E7340A, 2 to 85 GHz
E7350A, 2 to 110 GHz
Key features:
• Broad frequency coverage, from
45 MHz to 110 GHz, in a single
sweep
• Band switching performed internally by the 8510XF
• Ability to accurately control power
at test ports with power control
range of greater than 20 dB at
110 GHz
• New test heads designed for convenient on-wafer and coaxial
measurements
• Full-frequency calibrations supported on-wafer and in coax using
a new 1.0 mm coaxial calibration
kit
The Agilent Technologies 8510XF
family of systems provides the best
overall performance to meet your new
design and test challenges in millimeter-wave applications.
The 8510XF systems have been
designed to make fully- calibrated,
single-sweep measurements of broadband devices to 110 GHz, in 1.0 mm
coax. By building on the 8510 network analyzer’s capabilities, the
8510XF provides the highest measurement performance in frequency
coverage, dynamic range, and measurement accuracy.
With the low-frequency extension
(Option 005), the 8510XF extends its
low-end frequency from 2 GHz down
to 45 MHz, providing frequency coverage from 45 MHz up to 110 GHz in a
single sweep. Other models are available to sweep from 45 MHz to 85 GHz
and from 2 GHz to 85 GHz.
By adding a wafer probing station
with 1.0 mm probes, you can perform
fully-calibrated on-wafer measurements to 110 GHz.
Agilent 8510XF Vector Network Analyzer
Single-Connection, Single-Sweep Systems
Product Overview
Agilent 8510XF vector network analyzer providing new
capabilities for broadband measurements, on-wafer or in
1.0 mm coax, microwave and millimeter-wave applications.
Discontinued Product Information
— For Support Reference Only —
Information herein, may refer to products/services no longer supported.
We regret any inconvenience caused by obsolete information. For the
latest information on Agilent’s test and measurement products go to:
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2
On-wafer or in 1.0 mm coax
Convenient on-wafer calibrations and
measurements with 1.0 mm probe
The Agilent 8510XF system is
designed for convenient on-wafer
measurements. The new test heads
are designed especially for mounting
on top of the probe positioners in a
wafer probe configuration. This configuration allows the test heads to
move with the probe tips so that
there is no relative movement
between the two. This prevents RF
cable flexing, which improves measurement performance.
Signal conditioning and power amplification to drive the millimeter components have been moved out of the
system rack and integrated into the
test heads. This allows cable connection of the system rack to the test
head without affecting performance
and still provides the required signal
levels needed to drive the test heads
to achieve maximum performance.
With the test heads placed closer to
the probe tips, RF cable insertion loss
is minimized, which results in excellent performance at the probe tips up
to 110 GHz.
To complement the 8510XF, wafer
probing stations and accessories are
available from Cascade Microtech
Inc., Beaverton, Oregon, U.S.A.
Figure 1. System configuration for wafer probing to 110 GHz using a Cascade Microtech
wafer probing station and ACP110 probes
Figure 2. ACP110 probes with a 1.0 mm connector interface from Cascade Microtech
enable single touchdown probing from 45 MHz to 110 GHz
Millimeter
controller
8510C
Test head
83651B
83621B
3
Millimeter-wave measurements
made in 1.0 mm coax
You can now perform fully errorcorrected measurements to 110 GHz
in coax with the new 8510XF system
and 1.0 mm calibration kit. Making
measurements in 1.0 mm coax delivers
uncompromised performance with
improved productivity over the fullfrequency band, compared to making
banded waveguide measurements.
Because of the insertion loss of the
cables, keeping RF cable length short
is extremely critical for achieving
high performance up to 110 GHz. To
minimize the RF cable length, the
8510XF measurement setup for 1.0 mm
coax is configured with the test heads
placed closely to the device-undertest (DUT) or test fixture.
Port power control
When performing on-wafer measurements, it is important to control the
amount of power delivered to the
wafer-under-test to avoid damaging it
with excessive input power. Power
control in the 8510XF system is
achieved through port power leveling.
Without leveling, power at the test
port can vary up to 15 dB over the
full range, subjecting the wafer-undertest to different RF power levels at
different frequencies. With leveling
in the 8510XF, test port power variation is typically less than 1 dB over
the full frequency sweep, with a control range of greater than 20 dB at
110 GHz. This control range can be
increased if a smaller portion of the
frequency span is used.
Figure 3. System configuration for measurements to 110 GHz in 1.0 mm coax
Figure 4. An example of leveled and unleveled port power
8510C
MM
Controller
DUT
Test head
83651B
83621B
Port
power
(dBm)
Leveling
range
+15
+10
+5
0
-5
-10
-15
-20
-25
-30
-35
Unleveled port power
10 20 30 40 50 60 70 80 90 100 110
Frequency (GHz)
Leveled port power
4
Broadband measurements
Broadband coverage in a single sweep
Covering a wide frequency range in
millimeter-wave has been limiting due
to the frequency bandwith of each
waveguide band. Until now, millimeterwave device measurements were
made in narrow bands requiring multiple setups and calibrations.
The recent development by Agilent
Technologies of ultra broadband components enables us to offer measurement systems for measuring broadband devices over a wide frequency
range, 45 MHz to 110 GHz, with a single connection, in one frequency
sweep. These components include the
1.0 mm coaxial coupler and the 1.0 mm
coaxial signal combiner. The coaxial
couplers are placed directly on the test
ports, with the signal combiners positioned before them. This arrangement
significantly improved broadband
S-parameter measurement accuracy
and greatly reduced the effect of
insertion loss on the calibrated
performance.
All frequency band switching is performed internally by the 8510XF
firmware, making it extremely convenient to measure broadband
devices.
Full-frequency calibration reduces
setup time
By performing a calibration over the
system’s full frequency range, 45 MHz
to 110 GHz, you are able to perform
fully error-corrected measurements
on broadband devices with a single
setup. Productivity is improved
because you no longer need to connect and disconnect banded coaxial
test sets or waveguide modules as
measurements move from one frequency band to the next. In addition,
the system requires minimal training,
making it suitable for first-time users
as well as experienced users.
Figure 5. With a single connection, in one frequency sweep, broadband measurement
of a high-pass filter was made over the frequency range of 2 to 110 GHz.
Figure 6. With a single touchdown, an on-wafer discrete InP HEMT (High Electron
Mobility Transistor) was measured in a single-sweep, displaying low frequency gain
of 15 dB and cutoff frequency above 100 GHz.
5
Power measurements made simple
Since the 8510XF system already
comes with power-leveling calibration, the system is ready for power
measurements using port power control. By setting and controlling power
level at the test ports, performing
power sweeps has never been easier.
You no longer need to perform a
power flatness calibration each time a
power measurement is needed.
Simply select power domain (hardkey
DOMAIN, then softkey Power); the system is now sweeping in power at a
CW frequency.
One of the other key benefits of power
leveling of the 8510XF system, is the
ability to measure the absolute power
and gain compression of amplifiers.
Since the input power level to an
amplifier is kept constant, the 1-dB
gain compression point is easily identified by simply displaying S21 in
power domain, as shown in Figure 7.
Time domain (Option 010)
With the time domain option, data
from transmission or reflection measurements is converted from the frequency domain to the time domain
using the inverse Fourier transform
and is presented on the CRT display.
The time domain response shows the
measured parameter value versus
time.
Upgrades available to increase
your measurement capabilities
Any existing 8510-based system can
be upgraded to an 8510XF to meet
your new design and test challenges.
Preconfigured upgrades are available
for standard 8510 systems. These systems include 85107B, 85106C/D and
85109C. Each has upgrade model
numbers to convert the system to an
85 GHz or 110 GHz system. All upgrade
packages include hardware and
firmware upgrades and on-site installation. Customized upgrades are available for other system configurations.
Figure 7
Figure 8. Various upgrades are available to increase measurement capabilities.
8510XF
system
(2 to 85 GHz)
E7345A
E7346A
E7347A
85107B
85109C
85106C
85106C with Option 002
85106D
85106C with Option 001 and 002
85106D with Option 001
85109C with Option 002
E7355A
E7356A
E7357A
8510XF
system
(2 to 110 GHz)
Other system
configurations
6
1.0 mm accessories
The 1.0 mm connector is an IEEE
industry standard connector with a
cutoff frequency above 120 GHz. The
connector utilizes an air dielectric
interface for highest accuracy and
repeatability. The coupling diameter
and thread size were chosen to maximize strength, increase durability,
and provide highly repeatable interconnects.
1.0 mm calibration kits
The Agilent 85059A is a 1.0 mm calibration/ verification kit designed for
vector network analyzer systems
operating over the frequency range of
45 MHz to 110 GHz. The opens, shorts
and loads in this kit were optimized
to provide accurate calibrations over
the specified frequency range. For
best results, the calibration techniques recommended are the openshort-load-thru (OSLT) calibration
from 45 MHz to 50 GHz, and the offset-shorts calibration from 50 GHz to
110 GHz, all in one calibration
sequence.
1.0 mm cables
The 11500I/J/K/L series of 1.0 mm
coaxial cables are available for connecting test ports to devices, fixtures
or probe tips with 1.0 mm connectors
for frequency coverage from dc to
110 GHz. Performance data of 1.0 mm
cables will equal or exceed the following, at frequencies up to 110 GHz:
Figure 9. Agilent 85059A, 1.0 mm calibration/verification kit
Figure 10. 1.0 mm accessories: (a) opens, shorts; (b) female-to-female test port cable;
(c) 1.0 mm coax to V-band or W-band waveguide adapters; (d) 1.0 mm in-series adapters
Cable Cable length Return loss Insertion loss
11500I (F-F) 8.8 cm/3.45 in 17 dB min. dc to 50 GHz 1.2 dB max
50 to 75 GHz 1.4 dB max
75 to 110 GHz 1.7 dB max
11500J (M-F) 16.0 cm/6.30 in 17 dB min. dc to 50 GHz 2.25 dB max
50 to 75 GHz 2.5 dB max
75 to 110 GHz 3.2 dB max
11500K (M-F) 20.0 cm/7.87 in 16 dB min. 3.5 dB
11500L (M-F) 24.0 cm/9.45 in 16 dB min. 3.8 dB
a
d
c
b
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