Agilent E4991A Technical Overview

The new standard in RF impedance and material measurements.
Agilent E4991A RF Impedance/ Material Analyzer
Technical Overview
Windows®-based user interface
• Windows®-based graphical user interface (GUI) brings an intuitive view of measurement settings and results.
• 8.4-inch TFT color LCD can display up to 5 traces (3 scalar and 2 complex parameters), 9 markers (1 reference marker and 8 markers), and 801 sweep points.
High accuracy and adaptability
• Test head with 7 mm connector adapts easily to various test fixtures.
• RF I-V technique enables highly accurate measurements up to 3 GHz.
Versatile analysis functions
• Marker analysis and marker limit functions reduce test time.
• Various test signals such as frequency, DC bias and AC signal level are available.
• Equivalent circuit analysis function enables easy modeling of components with 5 different multi-parameter models.
Built-in Visual Basic
®
for Applications (VBA) programming function
• VBA offers easy programming for automation and further detailed analysis.
Data storage function
• Internal 31/2 - inch floppy disk drive and hard disk drive are available.
• Store VBA program, calibration data, and measurement data.
• CITIFILE format is supported for automation tool users.
E4991A RF Impedance/ Material Analyzer
2
External VGA output
• Display measurement results on a larger VGA monitor.
Parallel interface
• Support parallel interface printers.
External keyboard and mouse interface
• VBA programming made easy.
• Users can perform operations with a mouse for more comfortable operation.
LAN interface
• Control other instruments or simplify test-data sharing.
• Connect to a PC through remote user interface software.
GPIB interface
• Controlled by external PC. (cannot control external instruments)
USB interface
• Control external instruments using the 82357A USB/GPIB interface.
• Support USB interface printers.
3
Powerful Analysis Functions to Meet Your Needs
The Agilent E4991A RF impedance/ material analyzer provides a total solution for making highly accurate, repeatable and stable measurements of surface mount devices (SMD) and dielectric/magnetic materials.
Recent trends indicate that wireless communications and digital equipment operating frequencies are getting higher, while component sizes are getting smaller. Component and equipment manufacturing engineers need to evaluate components they will be using in their products under their projected operating conditions. The E4991A can evaluate passive component's characteristics up to 3 GHz. Additionally, engineers must measure SMDs as small as 0201(inch)/0603(mm).
Key Specifications
Agilent provides various test fixtures for SMDs, designed to help you obtain the impedance parameters with high repeatability. The E4991A offers impedance measurement capabilities for your needs today and into the future.
• Accurate and versatile 3 GHz impedance measurement solution
• Analyze passive component behavior
• Wide range of test fixtures available
• PC connectivity features with Windows®-based technology
Advanced Solution for RF Impedance and Material Measurement
The E4991A provides a powerful tool for component manufacturing R&D engineers and circuit designers of wireless and digital equipment who want to evaluate components from various per­spectives. The following are application examples:
Passive components
RF impedance measurement
of chip components such as ceramic capacitors, RF inductors, ferrite beads, and resistors
Semiconductors
Capacitance-Voltage (C-V)
characteristics and Equivalent Series Resistance (ESR) measurements of varactor diodes
Materials
Permittivity and loss tangent
evaluation of plastics, ceramics, printed circuit boards and other dielectric material
Permeability and loss
tangent evaluation of ferrite, amorphous and other magnetic materials
Table 1. E4991A key specifications
E4991A RF Impedance/Material Analyzer
Operating frequency 1 MHz to 3 GHz (1 mHz resolution) Impedance parameters |Z|, θZ, |Y|, θY, R, X, G, B, CS, CP, LS, LP, RP, RS, D, Q, |Γ|, θΓ, ΓX, Γ
Y
Material parameters
1
|εr|, εr’, εr", |µr|, µr’, µr", θ, tanδ
Basic impedance accuracy ±0.8% Test port 7-mm connector Sweep parameters Frequency, AC signal level, DC bias level Calibration Open/short/50 Ω/low-loss capacitor Fixture compensation Open/short, fixture electrical length Mass storage 3
1
/2 -inch floppy disk drive (MS-DOS®format),
hard disk drive
Other features •Equivalent circuit analysis function
•Built-in VBA for internal programming
•Segment sweep
DC bias (Option E4991A-001)
DC level 0 V ~ ±40 V (1 mV resolution)
100 µA ~ 50 mA, –100 µA ~ –50 mA (10 µA resolution)
1. Option E4991A-002 is required
E4991A Provides New Insights into RF Passive Component Behavior
The Agilent E4991A's enhanced frequency coverage up to 3 GHz is compatible with wireless communication applications such as W-CDMA, BluetoothTM, and Wireless LAN. The E4991A’s wide impedance coverage and versatile measurement functions allow analysis of RF chip inductors and capacitors under actual operating conditions. A wide range of test fixturing solutions makes tiny chip device measurements even easier.
Quality Factor (Q) and Equivalent Series Resistance (ESR) are critical parameters for the components used in mobile communication equipment. Q and ESR measurements require high accuracy. Prior to the E4991A, there was not a good solution available over 2 GHz. The E4991A offers much improved Q and ESR accuracy over traditional network analyzers; due to the enhanced RF I-V technique that measures voltage and current at the device under test (DUT), along with the innovative low-loss capacitor calibration.
Table 3 provides a brief summary of the key differences between Agilent E4991A and network analyzers.
Low-loss capacitor calibration
The low-loss capacitor calibra­tion of the E4991A improves phase measurement accuracy, which establishes a reference to the reactance axis (-90 degrees) in the impedance plane with its near-zero resistance. Capacitors and inductors are measured close to the reactance axis in the impedance plane, making low-loss capacitance calibration very effective for ESR and Q measurements. (See Figure 1)
Figure 1. Ls-Q characteristics of a chip inductor
Table 3. Comparison of key characteristics of E4991A and network analyzers
E4991A Network analyzers
Device type 1 port devices such as inductors, 2 port devices such as filters,
capacitors, and others. amplifiers, and others.
Measurement |Z|, |Y|, θ, R, X, G, B, C, L, S-parameters, Γ, θ parameters R, D, Q, Γ Sweep • Frequency • Frequency
parameter • Test signal level • Test signal level setting • DC bias voltage
• DC bias current
Fixturing • Selection from various * Prepare custom test fixture or
Agilent test fixtures use Agilent channel partner
• Built-in fixture compensation solution function (Accuracy enhancement at DUT connection)
Impedance • Accurate high Q device • Accurate impedance measurement measurement due to low loss measurement around 50 accuracy capacitor calibration
• Accurate measurement over non-50 Ω impedance
Other Equivalent circuit analysis function
Table 2. Q measurement accuracy (Typical)
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In-depth Device Characterization
Intuitive graphical user interface
The 8.4-inch color LCD with Windows-based GUI brings an intuitive view of measurement settings and results. The E4991A can display up to 3 scalar and 2 complex parameters simultaneously.
Figure 2 shows a measurement result of a chip bead. You can observe the |Z|, R and X parame­ters on the display at same time. You can also assign each measure­ment trace in a separate window.
Windows-styled GUI brings the added benefits of mouse operation to the E4991A. Simply drag the mouse over the area you are interested in and you can zoom in quickly and easily. (See Figure 3)
Figure 2. Flexible measurement trace assignment
Figure 3. Mouse operation example
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DC bias function– Option E4991A-001
For components with voltage and current dependency, such as RF inductors or ceramic capacitors, the DC bias function (Option E4991A-001) supplies DC voltage (±40 V) and current bias (±50 mA) across the device. You can easily observe your device behavior under various DC bias conditions without using an external DC bias source.
External DC bias adapter
If you require even higher DC current bias, the Agilent 16200B external DC bias adapter allows you to apply larger DC bias across the device of up to ±5 A through a 7-mm test port by using an external DC current source. E4991A operating frequency is limited to 1 GHz with the 16200B.
Extracting the equivalent circuit parameters
The equivalent circuit analysis function offers more detailed circuit models over the standard 2-parameter model. Five different multi-parameter models accom­modate different types of devices, such as ceramic capacitors or crystal resonators. You can simulate the impedance trace of your own equivalent parameter values and then compare it with actual measurement traces. The extracted parameters can also be used with electronic design automation (EDA) tools to improve modeling accuracy.
Figure 4 shows the C-V characteristic measurement of a varactor diode. Sweeping DC voltage from 0.5 V to 4.5 V, you can easily read capacitance change (11.27 pF) using the delta marker function. Evaluate DC bias voltage dependency on components easily. DC current bias measurement is also avail­able so that you can evaluate characteristics of inductors, such as, saturation or hysteresis.
Figure 4. Varactor diode capacitance vs. DC voltage characteristics
Figure 5-1. 16200B
Figure 5. 16200B DC bias adapter connected to the E4991A
Figure 6. Equivalent circuit analysis models
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Increase Productivity with Segment Sweep Function
The segment sweep function enables different measurement setups in a single sweep by dividing the sweep range into segments. Each segment, including the frequency range, number of points, averaging factor, DC bias level (V or I), and test signal level can be set independently. (See Figure 7) Segment sweep function can drastically reduce your test time when you need specific data in a wide frequency range. With segment sweep, you can avoid repeatedly changing instrument setups. (See Figure 7-1)
Various Text Fixtures are Ready to Use
The 16197A and 16196A/B/C/D are test fixtures that accommodate passive surface mount devices (SMD) and have high repeatability and stable frequency characteris­tics up to 3 GHz.
The 16197A is a test fixture that can hold chip devices that have electrodes at the bottom. Various sizes and shapes of devices are supported. The 16197A supports the following EIA/EIAJ standard sizes:
• 0201 (inch)/0603 (mm)
1
• 0402 (inch)/1005 (mm)
• 0603 (inch)/1608 (mm)
• 0805 (inch)/2012 (mm)
• 1208 (inch)/3216 (mm)
• 1210 (inch)/3225 (mm)
• Non-standard shape (requires modification of the holder part)
The 16196A/B/C/D series are coaxial-structured high perfor­mance test fixtures, which achieve high repeatability and stability up to 3 GHz. The 16196x series simplifies operation significantly and eliminates operation-related errors. The 16196x series supports chip devices as small as 01005 (inch)/0402 (mm) size. Each test fixture model supports respectively shaped devices as follows:
Model Device size supported
16196A 0603 (inch)/1608 (mm) 16196B 0402 (inch)/1005 (mm) 16196C 0201 (inch)/0603 (mm) 16196D 01005 (inch)/0402 (mm)
Figure 8. Agilent 16197A bottom electrode SMD test fixture
Figure 9. Agilent 16196B parallel electrode SMD test fixture
1 Option E4991A-001 is required.
Figure 7. Segment list table
Figure 7-1. Segment sweep measurement example
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Connectivity Advances with PC and Windows-based Technology
Visual Basic for applications (VBA) helps automate tasks
The built-in VBA is available for customization and automation of complex measurement procedures. You can create macro programs in the Integrated Development Environment (IDE) of VBA in a similar manner to Visual Basic® operation.
Link to EDA tools
Using electronic design applications such as Agilent’s Advanced Design System (ADS), in conjunction with the E4991A, can help you optimize and verify the performance of your device with simulated circuit modeling. You can easily store measured data in CITIFILE format and import to EDA software tools. (Agilent’s ADS software may be purchased separately from the E4991A.)
LAN interface enables seamless connectivity with PC environment
Using the remote user interface software provided with the E4991A, you can easily correct data and troubleshoot over the LAN interface. The remote user interface brings the instrument control panel to the PC display via LAN. You can gain control of instruments in physically separate locations. Easily share your measurement data with other applications, such as spreadsheets, through a file or via the clipboard.
Figure 10. VBA
Figure 11. ADS figure
Figure 12. Remote user interface
Material Analysis Made Easy
The dielectric and magnetic measurement software (Option E4991A-002) provides direct readout of material parameters such as permeability and permittivity up to 1 GHz. The dielectric material test fixture, 16453A, and the magnetic material test fixture, 16454A, eliminate designing time-consuming custom test fixtures.
Dielectric material testing
The 16453A employs the parallel plate method for dielectric constant and loss tangent measurements up to 1 GHz. It is well-suited for measuring a sheet of solid substrate material, such as PC board, ceramic or polymer. Simple measurements are possible by inserting the material between the electrodes. With E4991A Option E4991A-002, material measurement function, you can display permittivity parameters directly on the ana­lyzer’s display.
Magnetic material testing
The 16454A is used for perme­ability measurements up to 1 GHz on the E4991A. This single-wound, coil-structured test fixture holds toroidal-shaped magnetic materials such as soft-ferrite and magnetic cores. It is possible to accommodate different sizes of toroidal cores by exchanging small (smaller than 8 mm diameter) and large adapters. To use the 16454A, you need the material measurement function (Option E4991A-002).
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Material size requirements
Diameter ≥ 15 mm Thickness 3 mm
Material size requirements
Small size:
Outer diameter 8 mm Inner diameter 3.1 mm Thickness 3 mm
Large size:
Outer diameter ≤ 20 mm Inner diameter 5 mm Thickness 8.5 mm
Figure 13. E4991A with material test fixtures
Figure 14. 16453A Dielectric material fixture
Figure 15. 16454A Magnetic material fixture
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More ICs or circuit modules are used in electronic circuits to save spaces, more capacitors or inductors, such as thin dielectric layers and pattern inductors, tend to be developed on wafer or substrate. These devices usually have a small capacitance or inductance like pF, nH. The Agilent E4991A RF impedance/material analyzer, with Option E4991A-010 probe station connection kit, offers an accurate on-wafer or micro-component impedance measurement solution up to 3 GHz.
Easy installation
When connecting the E4991A to probe stations, the accuracy degradation, caused by port extension and improper calibra­tion, always becomes a big issue. The Option E4991A-010 probe station connection kit, for E4991A provides all necessary parts as one option and solves this problem. This option includes a smaller test head, extension cables, adapters, a connecting plate and detailed installation procedures. Probe stations are provided from Cascade Microtech, Inc. With this kit, you can easily establish a reliable measurement system in the short time.
Impedance measurement specification at the extended test head port
The E4991A’s Option E4991A-010 has a guaranteed impedance measurement specification at the end of the extended 7-mm test head port. This is an impor­tant element for accurate mea­surement, because the port extension usually de-grades the measurement accuracy. The situa­tion becomes even worse if the cable used has an improper characteristic. Agilent solved this issue by preparing reliable extension cables and making a special test head. This test head is small enough to be brought closer to probe stations, so that the measurement error caused by this extra length is also minimized.
Figure 16. Agilent E4991A with probe station
Accurate impedance measurement with probe station
Figure 17. Probe measurement configuration using E4991A Option E4991A-010
Test head*
Extension cable*
E4991A
Mounting plate
3.5-mm to 7-mm adapter*
*Comes with Agilent E4991A Option E4991A-010
probe station connection kit.
Semi-rigid cable
DUT
Probe head
Stage
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Wide and repeatable impedance measurement
Agilent E4991A can cover wider impedance range than network analyzers. In general, network analyzers are good at measuring impedance near 50 , but the accuracy gets worse for impedance away from 50 . The E4991A is designed to measure non-50 impedance as well, so it can give much better accuracy especially when you measure small capacitance and inductance like 1 pF and 1 nH. The E4991A is repeatable over time and temperature, too This is another benefit of dedicated impedance analyzers.
Figure 18. Agilent E4991A Option E4991A-010 probe station connection kit
What is E4991A Option E4991A-010
The E4991A Option E4991A-010 includes following items:
• Smaller E4991A test head
• Extension cables
• 7mm - 3.5mm (f) adapter x 1 ea.
• N (m)-SMA(f) adapter x 3 ea.
• Installation manual
Probe
Agilent E4991A RF
impedance/material
analyzer
Probe head
Agilent E4991A
probe station
connection kit
(Option E4991A-010)
What else do you need for a system?
Besides the E4991A with Option E4991A-010, a probe station and probe heads need to be purchased separately. This option works with any probe stations, but we recommend Cascade Microtech probe sta­tions, because this combination was carefully checked to work well. The following are product examples:
• Summit 9000, 11000, or 12000 series probe station
• ACP-series or HPC-series probe head
• Impedance Standard Substrate (ISS)
• Adjustable mounting plate for the E4991A test head.
• Semi-rigid cable for the probe head connection
These products are provided by Cascade Microtech, Inc.
High-temperature cable
Test fixture station
VBA sample program
Extension cable
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The temperature characteristic test kit, E4991A Option E4991A­007, is a new solution of temper­ature characteristic measurement for components and materials. This solution provides highly accurate temperature character­istic analysis capability within the wide temperature range from
-55°C to +150°C with a powerful temperature drift compensation function.
Figure 19 shows the typical 10% measurement accuracy range of the E4991A compared to the 4291B. The 4291B requires both low and high impedance test heads for obtaining the wide impedance measurement range. On the other hand, the E4991A covers the wider impedance measurement range with a single test head.
The temperature drift compensa­tion function is a new technology that is adopted in the E4991A. Unlike the 4291B, open/short compensation can be performed at pre-defined temperature points so that temperature drift errors can be drastically reduced as shown in Figure 20.
Easy integration with the ESPEC
1
temperature
chamber
ESPEC supplies a temperature chamber, while Agilent provides all other necessary accessories and a sample program for creat­ing an automated temperature characteristic test system. Figure 21 shows the contents of the E4991A Option E4991A-007.
2
A VBA sample program is compatible with the ESPEC bench-top temperature chamber, SU-261, so that you can easily integrate an automated tempera­ture characteristic test system Figure 22. The SU-261 provides a wide temperature range from
-60° C to +150° C; which covers
the entire temperature range of Option E4991A-007. Also, this sample program can be modified to fit other companies’ tempera­ture chambers. In addition, the VBA sample program provides an intuitive GUI interface; which provides the temperature chamber control, measurement parameter setup, and temperature profile setup with easy operation.
Figure 19. Typical 10% measurement accuracy comparison chart
Figure 20. Effect of the temperature drift compensation function
Figure 21. Contents of the E4991A Option E4991A-007
Integrated Temperature Characteristic Testing
A temperature characteristic test solution is now available
Figure 22. The E4991A Option E4991A-007 with the ESPEC bench-top temperature chamber (SU-261)
1. ESPEC is an Agilent channel partner.
2. The Agilent 82357A USB/GPIB interface is
required to control the chamber from the
E4991A. The USB/GPIB interface is not
included in the Option E4991A-007.
13
Test Fixture Accessories
16197A bottom electrode SMD test fixture
Designed for bottom electrode SMDs up to 3 GHz. Adjustable electrodes accommodate a wide array of sizes. This fixture is designed to evaluate SMDs between 0.6 mm1and 3.2 mm in length.
Figure 23. 16197A
16196A/B/C/D parallel electrode SMD test fixture
Designed for side electrode SMDs up to 3 GHz. Dedicated design for specific shape of the devices eliminates repeatability errors and significantly improves usability. 0603 inch/1608 mm (16196A), 0402 inch/1005 mm (16196B), 0201 inch/0603 mm (16196C), and 01005 inch/0402 mm (16196D) are supported.
Figure 24. 16196A/B/C
16191A bottom electrode SMD test fixture
Designed for bottom electrode SMDs up to 2 GHz. Adjustable electrodes accommodate a wide array of sizes. This fixture is designed to evaluate SMDs between 2.0 mm and 12.0 mm in length.
Figure 25. 16191A
16192A parallel electrode SMD test fixture
Holds chip devices with electrodes on both sides up to 2 GHz. Adjustable electrodes can accommodate a wide array of sizes. This fixture is adapted to evalu­ate SMDs between 1.0 mm and 20.0 mm in length.
Figure 26. 16192A
16194A parallel electrode SMD test fixture
Holds both lead devices and SMDs up to 2 GHz. It is furnished with two device holders that can be easily attached to measure either type of DUT.
Figure 27. 16194A
SMD test fixture selection guide
DUT size Side Bottom
electrodes SMD electrode SMD
01005 (inch)/0603 (mm) 16196D – 0201 (inch)/0603 (mm) 16196C 16197A
3
0402 (inch)/1005 (mm) 16196B 16197A 0603 (inch)/1608 (mm) 16196A 16197A 0805 (inch)/2012 (mm) 16192A
2
16197A
1206 (inch)/3216 (mm) 16192A
2
16197A
1210 (inch)/3225 (mm) 16192A
2
16197A
Over 1210 (inch)/3225 (mm) 16192A
2
16191A
2
1. Option E4991A-001 is required.
2. Frequency is limited to 2 GHz.
3. Option 16197A-001.
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Ordering information
Agilent E4991A RF impedance/ material analyzer includes: Impedance test head, calibration kit (50 load, open, short, low loss capacitor, torque wrench), power cable, CD-ROM (firmware/VBA software), and CD-ROM (manual).
1
Configuration guide
Choose the option from the group <A> depending on your require­ment for frequency reference function. Then, choose the appro­priate options from the option group <B>, <C>, <D>, and <E>.
Choose ONE and ONLY one
(Options are mutually exclusive)
Choose any combination
<A> For frequency reference function
E4991A-800 standard
frequency reference, no DC bias
E4991A-1D5 high stability
frequency reference
<B> For test function
E4991A-001 DC biasE4991A-002 material
measurement firmware
E4991A-007 temperature
characteristic test kit
E4991A-010 probe station
connection kit
<C> For calibration certificate
E4991A-1A7 ISO 17025
compliant calibration
<D> For accessories
E4991A-810 keyboardE4991A-820 mouseE4991A-1CM rackmount kitE4991A-1CN front handle kitE4991A-1CP handle/rack
mount kit
<E> For manual
2
E4991A-ABA
U.S. - English localization
E4991A-ABJ
Japan - Japanese localization
E4991A-0BW service manual
Accessories
3
16197A4 bottom electrode SMD test fixture (up to 3 GHz) Options
16197A-001 add 0201 (inch)/0603 (mm) device guide set 16197A-ABA U.S. - English localization 16197A-ABJ Japan - Japanese localization
16196A/B/C/D5parallel electrode SMD test fixture (up to 3 GHz) Options
16196A/B/C/D-710 add magnifying lens and tweezers 16196A/B/C/D-ABJ Japan - Japanese localization 16196A/B/C/D-ABA U.S. - English localization
16196U maintenance kits for 16196X Options
16196U-010 upper electrode set for 16196A/B/C (5 ea) 16196U-020 upper electrode set for 16196D (5 ea) 16196U-100 1608 (mm) short plate set (5 ea) 16196U-110 1608 (mm) lower electrode set (5 ea) 16196U-200 1005 (mm) short plate set (5 ea) 16196U-210 1005 (mm) lower electrode set (5 ea) 16196U-300 0603 (mm) short plate set (5 ea) 16196U-310 0603 (mm) lower electrode set (5 ea)
16196U-400 0402 (mm) short plate set (5 ea) 16196U-410 0402 (mm) lower electrode set (5 ea)
16191A6bottom electrode SMD test fixture (DC to 2 GHz) Options
16191A-701 short bars set (1 x 1 x 2.4, 1.6 x 2.4 x 2,
3.2 x 2.4 x 2.4, 4.5 x 2.4 x 2.4) mm
16191A-710 add magnifying lens and tweezers 16191A-010 EIA/EIAJ industry sized short bar set
16192A6parallel electrode SMD test fixture (DC to 2 GHz) Options
16192A-701 short bars set (1 x 1 x 2.4, 1.6 x 2.4 x 2,
3.2 x 2.4 x 2.4, 4.5 x 2.4 x 2.4) mm
16192A-710 add magnifying lens and tweezers 16192A-010 EIA/EIAJ industry sized short bar set
16094A probe test fixture (up to 125 MHz)
16453A dielectric material test fixture (up to 1 GHz)
16454A magnetic material test fixture (up to 1 GHz)
16190B performance kit
16195B 7-mm coaxial calibration kit
16092A SMD test fixture (up to 500 MHz)
16200B external DC bias adapter (up to 1 GHz)
82357A USB/GPIB Interface for Windows
7
1. Test fixtures, a keyboard, a mouse, USB/GPIB Interface, and a printed manual are not furnished as standard.
2. Printed manual is not furnished as standard.
3. Additional accessory details can be found in the Accessories Selection Guide for Impedance Measurements, publication number 5965-4792E.
4. Must specify one of language options (ABA or ABJ) for operation manual for shipment with product.
5. Magnify lens and tweezers are not furnished as standard. Must specify one of language options (ABA or ABJ) for operation manual for shipment with product.
6. Short bar set, magnify lens, and tweezers are not furnished as standard.
7. The USB/GPIB Interface is required to control external devices.
E4991A Configuration and Accessory Guide
Key Web Resources
Please visit our component manufacturer industry area at:
www.agilent.com/find/component_test
Please visit our impedance solutions area at:
www.agilent.com/find/impedance
www.agilent.com/find/emailupdates
Get the latest information on the products and applications you select.
For Cascade Microtech products, contact Cascade Microtech, Inc.
Cascade Microtech 2430 NW 206th Avenue Beaverton, Oregon 97006, U.S.A. Tel. 503-610-1000 Fax. 506-601-1002 Email sales@cmicro.com www.cascademicrotech.com
For the ESPEC products, contact ESPEC Corp.
ESPEC CORP. 3-5-6, Tenjinbashi, Kita-ku, Osaka, 530-8550 Japan Tel. +81-6-6358-4741 Fax. +81-6-6358-5500 www.espec.co.jp
ESPEC North America, Inc. 425 Gordon Industrial Court, S.W. Byron Center, MI 49315-8354, U.S.A. Tel. 616-878-0270 Toll Free 1-800-537-7320 Fax. 616-878-0280 www.espec.com
Windows®is a U.S. registered trademark of Microsoft Corporation. Visual Basic®for Applications is a U.S. registered trademark of Microsoft Corporation. BluetoothTMis a trademark owned by the Bluetooth SIG, Inc.
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© Agilent Technologies, Inc. 2000, 2003, 2004, 2005 Printed in USA, March 8, 2005 5980-1234E
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