Agilent 16442A Accessories Guide

AAcccceessssoorriieess GGuuiiddee

AAggiilleenntt BB11550000AA——SSeemmiiccoonndduuccttoorr DDeevviiccee AAnnaallyyzzeerr

AAggiilleenntt 44115555CC//44115566CC——SSeemmiiccoonndduuccttoorr PPaarraammeetteerr AAnnaallyyzzeerr

AAggiilleenntt EE55227700BB——88 sslloott PPrreecciissiioonn MMeeaassuurreemmeenntt MMaaiinnffrraammee

AAggiilleenntt EE55226600AA——88 sslloott HHiigghh SSppeeeedd MMeeaassuurreemmeenntt mmaaiinnffrraammee

AAggiilleenntt BB22220000AA——ffAA LLeeaakkaaggee SSwwiittcchh MMaaiinnffrraammee

AAggiilleenntt BB22220011AA——1144cchh LLooww LLeeaakkaaggee SSwwiittcchh MMaaiinnffrraammee

AAggiilleenntt EE55225500AA——LLooww LLeeaakkaaggee SSwwiittcchh MMaaiinnffrraammee

CCoonntteennttss

1. Introduction

33

2. Connecting to fixture

44

2.1. Jumper cables

44

2.2. Socket modules

55

3. Connecting to SWM

66

3.1 GNDU

66

3.2 SMU

77

4. Connecting to prober

88

4.1. GNDU connections

88

4.2. SMU/CMU connections

99

5. Accessories

1133

5.1. CMU accessories

1133

5.2. B1500A peripherals

1155

5.3. Connector type

1166

5.4. Cables

1188

5.5. Connector plates

2200

5.6. Adapters & connectors

2244

2

11.. IInnttrroodduuccttiioonn

This guide provides information
on how to connect a prober to
Agilent Technologies semiconductor
parametric measurement instruments.

This guide also provides information
on accessories for a variety of
Agilent Technologies semiconductor
parametric measurement instruments,
such as the B1500, B2200/B2201,
E5250, E5260/E5270, 4155/4156,

41501.

3

FFiigguurree 11..11..

B1500A with Cascade prober

FFiigguurree 11..22..

B1500A with Vector prober

FFiigguurree 11..33,,

B1500A with Suss prober

FFiigguurree 11..44..

ASUs on the probe station

22.. CCoonnnneeccttiinngg ttoo ffiixxttuurree

The 16442A and 16442B test fixtures
have 6 triaxial input ports. You can
connect force ports of SMU to them
by using Triaxial Cable 16494A as
shown in Figure 2.1.

22..11.. JJuummppeerr ccaabblleess

TTaabbllee 22..11..

Jumper cables

MMiinnii bbaannaannaa –– PPiinn pplluugg

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-811/16442B-811 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61600 for Black (1ea)
16442-61601 for Red (1ea)
16442-61602 for Blue (1ea)

PPiinn pplluugg –– PPiinn pplluugg

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-812/16442B-812 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61603 for Black (1ea)
16442-61604 for Red (1ea)
16442-61605 for Blue (1ea)

MMiinnii bbaannaannaa –– MMiinnii cclliipp

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-813/16442B-813 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61606 for Black (1ea)
16442-61607 for Red (1ea)
16442-61608 for Blue (1ea)

MMiinnii bbaannaannaa –– MMiinnii bbaannaannaa

AAss ooppttiioonn ooff 1166444422AA//1166444422BB

16442A-814/16442B-814 for Black (2ea), Blue (2ea), Red (2ea)

PPaarrttss nnuummbbeerr

16442-61609 for Black (1ea)
16442-61610 for Red (1ea)
16442-61611 for Blue (1ea)

Approximately 200 mm

11 mm

2 mm

Approximately 200 mm

11 mm

40 mm

2 mm

Approximately 200 mm

7 mm

1 mm

7 mm

1 mm

Approximately 200 mm

11 mm 7 mm

2 mm

1 mm

4

FFiigguurree 22..11..

Connecting SMUs to fixture

Fixture

16442A

or

16442B

SMU

1-6

S

M

U

Triaxial cable

16494A-001 1.5m

or

16494A-002 3.0m

Force

Sense

22..22.. SSoocckkeett mmoodduulleess

TTaabbllee 22..22..

Socket modules

NN11225544AA--220044

0.1 inch

1166444422AA--880011//1166444422BB--880011

0.1 inch

NN11225544AA--220055

0.075 inch

1166444422AA--880022//1166444422BB--880022

0.075 inch

NN11225544AA--220066

0.05 inch

1166444422AA--880033//1166444422BB--880033

0.05 inch

NN11225544AA--220000

1166444422AA--882211//1166444422BB--882211

NN11225544AA--220011

1166444422AA--882233//1166444422BB--882233

NN11225544AA--220022

1166444422AA--882222//1166444422BB--882222

NN11225544AA--220077

1166444422AA--880000//1166444422BB--880000

5

43 mm43 mm

86 mm

84 mm

20 mm

3 mm

5 mm

5 mm 3 mm

This socket module has two
transistor sockets for measurement
of three lead or four lead bipolar
transistors and FETs.

Maximum voltage: 200 V

43 mm43 mm

86 mm

84 mm

8 mm 17.2 mm

This socket module is for measurement
of virtually any device—component, DIPIC,
or small-scale circuit.

1.8 mm

1 mm

18

9

1

43 mm43 mm

86 mm

84 mm

9 mm

2.54 mm

This socket module has an
18-pin dual-in-line socket.

Maximum voltage: 230 V

28 15

1

43 mm43 mm

This socket module has a
28-pin dual-in-line socket.

Maximum voltage: 230 V

86 mm

84 mm

2.54 mm

16.54 mm

84 mm

This insulation board has minimal leakage
current, and so is good for extremely low
current measurements.

86 mm

43 mm43 mm

33.. CCoonnnneeccttiinngg ttoo SSWWMM

33..11.. GGNNDDUU

An SMU has FORCE (SENSE),
GUARD, and COMMON, but a GNDU
has SENSE, FORCE, and COMMON
as shown in Figure 3.1. You need
some sort of GNDU to Kelvin
adapter when connecting the GNDU
to standard triaxial connections.

CCAAUUTTIIOONN

You should use the Agilent 16493L
GNDU cable to connect the GNDU
to the SWM; do not use a standard
triaxial cable. The GNDU cable can
handle the maximum GNDU current
of 4.2 A, but standard triaxial cables
are only rated to 1 A.

((NNoonn--KKeellvviinn ccoonnnneeccttiioonn))

Connect the triaxial connector using
an adapter for GNDU (N1254A-107)
as shown in Figure 3.2. For this
part, see Table 1.10 in Section 1.6
Adapters. For parts information,
see Table 3.1.

KKeellvviinn ccoonnnneeccttiioonn

Connect the dual triaxial connector
using a GNDU to Kelvin Adapter
(N1254A-100) as shown in
Figure 3.3. For this part, see
Table 1.10 in Section 1.6 Adapters.
For parts information, see
Table 3.2. Maximum current is
restricted when the Kelvin triaxial
cable is used. See Table 3.2.

6

FFiigguurree 33..11..

GNDU terminal

Common

Sense

Force

FFiigguurree 33..22..

Examples of a GNDU non-Kelvin connection to SWM

Ground unit cable

16493L-001 1.5m

or

16493L-002 3.0m

Triaxial – triaxial

adapter

N1254A-107

SWM
B2200A
E5250A

G
N
D
U

FFiigguurree 33..33..

Examples of a GNDU Kelvin connection to SWM

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Force

Sense

Force

Sense

Ground unit cable
16493N-001 1.5m

GNDU to Kelvin adapter
N1254A-100

SWM

B2200A

Force

Sense

SWM

B2200A

G
N
D
U

G
N
D
U

TTaabbllee 33..11..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Ground unit cable – 1.5m (Max 4.2A) 1 — 16493L-001

Ground unit cable – 3.0m (Max 4.2A) 1 — 16493L-002

Adapter for GNDU (triaxial (m) – triaxial (f)) 1 1250-2654 N1254A-107

TTaabbllee 33..22..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Kelvin triaxial cable – 1.5m (Max 3.0A) 1 — 16493K-001

Kelvin triaxial cable – 3.0m (Max 2.6A) 1 — 16493K-001

Ground unit cable – 1.5m 1 — 16493N-001

GNDU to Kelvin adapter 1 — N1254A-100

33..22.. SSMMUU

An SMU terminal is shown in
Figure 3.4.

KKeellvviinn ccoonnnneeccttiioonn

When Kelvin connection is used,
connect an Agilent 16493K Kelvin
triaxial cable for B2200A/B2201A
as shown in Figure 3.5. For E5250A,
connect an Agilent 16494B Kelvin
Triaxial Cable as shown in
Figure 3.5. You can also use two
Agilent 16494A triaxial cables in
place of one Kelvin Triaxial Cable.

Connect the FORCE and SENSE
lines to ports separately.

NNoonn--kkeellvviinn ccoonnnneeccttiioonn

When non-Kelvin connection is
used, connect the Agilent 16494A
triaxial cable between the SMU and
SWM as shown in Figure 3.6.

33..33.. MMFFCCMMUU

MFCMU of B1500A is connected
to CMH and CML port of B2200A/
B2201A by using CMU input cable
16494F-001 as shown in Figure 3.7.

7

FFiigguurree 33..44

. SMU terminal

Common

Force

(Sense)

Guard

FFiigguurree 33..55..

Examples of a SMU Kelvin connection to SWM

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Force

Sense

Force

Sense

SWM

B2200A

or

B2201A

S

M

U

Kelvin triaxial cable

16494B-003 0.8m

or

16494B-001 1.5m

or

16494B-002 3.0m

Force

Sense

Force

Sense

SWM

E5250A

S

M

U

FFiigguurree 33..66..

Examples of a SMU non-Kelvin connection to SWM

Triaxial cable

16494A-001 1.5m

or

16494A-002 3.0m

S

M

U

SWM

E5250A

Force

Sense

FFiigguurree 33..77..

Examples of a MFCMU connection to SWM

Hcur

CMH

CML

Hpot

Lpot

Lcur

CMU input cable

16494F-001 2.0m

M

F
C

M

U

SWM

B2200A

or

B2201A

44.. CCoonnnneeccttiinngg ttoo pprroobbeerr

44..11.. GGNNDDUU ccoonnnneeccttiioonnss

An SMU has FORCE (SENSE),
GUARD, and COMMON, but a
GNDU has SENSE, FORCE, and
COMMON as shown in Figure 4.1.
You need some sort of GNDU to
Kelvin adapter when connecting
the GNDU to standard triaxial
connections.

CCAAUUTTIIOONN

You should use the Agilent 16493L
GNDU cable to connect the GNDU
to the connector plate; do not use a
standard triaxial cable. The GNDU
cable can handle the maximum
GNDU current of 4.2A, but standard
triaxial cables are only rated to 1 A.

NNoonn--KKeellvviinn ccoonnnneeccttiioonn

Connect the triaxial connector using
an adapter for GNDU (N1254A-107)
as shown in Figure 4.2. For this
part, see Table 5.10 in Section 5.6
Adapters. For parts information,
see Table 4.1.

KKeellvviinn ccoonnnneeccttiioonn

Connect the dual triaxial connector
using a GNDU to Kelvin Adapter
(N1254A-100) as shown in
Figure 4.3. For this part, see
Table 5.10 in Section 5.6 Adapters.
For parts information, see Table 4.2.
Maximum current is restricted
when the Kelvin triaxial cable is
used. See Table 4.2.

8

FFiigguurree 44..11..

GNDU terminal

Common

Sense

Force

FFiigguurree 44..22..

Examples of a GNDU non-Kelvin connection

Triaxial cable

16493L-001 1.5m

or

16493L-002 3.0m

Connector plate

Shielding box

Adapter for GNDU
N1254A-107

Prober

Probe cable (triaxial)

DUT

G
N
D
U

FFiigguurree 44..33..

Examples of a GNDU Kelvin connection

Kelvin triaxial cable

16493K-001 1.5m

or

16493K-002 3.0m

Connector plate

Shielding box

GNDU to
Kelvin adapter
N1254A-100

Force

Sense

Force

Sense

Prober

Probe cable (triaxial)

Probe cable (triaxial)

DUT

G
N
D
U

TTaabbllee 44..11..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Ground unit cable – 1.5m (Max 4.2A) 1 — 16493L-001

Ground unit cable – 3.0m (Max 4.2A) 1 — 16493L-002

Adapter for GNDU (triaxial (m) – triaxial (f)) 1 1250-2654 N1254A-107

TTaabbllee 44..22..

Parts information

DDeessccrriippttiioonn QQttyy PPaarrtt nnuummbbeerr PPrroodduucctt

Kelvin triaxial cable – 1.5m (Max 3.0A) 1 — 16493K-001

Kelvin triaxial cable – 3.0m (Max 2.6A) 1 — 16493K-002

GNDU to Kelvin adapter 1 — N1254A-100