Agilent E4980A Data Sheet

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E4980A Precision LCR Meter 20 Hz to 2 MHz
Data Sheet
Agilent
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2
All specifications apply to the conditions of a 0 to 55 °C temperature range, unless otherwise stated, and 30 minutes after the instrument has been turned on.
Specifications (spec.): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution, measurement uncertainties, and changes in performance due to environmental conditions.
Supplemental information is provided as information that is useful in operating the instru­ment, but is not covered by the product warranty. This information is classified as either typical or nominal.
Typical (typ.): Expected performance of an average unit without taking guardbands into account.
Nominal (nom.): A general descriptive term that does not imply a level of performance.
When measurement conditions fall under multiple categories in a table, apply the best value.
For example, basic accuracy Ab is 0.01% under the following conditions;
Measurement time mode SHORT Test frequency 125 Hz Test signal voltage 0.3 Vrms
Definitions
How to Use Tables
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Measurement functions
Measurement parameters
• Cp-D, Cp-Q, Cp-G, Cp-Rp
• Cs-D, Cs-Q, Cs-Rs
• Lp-D, Lp-Q, Lp-G, Lp-Rp, Lp-Rdc
1
• Ls-D, Ls-Q, Ls-Rs, Ls-Rdc
1
•R-X
•Z-θd, Z-θr
•G-B
•Y-θd, Y-θr
• Vdc-Idc
1
Definitions
Cp Capacitance value measured with parallel-equivalent circuit model Cs Capacitance value measured with series-equivalent circuit model Lp Inductance value measured with parallel-equivalent circuit model Ls Inductance value measured with series-equivalent circuit model D Dissipation factor Q Quality factor (inverse of D) G Equivalent parallel conductance measured with parallel-equivalent circuit model Rp Equivalent parallel resistance measured with parallel-equivalent circuit model Rs Equivalent series resistance measured with series-equivalent circuit model Rdc Direct-current resistance R Resistance X Reactance Z Impedance Y Admittance
θd Phase angle of impedance/admittance (degree) θr Phase angle of impedance/admittance (radian)
B Susceptance Vdc Direct-current voltage Idc Direct-current electricity
Deviation measurement function: Deviation from reference value and percentage of
deviation from reference value can be output as the result.
Equivalent circuits for measurement: Parallel, Series
Impedance range selection: Auto (auto range mode), manual (hold range mode)
Trigger mode: Internal trigger (INT), manual trigger (MAN), external trigger (EXT), GPIB
trigger (BUS)
Basic Specifications
1. Option E4980A-001 is required.
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Table 1. Trigger delay time
Range 0 s - 999 s
Resolution 100 µs (0 s - 100 s)
1 ms (100 s - 999 s)
Table 2. Step delay time
Range 0 s - 999 s
Resolution 100 µs (0 s - 100 s)
1 ms (100 s - 999 s)
Measurement terminal: Four-terminal pair
Test cable length: 0 m, 1 m, 2 m, 4 m
Measurement time modes: Short mode, medium mode, long mode.
Table 3. Averaging
Range 1 - 256 measurements
Resolution 1
Test signal
Table 4. Test frequencies
Test frequencies 20 Hz - 2 MHz
Resolution 0.01 Hz (20 Hz - 99.99 Hz)
0.1 Hz (100 Hz - 999.9 Hz) 1 Hz (1 kHz - 9.999 kHz) 10 Hz (10 kHz - 99.99 kHz) 100 Hz (100 kHz - 999.9 kHz) 1 kHz (1 MHz - 2 MHz)
Measurement accuracy ± 0.01%
Table 5. Test signal modes
Normal Program selected voltage or current at the measurement
terminals when they are opened or short-circuited, respectively.
Constant Maintains selected voltage or current at the device under test
(DUT) independently of changes in impedance of DUT.
4
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Signal level
Table 6. Test signal voltage
Range 0 Vrms - 2.0 Vrms Resolution 100 µVrms (0 Vrms - 0.2 Vrms)
200 µVrms (0.2 Vrms - 0.5 Vrms) 500 µVrms (0.5 Vrms - 1 Vrms) 1 mVrms (1 Vrms - 2 Vrms)
Accuracy Normal ±(10% + 1 mVrms) Test frequency 1 MHz: spec.
Constant
1
±(6% + 1 mVrms) Test frequency > 1 MHz: typ.
Table 7. Test signal current
Range 0 Arms - 20 mArms Resolution 1 µArms (0 Arms - 2 mArms)
2 µArms (2 mArms - 5 mArms) 5 µArms (5 mArms - 10 mArms) 10 µArms (10 mArms - 20 mArms)
Accuracy Normal ±(10% + 10 µArms) Test frequency 1 MHz: spec.
Constant
1
±(6% + 10 µArms) Test frequency > 1 MHz: typ.
Output impedance: 100 (nominal)
Test signal level monitor function
• Test signal voltage and test signal current can be monitored.
• Level monitor accuracy.
Table 8. Test signal voltage monitor accuracy (Vac)
Test signal voltage
2
Test frequency Specification
5 mVrms - 2 Vrms 1 MHz ± (3% of reading value + 0.5 mVrms)
> 1 MHz ± (6% of reading value + 1 mVrms)
Table 9. Test signal current monitor accuracy (lac)
Test signal current
2
Test frequency Specification
50 µArms - 20 mArms 1 MHz ± (3% of reading value + 5 µArms)
> 1 MHz ± (6% of reading value + 10 µArms)
1. When auto level control function is on.
2. Monitored test signal level.
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Measurement display ranges
Table 10 shows the range of measured value that can be displayed on the screen.
Table 10. Allowable display ranges for measured values
Parameter Measurement display range
Cs, Cp ± 1.000000 aF to 999.9999 EF
Ls, Lp ± 1.000000 aH to 999.9999 EH
D ± 0.000001 to 9.999999
Q ± 0.01 to 99999.99
R, Rs, Rp, ± 1.000000 ato 999.9999 E X, Z, Rdc
G, B, Y ± 1.000000 aS to 999.9999 ES
Vdc ± 1.000000 aV to 999.9999 EV
Idc ± 1.000000 aA to 999.9999 EA
θr ± 1.000000 arad to 3.141593 rad
θd ± 0.0001 deg to 180.0000 deg
D% ± 0.0001 % to 999.9999 %
a: 1 x 10
-
18
, E: 1 x 10
18
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Absolute measurement accuracy
The following equations are used to calculate absolute accuracy.
Absolute accuracy Aa of |Z|, |Y|, L, C, R, X, G, B (L, C, X, and B accuracies apply when Dx 0.1, R and G accuracies apply when Qx 0.1 )
Equation 1. Aa = Ae + Acal
Aa Absolute accuracy (% of reading value) Ae Relative accuracy (% of reading value) Acal Calibration accuracy (%)
where G accuracy is applied only to G-B measurements.
D accuracy (when Dx ≤ 0.1)
Equation 2. De + θcal
Dx Measured D value De Relative accuracy of D
θcal Calibration accuracy of θ (radian)
Q accuracy (When Qx × Da < 1)
Equation 3.
±
(Qx
2
×
Da)
(1 Qx × Da)
Qx Measured Q value Da Absolute accuracy of D
θ accuracy
Equation 4. θe + θcal
θe Relative accuracy of θ (degree) θcal Calibration accuracy of θ (degree)
±
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G accuracy (when Dx ≤ 0.1)
Equation 5. Bx + Da (S)
Bx = 2πfCx =
1
2πfLx
Dx Measured D value Bx Measured B value (S) Da Absolute accuracy of D f Test frequency (Hz) Cx Measured C value (F) Lx Measured L value (H)
where the accuracy of G is applied to Cp-G measurements.
Absolute accuracy of Rp (when Dx ≤ 0.1)
Equation 6.
±
Rpx × Da
()
Dx Da
Rpx Measured Rp value (Ω) Dx Measured D value Da Absolute accuracy of D
Absolute accuracy of Rs (when Dx ≤ 0.1)
Equation 7. Xx × Da (Ω)
Xx = 1 = 2πfLx
2πfCx
Dx Measured D value Xx Measured X value (Ω) Da Absolute accuracy of D f Test frequency (Hz) Cx Measured C value (F) Lx Measured L value (H)
±
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Relative accuracy
Relative accuracy includes stability, temperature coefficient, linearity, repeatability, and calibration interpolation error. Relative accuracy is specified when all of the following conditions are satisfied:
• Warm-up time: 30 minutes
• Test cable length: 0 m, 1 m, 2 m, or 4 m (Agilent 16047A/B/D/E)
• DC bias current level monitor 100 mA
• The DC bias current does not exceed a set value within each range of the DC bias current
• A “Signal Source Overload” warning does not appear. When the test signal current exceeds a value in table 11 below, a “Signal Source Overload” warning appears.
Table 11.
Test signal voltage Test frequency Condition
1
≤ 2 Vrms – > 2 Vrms ≤ 1 MHz the smaller value of either 110 mA or
130 mA - 0.0015 × Vac × (Fm / 1 MHz) × (L_cable + 0.5)
> 1 MHz 70 mA - 0.0015 × Vac × (Fm / 1 MHz) × (L_cable + 0.5)
Vac [V] Test signal voltage Fm [Hz] Test frequency L_cable [m] Cable length
• OPEN and SHORT corrections have been performed.
• Bias current isolation: Off
• The optimum impedance range is selected by matching the impedance of DUT to the effective measuring range.
|Z|, |Y|, L, C, R, X, G, and B accuracy (L, C, X, and B accuracies apply when Dx 0.1, R and G accuracies apply Qx 0.1)
Relative accuracy Ae is given as: Equation 8. Ae = [Ab + Zs /|Zm| × 100 + Yo × |Zm| × 100 ] × Kt
Zm Impedance of DUT Ab Basic accuracy Zs Short offset Yo Open offset Kt Temperature coefficient
D accuracy
D accuracy De is given as
• when Dx ≤ 0.1
Equation 9. De = ±Ae/100
Dx Measured D value Ae Relative accuracies of |Z|, |Y|, L, C, R, X, G, and B
• when Dx > 0.1, multiply De by (1 + Dx)
1. When the calculation result is a negative value, 0 A is applied.
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Q accuracy (when Q x De < 1)
Q accuracy Qe is given as:
Equation 10. Qe = ±
(Qx
2
× De)
(1 Qx × De)
Qx Measured Q value De Relative D accuracy
θ accuracy θ accuracy θe is given as:
Equation 11. θe =
180 × Ae
(deg)
π× 100
Ae Relative accuracies of |Z|, |Y|, L, C, R, X, G, and B
G accuracy (when Dx ≤ 0.1)
G accuracy Ge is given as:
Equation 12. Ge = Bx × De (S)
Bx = 2πfCx =
1
2πfLx
Ge Relative G accuracy Dx Measured D value Bx Measured B value De Relative D accuracy f Test frequency Cx Measured C value (F) Lx Measured L value (H)
Rp accuracy (when Dx ≤ 0.1)
Rp accuracy Rpe is given as:
Equation 13. Rpe = ±
Rpx × De
()
Dx De
Rpe Relative Rp accuracy Rpx Measured Rp value (Ω) Dx Measured D value De Relative D accuracy
Rs accuracy (when Dx ≤ 0.1)
Rs accuracy Rse is given as:
Equation 14. Rse = Xx × De (Ω)
Xx = 1 = 2πfLx
2πfCx
Rse Relative Rs accuracy Dx Measured D value Xx Measured X value (Ω) De Relative D accuracy f Test frequency (Hz) Cx Measured C value (F) Lx Measured L value (H)
±
±
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Example of C-D accuracy calculation
Measurement conditions
Test Frequency: 1 kHz Measured C value: 100 nF Test signal voltage: 1 Vrms Measurement time mode: Medium Measurement temperature: 23 °C
Ab = 0.05% |Zm| = 1 / (2π×1 × 10
3
× 100 × 10-9) = 1590 Zs = 0.6 mΩ×(1 + 0.400/1) × (1 + √(1000/1000) = 1.68 m Yo = 0.5 nS × (1 + 0.100/1) × (1 + (100/1000) = 0.72 nS C accuracy: Ae = [0.05 + 1.68 m/1590 × 100 + 0.72 n × 1590 × 100] × 1 = 0.05% D accuracy: De = 0.05/100 = 0.0005
Basic accuracy
Basic accuracy Ab is given below.
Table 12. Measurement time mode = SHORT
Test signal voltage
Test 5 mVrms - 50 mVrms - 0.3 Vrms - 1 Vrms - 10 Vrms ­frequency [Hz] 50 mVrms 0.3 Vrms 1 Vrms 10 Vrms 20 Vrms
20 - 125 (0.6%) × 0.60% 0.30% 0.30% 0.30%
(50 mVrms/Vs)
125 - 1 M (0.2%) × 0.20% 0.10% 0.15% 0.15%
(50 mVrms/Vs)
1 M - 2 M (0.4%) × 0.40% 0.20% 0.30% 0.30%
(50 mVrms/Vs)
Table 13. Measurement time mode = MED, LONG
Test signal voltage
Test 5 mVrms - 50 mVrms - 0.3 Vrms - 1 Vrms - 10 Vrms ­frequency [Hz] 50 mVrms 0.3 Vrms 1 Vrms 10 Vrms 20 Vrms
20 - 125 (0.25%) × 0.25% 0.10% 0.15% 0.15%
(30 mVrms/Vs)
125 - 1 M (0.1%) × 0.10% 0.05% 0.10% 0.15%
(30 mVrms/Vs)
1 M - 2 M (0.2%) × 0.20% 0.10% 0.20% 0.30%
(30 mVrms/Vs)
Vs [Vrms] Test signal voltage
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Effect by impedance of DUT
Table 14. For impedance of DUT below 30 , the following value is added.
Test Impedance of DUT frequency [Hz] 1.08 Ω≤|Zx| < 30 |Zx| < 1.08
20 - 1 M 0.05% 0.10% 1 M - 2 M 0.10% 0.20%
Table 15. For impedance of DUT over 9.2 k , the following value is added.
Test Impedance of DUT frequency [Hz] 9.2 k< |Zx| 92 k 92 k< |Zx|
10 k - 100 k 0% 0.05% 100 k - 1 M 0.05% 0.05% 1 M - 2 M 0.10% 0.10%
Effect from cable extension
When the cable is extended, the following element is added per one meter.
0.015 % × (Fm/1 MHz)
2
× (L_cable)
2
Fm [Hz] Test Frequency L_cable [m] Cable length
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Short offset Zs
Table 16. Impedance of DUT > 1.08
Test Measurement time mode frequency [Hz] SHORT MED, LONG
20 - 2 M 2.5 mΩ×(1 + 0.400/Vs) × 0.6 mΩ×(1 + 0.400/Vs) ×
(1 + (1000/Fm)) (1 + √(1000/Fm))
Table 17. Impedance of DUT ≤ 1.08 Ω
Test Measurement time mode frequency [Hz] SHORT MED, LONG
20 - 2 M 1 mΩ×(1 + 1/Vs) × 0.2 mΩ×(1 + 1/Vs) ×
(1 + (1000/Fm)) (1 + √(1000/Fm))
Vs [Vrms] Test signal voltage Fm [Hz] Test frequency
Effect from cable extension (Short offset)
Table 18. When the cable is extended, the following value is added to Zs (independent of the measurement time mode).
Test Cable length frequency [Hz] 0 m 1 m 2 m 4 m
20 - 1 M 0 0.25 m 0.5 m 1 m 1 M - 2 M 0 1 m 2 m 4 m
Open offset Yo
Table 19. Test signal voltage 2.0 Vrms
Test Measurement time mode frequency [Hz] SHORT MED, LONG
20 - 100 k 2 nS × (1 + 0.100/Vs) × 0.5 nS × (1 + 0.100/Vs) ×
(1 + (100/Fm)) (1 + √(100/Fm)) 100 k - 1 M 20 nS × (1 + 0.100/Vs) 5 nS × (1 + 0.100/Vs) 1 M - 2 M 40 nS × (1 + 0.100/Vs) 10 nS × (1 + 0.100/Vs)
Table 20. Test signal voltage > 2.0 Vrms
Test Measurement time mode frequency [Hz] SHORT MED, LONG
20 - 100 k 2 nS × (1 + 2/Vs) × 0.5 nS × (1 + 2/Vs) ×
(1 + (100/Fm)) (1 + √(100/Fm)) 100 k - 1 M 20 nS × (1 + 2/Vs) 5 nS × (1 + 2/Vs) 1 M - 2 M 40 nS × (1 + 2/Vs) 10 nS × (1 + 2/Vs)
Vs [Vrms] Test signal voltage Fm [Hz] Test frequency
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Effect from cable length
Table 21. When the cable is extended, multiply Yo by the following factor.
Test Cable length frequency [Hz] 0 m 1 m 2 m 4 m
100 - 100 k 1 1 + 5 × Fm/1 MHz 1 + 10 × Fm/1 MHz 1 + 20 × Fm/1 MHz 100 k - 1 M 1 1 + 0.5 × Fm/1 MHz 1 + 1 × Fm/1 MHz 1 + 2 × Fm/1 MHz 1 M - 2 M 1 1 + 1 × Fm/1 MHz 1 + 2 × Fm/1 MHz 1 + 4 × Fm/1 MHz
Fm [Hz] Test frequency
Temperature factor Kt
Table 22. The temperature factor Kt is given below.
Temperature [°C] Kt
0 - 18 4 18 - 28 1 28 - 55 4
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Calibration accuracy Acal
Calibration accuracy Acal is given below. For impedance of DUT on the boundary line, apply the smaller value.
Table 23. Impedance range = 0.1, 1, 10
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 0.05 0.05 0.05 + 0.05 + 0.1 +
5 × 10
-5
Fm 5 × 10
-5
Fm 1 × 10
-4
Fm
θ [radian] 1 × 10-42 × 10
-4
3 × 10
-4
3 × 10-4+ 3 × 10-4+6 × 10-4+ 2 × 10
-7
Fm 2 × 10
-7
Fm 4 × 10
-7
Fm
Table 24. Impedance range = 100
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 0.05 0.05 0.05 + 0.05 + 0.1 +
5 × 10
-5
Fm 5 × 10
-5
Fm 1 × 10
-4
Fm
θ [radian] 1 × 10
-4
2 × 10
-4
3 × 10
-4
3 × 10
-4
3 × 10
-4
6 × 10
-4
Table 25. Impedance range = 300, 1 k
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 0.03 0.05 0.05 0.05 0.1 θ [radian] 1 × 10-41 × 10
-4
3 × 10
-4
3 × 10
-4
3 × 10
-4
6 × 10
-4
Table 26. Impedance range = 3 k, 10 k
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 + 0.03 + 0.03 + 0.03 + 0.03 + 0.06 +
1 × 10
-4
Fm 1 × 10
-4
Fm 1 × 10
-4
Fm 1 × 10
-4
Fm 1 × 10
-4
Fm 2 × 10
-4
Fm
θ [radian] (100 + (100 + (100 + (100 + (100 + (200 +
2.5 Fm) × 10-62.5 Fm) × 10-62.5 Fm) × 10-62.5 Fm) × 10-62.5 Fm) × 10-65 Fm) × 10
-6
Table 27. Impedance range = 30 k, 100 k
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 + 0.03 + 0.03 + 0.03 + 0.03 + 0.06 +
1 × 10
-3
Fm 1 × 10
-3
Fm 1 × 10
-3
Fm 1 × 10
-3
Fm 1 × 10
-4
Fm 2 × 10
-4
Fm
θ [radian] (100 + (100 + (100 + (100 + (100 + (200 +
20 Fm) × 10-620 Fm) × 10-620 Fm) × 10-620 Fm) × 10-62.5 Fm) × 10-65 Fm) × 10
-6
Fm[kHz] Test frequency
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Measurement accuracy
The impedance measurement calculation example below is the result of absolute measurement accuracy.
Figure 1. Impedance measurement accuracy (Test signal voltage = 1 Vrms, cable length=0 m, measurement time mode = MED)
[ S ]
10n
100n
10µ
100µ
1m
10m
1kH
100aF
100H
10H
1H
10pF
1n
1G
100pF
100M
1nF
10M
1pF
100fF
1MH
100kH
10.0%
1.0%
10fF
10kH
1fF
0.3%
10nF
1µ
1M
100nF
100k
1µF
10k
[]
1k
100
10µF
C
100µF
0.1%
0.1%
100mH
10mH
1mH
100µH
10µH
100m
100
1mF
10
10mF
1
1
0.3%
100mF
10
100m
10m
1.0%
1F
10.0%
10
1m
20 100 1k 10k 100k 1M 2M
Frequency [ Hz ]
1µH
100nH
10nH
1nH
100pH
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Compensation function
Table 28. The E4980A provides three types of compensation functions: OPEN compensation, SHORT compensation, and LOAD compensation.
Type of compensation Description
OPEN compensation Compensates errors caused by the stray admittance (C, G)
of the test fixture.
SHORT compensation Compensates errors caused by the residual impedance (L, R)
of the test fixture.
LOAD compensation Compensates errors between the actual measured value
and a known standard value under the measurement conditions desired by the user.
List sweep
Points: There is a maximum of 201 points.
First sweep parameter (primary parameter): Test frequency, test signal voltage, test
signal current, test signal voltage of DC bias signal, test signal current of DC bias signal, DC source voltage.
Second sweep parameter (secondary parameter): None, impedance range, test frequency, test signal voltage, test signal current, test signal voltage of DC bias signal, test signal current of DC bias signal, DC source voltage
Trigger mode
Sequential mode: When the E4980A is triggered once, the device is measured at all
sweep points. /EOM/INDEX is output only once.
Step mode: The sweep point is incremented each time the E4980A is triggered. /EOM/INDEX is output at each point, but the result of the comparator function of the list sweep is available only after the last /EOM is output.
Note
A parameter selected for one of the two parameters cannot be selected for the other parameter. It is not possible to set up a combination of test signal voltage and test signal current or one of test signal voltage of DC bias signal and test signal current of DC bias.
The secondary parameter can be set only with SCPI commands.
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Comparator function of list sweep: The comparator function enables setting one pair of lower and upper limits for each measurement point.
You can select from: Judge with the first sweep parameter/Judge with the second parameter/Not used for each pair of limits.
Time stamp function: In the sequential mode, it is possible to record the measurement starting time at each measurement point by defining the time when FW detects a trigger as 0 and obtain it later with the SCPI command.
Comparator function
Bin sort: The primary parameter can be sorted into 9 BINs, OUT_OF_BINS, AUX_BIN,
and LOW_C_REJECT. The secondary parameter can be sorted into HIGH, IN, and LOW. The sequential mode and tolerance mode can be selected as the sorting mode.
Limit setup: Absolute value, deviation value, and % deviation value can be used for setup.
BIN count: Countable from 0 to 999999.
DC bias signal
Table 29. Test signal voltage
Range 0 V to +2 V Resolution 0 V / 1.5 V / 2 V only Accuracy 0.1% + 2 mV (23 °C ± 5 °C)
(0.1% + 2 mV) × 4 (0 to 18 °C or 28 to 55 °C)
Output impedance: 100 (nominal)
Measurement assistance functions
Data buffer function: Up to 201 measurement results can be read out in a batch.
Save/Recall function:
• Up to 10 setup conditions can be written to/read from the built-in non-volatile memory.
• Up to 10 setup conditions can be written to/read from the USB memory.
• Auto recall function can be performed when the setting conditions are written to
Register 10 of the USB memory.
Key lock function: The front panel keys can be locked.
GPIB: 24-pin D-Sub (Type D-24), female; complies with IEEE488.1, 2 and SCPI.
USB host port: Universal serial bus jack, type-A (4 contact positions, contact 1 is on
your left), female (for connection to USB memory only).
USB interface port: Universal serial bus jack, type mini-B (4 contact positions); complies with USBTMC-USB488 and USB 2.0; female; for connection to the external controller.
USBTMC: Abbreviation for USB Test & Measurement Class
LAN: 10/100 BaseT Ethernet, 8 pins (two speed options)
Note
The following USB memory can be used. Complies with USB 1.1; mass storage class, FAT16/FAT32 format; maximum consumption current is below 500 mA.
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The following options are available for the E4980A LCR Meter.
Option 001 (Power and DC bias enhancement)
Increases test signal voltage and adds the variable DC bias voltage function.
Measurement parameters
The following parameters can be used.
• Lp-Rdc
• Ls-Rdc
• Vdc-Idc
where
Rdc Direct-current resistance (DCR) Vdc Direct-current voltage Idc Direct-current electricity
Test signal
Signal level
Table 30. Test signal voltage
Range 0 Vrms to 20 Vrms (test frequency 1 MHz)
0 Vrms to 15 Vrms (test frequency > 1 MHz)
Resolution 100 µVrms (0 Vrms - 0.2 Vrms)
200 µVrms (0.2 Vrms - 0.5 Vrms) 500 µVrms (0.5 Vrms - 1 Vrms) 1 mVrms (1 Vrms - 2 Vrms) 2 mVrms (2 Vrms - 5 Vrms) 5 mVrms (5 Vrms - 10 Vrms) 10 mVrms (10 Vrms - 20 Vrms)
Setup accuracy normal ±(10% + 1 mVrms) (test signal voltage 2 Vrms)
(test frequency 1 MHz : spec., test frequency > 1 MHz : typ.) ±(10% + 10 mVrms) (Test frequency 300 kHz, test signal voltage > 2 Vrms) (spec.) ±(15% + 20 mVrms) (test frequency > 300 kHz, test signal voltage > 2 Vrms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.)
Constant1±(6% + 1 mVrms) (test signal voltage 2 Vrms)
(test frequency 1 MHz : spec. , test frequency > 1 MHz : typ.) ±(6% + 10 mVrms) (test frequency 300 kHz, test signal voltage > 2 Vrms) (spec.) ±(12% + 20 mVrms) (test frequency > 300 kHz, test signal voltage > 2 Vrms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.)
Options
Note
Option xxx is described as E4980A-xxx in the order information
1. When auto level control function is on.
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Table 31. Test signal current
Range 0 Arms - 100 mArms Resolution 1 µArms (0 Arms - 2 mArms)
2 µArms (2 mArms - 5 mArms) 5 µArms (5 mArms - 10 mArms) 10 µArms (10 mArms - 20 mArms) 20 µArms (20 mArms - 50 mArms) 50 µArms (50 mArms - 100 mArms)
Setup accuracy normal ±(10% + 10 µArms) (test signal voltage 20 mArms)
(test frequency 1 MHz : spec., test frequency > 1 MHz : typ.) ±(10% + 100 µArms) (test frequency 300 kHz, test signal current > 20 mArms) (spec.) ±(15% + 200 µArms) (test frequency > 300 kHz, test signal voltage > 20 mArms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.)
Constant1±(6% + 10 µArms) (test signal voltage 20 mArms)
(test frequency 1 MHz : spec. , test frequency > 1 MHz : typ.) ±(6% + 100 µArms) (test frequency 300 kHz, test signal voltage > 20 mArms) (spec.) ±(12% + 200 µArms) (test frequency > 300 kHz, test signal voltage > 20 mArms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.)
Test signal level monitor function
• Test signal voltage and test signal current can be monitored.
• Level monitor accuracy:
Table 32. Test signal voltage monitor accuracy (Vac)
Test signal voltage
2
Test frequency Specification
5 mVrms to 2 Vrms 1 MHz ±(3% of reading value + 0.5 mVrms)
> 1MHz ±(6% of reading value + 1 mVrms)
> 2 Vrms 300 kHz ±(3% of reading value + 5 mVrms)
> 300 kHz ±(6% of reading value + 10 mVrms)
3
Table 33. Test signal current monitor accuracy (Iac)
Test signal current
2
Test frequency Specification
50 µArms to 20 mArms 1 MHz ±(3% of reading value + 5 µArms)
> 1MHz ±(6% of reading value + 10 µArms)
> 20 mArms 300 kHz ±(3% of reading value + 50 µArms)
> 300 kHz ±(6% of reading value + 100 µArms)
1. When auto level control function is on.
2. Monitored signal level.
3. Typ. when test frequency is > 1 MHz with test signal voltage > 10 Vrms.
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21
DC bias signal
Table 34. Test signal voltage
Range –40 V to +40 V Resolution Setup resolution: 100 µV, effective
resolution: 330 µV ±(0 V - 5 V) 1 mV ±(5 V - 10 V) 2 mV ±(10 V - 20 V) 5 mV ±(20 V - 40 V)
Accuracy test signal voltage ≤ 2 Vrms 0.1% + 2 mV (23 °C ± 5 °C)
(0.1% + 2 mV) x 4 (0 to 18 °C or 28 to 55 °C)
test signal voltage > 2 Vrms 0.1 % + 4 mV (23 °C ± 5 °C)
(0.1% + 4 mV) x 4 (0 to 18 °C or 28 to 55 °C)
Table 35. Test signal current
Range –100 mA - 100 mA Resolution Setup resolution: 1 µA, effective
resolution: 3.3 µA ±(0 A - 50 mA) 10 µA ±(50 mA - 100 mA)
DC bias voltage level monitor Vdc
(0.5% of reading value + 60 mV) × Kt
When using Vdc-Idc measurement: (spec.)
When using level monitor: (typ.)
Kt Temperature coefficient
DC bias current level monitor Idc
(A [%] of the measurement value + B [A]) × Kt
When using Vdc-Idc measurement: (spec.)
When using level monitor: (typ.)
A [%] When the measurement time mode is SHORT: 2%
When the measurement time mode is MED or LONG: 1%
B [A] given below
Kt Temperature coefficient
When the measurement mode is SHORT, double the following value.
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22
Table 36. Test signal voltage 0.2 Vrms (measurement time mode = MED, LONG)
DC bias Impedance range [Ω] current range < 100 100 300, 1 k 3 k, 10 k 30k, 100 k
20 µA 150 µA 30 µA 3 µA 300 nA 45 nA 200 µA 150 µA 30 µA 3 µA 300 nA 300 nA 2 mA 150 µA 30 µA 3 µA 3 µA 3 µA 20 mA 150 µA 30 µA 30 µA 30 µA 30 µA 100 mA 150 µA 150 µA 150 µA 150 µA 150 µA
Table 37. 0.2 Vrms < test signal voltage 2 Vrms (measurement time mode = MED, LONG)
DC bias Impedance range [Ω] current range < 100 100, 300 1k, 3 k 10k, 30 k 100 k
20 µA 150 µA 30 µA 3 µA 300 nA 45 nA 200 µA 150 µA 30 µA 3 µA 300 nA 300 nA 2 mA 150 µA 30 µA 3 µA 3 µA 3 µA 20 mA 150 µA 30 µA 30 µA 30 µA 30 µA 100 mA 150 µA 150 µA 150 µA 150 µA 150 µA
Table 38. Test signal voltage > 2 Vrms (measurement time mode = MED, LONG)
DC bias Impedance range [Ω] current range 300 1 k, 3 k 10k, 30 k 100 k
20 µA 150 µA 30 µA 3 µA 300 nA 200 µA 150 µA 30 µA 3 µA 300 nA 2 mA 150 µA 30 µA 3 µA 3 µA 20 mA 150 µA 30 µA 30 µA 30 µA 100 mA 150 µA 150 µA 150 µA 150 µA
DC source signal
Table 39. Test signal voltage
Range –10 V to 10 V Resolution 1 mV Accuracy 0.1% + 3 mV (23 °C ± 5 °C)
(0.1% + 3 mV) x 4 (0 to 18 °C or 28 to 55 °C)
Table 40. Test signal current
Range –45 mA to 45 mA (nominal)
Output impedance
100 Ω (nominal)
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23
DC resistance (Rdc) accuracy
Absolute measurement accuracy Aa
Absolute measurement accuracy Aa is given as
Equation 15. Aa = Ae + Acal
Aa Absolute accuracy (% of reading value) Ae Relative accuracy (% of reading value) Acal Calibration accuracy
Relative measurement accuracy Ae
Relative measurement accuracy Ae is given as Equation 16. Ae = [Ab + (Rs /|Rm|+ Go × |Rm|) × 100 ] × Kt
Rm Measurement value Ab Basic accuracy Rs Short offset [Ω] Go Open offset [S] Kt Temperature coefficient
Calibration accuracy Acal
Calibration accuracy Acal is 0.03%.
Basic accuracy Ab
Table 41. Basic accuracy Ab is given below.
Measurement Test signal voltage time mode 2 Vrms > 2 Vrms
SHORT 1.00% 2.00% MED 0.30% 0.60%
Open offset Go
Table 42. Open offset Go is given below.
Measurement Test signal voltage time mode 2 Vrms > 2 Vrms
SHORT 50 nS 500 nS MED 10 nS 100 nS
Short offset Rs
Table 43. Short offset Rs is given below.
Measurement Test signal voltage time mode 2 Vrms > 2 Vrms
SHORT 25 m 250 m MED 5 m 50 mΩ
Page 24
24
Effect from cable length (Short offset)
Table 44. The following value is added to Rs when the cable is extended.
Cable length 1 m 2 m 4 m
0.25 m 0.5 m 1 m
Temperature coefficient Kt
Table 45. Temperature coefficient Kt is given below.
Temperature [°C] Kt
0 - 18 4 18 - 28 1 28 - 55 4
Other options
Option 002 (Bias current interface): Adds a digital interface to allow the E4980A LCR
meter to control the Agilent 42841A bias current source.
Option 005 (Entry model): Economy option with less measurement speed. Same measurement accuracy as the standard model.
Option 007 (Standard model): Upgrade to the standard model.
Option 201 (Handler interface): Adds handler interface.
Option 301 (Scanner interface): Adds scanner interface.
Note
Option 007 can be installed only in the E4980A with option 005.
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25
Table 46. Power source
Voltage 90 VAC - 264 VAC Frequency 47 Hz - 63 Hz Power consumption Max. 150 VA
Table 47. Operating environment
Temperature 0 - 55 °C Humidity 15% - 85% RH
(40 °C, no condensation) Altitude 0 m - 2000 m
Table 48. Storage environment
Temperature –20 - 70 °C Humidity 0% - 90% RH
( 60 °C, no condensation) Altitude 0 m - 4572 m
Outer dimensions: 375 (width) x 105 (height) × 390 (depth) mm (nominal)
Figure 2. Dimensions (front view, with handle and bumper, in millimeters, nominal)
Figure 3. Dimensions (front view, without handle and bumper, in millimeters, nominal)
General specifications
367.4
14.4 14.4338.6
41.8
E4980A
20 Hz - 2 MHz
Recall A Recall B
Precision LCR Meter
789
456
123
.
Meas Setup
DC Source (Option 001)
0
10VDC Max
Display
Format
Save/ Recall
Return
Local/
System
Lock
DC
Source
Discharge test device before connecting 42V Peak Max Output CAT I
L
CUR
103.8
55.0
Preset
Trigger
DC Bias
DC
Source
319.1
E4980A
20 Hz - 2 MHz
Recall A Recall B
Precision LCR Meter
789
456
123
.
Meas Setup
DC Source (Option 001)
0
10VDC Max
Display
Format
Save/ Recall
Return
Local/
System
Lock
DC
Source
Discharge test device before connecting 42V Peak Max Output CAT I
L
CUR
2755.2
88.3
Preset
Trigger
DC Bias
DC
Source
L
L
POT
POT
DC
Bias
UNKNOWN
DC Bias
UNKNOWN
USB
H
POT
2222222755.2 40.1
USB
H
POT
222222 30.3
28.027.3
H
CUR
32.0
21.8
H
CUR
18.0
Page 26
26
Figure 4. Dimensions (rear view, with handle and bumper, in millimeters, nominal)
Figure 5. Dimensions (front view, without handle and bumper, in millimeters, nominal)
Option 301: Scanner Interface
Option 201: Handler Interface
Option 002: DC Current Control Interface
rigger
GPIB
LAN
LINE
115V
-230V 50/60Hz 150V
A MAX
Fuse
T3A , 250V
E4980A
Option 710: No Interface
Option 710: No Interface
17.6
rigger
GPIB
LAN
LINE
115V
-230V 50/60Hz 150V
A MAX
Fuse
T3A , 250V
E4980A
Option 710: No Interface
Option 710: No Interface
118.1
367.4
332.2
23.241.6 34.7
17.6
23.9
E4980A
Option 710: No Interface
101.6
115V
-230V 50/60Hz 150V
Fuse
T3A , 250V
Serial Label
LINE
A MAX
Option 710: No Interface
GPIB
55.0 28.0
113.9 72.3 72.3 31.1
17.1
49.3
Option 002: DC Current Control Interface
36.2
72.3
Option 301: Scanner Interface
72.3
0.4
Option 201: Handler Interface
36.2
317.8
110.9
19.6
Serial Label
E4980A
Option 710: No Interface
84.4
36.5 23.7
GPIB
LINE
115V
-230V 50/60Hz 150V
A MAX
Fuse
T3A , 250V
25.7
LAN
36.2
72.3
21.3
Option 710: No Interface
Trigger
23.241.6 27.5
LAN
Trigger
26.63725.5
20.9
22.23712.7
106.7
72.3 72.3 24.0
0.4
Option 301: Scanner Interface Option 201: Handler InterfaceOption 002: DC Current Control Interface
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27
Figure 6. Dimensions (side view, with handle and bumper, in millimeters, nominal )
Figure 7. Dimensions (side view, without handle and bumper, in millimeters, nominal)
Weight: 5.3 kg (nominal) Display: LCD, 320 × 240 (pixels), RGB color
The following items can be displayed:
• measurement value
• measurement conditions
• limit value and judgment result of comparator
• list sweep table
• self-test message
66.6
Note
Effective pixels are more than 99.99%. There may be 0.01% (approx. 7 pixels) or smaller missing pixels or constantly lit pixels, but this is not a malfunction.
388.7
103.8
55.0
1
4
1
.4
15.7
21.921.9
88.3
45.7
19.7
50.9
374.0
101.6
10.5347.9
84.4
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28
Description Supplemental Information
EMC
European Council Directive 89/336/EEC, 92/31/EEC, 93/68/EEC IEC 61326-1:1997 +A1:1998 +A2:2000 EN 61326-1:1997 +A1:1998 +A2:2001 CISPR 11:1997 +A1:1999 +A2:2002 EN 55011:1998 +A1:1999 +A2:2002 Group 1, Class A IEC 61000-4-2:1995 +A1:1998 +A2:2001 EN 61000-4-2:1995 +A1:1998 +A2:2001 4 kV CD/8 kV AD IEC 61000-4-3:1995 +A1:1998 +A2:2001 EN 61000-4-3:1996 +A1:1998 +A2:2001 3 V/m, 80-1000 MHz, 80% AM IEC 61000-4-4:1995 +A1:2001 +A2:2001 EN 61000-4-4:1995 +A1:2001 +A2:2001 1 kV power /0.5 kV Signal IEC 61000-4-5:1995 +A1:2001 EN 61000-4-5:1995 +A1:2001 0.5 kV Normal/1 kV Common IEC 61000-4-6:1996 +A1:2001 EN 61000-4-6:1996 +A1:2001 3 V, 0.15-80 MHz, 80% AM IEC 61000-4-11:1994 +A1:2001 EN 61000-4-11:1994 +A1:2001 100% 1cycle
ICES/NMB-001 This ISM device complies with Canadian ICES-001:1998.
Cet appareil ISM est conforme a la norme NMB-001 du Canada.
AS/NZS 2064.1 Group 1, Class A
Safety
European Council Directive 73/23/EEC, 93/68/EEC IEC 61010-1:2001/EN 61010-1:2001
Measurement Category I, Pollution Degree 2, Indoor Use
IEC60825-1:1994 Class 1 LED
CAN/CSA C22.2 61010-1-04
Measurement Category I, Pollution Degree 2, Indoor Use
Environment
This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/electronic product in domestic house hold waste. Product Category: With reference to the equipment types in the WEEE Directive Annex I, this product is classed as a “Monitoring and Control instrumentation” product.
Page 29
29
Settling time
Table 49. Test frequency setting time
Test frequency setting time Test frequency (Fm)
5 mS Fm 1 kHz 12 mS 1 kHz > Fm 250 Hz 22 mS 250 Hz > Fm 60 Hz 42 mS 60 Hz > Fm
Table 50. Test signal voltage setting time
Test signal voltage setting time Test frequency (Fm)
11 mS Fm 1 kHz 18 mS 1 kHz > Fm 250 Hz 26 mS 250 Hz > Fm 60 Hz 48 mS 60 Hz > Fm
Switching of the impedance range is as follows: 5 mS/ range switching
Measurement circuit protection
The maximum discharge withstand voltage, where the internal circuit remains protected if a charged capacitor is connected to the UNKNOWN terminal, is given below.
Table 51. Maximum discharge withstand voltage
Maximum discharge withstand voltage Range of capacitance value C of DUT
1000 V C < 2 µF
`
2/C V
2 µF ≤ C
Figure 8. Maximum discharge withstand voltage
Supplemental Information
Note
Discharge capacitors before connecting them to the UNKNOWN terminal or a test fixture to avoid damages to the instrument.
0
200
400
600
800
1000
1200
1.E–15 1.E–13 1.E–11 1.E–09 1.E–07 1.E–05 1.E–03
Voltage [V]
Capacitance [F]
Page 30
30
Measurement time
Definition
This is the time between the trigger and the end of measurement (EOM) output on the handler interface.
Conditions
Table 51 shows the measurement time when the following conditions are satisfied:
• Normal impedance measurement other than Ls-Rdc, Lp-Rdc, Vdc-Idc
• Impedance range mode: hold range mode
• DC bias voltage level monitor: OFF
• DC bias current level monitor: OFF
• Trigger delay: 0 s
• Step delay: 0 s
• Calibration data: OFF
• Display mode: blank
Table 52. Measurement time [ms](DC bias:OFF)
Measurement time mode Test frequency
20 Hz 100 Hz 1 kHz 10 kHz 100 kHz 1 MHz 2 MHz
1 LONG 480 300 240 230 220 220 220 2 MED 380 180 110 92 89 88 88 3 SHORT 330 100 20 7.7 5.7 5.6 5.6
Figure 9. Measurement time (DC bias: OFF)
10
1
0.1
Measurement time [sec]
0.01
0.001 20 100 1k 10k 100k 1M 2M
Test frequency [Hz]
1. LONG
2. MED
3. SHORT
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31
Measurement time when Option 005 is installed
Table 53. Measurement time when option 005 is installed [mS] (DC bias: OFF)
Measurement time mode Test frequency
20 Hz 100 Hz 1 kHz 10 kHz 100 kHz 1 MHz 2 MHz
1 LONG 1190 650 590 580 570 570 570 2 MED 1150 380 200 180 180 180 180 3 SHORT 1040 240 37 25 23 23 23
Figure 10. Measurement time (DC bias: OFF, Option 005)
When DC bias is ON, the following time is added:
Table 54. Additional time when DC bias is ON [ms]
Test frequency 20 Hz 100 Hz 1 kHz 10 kHz 100 kHz 1 MHz 2 MHz
30 30 10 13 2 0.5 0.5
When the number of averaging increases, the measurement time is given as
Equation 17. MeasTime + (Ave – 1) × AveTime
MeasTime Measurement time calculated based on Table 52 and Table 53 Ave Number of averaging AveTime Refer to Table 55
Table 55. Additional time per averaging [mS]
Measurement time mode Test frequency
20 Hz 100 Hz 1 kHz 10 kHz 100 kHz 1 MHz 2 MHz
SHORT 51 11 2.4 2.3 2.3 2.2 2.2
MED 110 81 88 87 85 84 84
LONG 210 210 220 220 220 210 210
10
1
0.1
Measurement time [sec]
0.01
0.001 20 100 1k 10k 100k 1M 2M
Test frequency [Hz]
1. LONG
2. MED
3. SHORT
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32
Display time
When the display is set to something other than “Display Blank page”, time required to update the display on each page (display time) is as follows. When a screen is changed, drawing time and switching time are added. Display updates are done approx. every 100 ms during the measurement.
Table 56. Display time
Item Time
MEAS Display screen drawing time 40 ms
MEAS Display screen (large) drawing time 40 ms
BIN No. Display screen drawing time 40 ms
BIN COUNT screen drawing time 40 ms
Measurement display switching time 35 ms
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33
Measurement data transfer time
This table shows the measurement data transfer time under the following conditions. The measurement data transfer time varies depending on measurement conditions and computers.
Table 57. Measurement transfer time under the following conditions:
Host computer: DELL OPTIPLEX GX260 Pentium 4 2.6 GHz
Display: ON
Impedance range mode: AUTO (The overload has not been generated.)
OPEN/SHORT/LOAD compensation: OFF
Test signal voltage monitor: OFF
Table 58. Measurement data transfer time [ms]
using :FETC? command using data buffer memory Data (one point measurement) (list sweep measurement) transfer Comparator Comparator 10 51 128 201
Interface format ON OFF points points points points
ASCII 2 2 4 13 28 43
GPIB ASCII Long 2 2 5 15 34 53
Binary 2 2 4 10 21 32
ASCII 2 2 3 8 16 23
USB ASCII Long 2 2 4 9 19 28
Binary 2 2 3 5 9 13
ASCII 3 4 5 12 24 36
LAN ASCII Long 3 3 5 13 29 44
Binary 3 3 5 9 18 26
DC bias test signal current (1.5 V/2.0 V): Output current: Max. 20 mA
Option 001 (Power and DC Bias enhance):
DC bias voltage: DC bias voltage applied to DUT is given as:
Equation 18. Vdut = Vb – 100 × Ib
Vdut [V] DC bias voltage Vb [V] DC bias setting voltage Ib [A] DC bias current
DC bias current: DC bias current applied to DUT is given as:
Equation 19. Idut = Vb/(100 + Rdc)
Idut [A] DC bias current Vb [V] DC bias setting current Rdc [] DUT’s DC resistance
Page 34
34
Maximum DC bias current
Table 59. Maximum DC bias current when the normal measurement can be performed.
Bias current isolation
Impedance OFF range [Ω]
ON
Test signal voltage 2 Vrms Test signal voltage > 2 Vrms
0.1 20 mA 100 mA
1 20 mA 100 mA
10 20 mA 100 mA
100 20 mA 100 mA
300 2 mA 100 mA
1 k 2 mA 20 mA
3 k 200 µA 20 mA
10 k 200 µA 2 mA
30 k 20 µA 2 mA
100 k 20 µA 200 µA
When DC bias is applied to DUT
When DC bias is applied to the DUT, add the following value to the absolute accuracy Ab.
Table 60. Only when Fm < 10 kHz and |Vdc| > 5 V
SHORT MED, LONG
0.05% × (100 mV/Vs) × (1 + √(100/Fm)) 0.01% × (100 mV/Vs) × (1 + √(100/Fm))
Fm [Hz] Test frequency Vs [V] Test signal voltage
Relative measurement accuracy with bias current isolation
When DC bias Isolation is set to ON, add the following value to the open offset Yo.
Equation 20. Yo_DCI1 × (1 + 1/(Vs)) × (1 + (500/Fm)) + Yo_DCI2
Zm [] Impedance of DUT Fm [Hz] Test frequency Vs [V] Test signal voltage Yo_DCI1,2 [S] Calculate this by using Table 61 and 62 Idc [A] DC bias isolation current
Table 61. Yo_DCI1 value
DC bias current range Measurement time mode
SHORT MED, LONG
20 µA 0 S 0 S 200 µA 0.25 nS 0.05 nS 2 mA 2.5 nS 0.5 nS 20 mA 25 nS 5 nS 100 mA 250 nS 50 nS
Table 62. Yo_DCI2 value
DC bias Measurement time mode current range ≤ 100 Ω 300 Ω, 1 k 3 k , 10 k 30 k , 100 k
20 µA 0 S 0 S 0 S 0 S 200 µA 0 S 0 S 0 S 0 S 2 mA 0 S 0 S 0 S 3 nS 20 mA 0 S 0 S 30 nS 30 nS 100 mA 0 S 300 nS 300 nS 300 nS
Auto range mode: 100 mA
Hold range mode: its values for the range.
Page 35
35
DC bias settling time
When DC bias is set to ON, add the following value to the settling time:
Table 63. DC bias settling time
Bias Settling time
1 Standard Capacitance of DUT × 100 × loge(2/1.8 m) + 3 m 2 Option 001 Capacitance of DUT × 100 × loge(40/1.8 m) + 3 m
Figure 11. DC bias settling time
100 sec
10 sec
1 sec
100 msec
Settling time
10 msec
1 µF 10 µF 100 µF 1 mF 10 mF 100 mF
2.
1.
DUT capacitance
Page 36
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