Agilent E4991A Data Sheet

Agilent
E4991A RF Impedance/Material Analyzer

Data Sheet

2

Definitions

All specifications apply over a 5 °C to 40 °C range
(unless otherwise stated) and 30 minutes after the
instrument has been turned on.

Specification (spec.)

Warranted performance. Specifications
include guardbands to account for the expected
statistical performance distribution, measurement
uncertainties, and changes in performance due
to environmental conditions.

Supplemental information is intended to provide
information useful in applying the instrument, but
that is not covered by the product warranty. The
information is denoted as typical, or nominal.

Typical (typ.)

Expected performance of an average unit which
does not include guardbands. It is not covered by
the product warranty.

Nominal (nom.)

A general, descriptive term that does not imply
a level of performance. It is not covered by the
product warranty.

Measurement Parameters and
Range

Measurement parameters

Impedance parameters:

|Z|, |Y|, Ls, Lp, Cs, Cp, Rs(R), Rp, X, G, B, D, Q, θz,

θy, |Γ|, Γx, Γy, θ

γ

Material parameters (option E4991A-002):

(see “Option E4991A-002 material measurement
(typical)” on page 17)

Permittivity parameters: |εr|, εr', εr", tanδ
Permeability parameters: |µr|, µr', µr", tanδ

Measurement range

Measurement range (|Z|):

130 mΩ to 20 kΩ.

(Frequency= 1 MHz,
Point averaging factor ≥ 8,
Oscillator level= –3 dBm; = –13 dBm; or = –23 dBm,
Measurement accuracy ≤ ±10%,
Calibration is performed within 23 °C ±5 °C,
Measurement is performed within ±5 °C of
calibration temperature)

3

1. It is possible to set more than 0 dBm (447 mV, 8.94 mA) oscillator
level at frequency > 1 GHz. However, the characteristics at this
setting are not guaranteed.

2. When the unit is set at mV or mA, the entered value is rounded
to 0.1 dB resolution.

DC Bias (Option E4991A-001)

DC voltage bias

Range:

0 to ±40 V

Resolution:

1 mV

Accuracy:

±{0.1% + 6 mV + (Idc[mA] x 20 Ω)[mV]}

(23 °C ±5 °C)

±{0.2% +12 mV + (Idc[mA] x 40 Ω)[mV]}

(5 °C to 40 °C)

DC current bias

Range:

100 µ A to 50 mA, –100 µ A to –50 mA

Resolution:

10 µ A

Accuracy:

±{0.2%+ 20 µ A+ (Vdc[V] /10 kΩ)[mA]}

(23 °C ±5 °C)

±{0.4% + 40 µ A+ (Vdc[V] /5 kΩ)[mA]}

(5 °C to 40 °C)

DC bias monitor

Monitor parameters:

Voltage and current

Voltage monitor accuracy:

±{0.5% + 15 mV + (Idc[mA] x 2 Ω)[mV]}

(23 °C ±5 °C, typical)

±{1.0% + 30 mV + (Idc[mA] x 4 Ω)[mV]}

(5 °C to 40 °C, typical)

Current monitor accuracy:

±{0.5% + 30 µ A + (Vdc[V] / 40 k Ω)[mA]}

(23 °C ±5 °C, typical)

±{1.0% + 60 µ A + (Vdc[V] / 20 k Ω)[mA]}

(5 °C to 40 °C, typical)

Source Characteristics

Frequency

Range:

1 MHz to 3 GHz

Resolution:

1 mHz

Accuracy:

without Option E4991A-1D5:

±10 ppm (23 °C ±5 °C)
±20 ppm (5 °C to 40 °C)

with Option E4991A-1D5:

±1 ppm (5 °C to 40 °C)

Stability:

with Option E4991A-1D5:

±0.5 ppm/year (5 °C to 40 °C)

Oscillator level

Range:

Power (when 50 Ω load is connected to test port):

–40 dBm to 1 dBm (frequency ≤ 1 GHz)
–40 dBm to 0 dBm (frequency > 1 GHz1)

Current (when short is connected to test port):

0.0894 mArms to 10 mArms (frequency ≤ 1 GHz)

0.0894 mArms to 8.94 mArms (frequency > 1 GHz1)

Voltage (when open is connected to test port):

4.47 mVrms to 502 mVrms (frequency ≤ 1 GHz)

4.47 mVrms to 447 mVrms (frequency > 1 GHz1)

Resolution:

0.1 dB

2

Accuracy:

(Power, when 50 Ω load is connected to test port)

Frequency ≤ 1 GHz:

±2 dB (23 °C ±5 °C)
±4 dB (5 °C to 40 °C)

Frequency > 1 GHz:

±3 dB (23 °C ±5 °C)
±5 dB (5 °C to 40 °C)

with Option E4991A-010:

Frequency ≤ 1 GHz

±3.5 dB (23 °C ± 5 °C)
±5.5 dB (5 °C to 40 °C)

Frequency > 1 GHz

±5.6 dB (23 °C ± 5 °C)
±7.6 dB (5 °C to 40 °C)

Output impedance

Output impedance:

50 Ω (nominal)

4

Measurement Accuracy

Conditions for defining accuracy

Temperature:

23 °C ±5 °C

Accuracy-specified plane:

7-mm connector of test head

Accuracy defined measurement points:

Same points at which the calibration is done.

Accuracy when open/short/load
calibration is performed

Probe Station Connection Kit
(Option E4991A-010)

Oscillator level

Power accuracy:

Frequency ≤ 1 GHz:

±5.5 dB (5 °C to 40 °C)

Frequency > 1 GHz:

±7.6 dB (5 °C to 40 °C)

Sweep Characteristics

Sweep conditions

Sweep parameters:

Frequency, oscillator level (power, voltage,

current), DC bias voltage, DC bias current

Sweep range setup:

Start/stop or center/span

Sweep types:

Frequency sweep: linear, log, segment
Other parameters sweep: linear, log

Sweep mode:

Continuous, single

Sweep directions:

Oscillator level, DC bias (voltage and current): up sweep,

down sweep

Other parameters sweep: up sweep

Number of measurement points:

2 to 801

Delay time:

Types: point delay, sweep delay, segment delay
Range: 0 to 30 sec
Resolution: 1 msec

Segment sweep

Available setup parameters for each segment:

Sweep frequency range, number of measurement

points, point averaging factor, oscillator level
(power, voltage, or current), DC bias (voltage or
current), DC bias limit (current limit for voltage
bias, voltage limit for current bias)

Number of segments:

1 to 16

Sweep span types:

Frequency base or order base

|Z|, |Y|: ±(Ea+ Eb) [%]

(see Figures 1 through 4
for examples of
calculated accuracy)

θ: ±

(Ea+ Eb)

[rad]

100

L, C, X, B: ±(E

a

+ Eb) x √(1 + D

2
x

) [%]

R, G: ±(Ea+ Eb) x √(1 + Q

2
x

) [%]

D:

at D

x

tan

E

a

+ E

b

< 1 ±

100

at D

x

≤0.1

±

E

a

+ E

b

100

Q:

at Qxtan

Ea+ E

b

< 1 ±

100

at

10

≥ Q

x

≥ 10 ±Q

2

x

Ea+ E

b

Ea+ E

b

100

(1 + D

2

x

)tan

Ea+ E

b

100

1 Dxtan

E

a

+ E

b

100

(1 + Q

2

x

)tan

E

a

+ E

b

100

1 Qxtan

E

a

+ E

b

100

±

±

at Oscillator level < –33 dBm:

±1 [%] (1 MHz ≤ Frequency ≤ 100 MHz)
±1.2 [%] (100 MHz < Frequency ≤ 500 MHz)
±1.2 [%] (500 MHz < Frequency ≤ 1 GHz)
±2.5 [%] (1 GHz < Frequency ≤ 1.8 GHz)
±5 [%] (1.8 GHz < Frequency ≤ 3 GHz)

Eb =

(|Zx|: measurement value of |Z|)

Ec =

(F: frequency [MHz], typical)

Zs = (Within ±5 °C from the calibration temperature.
Measurement accuracy applies when the calibration
is performed at 23 °C ±5 °C. When the calibration
is performed beyond 23 °C ±5 °C, the measurement
accuracy decreases to half that described.
F: frequency [MHz].)

at oscillator level = –3 dBm, –13 dBm, or –23 dBm:

±(13 + 0.5 × F) [mΩ] (averaging factor ≥ 8)
±(25 + 0.5 × F) [mΩ] (averaging factor ≤ 7)

at oscillator level ≥ –33 dBm

±(25 + 0.5 × F) [mΩ] (averaging factor ≥ 8)
±(50 + 0.5 × F) [mΩ] (averaging factor ≤ 7)

at oscillator level < –33 dBm

±(50 + 0.5 × F) [mΩ] (averaging factor ≥ 8)
±(100 + 0.5 × F) [mΩ] (averaging factor ≤ 7)

Yo = (Within ±5 °C from the calibration temperature.
Measurement accuracy applies when the calibration
is performed at 23 °C ±5 °C. When the calibration
is performed beyond 23 °C ±5 °C, the measurement
accuracy decreases to half that described.
F: frequency [MHz].)

at oscillator level = –3 dBm, –13 dBm, –23 dBm:

±(5 + 0.1 × F) [µS] (averaging factor ≥ 8)
±(10 + 0.1 × F) [µS] (averaging factor ≤ 7)

at oscillator level ≥ –33 dBm:

±(10 + 0.1 × F) [µS] (averaging factor ≥ 8)
±(30 + 0.1 × F) [µS] (averaging factor ≤ 7)

at oscillator level < –33 dBm

±(20 + 0.1 × F) [µS] (averaging factor ≥ 8)
±(60 + 0.1 × F) [µS] (averaging factor ≤ 7)

± 0.06 +

0.08 × F

[%]

1000

Accuracy when open/short/load/low-loss
capacitor calibration is performed

(See Figure 5)

Definition of each parameter

Dx = Measurement value of D

Qx = Measurement value of Q

Ea = (Within ±5 °C from the calibration temperature.

Measurement accuracy applies when the calibration
is performed at 23 °C ±5 °C. When the calibration
is performed beyond 23 °C ±5 °C, measurement
error doubles.)

at oscillator level ≥ –33 dBm:

±0.65 [%] (1 MHz ≤ Frequency ≤ 100 MHz)
±0.8 [%] (100 MHz < Frequency ≤ 500 MHz)
±1.2 [%] (500 MHz < Frequency ≤ 1 GHz)
±2.5 [%] (1 GHz < Frequency ≤ 1.8 GHz)
±5 [%] (1.8 GHz < Frequency ≤ 3 GHz)

|Z|, |Y|: ±(Ea+ Eb) [%]

θ: ±

E

c

[rad]

100

L, C, X, B: ± √(E

a

+ Eb)2+ (EcDx)2[%]

R, G: ± √(Ea+ Eb)2+ (EcQx)2[%]

D:

at Dxtan

E

c

< 1 ±

100

at D

x

≤0.1 ±

E

c

100

Q:

at Qxtan

E

c

< 1 ±

100

at

10

≥Qx≥ 10 ±Q

2

x

E

c

E

c

100

(1 + D

2

x

)tan

E

c

100

1 Dxtan

E

c

100

(1 + Q

2

x

)tan

E

c

100

1 Qxtan

E

c

100

±

Z

s

+Yo• Zx× 100 [%]

Z

x

5

±

±

6

Figure 2. |Z|, |Y| Measurement accuracy when open/short/load

calibration is performed. Oscillator level ≥ –33 dBm.
Point averaging factor ≥ 8 within ±5 °C from the calibration
temperature.

Figure 3. |Z|, |Y| Measurement accuracy when open/short/load

calibration is performed. Oscillator level ≥ –33 dBm.
Point averaging factor ≤ 7 within ±5 °C from the calibration
temperature.

Measurement Accuracy

(continued)

Examples of calculated impedance
measurement accuracy

Figure 1. |Z|, |Y| Measurement accuracy when open/short/load

calibration is performed. Oscillator level = –23 dBm,

–13 dBm, –3 dBm. Point averaging factor ≥ 8 within ±5 °C

from the calibration temperature.

7

Figure 4. |Z|, |Y| Measurement accuracy when open/short/load

calibration is performed. Oscillator level < –33 dBm within
±5 °C from the calibration temperature.

Figure 5. Q Measurement accuracy when open/short/load/low-loss

capacitor calibration is performed (typical).

Measurement Support
Functions

Error correction

Available calibration and compensation

Open/short/load calibration:

Connect open, short, and load standards to the
desired reference plane and measure each kind
of calibration data. The reference plane is called
the calibration reference plane.

Low-loss capacitor calibration:

Connect the dedicated standard (low-loss
capacitor) to the calibration reference plane
and measure the calibration data.

Port extension compensation (fixture selection):

When a device is connected to a terminal that is
extended from the calibration reference plane,
set the electrical length between the calibration
plane and the device contact. Select the model
number of the registered test fixtures in the
E4991A’s setup toolbar or enter the electrical
length for the user’s test fixture.

Open/short compensation:

When a device is connected to a terminal that
is extended from the calibration reference
plane, make open and/or short states at the
device contact and measure each kind of

compensation data.

Calibration/compensation data measurement point

User-defined point mode:

Obtain calibration/compensation data at
the same frequency and power points as used
in actual device measurement, which are
determined by the sweep setups. Each set of
calibration/compensation data is applied to each
measurement at the same point. If measurement
points (frequency and/or power) are changed

by altering the sweep setups, calibration/
compensation data become invalid and calibration
or compensation data acquisition is again required.

8

Measurement Support
Functions

(continued)

Fixed frequency and fixed power point mode:

Obtain calibration/compensation data at fixed
frequency and power points covering the entire
frequency and power range of the E4991A. In
device measurement, calibration or compensation
is applied to each measurement point by using
interpolation. Even if the measurement points
(frequency and/or power) are changed by
altering the sweep setups, you don’t need to
retake the calibration or compensation data.

Fixed frequency and user-defined power point mode:

Obtain calibration/compensation data at fixed
frequency points covering the entire frequency
range of the E4991A and at the same power
points as used in actual device measurement
which are determined by the sweep setups.
Only if the power points are changed, calibration/
compensation data become invalid and
calibration or compensation data acquisition
is again required.

Trigger

Trigger mode:

Internal, external (external trigger input

connector), bus (GPIB), manual (front key)

Averaging

Types:

Sweep-to-sweep averaging, point averaging

Setting range:

Sweep-to-sweep averaging: 1 to 999 (integer)
Point averaging: 1 to 100 (integer)

Display

LCD display :

Type/size: color LCD, 8.4 inch (21.3 cm)
Resolution: 640 (horizontal) × 480 (vertical)

Number of traces:

Data trace: 3 scalar traces + 2 complex traces

(maximum)

Memory trace: 3 scalar traces + 2 complex traces

(maximum)

Trace data math:

Data – memory, data/memory (for complex

parameters), delta% (for scalar parameters), offset

Format:

For scalar parameters: linear Y-axis, log Y-axis
For complex parameters: Z, Y: polar, complex; Γ: polar,

complex, Smith, admittance

Other display functions:

Split/overlay display (for scalar parameters),
phase expansion

Marker

9

3. Refer to the standard for the meaning of each function code.

Number of markers:

Main marker: one for each trace (marker 1)
Sub marker: seven for each trace (marker 2 to

marker 8)

Reference marker: one for each trace (marker R)

Marker search:

Search type: maximum, minimum, target, peak
Search track: performs search with each sweep

Other functions:

Marker continuous mode, marker coupled mode,
marker list, marker statistics

Equivalent circuit analysis

Circuit models:

3-component model (4 models),
4-component model (1 model)

Analysis types:

Equivalent circuit parameters calculation,

frequency characteristics simulation

Limit marker test

Number of markers for limit test:

9 (marker R, marker 1 to 8)

Setup parameters for each marker:

Stimulus value, upper limit, and lower limit

Mass storage

Built-in flexible disk drive:

3.5 inch, 720 KByte or 1.44 MByte, DOS format

Hard disk drive:

2 GByte (minimum)

Stored data:

State (binary), measurement data (binary, ASCII
or CITI file), display graphics (bmp, jpg), VBA
program (binary)

Interface

GPIB

Standard conformity:

IEEE 488.1-1987, IEEE 488.2-1987

Available functions (function code)3:

SH1, AH1, T6, TE0, L4, LE0, SR1, RL0, PP0, DT1,
DC1, C0, E2

Numerical data transfer format:

ASCII

Protocol:

IEEE 488.2-1987

Printer parallel port

Interface standard:

IEEE 1284 Centronics

Connector type:

25-pin D-sub connector, female

LAN interface

Standard conformity:

10 Base-T or 100 Base-TX (automatically
switched), Ethertwist, RJ45 connector

Protocol:

TCP/IP

Functions:

FTP

10

Rear panel connectors

External reference signal input connector

Frequency:

10 MHz ±10 ppm (typical)

Level:

0 dBm to +6 dBm (typical)

Input impedance:

50 Ω (nominal)

Connector type:

BNC, female

Internal reference signal output connector

Frequency:

10 MHz (nominal)

Accuracy of frequency:

Same as frequency accuracy described in
“Frequency” on page 3

Level:

+2 dBm (nominal)

Output impedance:

50 Ω (nominal)

Connector type:

BNC, female

High stability frequency reference
output connector (Option E4991A-1D5)

Frequency:

10 MHz (nominal)

Accuracy of frequency:

Same as frequency accuracy described in
“Frequency” on page 3

Level:

+2 dBm (nominal)

Output impedance:

50 Ω (nominal)

Connector type:

BNC, female

Measurement Terminal
(At Test Head)

Connector type:

7-mm connector

11

General Characteristics

Environment conditions

Operating condition

Temperature:

5 °C to 40 °C

Humidity:

(at wet bulb temperature ≤ 29 °C,
without condensation)

Flexible disk drive non-operating condition:

15% to 90% RH

Flexible disk drive operating condition:

20% to 80% RH

Altitude:

0 m to 2,000 m (0 feet to 6,561 feet)

Vibration:

0.5 G maximum, 5 Hz to 500 Hz

Warm-up time:

30 minutes

Non-operating storage condition

Temperature:

–20 °C to +60 °C

Humidity:

(at wet bulb temperature ≤ 45 °C,
without condensation)

15% to 90% RH

Altitude:

0 m to 4,572 m (0 feet to 15,000 feet)

Vibration:

1 G maximum, 5 Hz to 500 Hz

External trigger input connector

Level:

LOW threshold voltage: 0.5 V
HIGH threshold voltage: 2.1 V
Input level range: 0 V to +5 V

Pulse width (Tp):

≥ 2 µ sec (typical). See Figure 6 for definition of Tp.

Polarity:

Positive or negative (selective)

Connector type:

BNC, female

Figure 6. Definition of pulse width (Tp)

12

General Characteristics

(continued)

Other specifications

EMC

European Council Directive 89/336/EEC

IEC 61326-1:1997+A1

CISPR 11:1990 / EN 55011:1991 Group 1, Class A

IEC 61000-4-2:1995 / EN 61000-4-2:1995

4 kV CD / 4 kV AD

IEC 61000-4-3:1995 / EN 61000-4-3:1996

3 V/m, 80-1000 MHz, 80% AM

IEC 61000-4-4:1995 / EN 61000-4-4:1995

1 kV power / 0.5 kV Signal

IEC 61000-4-5:1995 / EN 61000-4-5:1995

0.5 kV Normal / 1 kV Common

IEC 61000-4-6:1996 / EN 61000-4-6:1996

3 V, 0.15-80 MHz, 80% AM

IEC 61000-4-11:1994 / EN 61000-4-11:1994

100% 1cycle
Note: When tested at 3 V/m according to
EN 61000-4-3:1996, the measurement accuracy
will be within specifications over the full immunity
test frequency range of 80 MHz to 1000 MHz except
when the analyzer frequency is identical to the
transmitted interference signal test frequency.

AS/NZS 2064.1/2 Group 1, Class A

Safety

European Council Directive 73/23/EEC
IEC 61010-1:1990+A1+A2 / EN 61010-1:1993+A2

INSTALLATION CATEGORY II, POLLUTION
DEGREE 2
INDOOR USE

IEC60825-1:1994 CLASS 1 LED PRODUCT

CAN/CSA C22.2 No. 1010.1-92

Power requirements

90 V to 132 V, or 198 V to 264 V (automatically
switched), 47 Hz to 63 Hz, 350 VA maximum

Weight

Main unit: 17 kg (nominal)
Test head: 1 kg (nominal)

Dimensions

Main unit: See Figure 7 through Figure 9
Test head: See Figure 10
Option E4991A-007 test head dimensions: See Figure 11
Option E4991A-010 test head dimensions: See Figure 12

13

Figure 8. Main unit dimensions

(rear view, in millimeters, nominal)

Figure 9. Main unit dimensions

(side view, in millimeters, nominal)

Figure 7. Main unit dimensions

(front view, in millimeters, nominal)

14

Figure 10. Test head dimensions

(in millimeters, nominal)

General Characteristics (continued)

Figure 11. Option E4991A-007 test head

dimensions (in millimeters,nominal)

15

General Characteristics (continued)

Figure 12. Option E4991A-010 test head

dimensions (in millimeters,nominal)

16

Furnished accessories

Model/option number Agilent part number Description Qty

Agilent E4991A - Agilent E4991A impedance/material analyzer (main unit) 1

- Test head 1

- Agilent 16195B 7-mm calibration kit 1
8710-1766 Torque wrench 1

- Mouse

4

1

- Keyboard

5

1

- Power cable 1
E4991-1610x CD-ROM (firmware and VBA software)

6

1

E4991-905xx CD-ROM (for manual)

6

1

Option 007 E4991-60005 Fixture station 1

E4991-60006 Test head stand 1
E4991-60032 7-mm OPEN standard 1
E4991-60031 7-mm SHORT standard 1
04287-61651 RF extenstion cable assembly 1
1250-2879 N (m) to SMA (f) adapter 3
1250-3157 N (f) to SMA (f) adapter 3
E4991-18001 Floppy disk

(Contains temperature characterisitc 1

measurement software)
04291-09001 Pad 1
1400-0584 Mount cable tie 1

Option 010 - Test head 1

(Including 1 m extension cable)
1250-2879 N (m) to SMA (f) adapter 3
1250-1747 3.5-mm to 7-mm adapter 1
0515-1551 Screw 4
3050-0891 Washer 4

Option ABA E4991-900x0 Operation manual

6

1

E4991-900x1 Installation and quick start guide

6

1

E4991-900x2 Programming manual

6

1

E4991-180x0 Sample program disk (3.5 inch floppy disk)

6

1

Option 1D5 8120-1838 BNC(m)-BNC(m) cable

7

1
Option 1CM 5063-9216 Rackmount kit 1
Option 1CN 5063-9229 Handle kit 1
Option 1CP 5063-9223 Rackmount & handle kit 1

4. Not furnished if Option 1CS (without mouse) is designated.

5. Not furnished if Option 1A2 (without keyboard) is designated.

6. The number indicated by “x” in the part number of each manual, sample

program disk, or CD-ROM, is incremented by 1 each time a revision is
made. The latest edition comes with the product (0 for the first edition).

7. This cable is furnished if Option 1D5 high stability frequency reference is designated.

Typical accuracy of permittivity parameters:

εr' accuracy

(at tanδ < 0.1)

Loss tangent accuracy of εr(= ∆tanδ):

±(Ea+ Eb) (at tanδ <0.1)

where,

E

a

=

at Frequency ≤ 1 GHz:

E

b

=

f = Measurement frequency [GHz]

t = Thickness of MUT (material under test) [mm]
ε'

rm

= Measured value of ε'

r

tanδ = Measured value of dielectric loss tangent

17

=

∆ε'

rm

:

ε'

rm

Option E4491A-002 Material
Measurement (Typical)

Measurement parameter

Permittivity parameters:

|εr|, εr', εr", tanδ

Permeability parameters:

|µr|, µr', µr", tanδ

Frequency range

Using with Agilent 16453A:

1 MHz to 1 GHz (typical)

Using with Agilent 16454A:

1 MHz to 1 GHz (typical)

Measurement accuracy

Conditions for defining accuracy:

Calibration:

Open, short, and load calibration at the test

port (7-mm connector)

Calibration temperature:

Calibration is performed at an environmental

temperature within the range of 23 °C ± 5 °C.
Measurement error doubles when calibration
temperature is below 18 °C or above 28 °C.

Temperature:

Temperature deviation: within ±5 ˚C from the

calibration temperature

Environment temperature: Measurement accuracy

applies when the calibration is performed at
23 °C ±5 °C. When the calibration is below

18 °C or above 23 °C, measurement error doubles.

Measurement frequency points:

Same as calibration points

Oscillator level:

Same as the level set at calibraiton

Point averaging factor: ≥ 8
Electrode pressure setting of 16453A: maximum

± 5 + 10 +

0.1 t
+ 0.25

ε'

rm

+

100

[%]

f

ε'

rm

t

1–

13

2

f √ε'

rm

0.002 +

0.001•t
+ 0.004f +

0.1

f ε'

rm

1–

13

2

f √ε'

rm

∆ε'

rm

• 1+ ε'

rm

0.002

tanδ

ε

'

rm

100 t

•

Typical accuracy of permeability parameters:

µ

r

' accuracy

(at tanδ
<0.1)

Loss tangent accuracy of µr(= ∆tanδ):

±(Ea+ Eb) (at tanδ <0.1)

where,

Ea=

E

b

=

f = Measurement frequency [GHz]

F =

h = Height of MUT (material under test) [mm]

b = Inner diameter of MUT (material under

test) [mm]

c = Outer diameter of MUT (material under

test) [mm]

µ'

rm

= Measured value of µ'

r

tanδ = Measured value of loss tangent

18

=

∆µ'

rm

:

µ'

rm

∆µrm' • tanδ

µ'

rm

100

4 +

0.02 25
+ Fµ'

rm

1 +

15

2

f

2

[%]

fFµ'

rm

Fµ'

rm

0.002 +

0.001
+ 0.004 f

Fµ'rmf

hln c[mm]

b

×

•

19

Option E4491A-002 Material
Measurement (typical)

(continued)

Examples of calculated permittivity
measurement accuracy

Figure 13. Permittivity accuracy

(∆ε'

r

)

vs.

ε'

r

frequency (at t = 0.3 mm, typical)

Figure 14. Permittivity accuracy

(∆ε'

r

)

vs.

ε'

r

frequency (at t = 1 mm, typical)

Figure 15. Permittivity accuracy

(∆ε'

r

)

vs.

ε'

r

frequency (at t = 3 mm, typical)

20

Figure 16. Dielectric loss tangent (tanδ)

accuracy vs. frequency (at t = 0.3 mm, typical)

8

Figure 17. Dielectric loss tangent (tanδ)

accuracy vs. frequency (at t = 1 mm, typical)

8

Figure 18. Dielectric loss tangent (tanδ)

accuracy vs. frequency (at t = 3 mm, typical)

8

8. This graph shows only frequency dependence of Eato simplify it.

The typical accuracy of tanδ is defined as E

a

+ Eb; refer to “Typical

accuracy of permittivity parameters” on page 17.

Figure 19. Permittivity (ε'r) vs.

frequency (at t = 0.3 mm, typical)

Figure 20. Permittivity (ε'r) vs.

frequency (at t = 1 mm, typical)

Figure 21. Permittivity (ε'r) vs.

frequency (at t = 3 mm, typical)

Option E4991A-002 Material
Measurement (typical)

(continued)

Examples of calculated permeability
measurement accuracy

Figure 22. Permeability accuracy

(∆µ'

r

)

vs.

µ'

r

frequency (at F = 0.5, typical)

Figure 23. Permeability accuracy

(∆µ'

r

)

vs.

µ'

r

frequency (at F = 3, typical)

Figure 24. Permeability accuracy

(∆µ'

r

)

vs.

µ'

r

frequency (at F = 10, typical)

21

22

Figure 25. Permeability loss tangent (tanδ)

accuracy vs. Frequency (at F = 0.5, typical)

9

Figure 26. Permeability loss tangent (tanδ)

accuracy vs. frequency (at F = 3, typical)

9

Figure 27. Permeability loss tangent (tanδ)

accuracy vs. frequency (at F = 10, typical)

9

Figure 28. Permeability (µ'r) vs.

frequency (at F = 0.5, typical)

Figure 29. Permeability (µ'r) vs.

frequency (at F = 3, typical)

Figure 30. Permeability (µ'r) vs.

frequency (at F = 10, typical)

9. This graph shows only frequency dependence of Eato simplify it.

The typical accuracy of tanδ is defined as E

a

+ Eb; refer to “Typical

accuracy of permeability parameters” on page 18.

23

Option E4991A-007 Temperature
Characteristic Test Kit

This section contains specifications and
supplemental information for the E4991A
Option E4991A-007. Except for the contents in
this section, the E4991A standard specifications
and supplemental information are applied.

Operation temperature

Range:

–55 °C to +150 °C (at the test port of the high

temperature cable)

Source characteristics

Frequency

Range:

1 MHz to 3 GHz

Oscillator level

Source power accuracy at the test port of the high
temperature cable:

Frequency ≤ 1 GHz:

+2 dB/–4 dB (23 °C ±5 °C)
+4 dB/–6 dB (5 °C to 40 °C)

Frequency > 1 GHz:

+3 dB/–6 dB (23 °C ±5 °C)
+5 dB/–8 dB (5 °C to 40 °C)

Measurement accuracy (at 23 °C ±5 °C)

Conditions

10

The measurement accuracy is specified when the
following conditions are met:

Calibration: open, short and load calibration is

completed at the test port (7-mm connector)
of the high temperature cable

Calibration temperature: calibration is performed at

an environmental temperature within the range
of 23 °C ±5 °C. Measurement error doubles
when calibration temperature is below 18 °C
or above 28 °C.

Measurement temperature range: within ±5 °C of

calibration temperature

Measurement plane: same as calibration plane
Oscillator level: same as the level set at calibration

Impedance, admittance and phase angle accuracy:

10. The high temperature cable must be kept at the same position
throughout calibration and measurement.

|Z|, |Y| ± (Ea+ Eb) [%]

(see Figure 31 through Figure 34 for
calculated accuracy)

θ ±

(E

a

+ Eb)

[rad]

100

where,
Ea= at oscillator level ≥ –33 dBm:

±0.8 [%] (1 MHz ≤ ƒ ≤ 100 MHz)
±1 [%] (100 MHz < ƒ ≤ 500 MHz)
±1.2 [%] (500 MHz < ƒ ≤ 1 GHz)
±2.5 [%] (1 GHz < ƒ ≤ 1.8 GHz)
±5 [%] (1.8 GHz < ƒ ≤ 3 GHz)

at oscillator level ≥ –33 dBm:

±1.2 [%] (1 MHz ≤ ƒ ≤ 100 MHz)
±1.5 [%] (100 MHz < ƒ ≤ 500 MHz)
±1.5 [%] (500 MHz < ƒ ≤ 1 GHz)
±2.5 [%] (1 GHz < ƒ ≤ 1.8 GHz)
±5 [%] (1.8 GHz < ƒ ≤ 3 GHz)
(Where, ƒ is frequency)

E

b

= ±

Z

s

+ Yo× |Zx| × 100

[%]

|Z

x

|

Where,

|Z

x

|= Absolute value of impedance

Zs= At oscillator level = –3 dBm, –13 dBm, or –23 dBm:

± (30 + 0.5 × F) [mΩ] (point averaging factor ≥ 8)
± (40 + 0.5 × F) [mΩ] (point averaging factor ≤ 7)

At oscillator level ≥ –33 dBm:

± (35 + 0.5 × F) [mΩ] (point averaging factor ≥ 8)
± (70 + 0.5 × F) [mΩ] (point averaging factor ≤ 7)

At oscillator level < –33 dBm:

± (50 + 0.5 × F) [mΩ] (point averaging factor ≥ 8)
± (150 + 0.5 × F) [mΩ] (point averaging factor ≤ 7)

(Where, F is frequency in MHz)

Yo= At oscillator level = –3 dBm, –13 dBm, –23 dBm:

± (12 + 0.1 × F) [µS] (point averaging factor ≥ 8)
± (20 + 0.1 × F) [µS] (point averaging factor ≤ 7)

At oscillator level ≥ –33 dBm:

± (15 + 0.1 × F) [µS] (point averaging factor ≥ 8)
± (40 + 0.1 × F) [µS] (point averaging factor ≤ 7)

At oscillator level < –33 dBm:

± (35 + 0.1 × F) [µS] (point averaging factor ≥ 8)
± (80 + 0.1 × F) [µS] (point averaging factor ≤ 7)

(Where, F is frequency in MHz)

24

Calculated Impedance/
Admittance Measurement
Accuracy

Figure 31. |Z|, |Y| measurement accuracy when open/short/load

calibration is performed. Oscillator level = –23 dBm,
–13 dBm, –3 dBm. Point averaging factor ≥ 8 within ±5 °C
of calibration temperature.

Figure 32. |Z|, |Y| measurement accuracy when open/short/load

calibration is performed. Oscillator level ≥ –33 dBm. Point
averaging factor ≥ 8 within ±5 °C of calibration temperature.

Figure 33. |Z|, |Y| measurement accuracy when open/short/load

calibration is perfomed. Oscillator level ≥ –33 dBm. Point
averaging factor ≤ 7 within ±5 °C of calibration temperature.

Figure 34. |Z|, |Y| measurement accuracy when open/short/load

calibration is performed. Oscillator level < –33 dBm. Point
averaging factor ≥ 8 within ±5 °C of calibration temperature.

25

Typical Effects of Temperature
Change on Measuement
Accuracy

When the temperature at the test port (7-mm
connector) of the high temperature cable
changes from the calibration temperature, typical
measurement accuracy involving temperature
dependence effects (errors) is applied. The typical
measurement accuracy is represented by the
sum of error due to temperature coefficients
(Ea´, Yo´and Zs´), hysteresis error (E

ah

, Y

oh

and Zsh) and the specified accuracy.

Conditions

The typical measurement accuracy is applied
when the following conditions are met:

Conditions of Ea’, Zs’ and Yo’:

Measurement temperature: –55 °C to 5 °C or

40 °C to 150 °C at test port. For 5 °C to 40 °C,
Ea´, Yo´ and Zs´ are 0 (neglected).

Temperature change: ≥ 5 °C from calibration

temperature when the temperature
compensation is off.
≥ 20 °C from calibration temperature when
the temperature compensation is set to on.

Calibration temperature: 23 °C ±5 °C
Calibration mode: user calibration
Temperature compensation: temperature

compensation data is acquired at the same
temperature points as measurement
temperatures.

Conditions of Eah, Zshand Yoh:

Measurement temperature: –55 °C to 150 °C at

the test port

Calibration temperature: 23 °C ±5 °C
Calibration mode: user calibration

Figure 35. Typical frequency characteristics of temperature

coefficient, (Ec+Ed)/∆T, when |Zx|= 10 Ω and 250 Ω,
Eah= Zsh= Yoh= 0 are assumed12.

26

Typical measurement accuracy (involving temperature
dependence effects)

11

:

11. See graphs in Figure 35 for the calculated values of (Ec+Ed)
exclusive of the hysteresis errors E

ah

, Zshand

Yoh

, when

measured impedance is 10 Ω and 250 Ω.

12. Read the value of ∆|Z|%/°C at the material measurement
frequency and multiply it by ∆T to derive the value of (Ec+Ed)
when E

ah

= Yoh= Zsh= 0.

|Z|, |Y|: ± (Ea+ Eb+ Ec+ Ed) [%]

θ : ±

(E

a

+ Eb+ Ec+ Ed)

[rad]

100

Where,

Ec= Ea´ ×∆T + E

ah

Ed=±

Zs´× ∆T + Z

sh

+ (Yo´× ∆T + Yoh) × |Zx|× 100 [%]

|Zx|

Where,

|Z

x

| = Absolute value of measured impedance

Here, Ea´, Zs´ and Yo´ are given by the following equations:

Without temperature With temperature compensation
compensation

1 MHz ≤ ƒ < 500 MHz 500 MHz ≤ ƒ ≤ 3 GHz

Ea´ 0.006 + 0.015 × ƒ [%/°C] 0.006 + 0.015 × ƒ [%/°C] 0.006 + 0.015 × ƒ [%/°C]

Zs´ 1 + 10 × ƒ [mΩ/°C] 1 + 10 × ƒ [mΩ/°C] 5 + 2 × ƒ [mΩ/°C]

Yo´ 0.3 + 3 × ƒ [µS/°C] 0.3 + 3 × ƒ [µS/°C] 1.5 + 0.6 × ƒ [µS/°C]

ƒ = Measurement frequency in GHz

Eah, Zshand Yohare given by following equations:

E

ah

= Ea´ ×∆T

max

× 0.3 [%]

Z

sh

= Zs´ ×∆T

max

× 0.3 [mΩ]

Y

oh

= Yo´ ×∆T

max

× 0.3 [µS]

∆T = Difference of measurement temperature from calibration temperature

∆T

max

= Maximum temperature change (°C) at the test port from calibration

temperature after the calibration is performed.

27

Typical Material Measurement
Accuracy When Using
Options E4991A-002 and
E4991A-007

Material measurement accuracy contains the
permittivity and permeability measurement accuracy
when the E4991A with Option E4991A-002 and
E4991A-007 is used with the 16453A or 16454A
test fixture.

Measurement parameter

Permittivity parameters:

|εr|, ε'r, ε", tanδ

Permeability parameters:

|µr|, µ'r, µ", tanδ

Frequency

Use with Agilent 16453A:

1 MHz to 1 GHz (typical)

Use with Agilent 16454A:

1 MHz to 1 GHz (typical)

Opertation temperature

Range:

–55 °C to +150 °C (at the test port of the high

temperature cable)

Typical material measurement accuracy
(at 23 °C ±150 °C)

Conditions
The measurement accuracy is specified when the
following conditions are met:

Calibration: Open, short and load calibration is

completed at the test port (7-mm connector) of
the high temperature cable

Calibration temperature: Calibration is performed at

an environmental temperature within the range
of 23 °C ±5 °C. Measurement error doubles
when calibration temperature is below 18 °C
or above 28 °C.

Measurement temperature range: Within ±5 °C of

calibration temperature

Measurement frequency points: Same as calibration

points (User Cal)

Oscillator level: Same as the level set at calibration
Point averaging factor: ≥ 8

Typical permittivity measurement accuracy

13

:

13. The accuracy applies when the electrode pressure of the 16453A
is set to maximum.

εr´ accuracy Eε=

∆ε´

rm

:

ε

´

rm

± 5 + 10 +

0.5

× t+ 0.25 ×

ε´

rm

+

100

f

ε

´

rm

t

|

1–

13

2

|

f √ε´

rm

[%] (at tanδ < 0.1)

Loss tangent accuracy of εr(= ∆tanδ) :

±(Ea+ Eb) (at tanδ < 0.1)

where,

Ea=

at Frequency ≤ 1 GHz

0.002 +

0.0025

× t+ (0.008 × f ) +

0.1

f ε´

rm

|

1–

13

2

|

f √ε´

rm

Eb=

∆ε´

rm

×

1

+ ε´

rm

0.002

× tanδ

ε´

rm

100 t

f = Measurement frequency [GHz]

t = Thickness of MUT (material under test) [mm]

ε´rm= Measured value of ε´

r

tanδ = Measured value of dielectric loss tangent

.

28

µr´ accuracy Eµ=

∆µ´

rm

:

µ´

rm

4 +

0.02

×

25

+ F × µ´

rm

× 1 +

15

2

× f

2

f F × µ´

rm

F × µ´

rm

[%] (at tanδ < 0.1)

Loss tangent accuracy of µr(= ∆tanδ) :

±(Ea+ Eb) (at tanδ < 0.1)

where,

E

a

= 0.002 +

0.005

+ 0.004 × f

F × µ´

rm

× f

E

b

=

∆µ´

rm

×

tanδ

µ´

rm

100

f = Measurement frequency [GHz]

F = hln c[mm]

b

h = Height of MUT (material under test) [mm]

b = Inner diameter of MUT [mm]

c = Outer diameter of MUT [mm]

µ´

rm

= Measured value of µ´

r

tanδ = Measured value of loss tangent

Typical permeability measurement accuracy :

.

29

Examples of Calculated
Permittivity Measurement
Accuracy

14. This graph shows only frequency dependence of Eafor
simplification. The typical accuracy of tanδ is defined as E

a

+ Eb;

refer to “Typical permittivity measurement accuracy” on page 27.

Figure 39. Dielectric loss tangent (tanδ)

accuracy vs. frequency (at t = 0.3 mm, typical)

14

Figure 38. Permittivity accuracy

(∆ε'

r

)

vs.

ε'

r

frequency (at t = 3 mm, typical)

Figure 36. Permittivity accuracy

(∆ε'

r

)

vs.

ε'

r

frequency (at t = 0.3 mm, typical)

Figure 40. Dielectric loss tangent (tanδ)

accuracy vs. frequency (at t = 1 mm, typical)

14

Figure 37. Permittivity accuracy

(∆ε'

r

)

vs.

ε'

r

frequency (at t = 1 mm, typical)

30

Examples of Calculated
Permittivity Measurement
Accuracy

(continued)

Figure 41. Dielectric loss tangent (tanδ)

accuracy vs. frequency (at t = 3 mm, typical)

14

Figure 42. Permittivity (ε'r) vs.

frequency (at t = 0.3 mm, typical)

14. This graph shows only frequency dependence of Eafor

simplification. The typical accuracy of tanδ is defined as E

a

+ Eb;

refer to “Typical permittivity measurement accuracy” on page 27.

Figure 43. Permittivity (ε'r) vs.

frequency (at t = 1 mm, typical)

Figure 44. Permittivity (ε'r) vs.

frequency (at t = 3 mm, typical)

31

Examples of Calculated
Permeability Measurement
Accuracy

15. This graph shows only frequency dependence of Eafor
simplification. The typical accuracy of tanδ is defined as E

a

+ Eb;

refer to “Typical permeability measurement accuracy” on page 28.

Figure 49. Permeability loss tangent (tanδ)

accuracy vs. Frequency (at F = 3, typical)

15

Figure 48. Permeability loss tangent (tanδ)

accuracy vs. Frequency (at F = 0.5, typical)

15

Figure 46. Permeability accuracy

(∆µ'

r

)

vs.

µ'

r

frequency (at F = 3, typical)

Figure 50. Permeability loss tangent (tanδ)

accuracy vs. Frequency (at F = 10, typical)

15

Figure 47. Permeability accuracy

(∆µ'

r

)

vs.

µ'

r

frequency (at F = 10, typical)

Figure 45. Permeability accuracy

(∆µ'

r

)

vs.

µ'

r

frequency (at F = 0.5, typical)

32

Examples of Calculated
Permeability Measurement
Accuracy

(continued)

Figure 52. Permeability (µ'r) vs.

frequency (at F = 3, typical)

Figure 51. Permeability (µ'r) vs.

frequency (at F = 0.5, typical)

Figure 53. Permeability (µ'r) vs.

frequency (at F = 10, typical)

33

Typical Effects of Temperature
Change on Permittivity
Measurement Accuracy

When the temperature at the test port (7-mm
connector) of the high temperature cable changes
more than 5 °C from the calibration temperature,
the typical permittivity measurement accuracy
involving temperature dependence effects
(errors) is applied. The typical permittivity
accuracy is represented by the sum of error due
to temperature coefficient (Tc), hysteresis error
(Tc×∆T

max

) and the accuracy at 23 °C ± 5 °C.

ε

r

´ accuracy =

∆ε´

rm

:

ε´

rm

±(Eε+ Ef+ Eg) [%]

Loss tangent accuracy of ε (= ∆tanδ) :

±

(Eε+ Ef+ Eg)

100

where,

Eε= Permittivity measurement accuracy at 23 °C ± 5 °C

Ef= Tc×∆T

Eg= Tc×∆T

max

× 0.3

Tc = K1+ K2+ K

3

See Figure 54 through Figure 56 for the calculated value of T

c

without temperature compensation

K1= 1 × 10-6× (60 + 150 × ƒ)

K2=

× ƒ

3 × 10-6× (1 + 10 × ƒ) ×

ε´

rm

×

1

+10

t

f

2

1–

f

o

K3=

1

5 × 10-3× (0.3 + 3 × ƒ) ×

ε´

rm

×

1

+10 × ƒ

t

f

2

1–

f

o

Typical accuracy of permittivity parameters:

.

34

with temperature compensation

K

1

= 1 × 10-6× (60 + 150 × ƒ)

K

2

= 1 MHz ≤ f < 500 MHz

3 × 10-6× (1 + 10 × ƒ) ×

ε´

rm

×

1

+10

t

f

2

× ƒ

1–

f

o

500 MHz ≤ ƒ ≤ 1 GHz

3 × 10

-6

× (5 + 2 × ƒ) ×

ε´

rm

×

1

+10

t

f

2

× ƒ

1–

f

o

K

3

= 1 MHz ≤ ƒ < 500 MHz

1

5 × 10-3× (0.3 + 3 × ƒ) ×

ε´

rm

×

1

+10× ƒ

t

f

2

1–

f

o

500 MHz ≤ ƒ ≤ 1 GHz

1

5 × 10-3× (1.5 + 0.6 × ƒ) ×

ε´

rm

×

1

+10× ƒ

t

f

2

1–

f

o

ƒ = Measurement frequency [GHz]

ƒ

o

=

13

[GHz]

√

ε´

r

t = Thickness of MUT (material under test) [mm]

ε´rm= Measured value of ε´

r

∆T = Difference of measurement temperature from calibration temperature
∆T

max

= Maximum temperature change (°C) at test port from calibration

temperature after the calibration is performed.

Typical accuracy of permittivity parameters (continued):

35

Figure 55. Typical frequency characteristics of temperature coefficient

of ε'

r

(Thickness = 1 mm)

Figure 54. Typical frequency characteristics of temperature coefficient

of ε'

r

(Thickness = 0.3 mm)

Figure 56. Typical frequency characteristics of temperature coefficient

of

ε'

r

(Thickness = 3 mm)

36

Typical Effects of Temperature
Change on Permeability
Measurement Accuracy

When the temperature at the test port (7-mm
connector) of the high temperature cable changes
more than 5 °C from the calibration temperature,
the typical permeability measurement accuracy
involving temperature dependence effects
(errors) is applied. The typical permeability
accuracy is represented by the sum of error due
to temperature coefficient (Tc), hysteresis error
(Tc ×∆T

max

) and the accuracy at 23 °C ±5 °C.

µ

r

´ accuracy =

∆µ´

rm

:

µ´

rm

±(Eµ+ Eh+ Ei) [%]

Loss tangent accuracy of µ

r

(= ∆tanδ) :

±

(Eµ+ Eh+ Ei)

100

where,

E

µ

= Permeability measurement accuracy

at 23 °C ± 5 °C

E

h

= Tc×∆T

E

i

= Tc×∆T

max

× 0.3

T

c

= K4+ K5+ K

6

See Figure 57 through Figure 59 for the
calculated value of T

c

without temperature compensation

K

4

=1 × 10-6× (60 + 150 × ƒ)

K

5

=

1 × 10-2× (1 + 10 × ƒ) ×

|1–0.01 × {F × (µ´rm–1) +10} × ƒ2|

{F × (µ´rm–1) + 20} × ƒ

K

6

=

2 × 10-6× (0.3 + 3 × ƒ) ×

{F × (µ´

rm

–1) + 20} × ƒ

|1–0.01 × {F × (µ´

rm

–1) +10} × ƒ

2

|

with temperature compensation

K

4

=1 × 10-6× (60 + 150 × ƒ)

K

5

=

1 MHz ≤ ƒ < 500 MHz

1 × 10-2× (1 + 10 × ƒ) ×

|1–0.01 × {F × (µ´rm–1) +10} × ƒ2|

{F × (µ´rm–1) + 20} × ƒ

500 MHz ≤ ƒ ≤ 1 GHz

1 × 10-2× (5 + 2 × ƒ) ×

|1–0.01 × {F × (µ´rm–1) +10} × ƒ2|

{F × (µ´rm–1) + 20} × ƒ

Typical accuracy of permeability parameters:

.

37

K

6

= 1 MHz ≤ ƒ < 500 MHz

2 × 10-6× (0.3 + 3 × ƒ) ×

{F × (µ´rm–1) + 20} × ƒ

|1–0.01 × {F × (µ´

rm

–1) +10} × ƒ

2

|

500 MHz ≤ ƒ ≤ 1 GHz

2 × 10-6× (1.5 + 0.6 × ƒ) ×

{F × (µ´rm–1) + 20} × ƒ

|1–0.01 × {F × (µ´rm–1) +10} × ƒ

2

|

ƒ = Measurement frequency [GHz]

F = hln c[mm]

b

h = Height of MUT (material under test) [mm]

b = Inner diameter of MUT [mm]

c = Outer diameter of MUT [mm]

µ´ = Measured value of µ´

r

∆T = Difference of measurement temperature from

calibration temperature

∆T

max

= Maximum temperature change (°C) at test

port from calibration temperature after the
calibration is performed.

Typical accuracy of permeability parameters (continued):

38

Figure 58. Typical frequency characteristics of temperature coefficient

of µ'r(at F = 3)

Figure 57. Typical frequency characteristics of temperature coefficient

of µ'r(at F = 0.5)

Figure 59. Typical frequency characteristics of temperature coefficient

of µ'r(at F = 10)

39

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Product specifications and descriptions in this
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© 2003 Agilent Technologies, Inc.
Printed in USA August 13, 2003
5980-1233E

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