Agilent 16442A Accessories Guide

AAcccceessssoorriieess GGuuiiddee

AAggiilleenntt BB11550000AA——SSeemmiiccoonndduuccttoorr DDeevviiccee AAnnaallyyzzeerr

AAggiilleenntt 44115555CC//44115566CC——SSeemmiiccoonndduuccttoorr PPaarraammeetteerr AAnnaallyyzzeerr

AAggiilleenntt EE55227700BB——88 sslloott PPrreecciissiioonn MMeeaassuurreemmeenntt MMaaiinnffrraammee

AAggiilleenntt EE55226600AA——88 sslloott HHiigghh SSppeeeedd MMeeaassuurreemmeenntt mmaaiinnffrraammee

AAggiilleenntt BB22220000AA——ffAA LLeeaakkaaggee SSwwiittcchh MMaaiinnffrraammee

AAggiilleenntt BB22220011AA——1144cchh LLooww LLeeaakkaaggee SSwwiittcchh MMaaiinnffrraammee

AAggiilleenntt EE55225500AA——LLooww LLeeaakkaaggee SSwwiittcchh MMaaiinnffrraammee

CCoonntteennttss

1. Introduction

33

2. Connecting to fixture

44

2.1. Jumper cables

44

2.2. Socket modules

55

3. Connecting to SWM

66

3.1 GNDU

66

3.2 SMU

77

4. Connecting to prober

88

4.1. GNDU connections

88

4.2. SMU/CMU connections

99

5. Accessories

1133

5.1. CMU accessories

1133

5.2. B1500A peripherals

1155

5.3. Connector type

1166

5.4. Cables

1188

5.5. Connector plates

2200

5.6. Adapters & connectors

2244

2

11.. IInnttrroodduuccttiioonn

This guide provides information
on how to connect a prober to
Agilent Technologies semiconductor
parametric measurement instruments.

This guide also provides information
on accessories for a variety of
Agilent Technologies semiconductor
parametric measurement instruments,
such as the B1500, B2200/B2201,
E5250, E5260/E5270, 4155/4156,

41501.

3

FFiigguurree 11..11..

B1500A with Cascade prober

FFiigguurree 11..22..

B1500A with Vector prober

FFiigguurree 11..33,,

B1500A with Suss prober

FFiigguurree 11..44..

ASUs on the probe station

22.. CCoonnnneeccttiinngg ttoo ffiixxttuurree

The 16442A and 16442B test fixtures
have 6 triaxial input ports. You can
connect force ports of SMU to them
by using Triaxial Cable 16494A as
shown in Figure 2.1.

22..11.. JJuummppeerr ccaabblleess

TTaabbllee 22..11..

Jumper cables

MMiinnii bbaannaannaa –– PPiinn pplluugg

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-811/16442B-811 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61600 for Black (1ea)
16442-61601 for Red (1ea)
16442-61602 for Blue (1ea)

PPiinn pplluugg –– PPiinn pplluugg

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-812/16442B-812 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61603 for Black (1ea)
16442-61604 for Red (1ea)
16442-61605 for Blue (1ea)

MMiinnii bbaannaannaa –– MMiinnii cclliipp

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-813/16442B-813 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61606 for Black (1ea)
16442-61607 for Red (1ea)
16442-61608 for Blue (1ea)

MMiinnii bbaannaannaa –– MMiinnii bbaannaannaa

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-814/16442B-814 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61609 for Black (1ea)
16442-61610 for Red (1ea)
16442-61611 for Blue (1ea)

Approximately 200 mm

11 mm

2 mm

Approximately 200 mm

11 mm

40 mm

2 mm

Approximately 200 mm

7 mm

1 mm

7 mm

1 mm

Approximately 200 mm

11 mm 7 mm

2 mm

1 mm

4

FFiigguurree 22..11..

Connecting SMUs to fixture

Fixture

16442A

or

16442B

SMU

1-6

S

M

U

Triaxial cable

16494A-001 1.5m

or

16494A-002 3.0m

Force

Sense

22..22.. SSoocckkeett mmoodduulleess

TTaabbllee 22..22..

Socket modules

NN11225544AA--220044

0.1 inch

1166444422AA--880011//1166444422BB--880011

0.1 inch

NN11225544AA--220055

0.075 inch

1166444422AA--880022//1166444422BB--880022

0.075 inch

NN11225544AA--220066

0.05 inch

1166444422AA--880033//1166444422BB--880033

0.05 inch

NN11225544AA--220000

1166444422AA--882211//1166444422BB--882211

NN11225544AA--220011

1166444422AA--882233//1166444422BB--882233

NN11225544AA--220022

1166444422AA--882222//1166444422BB--882222

NN11225544AA--220077

1166444422AA--880000//1166444422BB--880000

5

43 mm43 mm

86 mm

84 mm

20 mm

3 mm

5 mm

5 mm 3 mm

This socket module has two
transistor sockets for measurement
of three lead or four lead bipolar
transistors and FETs.

Maximum voltage: 200 V

43 mm43 mm

86 mm

84 mm

8 mm 17.2 mm

This socket module is for measurement
of virtually any device—component, DIPIC,
or small-scale circuit.

1.8 mm

1 mm

18

9

1

43 mm43 mm

86 mm

84 mm

9 mm

2.54 mm

This socket module has an
18-pin dual-in-line socket.

Maximum voltage: 230 V

28 15

1

43 mm43 mm

This socket module has a
28-pin dual-in-line socket.

Maximum voltage: 230 V

86 mm

84 mm

2.54 mm

16.54 mm

84 mm

This insulation board has minimal leakage
current, and so is good for extremely low
current measurements.

86 mm

43 mm43 mm

33.. CCoonnnneeccttiinngg ttoo SSWWMM

33..11.. GGNNDDUU

An SMU has FORCE (SENSE),
GUARD, and COMMON, but a GNDU
has SENSE, FORCE, and COMMON
as shown in Figure 3.1. You need
some sort of GNDU to Kelvin
adapter when connecting the GNDU
to standard triaxial connections.

CCAAUUTTIIOONN

You should use the Agilent 16493L
GNDU cable to connect the GNDU
to the SWM; do not use a standard
triaxial cable. The GNDU cable can
handle the maximum GNDU current
of 4.2 A, but standard triaxial cables
are only rated to 1 A.

((NNoonn--KKeellvviinn ccoonnnneeccttiioonn))

Connect the triaxial connector using
an adapter for GNDU (N1254A-107)
as shown in Figure 3.2. For this
part, see Table 1.10 in Section 1.6
Adapters. For parts information,
see Table 3.1.

KKeellvviinn ccoonnnneeccttiioonn

Connect the dual triaxial connector
using a GNDU to Kelvin Adapter
(N1254A-100) as shown in
Figure 3.3. For this part, see
Table 1.10 in Section 1.6 Adapters.
For parts information, see
Table 3.2. Maximum current is
restricted when the Kelvin triaxial
cable is used. See Table 3.2.

6

FFiigguurree 33..11..

GNDU terminal

Common

Sense

Force

FFiigguurree 33..22..

Examples of a GNDU non-Kelvin connection to SWM

Ground unit cable

16493L-001 1.5m

or

16493L-002 3.0m

Triaxial – triaxial

adapter

N1254A-107

SWM
B2200A
E5250A

G
N
D
U

FFiigguurree 33..33..

Examples of a GNDU Kelvin connection to SWM

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Force

Sense

Force

Sense

Ground unit cable
16493N-001 1.5m

GNDU to Kelvin adapter
N1254A-100

SWM

B2200A

Force

Sense

SWM

B2200A

G
N
D
U

G
N
D
U

TTaabbllee 33..11..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Ground unit cable – 1.5m (Max 4.2A) 1 — 16493L-001

Ground unit cable – 3.0m (Max 4.2A) 1 — 16493L-002

Adapter for GNDU (triaxial (m) – triaxial (f)) 1 1250-2654 N1254A-107

TTaabbllee 33..22..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Kelvin triaxial cable – 1.5m (Max 3.0A) 1 — 16493K-001

Kelvin triaxial cable – 3.0m (Max 2.6A) 1 — 16493K-001

Ground unit cable – 1.5m 1 — 16493N-001

GNDU to Kelvin adapter 1 — N1254A-100

33..22.. SSMMUU

An SMU terminal is shown in
Figure 3.4.

KKeellvviinn ccoonnnneeccttiioonn

When Kelvin connection is used,
connect an Agilent 16493K Kelvin
triaxial cable for B2200A/B2201A
as shown in Figure 3.5. For E5250A,
connect an Agilent 16494B Kelvin
Triaxial Cable as shown in
Figure 3.5. You can also use two
Agilent 16494A triaxial cables in
place of one Kelvin Triaxial Cable.

Connect the FORCE and SENSE
lines to ports separately.

NNoonn--kkeellvviinn ccoonnnneeccttiioonn

When non-Kelvin connection is
used, connect the Agilent 16494A
triaxial cable between the SMU and
SWM as shown in Figure 3.6.

33..33.. MMFFCCMMUU

MFCMU of B1500A is connected
to CMH and CML port of B2200A/
B2201A by using CMU input cable
16494F-001 as shown in Figure 3.7.

7

FFiigguurree 33..44

. SMU terminal

Common

Force

(Sense)

Guard

FFiigguurree 33..55..

Examples of a SMU Kelvin connection to SWM

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Force

Sense

Force

Sense

SWM

B2200A

or

B2201A

S

M

U

Kelvin triaxial cable

16494B-003 0.8m

or

16494B-001 1.5m

or

16494B-002 3.0m

Force

Sense

Force

Sense

SWM

E5250A

S

M

U

FFiigguurree 33..66..

Examples of a SMU non-Kelvin connection to SWM

Triaxial cable

16494A-001 1.5m

or

16494A-002 3.0m

S

M

U

SWM

E5250A

Force

Sense

FFiigguurree 33..77..

Examples of a MFCMU connection to SWM

Hcur

CMH

CML

Hpot

Lpot

Lcur

CMU input cable

16494F-001 2.0m

M

F
C

M

U

SWM

B2200A

or

B2201A

44.. CCoonnnneeccttiinngg ttoo pprroobbeerr

44..11.. GGNNDDUU ccoonnnneeccttiioonnss

An SMU has FORCE (SENSE),
GUARD, and COMMON, but a
GNDU has SENSE, FORCE, and
COMMON as shown in Figure 4.1.
You need some sort of GNDU to
Kelvin adapter when connecting
the GNDU to standard triaxial
connections.

CCAAUUTTIIOONN

You should use the Agilent 16493L
GNDU cable to connect the GNDU
to the connector plate; do not use a
standard triaxial cable. The GNDU
cable can handle the maximum
GNDU current of 4.2A, but standard
triaxial cables are only rated to 1 A.

NNoonn--KKeellvviinn ccoonnnneeccttiioonn

Connect the triaxial connector using
an adapter for GNDU (N1254A-107)
as shown in Figure 4.2. For this
part, see Table 5.10 in Section 5.6
Adapters. For parts information,
see Table 4.1.

KKeellvviinn ccoonnnneeccttiioonn

Connect the dual triaxial connector
using a GNDU to Kelvin Adapter
(N1254A-100) as shown in
Figure 4.3. For this part, see
Table 5.10 in Section 5.6 Adapters.
For parts information, see Table 4.2.
Maximum current is restricted
when the Kelvin triaxial cable is
used. See Table 4.2.

8

FFiigguurree 44..11..

GNDU terminal

Common

Sense

Force

FFiigguurree 44..22..

Examples of a GNDU non-Kelvin connection

Triaxial cable

16493L-001 1.5m

or

16493L-002 3.0m

Connector plate

Shielding box

Adapter for GNDU
N1254A-107

Prober

Probe cable (triaxial)

DUT

G
N
D
U

FFiigguurree 44..33..

Examples of a GNDU Kelvin connection

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Connector plate

Shielding box

GNDU to
Kelvin adapter
N1254A-100

Force

Sense

Force

Sense

Prober

Probe cable (triaxial)

Probe cable (triaxial)

DUT

G
N
D
U

TTaabbllee 44..11..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Ground unit cable – 1.5m (Max 4.2A) 1 — 16493L-001

Ground unit cable – 3.0m (Max 4.2A) 1 — 16493L-002

Adapter for GNDU (triaxial (m) – triaxial (f)) 1 1250-2654 N1254A-107

TTaabbllee 44..22..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Kelvin triaxial cable – 1.5m (Max 3.0A) 1 — 16493K-001

Kelvin triaxial cable – 3.0m (Max 2.6A) 1 — 16493K-002

GNDU to Kelvin adapter 1 — N1254A-100

44..22.. SSMMUU//CCMMUU ccoonnnneeccttiioonnss

An SMU terminal is shown in
Figure 4.4.

KKeellvviinn ccoonnnneeccttiioonn

These instructions apply when
all connections are Kelvin. Two
probes must contact the wafer in
this connection.

Connect an Agilent 16493K Kelvin
triaxial cable (or two Agilent 16494A
triaxial cables) between the SMU
and the connector plate. Connect
the FORCE and SENSE lines to
probes separately.

Connect the triaxial connector
on the probe cable as shown in
Figure 4.5. To prevent oscillations,
use short cables. For parts
information, see Table 4.3.

NNoonn--kkeellvviinn ccoonnnneeccttiioonn

These instructions apply when
all connections are non-Kelvin.
Connect the Agilent 16494A triaxial
cables between the SMU and the
Connector plate.

Connect the triaxial connector on the
probe cable as shown in Figure 4.6.
For parts information, see Table 4.4.

9

FFiigguurree 44..44..

SMU terminal

Common

Force

(Sense)

Guard

FFiigguurree 44..55..

Examples of a SMU Kelvin connection

FFiigguurree 44..66..

Examples of a SMU non-Kelvin connection

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Connector plate

Shielding box

Probe cable (triaxial)

Probe cable (triaxial)

Force

Sense

Force

Sense

S

M

U

Prober

DUT

TTaabbllee 44..33..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Kelvin triaxial cable – 1.5m (Max 3.0A) 1 — 16493K-001

Kelvin triaxial cable – 3.0m (Max 2.6A) 1 — 16493K-002

TTaabbllee 44..44..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Triaxial cable – 1.5m 1 — 16494A-001

Triaxial cable – 3.0m 1 — 16494A-002

S

M

U

Triaxial cable

16494A-001 1.5m

or

16494A-002 3.0m

Connector plate

Shielding box

Probe cable (triaxial)

Force

Sense

Prober

DUT

KKeellvviinn ttoo nnoonn--kkeellvviinn ccoonnnneeccttiioonn

These instructions apply when the
connections up to the Connector
Plate are Kelvin, but the probe is
a non-Kelvin connection.

Connect an Agilent 16493K
Kelvin triaxial cable (or two
Agilent 16494A triaxial cables)
between the SMU and the
Connector plate.

Connect the triaxial connector
on the probe cable as shown in
Figure 4.7.

Connect the FORCE and SENSE
lines on this side of the probe input
terminal. A Tee Triaxial BNC
adapter can be used. For parts
information, see Table 4-5.

NNoottee::

When connecting the cable and tee
connector as shown in Figure 4.7,
space restrictions make an adjacent
connector unusable. Since three
connectors are necessary for a
Kelvin connection a connector
plate must be used. Select the
correct connector plate for your
application. To make two Kelvin
connections, use an Agilent 16495H.
To make three Kelvin connections,
use an Agilent 16495J.

10

FFiigguurree 44..77..

Examples of a SMU Kelvin to non-Kelvin connection

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Connector plate

Shielding box

Probe cable (triaxial)

Tee triaxial BNC
1250-1551

Triaxial cable
16494A-004 0.4m

Prober

DUT

Force

Sense

Force

Sense

S

M

U

TTaabbllee 44..55..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Kelvin triaxial cable – 1.5m 1 — 16493K-001

Kelvin triaxial cable – 1.5m 1 — 16493K-002

Triaxial cable – 0.4m 1 — 16494A-004

Triaxial tee-connector 1 1250-1551 —

AASSUU ccoonnnneeccttiioonn

Each ASU has one Dsub control
cable, one triaxial cable, and
(optionally) two coaxial cables
connected to it. The cables can be
connected to the ASU inside the
shielding box through the 16495K
plate.

The ASU outputs should be
connected to the DUT by using
triaxial cables as shown in
Figure 4.8.

When making IV measurements
with the SMUs, all measurements
are Kelvin. The SENSE line
information is fed back to the
SMU via the Dsub cable.

When making CV measurements,

the four-terminal pair (4TP)
connections are correctly
terminated inside of the ASUs.
The ASUs also allow for a current
return path between the outer
conductors to stabilize the series
inductance and improve accuracy.
You must connect the furnished
wire between the two ASUs to
enable this feature.

11

FFiigguurree 44..88..

Examples of an ASU connection

Connector plate
16495K

Shielding box

Prober

DUT

H
R
S

M

U

Hcur

Hpot

Lpot

Lcur

Dsub

Force

Dsub

Force

CMU-pot

CMU-pot

Dsub Dsub

Probe cable (triaxial)

Probe cable (triaxial)

Probe cable (triaxial)

Probe cable (triaxial)

Wire furnished with ASU
(both pin terminals

Triaxial cable and

Dsub cable

16493M-001 1.5m

or

16493M-002 3.0m

Triaxial cable and

Dsub cable

16493M-001 1.5m

or

16493M-002 3.0m

CMU cable

N1300A-001 1.5m

or

N1300A-002 3.0m

H
R
S

M

U

A
S
U

A
S
U

Force

CMU-cur/AUX in

CMU-cur/AUX in

Force

M

F

C

M

U

TTaabbllee 44..55..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Triaxial cable & Dsub cable for ASU – 1.5m 2 — 16493M-001

Triaxial cable & Dsub cable for ASU – 3.0m 2 — 16493M-002

CMU cable for B1500A – 1.5m 1 — N1300A-001

CMU cable for B1500A – 3.0m 1 — N1300A-002

Connector plate 1 — 16495K

SSCCUUUU ppoossiittiioonneerr--bbaasseedd pprroobbiinngg mmooddee

The SCUU should be connected to
the DUT by using triaxial cables as
shown in Figure 4.9.

When making IV measurements
using the SMUs, the outputs of the
SCUU function exactly the same as
the Kelvin outputs of an SMU (both
FORCE and SENSE lines are
available).

Note: In Figure 4.9 the SENSE lines
are not used.

When making CV measurements
using the MFCMU, only the FORCE
outputs of the SCUU are used.
SCUU FORCE output1 corresponds
to CMH, and SCUU FORCE output2
corresponds to CML.

The SCUU can be fixed on the
prober by using SCUU Magnet
Stand (N1301A-110).

12

FFiigguurree 44..99..

Examples of a SCUU remote docking mode

Prober

DUT

S
M
U

S
M
U

M

F
C
M
U

Shielding box

Force

Sense

Force

Probe cable (triaxial)

Probe cable (triaxial)

Sense

Sense

Force

Hcur

H pot

Lpot

Lcur

Force

Sense

SCUU cable

N1301A-002 3.0m

SCUU
N1301A-100

Connector plate
16495K

TTaabbllee 44..99..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

SMU CMU unify unit (SCUU) 1 — N1301A-100

SMU CMU unify unit cable (3.0m) 1 — N1301A-102

Connector plate 1 — 16495K

55.. AAcccceessssoorriieess

55..11 CCMMUU aacccceessssoorriieess

B1500A has the multi frequency
capacitance measurement unit
(MFCMU). There are two types of
CMU connection as follows.

• Standard four terminal pair
(4TP) connection

• SCUU positioner-based probing
mode

According to your situation, you
can select the type of connection.

13

FFiigguurree 55..11..

Standard four terminal pair (4TP)

FFiigguurree 55..22..

SCUU positioner-based probing

NN11330000AA--000011//NN11330000AA--000022 1166449944FF--000011

NN11330011AA--110000 NN11330011AA--110000 NN11330011AA--110000

NN11330011AA--110022 SSCCUUUU ww//SSCCUUUU CCaabbllee,, GGSSWWUU

NN113

30011AA--111100 SSCCUUUU ww//SSCCUUUU mmaaggnneett NN11330011AA--220000

NN11330011AA--220011 PPiinn ccaabbllee ffoorr GGSSWWUU GGSSWWUU ww//GGSSWWUU ccaabbllee

TTaabbllee 55..11..

CMU accessories overview

14

TTaabbllee 55..22..

CMU accessories item list

IItteemm DDeessccrriippttiioonn OOPP iinnssttrruuccttiioonn

N1300A CMU cable for B1500A

N1300A-001 CMU cable for B1500A (1.5m)

N1300A-002 CMU cable for B1500A (3.0m)

N1301A CMU accessories for B1500

N1301A-100 SMU CMU unify unit (SCUU)

N1301A-102 SMU CMU unify unit cable (3m)

N1301A-110 SCUU magnet stand To fix SCUU on prober top etc.

N1301A-200 Guard switch unit (GSWU) Need to be specified with N1301A-201 or N1301A-202.

N1301A-201 Guard switch unit cable (1m) Please specify N1301A-201 or N1302A-202 when N1301A-200 is ordered.

N1301A-202 Guard switch unit cable (3m)

16494F CMU input cable

16494F-001 CMU input cable (2m)

55..22.. BB11550000AA PPeerriipphheerraallss

TTaabbllee 55..33..

B1500A peripherals overview

1166444444AA--000011 1166444444AA--000022 1166444444AA--000033

TTaabbllee 55..44..

B1500A peripherals item list

IItteemm DDeessccrriippttiioonn OOPP iinnssttrruuccttiioonn

16444A B1500A accessories

16444A-001 USB keyboard Keyboard includes mouse pad and mouse pointer

16444A-002 USB mouse USB Mouse

16444A-003 Stylus pen For use with the B1500A touch screen

15

55..33.. CCoonnnneeccttoorr ttyyppee

There are two main styles of
Kelvin SMU connections. When
connecting instruments together,
you need to make sure that you
have the correct type of Kelvin
triaxial cables.

Type A connectors have two
screws, one guide pin, and two
triaxial terminals. Type B
connectors have one screw and
two triaxial terminals. These
connectors are also different
in their width and thickness.

16

TTaabbllee 55..55..

Overview of instrument connector types

BB11550000AA TTyyppee AA

44115566CC++4411550011BB TTyyppee AA

44115555CC SSiinnggllee ttrriiaaxxiiaall

EE55226600AA//EE55227700BB TTyyppee AA

BB22220000AA//BB22220011AA iinnppuuttss TTyyppee AA

17

TTaabbllee 55..55..

Overview of instrument connector types, continued

BB22220000AA//BB22220011AA oouuttppuuttss TTyyppee BB

EE55225500AA iinnppuuttss TTyyppee BB

EE55225500AA oouuttppuuttss ((EE55225522AA ccaarrddss)) TTyyppee BB

1166444422AA//BB TTyyppee AA

1166449933KK//1166449944BB//1166449933NN ccaabblleess TTyyppee AA

1166449944BB ccaabbllee TTyyppee BB

55..44.. CCaabblleess

Several possibilities exist for
connecting the Source Monitor
Units (SMUs) to the DUT. The great
variety of available cables can be
categorized into mainly three types:

Triaxial cables have three layers
or leads: a center conductor for the
signal, a middle conductor that is
actively driven to be at the same
potential as the center conductor
to eliminate leakage currents, and
a grounded (Common) outer
conductor.

Kelvin triaxial cables are similar
to triaxial cables, except that both
the Force and Sense lines from the
SMU run through the same cable.
The Force and Sense lines share a
common driven guard and a
common outer shield. Kelvin
triaxial cables typically give better
low-current measurement perfor­mance than you would get from
using two separate triaxial cables
for the Force and Sense lines.

The GNDU cable is a special triaxial
cable designed to handle the large
currents (up to 4.2 A) that the
ground unit can sink. In the GNDU
cable the center conductor is SENSE,
the middle conductor is FORCE, and
the outer conductor is Common.

18

TTaabbllee 55..66..

SMU cables overview

1166449933KK 1166449944BB

KKeellvviinn ttrriiaaxxiiaall ccaabbllee KKeellvviinn ttrriiaaxxiiaall ccaabbllee

Connector type Type A Type A Type B

SMU B1500A OK OK NG

E526X OK OK NG
E527X OK OK NG
415X OK OK NG
41501 OK OK NG

SWM input B220XA OK OK NG

E5250A NG NG OK

SWM output B220XA NG NG OK

E5250A NG NG OK

Length option 0.4m N/A N/A

0.8m N/A 16494B-003

1.5m 16493K-001 16494B-001

3.0m 16493K-002 16494B-002

4.0m N/A N/A

TTaabbllee 55..66..

SMU cables overview, continued

1166449933MM 1166449944AA 1166449933JJ

TTrriiaaxxiiaall && DDssuubb ccaabbllee FFoorr AASSUU TTrriiaaxxiiaall ccaabbllee IInntteerrlloocckk ccaabbllee

Connector type — Triax —

SMU B1500A OK OK OK

E526X N/A OK OK
E527X OK OK OK
415X N/A OK OK
41501 N/A OK N/A

SWM input B220XA N/A OK N/A

E5250A N/A OK N/A

SWM output B220XA N/A OK N/A

E5250A N/A OK N/A

Length option 0.4m N/A 16494A-004 N/A

0.8m N/A 16494A-003 N/A

1.5m 16493M-001 16494A-001 16493J-001

3.0m 16493M-002 16494A-002 16493J-002

4.0m N/A 16494A-005 N/A

TTaabbllee 55..77..

GNDU cables overview

1166449933NN 1166449933LL

GGrroouunndd uunniitt ccaabbllee GGrroouunndd uunniitt ccaabbllee

Connector type Type A Triaxial Triaxial

GNDU B1500A N/A OK OK

E526X N/A OK OK
E527X N/A OK OK
415X N/A N/A N/A
41501 N/A OK OK

SWM input B220XA OK OK OK

E5250A NG OK OK

SWM output B220XA NG OK OK

E5250A NG OK OK

Length option 1.5m 16493N-001 16493L-001

3.0m N/A 16493L-002

19

55..55.. CCoonnnneeccttoorr ppllaatteess

The following connector plates work
with a variety of Agilent Technologies
semiconductor parametric measure­ment instruments, such as the
B1500, B2200/B2201, E5250,
E5260/E5270, 4155/4156
and 41501.

Prober vendor also provides
connector plates. If you need the
information of those connector
plates, please kindly contact each
prober vendor.

If you need parts to fix a connector
plate, see Table 5.8. Order the
quantity you need. (The number of
holes in a connector plate is four.)

TTaabbllee 55..88..

Parts information to fix connector plates

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Screw 1 0515-0986 ---

Spring washer 1 2190-0584 ---

Terminal washer 1 3050-0891 ---

Nut 1 0535-0031 ---

TTaabbllee 55..99..

Connector plates

1166449955FF——HHaallff ssiizzee ccoonnnneeccttoorr ppllaattee ffoorr mmaattrriixx
16495F-001 has 12 triaxial through connectors (female to
female), an Intlk connector, and a GNDU connector (triaxial
through, female to female). The back of the Intlk connector is
designed for soldering.

16495F-002 has 12 triaxial connectors, an Intlk connector, and
a GNDU connector. The back of each connector is designed
for soldering.

1166449955GG——FFuullll ssiizzee ccoonnnneeccttoorr ppllaattee ffoorr mma

attrriixx

16495G-001 has 24 triaxial through connectors (female to
female), an Intlk connector, and a GNDU connector (triaxial
through, female to female). The back of the Intlk connector is
designed for soldering.

16495G-002 has 24 triaxial connectors, an Intlk connector, and
a GNDU connector. The back of each connector is designed
for soldering.

1166449955HH——HHaallff ssiizzee ccoonnnneeccttoorr ppllaattee ffoorr aannaallyyzzeerr
16495H-001 has 6 triaxial through connectors (female to
female), 6 BNC through connectors (female to female), an
Intlk connector, and a GNDU connector (triaxial through,
female to female). The back of the Intlk connector is designed
for soldering.

16495H-002 has 6 triaxial connectors, 6 BNC connectors, an
Intlk connector, and a GNDU connector. The back of each
connector is designed for soldering.

1166449955JJ——HHaallff ssiizzee ccoonnnneeccttoorr ppllaattee ffoorr aannaal

lyyzzeerr

16495J-001 has 8 triaxial through connectors (female to
female), 4 BNC through connectors (female to female), an
Intlk connector, and a GNDU connector (triaxial through,
female to female). The back of the Intlk connector is designed
for soldering.

16495J-002 has 8 triaxial connectors, 4 BNC connectors, an
Intlk connector, and a GNDU connector. The back of each
connector is designed for soldering.

1166449955KK——HHaallff ssiizzee ccoonnnneeccttoorr ppllaattee wwiitthh uunniivveerrssaall ccaabbllee hhoollddeerr
16495K-001 does not have any connectors. This plate provides
the cable hole and the cover with rubber used to block the
light from the cable hole. This plate will be used with the
Agilent E5288A Atto Sense/Switch Unit (ASU) or the
Agilent N1301A-200 Guard Switch Unit (GSWU) that will be
installed in the shielding box.

The cable hole is to pass the cables from the ASU or GSWU to
the instrument such as the Agilent B1500A, E5270B, and so on.
And the cables will be fixed to the shielding box by using the
cover with rubber that will close the opening of the cable hole.

20

21

FFiigguurree 55..33

. Front view and rear view of connector plate

B. Rear view

Triaxial
connector
(for GNDU)

Ground terminal

Common terminal

INTLK terminal

Agilent 16495H-001

Agilent 16495H-002

Coaxial
connector

Ground terminal

Common terminal

Triaxial
connector

INTLK terminal

The difference between
the Agilent 16495F, H and J
is the number of the triaxial
and coaxial connectors.

Coaxial
connector

Triaxial
connector

Triaxial
connector
(for GNDU)

Triaxial connector
(for SMU)

Triaxial connector
(for GNDU)

INTLK terminal

A. Front view

Coaxial connector
(for MFCMU)

Common

Sense

Force

Signal line

Common

Common

Force

(sense)

Guard

GNDU

!

Intlk

INPUT

11

34

56

78

910

11 12

22

FFiigguurree 55..44..

Dimensions of the connector plate (Agilent 16495F/H/J)

11

34

56

78

910

11

GNDU

!

Intlk

12

INPUT

50

196

91 12

115

105

5

5

210 220

4 - Ø 3.2

Unit: mm

Metal cover

Metal cover

Agilent 16495H-002

(The difference between the Agilent 16495 F, H and J
is the number of the triaxial and coaxial connectors.)

Note: Metal cover is for preventing electrical shock.
Metal cover is furnished with 16495 F/G/H/J-002 only.

12

FFiigguurree 55..55..

Connection type of connector plate (rear)

Triaxial

A. Connector type (16495F/G/H/J-001) B. Solder type (16495F/G/H/J-002)

Coaxial Triaxial Coaxial

23

FFiigguurree 55..66

. Dimensions of the connector plate (Agilent 16495G)

230

4 - Ø 3.2

12

50

196

Unit: mm

220

5

5

210 220

206 12

55..66.. AAddaapptteerrss aanndd ccoonnnneeccttoorrss

If you need to make a connection
between a triaxial connector and
a coaxial connector, use a triaxial­coaxial adapter.

Table 5.10 shows the adapter
information provided by Agilent.
If you need an adapter which is not
provided, contact a local parts vendor.

WWAARRNNIINNGG

Be sure to use a shielding box and
Interlock when you make a
measurement.

Do not use the adapters in Table 5.10
when the GUARD line connects to
the outer conductor of the connector
or adapter. Because they connect
GUARD line and outer conductor of
the connector or adapter, the potential
of the GUARD terminal is equal to the
output voltage and there is a potential
for high voltage electrical shock at the
adapter and connector.

24

TTaabbllee 55..1100..

Parts information

IItteemm DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr IIlllluussttrraattiioonn
N1254A-100 GNDU to Kelvin adapter 1 —

N1254A-101 Triaxial (m) – Coaxial (f) 1 1250-2648

N1254A-102 Triaxial (f) – Coaxial (m) 1 1250-2649

N1254A-003 Triaxial (m) – Coaxial (f) 1 1250-2650

N1254A-104 Triaxial (f) – Coaxial (m) 1 1250-2651

N1254A-105 Triaxial (f) – Coaxial (m) 1 1250-2652

N1254A-106 Triaxial (m) – Coaxial (f) 1 1250-2653

N1254A-107 Triaxial (m) – Triaxial (f) 1 1250-2654

Common

Sense

Force

f

f

m

25

PPaarraammeettrriicc TTeesstt WWeebbssiittee

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Revised: 11/08/06

Product specifications and descriptions
in this document subject to change
without notice.

© Agilent Technologies, Inc. 1998-2006
Printed in USA, December 9, 2006
5989-5695EN

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