-5
7-7 Boards Partially out of Card Cage ......................................................................................7-6
7-8 CPU Power Connector........................................................................................................7-6
7-9 Card Stack Removed from Card Cage............................................................................... 7-7
7-10 Boards in Card Cage .......................................................................................................... 7-8
7-11 Card Cage Interior ..............................................................................................................7-9
7-12 Turbo Controller Board .....................................................................................................7-11
7-13 Touch Screen Assembly...................................................................................................7-13
7-14 Control Panel Assembly (Right)........................................................................................7-14
7-15 Control Panel Assembly (Right)........................................................................................7-17
8-1 Turbo Pump ........................................................................................................................8-1
8-2 Spectrometer Tube and Turbo Pump .................................................................................8-2
8-3 Wing Nut .............................................................................................................................8-3
8-4 NW-25 Quick Clamp on Turbo-to-Spec Tube Manifold ......................................................8-4
8-5 NW-25 and NW-40 Quick Clamp on Turbo-to-Spec Tube Manifold...................................8-4
8-6 Remove the Turbo Power Connection................................................................................8-5
8-7 Inspecting an O-ring............................................................................................................8-6
8-8 Remove the Turbo Power Connection................................................................................8-7
8-9 Turbo-to-Spec Tube Manifold Connections........................................................................8-8
8-10 Connections at the Top of the Mechanical Pump .............................................................8-11
8-11 Connection at the Bottom of the Pump to Exhaust...........................................................8-11
8-12 One Mechanical Pump on a Cart......................................................................................8-12
8-13 Inspecting an O-ring..........................................................................................................8-13
9-1 Manual Spectube Tuning Screen........................................................................................9-2
9-2 Gauge Calibration Screen...................................................................................................9-6
9-3 979 Touch Panel Home Screen..........................................................................................9-7
B-1 979 COM Cable Wiring Diagram ........................................................................................B-1
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Model 979 Helium Mass Spectrometer Leak Detector
List of Tables
Table Description Page
9-1 Example: Setting the REPELLER Parameter using the Manual Spectube Tuning Screen 9-3
9-2 Example: Setting the REPELLER Parameter Value using J12 Diagnostic Port ................ 9-5
A-1 Assembly Drawings Included .............................................................................................A-1
A-2 Bills of Materials Included ..................................................................................................A-1
B-1 Summary Table of Non-Isolated I/O ..................................................................................B-1
C-1 979 Spare Parts ................................................................................................................C-1
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Model 979 Helium Mass Spectrometer Leak Detector
Section 1. System Overview
The V arian Model 979 is a portable wide-rang e Helium Mass Spectrometer Leak Detector. It
is comprised of a turbomolecular high vacuum pump, spectrometer tube, valve block,
Varian Vacuum Technologies’ Platform leak detecto r el e ctronics, a n d a n op e rator interface
in a rugged housing. The 979 is available as a stand-alone, bench-mount unit or as a single
or dual, dry or oil sealed mechanically pumped leak testing station on a cart.
The 979 uses Varian Vacuum Technologies’ Platform leak detector electronics architecture
to operate the spectrometer assembl y, control the mechanical and high vacuum pumps,
control the valve block, and provide leak rate and syst em status information to the operator
interface. The Platf orm is a collectio n of printed c ircuit boards th at operate usi ng the PC/1 04
Bus Structure to perform the various functions of a helium mass spectrometer leak detector.
1.1 Front Panel Displays and Controls
The 979 front panel leak rate display and control buttons are locat ed on the front right-hand
side of the leak detector (Figure 1-1). The panel features large, color coded and clearly
labeled buttons, and a large, easy to read bar graph display.
A touch panel display for the initial setup and configuration of the leak detector is located
on the left of the front panel. The touch panel menus also include some service operations.
If you need additional information abo ut operations of the 979, see the Model 979
Instruction Manual.
Audio Volume
Control
Sniffer
On/Off
Pressure
Displays
Zero
Leak Rate
Display
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Touch
Panel
Figure 1-1 979 Front Panel Displays and Controls
Key
Switch
Standard
Read
Leak
Calibrate
Vent
Test/Hold
1-1
1.1.1 Key Switch
The 979 Key Switch allows three different levels of access to the touch panel system
controls—RUN, SET-UP or SER VICE. Two di fferent keys are provi ded with the le ak detector :
❑ Key T009 operates the switch in RUN, SET-UP or SERVICE positions.
The T009 key is intended for service personnel and those who are very familiar with
the operation of the unit. Operations such as manually chang ing th e valv es can only
be performed when the key switch is in the SERVICE position. No changes to the
operating parameters are allowed when the key switch is in the RUN position.
❑ Key T008 operates the switch in either the RUN or SET-UP positions.
The T008 key is intended for use by a line supervisor or engineer and allows most
parameters to be changed, but does not allow any operation that could damage the
unit. No changes to the operating parame ters are allowed when the key switch is in
the RUN position.
Model 979 Helium Mass Spectrometer Leak Detector
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1-2
Model 979 Helium Mass Spectrometer Leak Detector
1.2 Rear Panel
The rear panel of the 979 (Figure 1-2) includes power and communications connections as
well as a manifold for connection to a mechanical pump.
Foreline
Pump
Connection
Communication Connections
Figure 1-2 979 Rear Panel
1.2.2 System Control and Communication Panel
The system control and communication panel (Figure 1-3) is located on the lower left
section of the rear panel.
Sniffer Inlet
Foreline Pump
Connection
Power
Connections
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I/O Connector
Remote Control Input
Roughing Valve /
Compression Box
Control
System VentPort
Figure 1-3 979 System Control and Communication Panel
1-3
Model 979 Helium Mass Spectrometer Leak Detector
1.3 Inside the Model 979
1.3.1 Inside Front View
Most serviceable parts are accessed from the front of the leak detector (Figure 1-4).
Spectrometer Tube
Ground Strap
Spectrometer
Tube
Thermocouple
Gauge
Test
Port
Valve Block
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(to Touch Screen Panel Assembly) (to Inside Front Panel)
1-4
Front Panel
Display Harness
Turbo
Controller Board
Turbo Pump
Ground Strap
Figure 1-4 979 Interior: Front View
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