Agilent E5250A Setup Guide

Agilent E5250A
Low Leakage Switch Mainframe

Setup Guide

Contents

Introduction and

Product Description......................... 2

E5250A Low Leakage

Switch Mainframe........................... 3

E5250A Option 001

10 x 12 Matrix Switch..................... 4

Input/Output Cables and
Connector Plates for the E5250A

Option 001......................................... 7

E5250A Option 501

24 (8 x 3) Channel Multiplexer....... 8

T ypical Applications

Hot Carrier Induced

Degradation ................................. 10

Time Dependent Dielectric

Breakdown................................... 11

Input/Output Cables and
Connector Plates for the E5250A

Option 501......................................... 12

Ordering Information ....................... 13

Appendix............................................ 16

Introduction and Product Description

The Agilent E5250A Low Leakage
Switch Mainframe can switch the
measurement ports with less
performance degradation. This
Setup Guide describes the con­figuration for various applica­tions. It also provides necessary
information to order the acces­sory products.

The Agilent 4155C/4156C and
other semiconductor parameter
analyzers and semiconductor
instruments provide high
performance measurement
capability. The Agilent E5250A
expands the single measure­ment station to an automated
measurement system.

The Agilent E5250A can be
configured either for general
parametric measurements
(with Option 001) with up to
48 outputs or for long term
reliability measurements (with
Option 501) with up to 384
channels (4 mainframes).

Option 001
10 x 12 Matrix Switch

For sequential measurement
of many devices on a test
structure, the 10 inputs and
48 outputs provide flexibility
and accuracy: two low leakage
(100 fA) and four standard
inputs for I-V measurements,
two C-V paths with accurate
capacitance compensation; and
two auxiliary inputs for pulsed,
differential voltage and other
measurements.

Option 501
24 (8 x 3) Channel Multiplexer

The Agilent E5250A is ideal
for long term reliability measure­ments with its 384 channel
capability and advanced fea­tures typically found only on
large, more costly dedicated
reliability test systems. Each
set of eight channels has a
multilevel DC bias input. This
allows inexpensive power
supplies to be used for consis­tent stressing. The large number
of channels and low-cost stress
sources allow the customer to
efficiently test hundreds of
devices in parallel resulting in
both cost and time savings, but
still achieve accurate and
consistent results.

2

E5250A Low Leakage Switch Mainframe

The width and height of the
E5250A is same as Agilent
4155C/4156C Semiconductor
Parameter Analyzer. So, you can
easily stack with the instru­ments. The front panel has a
selftest key, power switch, and
LED indicators.

All switch control is executed
by commands via the built-in
GPIB interface. The Agilent
4155C/4156C has control of the
Agilent E5250A (E5252A cards
only) integrated into the front
panel.

Front View

Software

A program disk that includes
utilities and sample routines/
programs is furnished with
Agilent E5250A.

The Capacitance compensation
routine is useful for accurate
measurement with Agilent
4284A.

Rear View

E5250A Rear View

E5250A has 4 card slots for
inserting the switch options.

The rear panel of the mainframe
has 10 input ports. With the switch
module options, you can config­ure a 10 x 48 Matrix Switch or a
96 channel Multiplexer per one
mainframe.

When the mainframe is used as
a matrix switch, 10 input ports
function as 2 low leakage I-V, 4
general I-V, 2 C-V, and 2 HF
ports. With Kelvin triaxial cable,

you can measure low voltage or
small resistance more accu­rately. A Kelvin cable occupies
two adjacent 2 I-V input ports.
When the mainframe is used as
a multiplexer, 6 of 10 input
ports can be used as low leakage
I-V ports, and remaining 4 input
ports are not used.

Agilent ICS

Besides the furnished software,
the Agilent E5230B Interactive
Characterization Software is
available to provide point and
click operation for Agilent
E5250A control.

Relay T est Adapter

If you need to test relays on the
switch cards, Option 301 Relay
Function Test Adapter is
available.

E5250A Option 301
Relay Test Adapter

3

E5250A Option 001
10 x 12 Matrix Switch

E5250A Option 001 has 12
triaxial output channels per
card and forms a 10 x 12 Matrix
Switch configuration with the
mainframe. Up to four Option
001 cards can be installed in the
four card slots.

Two adjacent triaxial connectors
can be used as a Kelvin connec­tion. If all outputs are Kelvin,
then the total number of output
channels is 6.

INPUT

SMU 1

E5250A Option 001 10 x 12 Matrix Switch.

OUTPUT

123456789101112

SMU 2

SMU 3

SMU 4

SMU 5

HF 1

CV 1

SMU 6

HF 2

CV 2

Figure 1. Option 001 block diagram.

4

The following describe items to
consider for complete setting of
the system:

Instruments

Agilent 4155C/4156C Semicon­ductor Parameter Analyzer is
best suited for I-V and quasi­static C-V measurement. For
high frequency C-V measure­ment, the Agilent 4284A is the
best choice.

Switch Options

Select the number of Option 001s
for E5250A by considering
maximum pin count that you
need. Remember that each
Kelvin connection uses two
ports.

Wafer Prober

Select a wafer prober for stable
and accurate low current
measurement. Cascade
Microtech, Inc. is one supplier of
low current probers with maxi­mum 48 pin count. Or, you can
use your prober in a shield box.

16494A

TRIAXIAL CABLE

E5250A

OPT .001

OR

OUTPUT

CONNECTOR PLATE

Figure 2. Cabling to prober.

16495A/B

* FOR CONNECTION INSIDE OF PROBER, PLEASE FOLLOW
YOUR PROBER VENDER'S INSTRUCTIONS.

Prober Shield BoxProber Shield Box

INSULATOR

GUARD

COAXIAL CABLE

8120-4461

SOLDER HERE

SIGNAL (FORCE/SENSE)

PROBER*

LOW LEAKAGE

PROBE CARD

DUT

Cables between Instruments and
E5250A with Option 001

Each I-V instrument furnishes
the triaxial cables. Also, you can
select suitable cable, triaxial, or
Kelvin triaxial, for the Agilent
E5250A input ports from the list
on page 7. For the Agilent 4284A,
you need to use the Agilent
16048D/E test cable with two T­connectors (Agilent P/N 1250-

2405). The cable from ground
unit is not connected through
the E5250A switch.

Figure 3. Typical application for Option 001 (front view).

5

SIDE VIEW OF PROBER SHIELD BOX

4284A WITH OPT. 001, 006

E5250A WITH OPT. 001 x 4

4155C (4156C)

Figure 4. Typical application for Option 001 (rear view).

Connection to Prober

For a dedicated low leakage
prober, you can directly connect
to the triaxial terminals on the
prober. If you use a conventional

recommends to use low-noise
coaxial cable (Agilent P/N 8120­4461 for switch output, 8120­3674 for GNDU). Solder the cable
on both sides.

prober with shield box, you
connect the triaxial cables to the
connector plate (Agilent 16495A/
B) mounted on the shield box.
Then, you connect cables from
the plate to the probe card.

Typical Application for E5250A
Option 001 Matrix Switch

One example of the Option 001
10 x 12 Matrix Switch is general
parametric measurement on
wafer. Figure 4 shows the
interconnection schematic.

Cabling to Prober

Figure 1 shows a cabling ex­ample. For the cable that con­nects the connector plates and
probe/probe card, Agilent

This setup allows you to auto­mate the system to measure the
parameters of devices such as
diodes, MOSFETs, and bipolar
transistors on a test structure
die.

The maximum 48 output channels
should be sufficient for pads on
test structure.

6

Input/Output Cables and Connector Plates for Agilent E5250A Option 001

Agilent 16494A Triaxial Cable

Low noise triaxial cable with male
triaxial connectors on both ends.
Length: 1.5 m, 3 m, and 80 cm. Above
picture shows four Agilent 16494As.

Agilent 16495A Connector Plate with 12
Triaxial Interlock/GNDU.

Half size connector plate with 12
triaxial female connectors, interlock,
and GNDU connector.

Agilent 16494B Kelvin T riaxial Cable

Low noise Kelvin triaxial cable with
sense and force connectors to connect
Agilent 4156C and Agilent E5250A.
Length: 1.5 m and 3 m.

Agilent 16495B Connector Plate with 24
Triaxial Interlock/GNDU.

Half size connector plate with 24 triaxial
female connectors, interlock, and GNDU
connector.

Agilent 16494C Kelvin Triaxial Cable

Low noise Kelvin triaxial cable with
sense and force connectors to connect
Agilent 4142B and Agilent E5250A.
Length: 1.5 m and 3 m.

Agilent 16495E Half Size Blank Plate

Blank plate to use with half size
connector plate to cover opening in
shield box.

Agilent 16048D/E BNC Test Leads

Four-terminal test leads to connect
Agilent 4284A Precision LCR Meter and
E5250A. Length: 2 m (D) and 4 m (E).

7

USER
RESISTOR

LOW
LEAKAGE
I-V INPUT 1

OUTPUT

12345678

USER
RESISTOR

LOW
LEAKAGE
I-V INPUT 2

OUTPUT

910111213141516

USER
RESISTOR

LOW
LEAKAGE
I-V INPUT 3

OUTPUT

17 18 19 20 21 22 23 24

BIAS INPUT 2

BIAS INPUT 1

BIAS INPUT 3

BLOCK 1

BLOCK 2

BLOCK 3

E5250A Option 501
24 (8 x 3) Channel Multiplexer

E5250A Option 501 has three 8
channel shielded output connec­tors and 3 bias input ports on
one card.

You can configure a total 96
outputs by using 4 cards.

Unique analog-bus and internal
jumper connections allow
flexible configurations.

For example, using four Option
501s, the Agilent E5250A can be
configured as two 2 x 48 or four
2 x 24 or six 2 x 16 multiplexers.
You can use an independent bias
input port for each 8 channel
output.

The following describe items to
consider for complete setting of
the system.

E5250A Option 501
24 (8 x 3) Channel Multiplexer

Instruments

The Agilent 4155C/4156C Semi­conductor Parameter Analyzer is
best suited for I-V measurement.
The Agilent 4142B also can be
used. For applying DC bias
stress to many DUTs simulta­neously, a DC power supply like
Agilent 6627A is suitable. See
example on page 9.

Switch Options

Select the number of Option 501s
for E5250A considering maxi­mum pin count that you need.

Environmental Chamber

For longtime reliability test of
semiconductor devices, you may
need to test the DUTs in a
particular environment such as
very low or high temperature/
humidity. An environmental
chamber is used for this purpose

Figure 5. Option 5o1 block diagram.

8

when you test packaged devices.
Vendors provide various types of
chambers that are suitable for
this purpose.

Cables between Instruments and the
E5250A with Option 501

Select the triaxial or Kelvin
triaxial cables for the Agilent
E5250A input from the list on
page 12. Also, the cables from DC
power supply to E5250A Option
501 are recommended.

The cable from ground unit is
not connected through the
E5250A.

Cables to the Environmental Chamber

There are two methods to
connect the cables to the envi­ronmental chamber.

One is direct connection using
the Agilent 16494E wide tem­perature 8 channel shielded
cable. Another is to use connec­tor plates that are attached to
the chamber, and use Agilent
16494D cable. See photos on
page 12.

Interface to the DUT

You may need to design a DUT
board to interface with DUT in
the chamber. The board should
be designed to keep low-leakage
current for various environ­ments if you require the best
performance of the E5250A and
instruments.

Typical Applications for E5250A
Option 501 Multiplexer

One example of the use of Option
501 is a bias-temperature test of
packaged devices.

Figure 6 shows the interconnec­tion schematic for a 384 channel
system. In this setup, you can
apply various values of DC bias
stress to many DUTs and obtain
the degradation of device
characteristics such as Vth,
Vdss, or Igss after long stress
time.

This system realizes very high
I-V measurement performance
with chamber that you may not
be able to achieve in a conven­tional reliability test system.

6627A

CHAMBER

E5250A

E5250A

E5250A

E5250A

4155C

Figure 6. Typical application for Option 501.

9

Application 1: Hot Carrier Induced
Degradation (HCI) of MOSFET Devices

To evaluate HCI, use Option 501.
In general, the total test time of
HCI is very long. So, it is re­quired to apply bias stress to
many DUTs simultaneously, if
you need mass of test data.

For the HCI measurement, the
Agilent 4155C/4156C with Agilent
E5250A has excellent accuracy
so you can easily find small
changes in the parameters.

6627A

4155C/4156C

Figure 7 shows a block diagram
to configure the typical circuit
for HCI measurement of 4
terminal MOSFETs.

The Agilent 6627A Multiple­Output System DC power supply
provides stress voltage to all
DUTs. The Agilent 4155C/4156C
measures Vth, Gm, Source-Drain
leakage current (Idss), and
monitors their degradation.

This example shows the unit
configuration for an 8 FET
measurement, which requires
two 8 channel blocks of the
multiplexer card. You may
require more blocks if you need
to connect other measurement
ports to the DUTs drain and
substrate.

The Agilent 6627A keeps sub­strate at a constant potential
while forcing stress voltage to

ONE BLOCK OF
E5250A OPT 501

USER RESISTOR

ONE BLOCK OF
E5250A OPT 501

DUTs

Figure 7. Block diagram of HCI measurement.

10

ONE BLOCK OF
E5250A OPT 501

the gate and source. Then, the
Agilent 4155C/4156C measures
necessary parameters for HCI
analysis.

The Agilent 6627A Multiple­Output System DC power supply
provides stress voltage to all
DUTs.

Agilent E5250A and Agilent
4155C/4156C’s low leakage
measurement capability helps to
find incipient degrading.

You can expand this setup by
number of DUT’s to be tested.

Application 2: Time-Dependent
Dielectric Breakdown (TDDB) of

MOS Capacitor

To evaluate the TDDB test, use
the Agilent E5250A Option 501.

For the TDDB test, the total test
time is very long, and it is also
required to apply voltage stress
to many DUTs at the same time,
until device breakdown occurs.

Figure 8 shows a block diagram
to configure the typical circuit
for TDDB test of 2 terminal MOS
capacitors.

This example shows a unit
configuration for an 8 capacitor
measurement, which requires
one 8 channel block of the
multiplexer card.

After applying the stress,
disconnect the Agilent 6627A
and connect 4155C/4156C, then
measure leakage current of the
capacitors one by one.

If capacitor is found to be
broken, do not stress it again.
Next, apply stress to all unbro­ken devices, and measure again.
Continue this until all capaci­tors are broken.

Agilent E5250A Option 501 has
holders on which user can
mount protective resistors.
When the DUT breaks down, the
resistance of the device becomes
very low immediately.

User resistor limits the surge
current and stabilizes the
voltage stress.

You can expand this setup by
number of DUTs to be tested.

There is one independent bias
input port per 8 channel output,
so you can apply different level
of the voltage stress for more
reliable data.

6627A

4155C/4156C

Figure 8. Block diagram of TDDB measurement.

ONE BLOCK OF
E5250A OPT 501

DUTs

11

Input/Output Cables and Connector Plates for Agilent E5250A Option 501

Agilent 16494D 8 Channel Shielded Coaxial
Cable

Low noise shielded coaxial cable with
8 channel connectors for E5250A
Option 501 on both ends. Length: 1.5 m
and 3 m.

Agilent 16494E Wide Temperature 8 Channel
Shielded Coaxial Cable

Low noise and wide temperature (–50
to +200°C) shielded coaxial cable with 8
channel connector for E5250A Option
501 on one end.

Bias Cable for the power supplies

For assembling one bias cable,
following parts or equivalents are
required. These are needed to
interconnect the power supply’s
screw terminals and E5250As
BNC bias ports.

Agilent 10501A
112 cm coaxial cable with BNC
connector on one end.
Agilent 0890-1494 2 cm Tube
Agilent 0890-1351 2 cm Tube
Ring Terminals

Agilent 16495C Connector Plate with Six 8
Channel Shielded Connector

Half size connector plate with six 8
channel shielded connectors, interlock

and GNDU connector.

Other Utility Parts

Agilent E5255-61626
A 2 m cable with coaxial connec­tor on one end for fitting into the
connector on Agilent 16495C/D
Connector Plate. Eliminates need
to solder each cable.

Use Agilent 1251-2170 tool to
remove original connector and
replace with this connector.

12

Agilent 16495D Connector Plate with Twelve
8 Channel Shielded Connector

Full size connector plate with twelve 8
channel shielded connectors, interlock
and GNDU connector.

Agilent 1251-00179
Original contractor on the
shielded connectors of Agilent
16495C/D connector plate.

Agilent 1251-2170
Remover tool for exchanging the
connectors.

Agilent 16495E Half Size Blank Plate

Blank plates to use with half size
connector plates for filling unnecessary
hole on chamber.

Ordering Information

Switch Mainframe and Cards Quantity

Agilent E5250A Low Leakage Switch Mainframe *1)

001 10 x 12 Matrix Switch (E5252A)
301 Relay Function Test Adapter *2)

501 24 Channel Multiplexer (E5255A)
Note 1: The mainframe does not furnish any cables.
Note 2: Please select this option if it is your first purchase of Agilent E5250A.

Cables (See page 7 and 12 for photo and detailed explanations) Quantity

Agilent 16494A Triaxial Cable *3)

001 Triaxial Cable (1.5 m)

002 Triaxial Cable (3 m)

003 Triaxial Cable (80 cm)
Agilent 16494B Kelvin Triaxial Cable *3)

001 Kelvin Triaxial Cable (1.5 m)

002 Kelvin Triaxial Cable (3 m)

003 Kelvin Triaxial Cable (80 cm)
Agilent 16494C Kelvin Triaxial Cable for 4142 *3)

001 Kelvin Triaxial Cable for 4142 (1.5 m)

002 Kelvin Triaxial Cable for 4142 (3 m)
Agilent 16494D 8 Channel Shielded Coaxial Cable *3)

001 8 Channel Shielded Coaxial Cable (1.5 m)

002 8 Channel Shielded Coaxial Cable (3 m)
Agilent 16494E Wide Temperature 8 Channel Shielded Coaxial Cable *3)

001 Wide Temperature 8 Channel Shielded Coaxial Cable (3 m)
Note 3: Fill in total number of all cable length options for the model.

Connector Plates (See page 7 and 12 for photo and detailed explanations) Quantity

Agilent 16495A Connector Plate with 12 Triaxial Interlock/GNDU
Agilent 16495B Connector Plate with 24 Triaxial Interlock/GNDU
Agilent 16495C Connector Plate with Six 8 Channel SHLD Connectors
Agilent 16495D Connector Plate with T welve 8 Channel SHLD Connectors
Agilent 16495E Half Size Blank Plate

Channel Upgrade Products for Agilent E5250A Mainframe User Quantity

Agilent E5252A 10 x 12 Matrix Switch *4)
(For Agilent E5250A Option 001 Equivalent)

Agilent E5255A 24 (8 x 3) Channel Multiplexer *4)
(For Agilent E5250A Option 501 Equivalent)

Note 4: The cards will be shipped ready to install. But, if you need the performance
verification test to guarantee the switch specifications after installing the cards,
please contact the nearest Agilent service office.

13

Ordering Information

Software Guide for Agilent E5250A

Interactive Characterization Software on Windows 3.1 Environment Quantity

Agilent E5230B Interactive Characterization Software
Agilent E5231B IV Parametric Driver Library
Agilent E5232B CV Driver Library
Agilent E5233B Switch Driver Library
CV driver library includes driver for Agilent 4284A Precision LCR Meter with

Capacitance compensation routine through Agilent E5250A Option 001 and Cables.

For detailed descriptions, please see the Agilent E5230B Technical Data (Agilent P/N 5964-2377E).

Furnished Programs and Routines with Agilent E5250A Mainframe

Utility Programs (Agilent Instrument BASIC, runs on Agilent 4155C/4156C)

Virtual Front Panel (VFP) Program: Allows Front Panel Like Operation of E5250A.
Selftest Program: Performs the Selftest with Agilent E5250A Option 301.

Sample Program and Routines (Agilent BASIC, for E5250A and the Instruments)

C-Compensation Routine (Used with Agilent 4284A)
VFP Data Upload Library: Routines to Upload Setup Data Stored by VFP.
Sample Application for Matrix Switch: Vth and Capacitance Measurement.
Sample Application for Multiplexer: Hot Carrier Induced Degradation Measurement.

Cable Compatibility Guide for E5250A Input and Output

Agilent Model Descriptions For Input Use For Output Use

Agilent 16494A Triaxial Cable
Agilent 16494B Kelvin T riaxial Cable
Agilent 16494C Kelvin Triaxial Cable for 4142 Yes (for Agilent 4142B) Yes (for #001)
Agilent 16494D 8 Channel Shielded Coaxial Cable No Yes (for #501)
Agilent 16494E Wide Temperature 8 Channel Shielded Coaxial Cable No Yes (for #501)

Agilent 16493C Triaxial Cable for 41420B/41421B Yes (Non-Kelvin) Yes (for #001)
(or Agilent 4155C Furnished T riaxial Cables)

Agilent 16493D Quad Axial Cable for 41420B/41421B No
Agilent 16493H Ground Unit Cable No
Agilent 16493J Interlock Cable for 4155C/4156C No
Agilent 16493K Kelvin T riaxial Cable for 4156C No

(Or Agilent 4156C Furnished Kelvin T riaxial Cables)
Note 1: The 80 cm length cable (Option 003) is not suitable for output use.

Note 2: Please order Agilent 16494C instead of 16493D.
Note 3: Connect directly to Connector Plate, not through E5250A Switch Cards.
Note 4: Please order Agilent 16494B instead of 16493K.

*1)

*1)

Yes (for Non-Kelvin) Yes (for #001)
Y es (for Agilent 4156C) Yes (for #001)

*2)

*3)

*3)

*4)

No
No
No
No

*2)

*3)

*3)

*4)

14

Ordering Information

Configuration Examples

Example 1. 48 Channel Matrix Switch Configuration for General Parametric Measurement
These examples are based on the figure on page 5, excludes system controller, software, and prober.

Agilent E5250A (*1) Low Leakage Switch Mainframe 1

001 10 x 12 Matrix Switch (E5252A) 4

301 Relax Function Test Adapter 1
Agilent 16494A Triaxial Cable 52

002 Traxial Cable (3 m) 48

003 Triaxial Cable (80 cm) 4
Agilent 16495B Connector Plate with 24 Triaxial Interlock/GNDU 2
Agilent 4155C (*1) Semiconductor Parameter Analyzer 1
Agilent 4284A (*1) Precision LCR Meter 1

001 Power Amplifier/DC Bias 1

006 2 m/4 m Cable Length Option 1
Agilent 10833A Agilent-IB Cable 2
Agilent 16048D BNC T est Cable (2 m) 1
Agilent 1250-2405 BNC T-Connector 2
Agilent 8120-4461Coaxial Cable between Connector Plate and Probe Card 2 m x 48

Example 2. 384 Channel Multiplexer Configuration for Long T erm Reliability Test.
These examples are based on Figure 6 on page 8, excludes system controller, software, temperature

chamber, and DUT boards in the chamber.
Agilent E5250A Low Leakage Switch Mainframe 4

301 Relax Function Test Adapter 1

501 24 Channel Multiplexer (E5255A) 16
Agilent 16494D 8 Channel Shielded Coaxial Cable 48

002 8 Channel Shielded Coaxial Cable (3 m) 48
Agilent 16495D Connector Plate with Twelve 8 Channel SHLD Connectors 4
Agilent 4155C (*1) Semiconductor Parameter Analyzer 1
Agilent 10833A Agilent-IB Cable 5
Agilent 6627A (*1) Multiple-Output System DC Power Supply 1
For Connection to DC Power Supply and Multiplexer
Agilent 10501A 112 cm Coaxial Cable with BNC Connector on One End 4
Agilent 0890-1494 2 cm Tube (For Protecting Bare Cable) 4
Agilent 0890-1351 2 cm Tube (For Protecting Bare Cable) 4
Agilent 8120-1838 Cable between Bias Ports of E5250A #501 (BNC-BNC) 12
Agilent E5255-61626 Assembled Coaxial Cable to DUT Board 384
Agilent 1251-2170 Remover Tool for Exchanging the Connector 1
For Rack Mount
Agilent E3662A(*1) 19 inch Rack 1
Agilent E3663A Rail Kit 5
Agilent 5062-3985 Rack Mount Kit 5
Agilent 5062-3977 5 1/4 Filler Kit 1

Note 1: Select appropriate options for power line and localization.
Please contact local Agilent sales office for more details.

15

Appendix

How to Select Options for Cable Length

The Agilent 4155C/4156C or
Agilent 4142B have low current
forcing and measurement capabil­ity by their SMU (Source Monitor
Unit) technology. The SMU uses a
kind of feedback circuit for
maintaining very high stability of
the current/voltage sourcing.
Therefore, the guard capacitance
(a load for SMUs) of connections
to SMU must be within certain
limits to prevent SMU circuit
oscillation.

The limit is about 900 pF in
the Agilent 4155C/4156C or
the Agilent 4142B’s case, for
example.

You should select proper cable
lengths to keep small guard
capacitance for the SMUs. A
system using E5250A sometimes
needs longer cable lengths than
for the standalone instruments.

If you plan to connect more than
6 m (E5250A Option 001) or 4 m
(E5250A Option 501) total cable
length (both instrument to
switch and switch to the DUTs),
make sure the cable guard
capacitance does not exceed
900 pF.

Table 1, on page 16, shows the
guard capacitance for each cable
and the E5250A.

How to Mount the Connector Plates

The Agilent 16495A/B connector
plate mounts on the side panel of
your prober shield box and is for
connecting triaxial output cable
from matrix switch. The other side
of the plate is for connecting
coaxial cable to probe as shown in
Figure 9. Figure 9 shows how to
mount the connector plate. If you
use a low leakage probing system
that has a built-in shield box, you
may not need to install the
connector plate and cables.

See page 17 and 18 for detailed
dimensions of the connector
plates.

SCREW

WASHER SPRING

WASHER FLAT

CONNECTOR
PLATE

Figure 9. Mounting connector plates.

SCREW HOLE

OPENING FOR
CONNECTOR PLATE

NUT

SHIELDING BOX

16

Table 1. Typical Value of Guard Capacitance.

Models Cable Length Guard Capacitance

E5250A with Option 001

Guard Capacitance between an I-V Port and an Output Terminal Not Applicable 145 pF
Additional Guard Capacitance when Another 001 Card is Added Not Applicable 8 pF

E5250A with Option 501

Guard Capacitance between an I-V Port and an Output Terminal Not Applicable 180 pF
Additional Guard Capacitance when Another 501 Card is Added Not Applicable 60 pF

16494A Triaxial Cable

Option 001 1.5 m 125 pF
Option 002 3.0 m 240 pF
Option 003 80 cm 75 pF

16494B Kelvin Triaxial Cable

Option 001 1.5 m 140 pF
Option 002 3.0 m 260 pF
Option 003 80 cm 90 pF

16494C Kelvin Triaxial Cable for 4142

Option 001 1.5 m 140 pF
Option 002 3.0 m 260 pF

16494D 8 Channel Shielded Coaxial Cable

Option 001 1.5 m 125 pF
Option 001 3.0 m 240 pF

16494E Wide Temperature 8 Channel Shielded Coaxial Cable

Option 001 3.0 m 240 pF

Agilent P/N 8120-4461 Coaxial Cable

For Connection to DUT Determined by User 130 pF/m

Guard Capacitance:
The structure of triaxial has three conductors: signal (sense/force), guard and ground. The guard capacitance is capaci­tance between the signal and guard.

Example:

Switch: E5250A Option 001 x 4 (48 Channel) 145 pF + 8 pF x 3
Cables: 16494A #001 125 pF

16494A #003 75 pF

8120-4461 2 m 130 pF x 2
Probe Card: < 10 pF (in usual case)
Total Guard Capacitance is:

145 pF + 24 pF + 125 pF + 75 pF + 260 pF + 10 pF = 639 pF < 900 pF

17

196 12

4-03.2

42

91

12

Figure 10. Agilent 16495A connector plate.

50

12

196

4-03.2

210

220

230

220

105

115

5

5

5

5

220

210

Figure 11. Agilent 16495B connector plate.

18

205

12

91

12

Figure 12. Agilent 16495C connector plate.

196 12

4-03.2

210

220

105

42

115

5

5

12

196

50

4-03.2

230
220

5

210

5

220

Figure 13. Agilent 16495D connector plate.

205

12

19

Note: Information relating to the
Agilent 4155C/4156C is also
applicable to the Agilent 4155A/
4156A and 4155B/4156B, except
for the front-panel matrix
control.

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