Agilent E7350A Product Overview

E7340A, 2 to 85 GHz
E7350A, 2 to 110 GHz

Key features:

• Broad frequency coverage, from
45 MHz to 110 GHz, in a single
sweep

• Band switching performed inter­nally by the 8510XF

• Ability to accurately control power
at test ports with power control
range of greater than 20 dB at
110 GHz

• New test heads designed for con­venient on-wafer and coaxial
measurements

• Full-frequency calibrations sup­ported on-wafer and in coax using
a new 1.0 mm coaxial calibration
kit

The Agilent Technologies 8510XF
family of systems provides the best
overall performance to meet your new
design and test challenges in millime­ter-wave applications.

The 8510XF systems have been
designed to make fully- calibrated,
single-sweep measurements of broad­band devices to 110 GHz, in 1.0 mm
coax. By building on the 8510 net­work analyzer’s capabilities, the
8510XF provides the highest meas­urement performance in frequency
coverage, dynamic range, and meas­urement accuracy.

With the low-frequency extension
(Option 005), the 8510XF extends its
low-end frequency from 2 GHz down
to 45 MHz, providing frequency cover­age from 45 MHz up to 110 GHz in a
single sweep. Other models are avail­able to sweep from 45 MHz to 85 GHz
and from 2 GHz to 85 GHz.

By adding a wafer probing station
with 1.0 mm probes, you can perform
fully-calibrated on-wafer measure­ments to 110 GHz.

Agilent 8510XF Vector Network Analyzer

Single-Connection, Single-Sweep Systems

Product Overview

Agilent 8510XF vector network analyzer providing new
capabilities for broadband measurements, on-wafer or in

1.0 mm coax, microwave and millimeter-wave applications.

Discontinued Product Information

— For Support Reference Only —

Information herein, may refer to products/services no longer supported.
We regret any inconvenience caused by obsolete information. For the
latest information on Agilent’s test and measurement products go to:

www.agilent.com/find/products

In the US, call Agilent Technologies at 1-800-829-4444

(any weekday between 8am–5pm in any U.S. time zone)

World-wide Agilent sales office contact information is available at:

www.agilent.com/find/contactus

2

On-wafer or in 1.0 mm coax

Convenient on-wafer calibrations and
measurements with 1.0 mm probe

The Agilent 8510XF system is
designed for convenient on-wafer
measurements. The new test heads
are designed especially for mounting
on top of the probe positioners in a
wafer probe configuration. This con­figuration allows the test heads to
move with the probe tips so that
there is no relative movement
between the two. This prevents RF
cable flexing, which improves meas­urement performance.

Signal conditioning and power ampli­fication to drive the millimeter com­ponents have been moved out of the
system rack and integrated into the
test heads. This allows cable connec­tion of the system rack to the test
head without affecting performance
and still provides the required signal
levels needed to drive the test heads
to achieve maximum performance.
With the test heads placed closer to
the probe tips, RF cable insertion loss
is minimized, which results in excel­lent performance at the probe tips up
to 110 GHz.

To complement the 8510XF, wafer
probing stations and accessories are
available from Cascade Microtech
Inc., Beaverton, Oregon, U.S.A.

Figure 1. System configuration for wafer probing to 110 GHz using a Cascade Microtech
wafer probing station and ACP110 probes

Figure 2. ACP110 probes with a 1.0 mm connector interface from Cascade Microtech
enable single touchdown probing from 45 MHz to 110 GHz

Millimeter
controller

8510C

Test head

83651B

83621B

3

Millimeter-wave measurements
made in 1.0 mm coax

You can now perform fully error­corrected measurements to 110 GHz
in coax with the new 8510XF system
and 1.0 mm calibration kit. Making
measurements in 1.0 mm coax delivers
uncompromised performance with
improved productivity over the full­frequency band, compared to making
banded waveguide measurements.

Because of the insertion loss of the
cables, keeping RF cable length short
is extremely critical for achieving
high performance up to 110 GHz. To
minimize the RF cable length, the
8510XF measurement setup for 1.0 mm
coax is configured with the test heads
placed closely to the device-under­test (DUT) or test fixture.

Port power control

When performing on-wafer measure­ments, it is important to control the
amount of power delivered to the
wafer-under-test to avoid damaging it
with excessive input power. Power
control in the 8510XF system is
achieved through port power leveling.
Without leveling, power at the test
port can vary up to 15 dB over the
full range, subjecting the wafer-under­test to different RF power levels at
different frequencies. With leveling
in the 8510XF, test port power varia­tion is typically less than 1 dB over
the full frequency sweep, with a con­trol range of greater than 20 dB at
110 GHz. This control range can be
increased if a smaller portion of the
frequency span is used.

Figure 3. System configuration for measurements to 110 GHz in 1.0 mm coax

Figure 4. An example of leveled and unleveled port power

8510C

MM

Controller

DUT

Test head

83651B

83621B

Port

power

(dBm)

Leveling
range

+15

+10

+5

0

-5

-10

-15

-20

-25

-30

-35

Unleveled port power

10 20 30 40 50 60 70 80 90 100 110

Frequency (GHz)

Leveled port power

4

Broadband measurements

Broadband coverage in a single sweep

Covering a wide frequency range in
millimeter-wave has been limiting due
to the frequency bandwith of each
waveguide band. Until now, millimeter­wave device measurements were
made in narrow bands requiring mul­tiple setups and calibrations.

The recent development by Agilent
Technologies of ultra broadband com­ponents enables us to offer measure­ment systems for measuring broad­band devices over a wide frequency
range, 45 MHz to 110 GHz, with a sin­gle connection, in one frequency
sweep. These components include the

1.0 mm coaxial coupler and the 1.0 mm

coaxial signal combiner. The coaxial
couplers are placed directly on the test
ports, with the signal combiners posi­tioned before them. This arrangement
significantly improved broadband
S-parameter measurement accuracy
and greatly reduced the effect of
insertion loss on the calibrated
performance.

All frequency band switching is per­formed internally by the 8510XF
firmware, making it extremely con­venient to measure broadband
devices.

Full-frequency calibration reduces
setup time

By performing a calibration over the
system’s full frequency range, 45 MHz
to 110 GHz, you are able to perform
fully error-corrected measurements
on broadband devices with a single
setup. Productivity is improved
because you no longer need to con­nect and disconnect banded coaxial
test sets or waveguide modules as
measurements move from one fre­quency band to the next. In addition,
the system requires minimal training,
making it suitable for first-time users
as well as experienced users.

Figure 5. With a single connection, in one frequency sweep, broadband measurement
of a high-pass filter was made over the frequency range of 2 to 110 GHz.

Figure 6. With a single touchdown, an on-wafer discrete InP HEMT (High Electron
Mobility Transistor) was measured in a single-sweep, displaying low frequency gain
of 15 dB and cutoff frequency above 100 GHz.

5

Power measurements made simple

Since the 8510XF system already
comes with power-leveling calibra­tion, the system is ready for power
measurements using port power con­trol. By setting and controlling power
level at the test ports, performing
power sweeps has never been easier.
You no longer need to perform a
power flatness calibration each time a
power measurement is needed.
Simply select power domain (hardkey
DOMAIN, then softkey Power); the sys­tem is now sweeping in power at a
CW frequency.

One of the other key benefits of power
leveling of the 8510XF system, is the
ability to measure the absolute power
and gain compression of amplifiers.

Since the input power level to an
amplifier is kept constant, the 1-dB
gain compression point is easily iden­tified by simply displaying S21 in
power domain, as shown in Figure 7.

Time domain (Option 010)

With the time domain option, data
from transmission or reflection meas­urements is converted from the fre­quency domain to the time domain
using the inverse Fourier transform
and is presented on the CRT display.
The time domain response shows the
measured parameter value versus
time.

Upgrades available to increase
your measurement capabilities

Any existing 8510-based system can
be upgraded to an 8510XF to meet
your new design and test challenges.
Preconfigured upgrades are available
for standard 8510 systems. These sys­tems include 85107B, 85106C/D and
85109C. Each has upgrade model
numbers to convert the system to an
85 GHz or 110 GHz system. All upgrade
packages include hardware and
firmware upgrades and on-site instal­lation. Customized upgrades are avail­able for other system configurations.

Figure 7

Figure 8. Various upgrades are available to increase measurement capabilities.

8510XF

system

(2 to 85 GHz)

E7345A

E7346A

E7347A

85107B
85109C

85106C

85106C with Option 002

85106D

85106C with Option 001 and 002

85106D with Option 001
85109C with Option 002

E7355A

E7356A

E7357A

8510XF

system

(2 to 110 GHz)

Other system

configurations

6

1.0 mm accessories

The 1.0 mm connector is an IEEE
industry standard connector with a
cutoff frequency above 120 GHz. The
connector utilizes an air dielectric
interface for highest accuracy and
repeatability. The coupling diameter
and thread size were chosen to maxi­mize strength, increase durability,
and provide highly repeatable inter­connects.

1.0 mm calibration kits

The Agilent 85059A is a 1.0 mm cali­bration/ verification kit designed for
vector network analyzer systems
operating over the frequency range of
45 MHz to 110 GHz. The opens, shorts
and loads in this kit were optimized
to provide accurate calibrations over
the specified frequency range. For
best results, the calibration tech­niques recommended are the open­short-load-thru (OSLT) calibration
from 45 MHz to 50 GHz, and the off­set-shorts calibration from 50 GHz to
110 GHz, all in one calibration
sequence.

1.0 mm cables

The 11500I/J/K/L series of 1.0 mm
coaxial cables are available for con­necting test ports to devices, fixtures
or probe tips with 1.0 mm connectors
for frequency coverage from dc to
110 GHz. Performance data of 1.0 mm
cables will equal or exceed the follow­ing, at frequencies up to 110 GHz:

Figure 9. Agilent 85059A, 1.0 mm calibration/verification kit

Figure 10. 1.0 mm accessories: (a) opens, shorts; (b) female-to-female test port cable;
(c) 1.0 mm coax to V-band or W-band waveguide adapters; (d) 1.0 mm in-series adapters

Cable Cable length Return loss Insertion loss

11500I (F-F) 8.8 cm/3.45 in 17 dB min. dc to 50 GHz 1.2 dB max

50 to 75 GHz 1.4 dB max

75 to 110 GHz 1.7 dB max

11500J (M-F) 16.0 cm/6.30 in 17 dB min. dc to 50 GHz 2.25 dB max

50 to 75 GHz 2.5 dB max

75 to 110 GHz 3.2 dB max

11500K (M-F) 20.0 cm/7.87 in 16 dB min. 3.5 dB

11500L (M-F) 24.0 cm/9.45 in 16 dB min. 3.8 dB

a

d

c

b

7

1. Maximum insertion loss for a single adapter.

2. At the coaxial port only.

3. Repeatability = 20 log |∆G| where |∆G| = |G m1 - G m2|. This is the difference between two measurements G m1 and G m2 before and
after one disconnect/connect cycle at the coax port. Repeatability depends upon proper torque and pin depth.

Adapters Supplemental characteristics

Connector Frequency Return loss Insertion loss
Type (GHz) better than: better than:

1.0 mm to 1.0 mm adapters

11920A (M) to (M) dc to 110 dc to 20 GHz, –24 dB –0.5 dB
11920B (F) to (F) 20 to 50 GHz, –20 dB
11920C (M) to (F) 50 to 75 GHz, –18 dB

75 to 110 GHz, –14 dB

1.0 mm to 1.85 mm adapters

11921A (M) to (M) dc to 65 –20 dB –0.5 dB
11921B (F) to (F)
11921C (M) to (F)
11921D (F) to (M)

1.0 mm to 2.4 mm adapters

11922A (M) to (M) dc to 50 –20 dB –0.7 dB
11922B (F) to (F)
11922C (M) to (F)
11922D (F) to (M)

1.0 mm to 1.0 mm or 1.85 mm or 2.4 mm adapters

Three series of 1.0 mm coax adapters are available: 11920A/B/C, 11921A/B/C/D and 11922A/B/C/D. They are the

1.0 mm to 1.0 mm, 1.0 mm to 1.85 mm and 1.0 mm to 2.4 mm series, respectively. Performance data of 1.0 mm coaxial

adapters will equal or exceed the following:

Coax-to-waveguide adapters Supplemental characteristics:

Waveguide Frequency Return loss Insertion Repeatability

2,3

number (GHz) better than: loss better typically better

than

1

than:

V281C, 1.0 mm (F) to V-band WR-15 50 to 75 –16 dB –0.8 dB –45 dB

V281D, 1.0 mm (M) to V-band WR-15 50 to 75 –16 dB –0.8 dB –45 dB

W281C, 1.0 mm (F) to W-band WR-10 75 to 110 –16 dB –1 dB –40 dB

W281D, 1.0 mm (M) to W-band WR-10 75 to 110 –16 dB –1 dB –40 dB

1.0 mm coax to V-band or W-band adapters

The Agilent V281C/D and W281C/D are 1.0 mm to V-band and 1.0 mm to W-band series waveguide adapters, respec­tively. These wave guide-to-coaxial adapters are designed for connecting devices, fixtures or probe tips with a wave­guide connection to a coaxial measurement system, and vice versa. Performance data of 1.0 mm coax to V-band or W-band
waveguide adapters will equal or exceed the following:

8

Connector launch Supplemental characteristics

Coax connector Frequency Return loss Insertion loss
type (GHz) better than: better than:

11923A 1.0 mm (F) to dc to 110 –16 dB –1.0 dB

circuit launch (typical)

1.0 mm female connector launch assemblies

The 11923A is a 1.0 mm female con­nector launch designed to thread into
a package or fixture housing to tran­sition a microwave circuit from
microstrip to coaxial connector. The
11923A 1.0 mm female connector has
an air dielectric interface and center
conductor that is supported by a low­loss plastic bead on one end, and a
glass-to-metal seal interface on the
other end. This interface consists of
a 0.162 mm diameter pin that extends
inside the package or fixture for con­nection onto a microwave circuit.

The 11923A is pre-assembled and
supplied with a machining detail for
mounting the launch and assembly
instructions. The user is responsible
for making the connection onto the
circuit card, machining the package,
and installing the connector. If a
quasi-hermetic seal is desired, epoxy
may be applied to threads of the
launch prior to installation. The pro­cedure describing the necessary
dimensions for the package and
installation is provided with the
launch assembly.

Figure 11. A pair of 1.0 mm female con­nector launch assemblies. Left: 1.0 mm
female connector end. Right: package end
with 0.162 mm diameter pin.

9

Agilent 8510XF system performance
Agilent E7340A Option 005 (45 MHz to 85 GHz)

The following specifications describe the system performance of the 8510XF system in the E7340A Option 005 configu­ration, from 0.045 GHz to 85 GHz. The following system configuration was used to generate the specifications:

Test set: Millimeter controller and two test heads, 45 MHz to 85 GHz
RF sources: Agilent 83621B and 83651B synthesized sweepers (one each)
Calibration kit: Agilent 85059A 1.0 mm precision calibration/verification kit
Calibration techniques: SOLT to 50 GHz, and offset-shorts from 50 to 85 GHz

Dynamic range (for transmission measurements)

Frequency range (GHz)

0.045 to 2 2 to 18 18 to 40 40 to 50 50 to 65 65 to 75 75 to 85

Maximum power (in)

measured at port 2 0 dBm 0 dBm +10 dBm +10 dBm –3 dBm –3 dBm –3 dBm

Reference power (out)

at port 1 (nominal) 0 dBm 0 dBm –12 dBm –12 dBm –3 dBm –3 dBm –10 dBm

Minimum power (in)

measured at port 2 –74 dBm –104 dBm –84 dBm –84 dBm –80 dBm –80 dBm –70 dBm

Receiver dynamic range 74 dB 104 dB 94 dB 94 dB 77 dB 77 dB 67 dB

System dynamic range174 dB 104 dB 72 dB 72 dB 77 dB 77 dB 60 dB

Measurement port characteristics

Frequency range (GHz)

RESIDUAL 0.045 to 2 2 to 18 18 to 40 40 to 50 50 to 65 65 to 75 75 to 85

Directivity 30 dB 30 dB 26 dB 24 dB 28 dB 28 dB 28 dB

Source match 27 dB 27 dB 23 dB 21 dB 28 dB 28 dB 28 dB

Load match 27 dB 27 dB 23 dB 21 dB 28 dB 28 dB 28 dB

Reflection tracking ±0.10 dB ±0.10 dB ±0.20 dB ±0.25 dB ±0.30 dB ±0.30 dB ±0.30 dB

Transmission tracking ±0.273 dB ±0.273 dB ±0.429 dB ±0.669 dB ±0.322 dB ±0.340 dB ±0.360 dB

Frequency range (GHz)

RAW (Typical) 0.045 to 2 2 to 18 18 to 40 40 to 50 50 to 65 65 to 75 75 to 85

Directivity 20 dB 20 dB 15 dB 15 dB 13 dB 10 dB 10 dB

Source match 20 dB 20 dB 15 dB 15 dB 13 dB 12 dB 12 dB

Load match 11 dB 11 dB 10 dB 10 dB 10 dB 10 dB 10 dB

1. System dynamic range = Pref –Pmin, where Pref is the nominal or reference power out of port 1 with maximum power delivered from the source and Pmin is the minimum
power into port 2 that can be measured above the peaks of the system’s noise floor (10 dB above the average noise floor). Noise floor is measured with full two-port error
correction and 1024 averages. System dynamic range is the amount of attenuation that can be measured from a 0 dB reference.

10

Measurement uncertainty

Reflection measurements

Magnitude Phase

Magnitude Phase

Magnitude Phase

Magnitude Phase

Figure 12

Transmission measurements

11

Agilent 8510XF system performance
Agilent E7350A Option 005 (45 MHz to 110 GHz)

The following specifications describe the system performance of the 8510XF system in the E7350A Option 005 configu­ration, from 0.045 GHz to 110 GHz. The following system configuration was used to generate the specifications:

Test set: Millimeter controller and two test heads, 45 MHz to 110 GHz
RF sources: Agilent 83621B and 83651B synthesized sweepers (one each)
Calibration kit: Agilent 85059A 1.0 mm precision calibration/verification kit
Calibration techniques: SOLT to 50 GHz, and offset-shorts from 50 to 110 GHz

Dynamic range (for transmission measurements)

Frequency range (GHz)

0.045 to 2 2 to 18 18 to 40 40 to 50 50 to 75 75 to 85 85 to 100 100 to 110

Maximum power (in)

measured at port 2 0 dBm 0 dBm +10 dBm +10 dBm 0 dBm 0 dBm 0 dBm 0 dBm

Reference power (out)

at port 1 (nominal) 0 dBm 0 dBm –12 dBm –12 dBm –7 dBm –12 dBm –12 dBm –12 dBm

Minimum power (in)

measured at port 2 –74 dBm –104 dBm –84 dBm –84 dBm –75 dBm –70 dBm –70 dBm –70 dBm

Receiver dynamic range

74 dB 104 dB 94 dB 94 dB 75 dB 70 dB 70 dB 70 dB

System dynamic range174 dB 104 dB 72 dB 72 dB 68 dB 58 dB 58 dB 58 dB

Measurement port characteristics

Frequency range (GHz)

RESIDUAL 0.045 to 2 2 to 18 18 to 40 40 to 50 50 to 75 75 to 85 85 to 100 100 to 110

Directivity 30 dB 30 dB 26 dB 24 dB 28 dB 28 dB 26 dB 26 dB

Source match 27 dB 27 dB 23 dB 21 dB 28 dB 28 dB 26 dB 26 dB

Load match 27 dB 27 dB 23 dB 21 dB 28 dB 28 dB 26 dB 26 dB

Reflection tracking ±0.10 dB ±0.10 dB ±0.20 dB ±0.25 dB ±0.30 dB ±0.30 dB ±0.30 dB ±0.30 dB

Transmission tracking

±0.273 dB ±0.273 dB ±0.429 dB ±0.669 dB ±0.322 dB ±0.360 dB ±0.451 dB ±0.451 dB

Frequency range (GHz)

RAW (Typical) 0.045 to 2 2 to 18 18 to 40 40 to 50 50 to 75 75 to 85 85 to 100 100 to 110

Directivity 20 dB 20 dB 15 dB 15 dB 11 dB 11 dB 11 dB 8 dB

Source match 20 dB 20 dB 15 dB 15 dB 11 dB 11 dB 11 dB 10 dB

Load match 11 dB 11 dB 10 dB 10 dB 10 dB 10 dB 9 dB 9 dB

1. System dynamic range = Pref –Pmin, where Pref is the nominal or reference power out of port 1 with maximum power delivered from the source and Pmin is the minimum
power into port 2 that can be measured above the peaks of the system’s noise floor
(10 dB above the average noise floor). Noise floor is measured with full two-port error correction and 1024 averages.
System dynamic range is the amount of attenuation that can be measured from a 0 dB reference.

12

Measurement uncertainty

Reflection measurements

Magnitude Phase

Magnitude Phase

Magnitude Phase

Magnitude Phase

Figure 12

Transmission measurements

13

Cascade Microtech, Inc.

Probing equipment from Cascade
Microtech, Inc.

The Cascade Microtech product line
includes millimeter-wave probes,
probe stations, autoprobers, calibra­tion standards, measurement soft­ware and application support for all
Agilent Technologies vector network
analyzers. Combining Cascade
Microtech probe products with
Agilent analyzers provides all the
tools needed for complete RF probing
solutions through 110 GHz.

A complete on-wafer, S-parameter
test system configured for 45 MHz to
110 GHz consists of the new 8510XF
coupled directly with wafer probe
positioners on a Cascade Microtech
prober. Wafer probes and calibration
standards to match the test devices
specified by the customer round out
the equipment accessories. Customer­selected calibration kits or software
complete the requirements for accu­rately corrected S-parameter meas­urements.

Positioners

For on-wafer measurements, specially­designed X-Y-Z positioners conve­niently hold the 8510XF test heads,
the 11500J minimum-length cables,
and the ACP110 wafer probes, provid­ing micron motion control without
measurement-degrading cable strain
and losses. Mounting the test heads
onto the X-Y-Z positioners allows for
1-micron placement accuracy, and
completely eliminates errors caused
by cable flexure. This solution pro­vides better than –60 dB connection
repeatability up to 110 GHz.

For coaxial measurements, module
test stations (MTS) are available to
use with the 8510XF system.
Depending on your measurement
needs, the MTS-1000 series can be
configured with either one or both
X-Y-Z positioners (a positioner is
shown above). Each positioner has a
X or Y movement of ±6 inches.

Cascade Microtech probing systems

A full range of Cascade RF probers is
offered to fit all customer needs. All
RF probers are designed specifically
for thin wafer usage with easy load­ing stages, and offer patented auxil­iary chucks that handle the calibra­tion standards. Probers are classified
as manual, semi-automatic, and fully
automatic.

• A manual probe station requires
the operator to make all position
adjustments manually, using a
microscope to watch the position
of the probe tips.

• Semi-automatic probe stations can
be programmed with a wafer map,
so that the system automatically
locates and measures every device
on the wafer. (Or, in “indexing”
mode, the system measures the
first device, and waits for the
operator to push a button before
it proceeds to the next device.)

• Fully automatic probe stations are
able to load a series of wafers from
a cassette, automatically measuring
each DUT on each wafer (using a
wafer map) before replacing the
wafer in the cassette.

In automatic and semi-automatic
probe stations, the adjustments in the
X, Y, and Z axes are used to put the
test probes into the proper positions
relative to one another; the chuck
then moves the wafer so that the
probe tips are brought into contact
with each device to be tested.

Figure 14. (a) 8510XF test heads; (b) ACP110 wafer probes; (c) 11500J cables; (d) spe­cially designed X-Y-Z positioners to conveniently hold the 8510XF test heads

a

c

a

b

d

14

For general characterization work,
choose the Summit 9101. The Summit
9101 chuck is designed to hold a wide
range of wafer sizes, from single dies
as small as 500 microns to 150-mm
wafers. Fine-pitch lead screws allow
for a manual placement repeatability
under 5 microns on a test device.

For metrology-grade semi-automated
RF measurements, choose the
Summit 12101. Full wafers can be
autoprobed with 1-micron repeatabil­ity. Fully automatic VNA calibrations
repeat to under 0.03 vector magni­tude, assuring data integrity.

For extensive temperature-dependent
characterization, choose the Summit

12651. The Summit 12651, with
patented MicroChamber, yields fast,
frost-free measurements from –65° C
to +200° C in a light- and EMI/RFI­tight enclosure.

For exhaustive characterization,
process monitoring or production
device testing, choose the PS21 RF
Autoprober. The PS21 offers 75 mm
to 200 mm wafer cassette handling,
Micro- Chambers with double-wall
EMI/RFI shielding, and a full range
of built-in temperature options from
–55° C to +200° C.

Wafer probes and calibration standards

The ACP110 series wafer probes
offers Ground-Signal-Ground (GSG)
standard tips with pitches ranging
from 50 microns to 150 microns to
cover all specific test needs. The
ACP110-L, with insertion loss <1.0 dB,
is designed specifically for S-parame­ter, noise parameter and load pull
disciplines while the ACP110-C is
used for thermal characterization
from –65° C to +200° C.

Cascade offers two mode-free imped­ance standard substrates (ISSs) for
full 2-port ACP110 calibration sup­port. Each ISS offers multiple sets of
standards, verified to compare favor­ably with the rigorous NIST multi-line
TRL calibration methodology.
Calibration reproducibility between
ISSs is better than –50 dB due to the
uniformity of thin film standards. W­band ISS part number 104-783 covers
ACP110 with 75-micron to 150­micron pitches, while the part num­ber 104-909 ISS is used for 50-micron
pitch probes. The companion diskette
(part number 101-338) provides
downloadable 8510 cal kits support­ing SOLT, LRM and TRL calibrations.

Computer-aided calibration and system
support

Cascade’s WinCal PC software utili­ties enhance your 8510XF on-wafer
system performance. WinCal provides
tools that can automatically monitor
total system drift and check the per­formance of each probe. Linked to the
Summit 12651 or PS21 RF, WinCal
provides fully automatic calibrations
shown to repeat better than –56 dB
using the NIST VERIFY program—
extremely useful for over-temperature
S-parameters.

Cascade prober upgrade paths

Numerous upgrades are available to
enhance your existing Cascade RF
prober investments. Depending on
your current measurement setup, you
may need a standard, preconfigured
upgrade or a customized upgrade.
Please consult with a Cascade
Microtech factory representative for
customized system solutions.

For more information contact:

Cascade Microtech, Inc.
2430 NW 206th Ave
Beaverton, OR 97006
[phone]

www.cmicro.com

Cascade RF probers

8510XF East West WinCal

Model Style application ACP110-L ACP110-C positioner positioner software

Summit 9101 Manual General purpose • • 112-960 112-970 VNACAL-WIN-M
Summit 10101 Semi-auto Modeling • • 112-960 112-970 VNACAL-WIN
Summit 11101 Manual General purpose • • 113-120 113-130 VNACAL-WIN-M
Summit 11651 Manual GP thermal • • 113-120 113-130 VNACAL-WIN
Summit 12101 Semi-auto Characterization • • 113-120 113-130 VNACAL-WIN
Summit 12651 Semi-auto Thermal modeling • • 113-120 113-130 VNACAL-WIN
PS21 RF Automatic Production • • SQ-113-120-01 SQ-113-130-01 SP-VNACAL-WIN-01

15

Ordering Information
Agilent 8510XF family single-connection, single-sweep systems

Complete measurement systems

 E7340A complete measurement system, 2 to 85 GHz
 E7350A complete measurement system, 2 to 110 GHz

The following options are available for both systems:

 Option 005 add 45 MHz to 2 GHz low frequency extension
 Option 006 add RF pass thru (provides coupled output of 50 GHz source)1
 Option 010 add time domain
 Option 230 220/240V line voltage operation
 Option W31 add two years additional on-site service

Each complete rack-mounted system consists of the following:

8510C network analyzer
Millimeter-wave subsystem (85 GHz or 110 GHz)
83621B synthesizer
83651B synthesizer
System rack
(Calibration/verification kit and 1.0 mm test port cables are not included and must be ordered separately.)

Factory integration of the 8510XF system integrates all the main system instruments in the system cabinet and fully
tests the system. On-site installation is included, and the entire system carries a full one-year, on-site warranty.

For on-wafer applications, Cascade Microtech provides complete probing systems using the 8510XF. These include both
new probing systems and upgrades to existing Cascade Microtech products. Cascade can also provide on-wafer verifica­tion and probing system training. Once the 8510XF system is verified in coax, Cascade Microtech will verify the system
through its wafer probes.

1.0 mm accessories

The following accessories are available for use with the 8510XF system, but are not included in the system.

 11500I 1.0 mm (f-f) test port cable (8.8 cm)
 11500J 1.0 mm (m-f) test port cable (16.0 cm)

2

 11500K 1.0 mm (m-f) test port cable (20.0 cm)

2

 11500L 1.0 mm (m-f) test port cable (24.0 cm)

2

 85059A DC to 110 GHz precision calibration/verification kit
 V281C 1.0 mm (f) to V-band waveguide adapter
 V281D 1.0 mm (m) to V-band waveguide adapter
 W281C 1.0 mm (f) to W-band waveguide adapter
 W281D 1.0 mm (m) to W-band waveguide adapter
 11920A 1.0 mm (m) to 1.0 mm (m) adapter
 11920B 1.0 mm (f) to 1.0 mm (f) adapter
 11920C 1.0 mm (m) to 1.0 mm (f) adapter
 11921A 1.0 mm (m) to 1.85 mm (m) adapter
 11921B 1.0 mm (f) to 1.85 mm (f) adapter
 11921C 1.0 mm (m) to 1.85 mm (f) adapter
 11921D 1.0 mm (f) to 1.85 mm (m) adapter
 11922A 1.0 mm (m) to 2.4 mm (m) adapter
 11922B 1.0 mm (f) to 2.4 mm (f) adapter
 11922C 1.0 mm (m) to 2.4 mm (f) adapter
 11922D 1.0 mm (f) to 2.4 mm (m) adapter
 11923A 1.0 mm (f) connector launch assembly

1. Option 006 is needed for multiple test sets configuration. Additional test set(s) must have Option 001 installed.
See Agilent 8510 Multiple Test Sets, product note, (literature number 5967-5886E) for additional information.

2. For on-wafer applications, two 11500J/K/L cables are required. One cable for each test port.

16

System upgrades

Upgrades available for existing 8510 systems to 8510XF single-sweep systems

Upgrades for

85107B
85109C

Upgrade consists of two test heads, a millimeter test set controller, an 83621B for LO source, and rack.
It does not include calibration kits or test port cables.

 E7345A upgrade to an 8510XF 85 GHz system
 E7355A upgrade to an 8510XF 110 GHz system

The following options are available for both upgrades:

 Option 005 add 45 MHz to 2 GHz low frequency extension
 Option 006 add RF pass thru (provides coupled output of 50 GHz source for additional test sets.

Additional test set(s) must have Option 001 installed.)

Upgrades for

85106C
85106C with Option 002 (replaced 8350B/83540A with 83621A/B)
85106D

Upgrade consists of two test heads, a millimeter test set controller and an 83651B for RF source. It does not include
calibration kits, test port cables or rack.

 E7346A upgrade to an 8510XF 85 GHz system
 E7356A upgrade to an 8510XF 110 GHz system

The following options are available for both upgrades:

 Option 005 add 45 MHz to 2 GHz low frequency extension
 Option 006 add RF pass thru (provides coupled output of 50 GHz source for additional test sets.

Additional test set(s) must have Option 001 installed.)

Upgrades
from…

… to 85 GHz E7345A

…to 110 GHz E7355A

8510C

Millimeter
subsystem

83651B

83621B

85107B
85109C

85106C
85106C w/Option 002
85106D

E7346A

E7356A

85106C w/ Option 001 and 002
85106D w/ Option 001
85109C w/ Option 002

E7347A

E7357A

Customer
owned
equipment

17

Upgrades for

85106C with Options 001 and 002 (added 8517B, replaced 83621A/B with

83651A/B, and replaced 8350B/83540A with 83621A/B)

85106D with Option 001 (added 8517B and replaced 83621B with 83651B)
85109C with Option 002 (replaced 8350B/83540A with 83621A/B)

Upgrade consists of two test heads and a millimeter test set. It does not include
calibration kits, test port cables or rack.

 E7347A upgrade to an 8510XF 85 GHz system
 E7357A upgrade to an 8510XF 110 GHz system

The following options are available for both upgrades:

 Option 005 add 45 MHz to 2 GHz low frequency extension
 Option 006 add RF pass thru (provides coupled output of 50 GHz

source for additional test sets. Additional test set(s) must have
Option 001 installed.)

Related literature Pub. number

Agilent 8510C Family Network Analyzer, Configuration Guide 5091-8967E
Agilent 8510C Family Network Analyzer, Data Specifications 5091-8484E
Agilent 8510 System Solutions, Color Brochure 5965-8837E
Agilent 8510 Multiple Test Sets, Product Note 5967-5886E
Agilent 11923A 1.0 mm Connector Launch, Product Overview 5968-4315E
Agilent 11920/1/2 A, B, C, D Series 1.0 mm Coaxial Adapters,

Product Overview 5968-4318E

Agilent V/W 281C, D Series Waveguide-to-1.0 mm Coaxial
Adapters, Product Overview 5966-2007E

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