Technical Data Sheet No. TD9709M Rev. N
Date of Issue: April 2012
QUALITY SYSTEM REGISTERED
OPERATING MANUAL
GFC MASS FLOW
CONTROLLER
TABLE OF CONTENTS
1. UNPACKING THE GFC MASS FLOW CONTROLLER........................
1.1 Inspect Package for External Damage..............................................
1.2 Unpack the Mass Flow Controller.......................................................
1.3 Returning Merchandise for Repair.....................................................
2. INSTALLATION....................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.2.1 Valve Control Configuration...........................................
2.2.2 Remote LCD Readouts...................................................
2.2.3 Panel Mounting Readouts...............................................
3. PRINCIPLE OF OPERATION....................................................
4. SPECIFICATIONS..................................................................
4.1 CE Compliance................................................................................
4.2 Flow Capacities.................................................................................
5. OPERATING INSTRUCTIONS...................................................
5.1 Preparation and Warm Up................................................................
5.2 Flow Signal Output Readings..............................................................
5.3 Swamping Condition...........................................................................
5.4 Setpoint Reference Signal..................................................................
5.5 Valve OFF Control (Open Collector NPN Compatible)..........................
5.6 Valve Test/Purge.................................................................................
6. MAINTENANCE....................................................................
6.1 Introduction........................................................................................
6.2 Flow Path Cleaning..............................................................................
6.2.1 Cleaning the Inlet Filter Screen in GFC Models...............
6.2.2 Valve Maintenance for GFC17/37/47 Models.....................
7. CALIBRATION PROCEDURES....................................................
7.1 Flow Calibration...................................................................................
7.2 Calibration of GFC Mass Flow Controllers.......................................
7.2.1 Connections and Initial Warm Up...................................
7.2.2 Zero Adjustment.............................................................
7.2.3 SPAN Adjustment...........................................................
7.2.4 Linearity Adjustment......................................................
7.2.4.1 Disable Solenoid Valve in GFC17/37/47 Models..............
7.2.4.2 Open Motorized Valve in GFC57/67/77 Models...............
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7.2.5 Connections and Initial Warm Up..................................
7.2.6 ZERO Adjustment..........................................................
7.2.7 25% Flow Adjustment.....................................................
7.2.8 50% Flow Adjustment.....................................................
7.2.9 75% Flow Adjustment....................................................
7.2.10 100% Flow Adjustment..................................................
7.2.11 Valve Adjustment............................................................
7.2.11.1 Valve Adjustment for GFC17/37/47................................
7.2.11.2 Valve Adjustment for GFC57/67/77................................
7.2.12 Full Scale Flow Adjustment............................................
7.2.13 25% Flow Adjustment....................................................
7.2.14 50% Flow Adjustment....................................................
7.2.15 75% Flow Adjustment....................................................
7.2.16 100% Flow Adjustment..................................................
7.2.17 LCD Display Scaling.......................................................
7.2.17.1 Access LCD Display Circuit............................................
7.2.17.2 Adjust Scaling...............................................................
7.2.17.3 Change Decimal Point....................................................
8. TROUBLESHOOTING.............................................................
8.1 Common Conditions...........................................................................
8.2 Troubleshooting Guide.......................................................................
8.3 Technical Assistance............................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................
APPENDIX 1 COMPONENT DIAGRAM..................................................
APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS)...............................
APPENDIX 3 DIMENSIONAL DRAWINGS.............................................
APPENDIX 4 WARRANTY......................................................................
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1. UNPACKING THE GFC MASS FLOW CONTROLLER
1.1 Inspect Package for External Damage
Your GFC Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon
receipt, inspect the package for possible external damage. In case of external
damage to the package contact the shipping company immediately.
1.2 Unpack the Mass Flow Controller
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to your distributor or Aalborg7 directly.
When unpacking the instrument please make sure that you have all the items indicated on the Packing List. Please report any shortages promptly.
1.3 Returning Merchandise for Repair
Please contact the customer service representative of your distributor or Aalborg7
if you purchased your Mass Flow Controller directly, and request a Return
Authorization Number (RAN). Equipment returned without an RAN will not
be accepted. Aalborg7 reserves the right to charge an evaluation fee for equip-
ment returned under warranty claims if the instruments are tested to be free from
warrantied defects.
Shipping charges are borne by the customer. Items returned “collect” will
not be accepted!
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
2. INSTALLATION
2.1 Primary Gas Connections
Please note that the GFC Mass Flow Controller will not operate with liquids. Only
clean gases are allowed to be introduced into the instrument. Contaminated
gases must be filtered to prevent the introduction of impediments into the sensor.
Caution: GFC transducers should not be used for monitoring
OXYGEN gas unless specifically cleaned and prepared for such
application. For more information, contact your distributor or Aalborg7.
Attitude sensitivity of the Mass Flow Controller is ±15
F
. This means that the gas
flow path of the flow meter must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the GFC transducer in a stable environment,
free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminants. Be sure to observe the direction
of gas flow as indicated by the arrow on the front of the meter when connecting
the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tubings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!
Compression fittings should not be removed unless the meter is being cleaned or
calibrated for a new flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system.
(All GFC's are checked prior to shipment for leak-
age within stated limits. See specifications in this manual.)
2.2 Electrical Connection
GFC transducers require a +12VDC (+24VDC optional) power supply with a minimum current rating of 800 mA to operate. The operating power input is supplied
via the 15-pin “D” connector located at the side of the flow transducer enclosure.
On GFC's purchased without an LCD readout, a readout panel meter, digital multimeter, or other equivalent device is required to facilitate visual flow readings.
A built in SETPOINT potentiometer is used for local control of the flow. Variable
analog 0 to 5 VDC (or 4 to 20 mA) reference input is required for remote control.
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PIN FUNCTION
1 0 to 5 VDC Flow Signal Common
2 0 to 5 VDC Flow Signal Output
3 Common
4 Open (Purge)
5 Common, Power Supply
6 (unassigned)
7 +12 VDC (+24 VDC*) Power Supply
8 Remote Setpoint Input
9 4 to 20 mA (-) Flow Signal Return (use with 14)
10 Remote Setpoint Common (use with 8)
11 +5VDC Reference Output for Remote Setpoint
12 Valve Off Control
13 Auxiliary +12 VDC (+24 VDC*)
Power Output (For Loads <100 mA)
14 4 to 20 mA (+) Flow Signal Output
15 Chassis Ground
WARNING: DO NOT CONNECT 24Vdc POWER SUPPLY UNLESS YOUR
GFC CONTROLLER WAS ORDERED AND CONFIGURED FOR 24Vdc.
Important Notes:
In general, “D” Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
Power must be turned OFF when connecting or disconnecting any cables in the system.
The power input is protected by a 1600mA M (medium time-lag) resettable fuse.
If a shorting condition or polarity reversal occurs, the fuse will cut power to the
flow transducer circuit. Disconnect the power to the unit, remove the faulty condition, and reconnect the power. The fuse will reset once the faculty condition has
been removed.
Use of the GFC flow transducer in a manner other than that specified in this manual or in writing from Aalborg7, may impair the protection provided by the equipment.
FIGURE 2-1 GFC 15-PIN “D” CONNECTOR CONFIGURATION
*+24 VDC power supply configuration is optional for only GFC17/37/47 models.
5 & 7 +12 VDC (+24 VDC*) POWER SUPPLY
8 & 10 0-5 VDC OR 4-20 mA REMOTE SETPOINT
9 & 14 4-20 mA OUTPUT
10 & 11 +5 VDC CONTROL SOURCE
1 & 2 0-5 VDC OUTPUT
3 & 4 PURGE
3 & 12 VALVE OFF CONTROL
5 & 13
AUXILIARY +12 VDC (+24 VDC*) POWER
OUTPUT (FOR LOADS <100 mA)
FIGURE 2-2, POTENTIOMETER AND JUMPER LOCATIONS
2.2.1 Valve Control Configuration
There are three basic valve control options.
(a) LOCAL or REMOTE control.
(b) 0 to 5 VDC or 4 to 20 mA setpoint signal -
*Note: this only applies for the REMOTE control configuration;
(c) 2% cutoff active or not active. Note: 2% cutoff not available for GFC 57/67/77.
When active, the 2% cutoff will shut off the power to the valve when a setpoint of
less than 2% of the full scale flow range is set. Figure 2-2 shows the jumper configurations for the three basic valve control options.
The factory default jumper settings are: LOCAL control, 2% cutoff off, and 0 to 5 VDC.
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FIGURE 2-3, VALVE CONTROL CONFIGURATION JUMPERS
2.2.2 Remote LCD Readouts
GFC Mass Flow Controllers are available with optional remote reading LCD displays supplied with a three foot long wire to accommodate most applications. This
configuration includes the upper block element which serves as the LCD readout
mounting. Special lengths of remote extension wiring (up to 9.5 feet [3 meters])
are available on request.
FUNCTION NJ1A NJ1B NJ1C NJ1D NJ1E
0 to 5 VDC
4 to 20 mA
2 - 3
1 - 2
5 - 6
4 - 5
8 - 9
7 - 8
local
remote
11 - 12
10 - 11
2% cutoff on
2% cutoff off
13 - 14
14 - 15
2.2.3 Panel Mounting Readouts
Another option for the GFC Mass Flow Controller is the Panel Mounting Remote
Readout.
In this configuration the LCD readout is supplied with a three foot long extension
wire, and no aluminum housing around the LCD. The LCD readout for panel
mounting includes a bezel with two plastic screws which conveniently fit into a
rectangular cut-out for panel mounting (see Figure 2-3).
FIGURE 2-3 CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING
3. PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary
conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics flow rates of gas in two properly sized
laminar flow conduits are related to one another. Therefore, the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater-sensor coils. Heat
is transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected electronically. The measured gradient at the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.
GFC Mass Flow Controller models GFC17/37/47 also incorporate a proportionating solenoid valve and models GFC57/67/77 a motorized valve. The closed loop
control circuit of the GFC continuously compares the mass flow output with the
selected flow rate. Deviations from the setpoint are corrected by compensating
valve adjustments, thus maintaining the desired flow parameters.
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4. SPECIFICATIONS
FLOW MEDIUM: Please note that GFC Mass Flow Controllers are designed to work with
clean gases only. Never try to meter or control flow rates of liquids.
CALIBRATIONS: Supplied at Standard Conditions (14.7 psia and 70
F
F), or Normal
Conditions (0
F
C and 1.01 bar abs) unless otherwise requested or stated.
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.
ACCURACY:
REPEATABILITY: ±0.5% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale/
F
C.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: GFC17: 300ms time constant; approximately 1 second to within
±2% of set flow rate for 25% to 100% of full scale flow.
GFC 37/47: 600ms time constant; approximately 2 seconds to within
±2% of set flow rate for 25% to 100% of full scale flow.
GFC 57/67/77: 1800ms time constant; approximately 5 seconds to
within ± 2% of set flow rate for 25% to 100% of full scale flow.
MAX GAS PRESSURE: 1000 psig (69 bars) 10, 50 and 100 L/min; 500 psig (34.5 bars)
optimum pressure is 20 psig (1.4 bars).
TURNDOWN RATIO: 40:1.
MAX DIFFERENTIAL PRESSURE: 50 psid (345 kPa).
GAS TEMPERATURE: 32
F
F to 122 FF (0 FC to 50 FC).
AMBIENT TEMPERATURE:14
F
F to 122 FF (-10 FC to 50 FC).
GAS RELATIVE HUMIDITY: Up to 70%.
MAXIMUM INTERNAL LEAK: 0.5% FS.
ACCURACY % FS OPTIONAL ENHANCED ACCURACY % FS
MODEL
GFC
17, 37
GFC
47, 57, 67, 77
MODEL GFC 17
GFC
37, 47, 57, 67, 77
FLOW
RANGE
2.5-100% 20-100% 0-20%
FLOW
RANGE
2.5-100%
20-100% 0-20%
ACCURACY
±1.5% ±1.5% ±3%
ACCURACY
±1%
±1%
REF DATA
with ±1%
LEAK INTEGRITY: 1 x 10-7sccs He max to the outside environment.
ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal. Standard
calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0 to 5 VDC (1000 Ω minimum load impedance) and 4 to 20
mA (0 to 500 Ω loop resistance); 20 mV peak to peak max noise for GFC 17/37/47 and
100 mV peak to peak max noise for GFC 57/67/77.
COMMAND SIGNAL: Analog 0 to 5 VDC (100 K minimum input impedance) or 4 to 20 mA
(250 Ω input impedance).
Contact your distributor or Aalborg7 for optional RS232 or IEEE488 interfaces.
TRANSDUCER INPUT POWER: +12 VDC, 800 mA maximum; GFC17/37/47 have an
OPTION of +24 VDC, 650 mA maximum - IF SPECIFIED AT TIME OF ORDERING AND
CONFIGURED ACCORDINGLY.
WETTED MATERIALS:
GFC17/37/47/57/67/77: Anodized aluminum, brass, 416 Stainless Steel and 316 stainless
steel with VITON7 O-rings seals; BUNA-N7, EPR or KALREZ7 O-rings are optional.
GFC17S/37S/47S/57S/67S/77S: 416 Stainless Steel and 316 stainless steel with VITON7
O-rings seals; BUNA-N7, EPR or KALREZ O-rings are optional.
Aalborg7 makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers sole responsibility to select the model suitable for a particular gas based on
the fluid contacting (wetted) materials offered in the different models.
CONNECTIONS:
GFC 17 and 37: 1/4" compression fittings. Optional: 6mm compression, 1/4" VCR7,
3/8" or 1/8" compression fittings.
GFC 47: 3/8" compression fittings.
GFC 57 3/8" compression fittings.
GFC 67: 1/2" compression fittings.
GFC 77: 3/4" FNPT fittings. Optional: 3/4" compression fittings.
LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”), 0.5 inch high characters.
On GFC171, GFC371, GFC471, GFC571, GFC671, GFC771 aluminum or stainless steel models the LCD display is built into the upper block element and may be tilted over 90 degrees
for optimal viewing comfort. Remote or panel mounting remote reading is optional.
Standard readings are in direct engineering units for the given gas and flow rate (i.e.
liters/minute [slpm], standard cubic centimeters/minute [sccm], standard cubic feet/hour
[scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of order.
Contact your distributor or Aalborg7 when non-standard display settings are desired.
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the GFC
transducer 15-pin “D” connector.
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TABLE I GFC 17 LOW FLOW MASS FLOW CONTROLLER*
4.2 Flow Capacities
MODEL CODE
mL/min [N2]
CODE
liters/min [N2]
17
01 10 07 1
02 20 08 2
03 50 09 5
04 100 10 10
05 200
06 500
TABLE II GFC 37 MEDIUM FLOW MASS FLOW CONTROLLER*
TABLE III GFC 47/57/67/77 HIGH FLOW MASS FLOW CONTROLLER*
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70 FF (21.1 FC) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
MODEL CODE
liters/min [N2]
37
11
15
30 20
31 30
32 40
33 50
MODEL
CODE
liters/min [N2]
47
40 60
41 80
42 100
57
50 200
67 60 500
77 70 1000
4.1 CE Compliance
GFC Mass Flow Controllers are in compliance with CE test standards stated
below:
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991,
Group 1, Class B Immunity Standard: EN 55082-1:1992
FLOW RANGES
GFC 17/37/47 CAUTION
CAUTION: If the valve is left in the AUTO (control) or OPEN (PURGE)
mode for an extended period of time, it may become warm or even hot
to the touch. Use care in avoiding direct contact with the valve during
operation.
Do not run GFC 17/37/47 models for extended periods of time with the valve in
AUTO or PURGE mode without the flow of gas through the transducer. Doing so
may result in up to 2% f.s. shift in calibration.
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5. OPERATING INSTRUCTIONS
5.1 Preparation and Warm Up
It is assumed that the Mass Flow Controller has been correctly installed and thoroughly leak tested as described in section (2). Shut the flow source OFF. Apply
power to the unit via the 15-pin “D” connector. Use a power supply that is between
+12 and +15 VDC with at least 800 mA current capacity (or optionally, for models
GFC17/37/47 only, +24 VDC 650 mA). Allow the Mass Flow Controller to warmup for at least 15 minutes.
During initial powering of the GFC transducer, the flow output signal will be indicating a higher than usual output. This is indication that the GFC transducer has
not yet attained its minimum operating temperature. This condition will automatically cancel within a few minutes and the transducer should eventually zero.
If after the 15 minutes warm-up period, the display still indicates a reading of less
than ± 3.0 % of F.S., readjust the ZERO potentiometer [R34] through the access
window. Before zero adjustment temporarily disconnect the gas source, to ensure
that no seepage or leak occurs in to the meter.
TABLE IV PRESSURE DROPS
MODEL
FLOW RATE
[liters/min]
MAXIMUM PRESSURE DROP
[mm H2O]
[psid] [mbar]
GFC 17 UP to 10 720 1.06 75
GFC 37
15 2630 3.87 266
20 1360 2.00 138
30 2380 3.50 241
40 3740 5.50 379
50 5440 8.00 551
GFC 47
60 7480 11.00 758
100 12850 18.89 1302
GFC 57 200 7031 10.00 690
GFC 67 500 8437 12.00 827
GFC 77 1000 10547 15.00 1034
5.2 Flow Signal Output Readings
The flow signal output can be viewed on the LCD display, remote panel meter, digital multimeter, or other display device connected as shown in Figure 2.1.
If an LCD display has been ordered with the GFC, the observed reading is in
direct engineering units, for example, 0 to 10 sccm or 0 to 100 slpm (0 to 100%
indication is optional). Engineering units for a specific GFC are shown on the flow
transducer's front label.
Analog output flow signals of 0 to 5 VDC and 4 to 20 mA are available at the
appropriate pins of the 15-pin “D” connector at the side of the GFC transducer
(see Figure 2-1).
Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. The full scale range and gas for which your meter has been
calibrated are shown on the flow transducer's front label.
Default calibration is performed for 0 to 5 VDC input/output signal. If 4-20 mA output signal is used for flow indication on the GFC, which was calibrated against 0
to 5 VDC input signal, the accuracy of the actual flow rate will be in the specified
range (+
1.5%) of full scale, but the total of the output reading may be in the range
of +
2.5% of full scale. Optional calibration for 4-20 mA output signal is available
upon request at time of order.
For optional RS232 or IEEE488 interfaces please contact your distributor or Aalborg7.
5.3 Swamping Condition
If a flow of more than 10% above the maximum flow rate of the Mass Flow
Controller is taking place, a temporary condition known as “swamping” may occur.
Readings of a “swamped” meter cannot be assumed to be either accurate or linear. Flow must be restored to below 110% of maximum meter range. Once flow
rates are lowered to within calibrated range, the swamping condition will end.
Operation of the meter above 110% of maximum calibrated flow may increase
recovery time.
5.4 Setpoint Reference Signal
GFC flow controllers have built-in solenoid valves (GFC 17/37/47) or motorized
valves (GFC 57/67/77), and allow the user to set the flow to any desired flow rate
within the range of the particular model installed. The solenoid valve is normally
closed (NC) when no power is applied.
The motorized valve can be in any position depending on the operation mode of
the GFC during disconnecting of the power. For example if the motorized valve
was left in the OPEN purge position after disconnecting power from the GFC it will
be in the OPEN position. It is the customers responsibility to provide a solution to
shut down the flow in case of a power outage. When power is applied to GFC 57
/67/77 models, the valve automatically closes within the first ten seconds regardless of the set point and valve override signals.
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Setpoints are controlled locally or remotely. Setpoints inputs respond to analog 0
to 5 VDC or 4 to 20 mA reference voltages (default jumper setting is 0 to 5 VDC).
Voltage is a linear representation of 0 to 100% of the full scale mass flow rate.
Response times to setpoint changes are 1 second (GFC 17), 2 seconds (GFC
37/47) and 5 seconds (GFC 57/67/77) within 2% of the final flow over 25 to 100%
of full scale.
For LOCAL flow control, use the built-in setpoint potentiometer located at the
same side as the solenoid valve of the GFC transducer. While applying flow to
the transducer, adjust the setpoint with an insulated screwdriver until the flow
reading is the same as the desired control point. [Display will only show actual
instantaneous flow rates. There is no separate display for setpoints].
For REMOTE control of the GFC, an analog reference signal must be supplied.
On pin [11] of the GFC transducer is a regulated and constant +5VDC output signal. This signal may be used in conjunction with a local setpoint potentiometer
for flow setting.
FIGURE 5-1 LOCAL SETPOINT POTENTIOMETER CONNECTIONS
It is recommended that a potentiometer between 5K to 100K ohm and capable of
at least 10-turns or more for adjustment be used. Use the control potentiometer
to command the percentage of flow desired.
Alternatively, a variable 0 to 5VDC or 4 to 20 mA analog signal may be applied
directly to the SETPOINT and COMMON connections of the GFC transducer (see
Figure 2-1). Be sure to apply the appropriate signal for the designated jumper settings.
5.5 Valve OFF Control
(Open Collector NPN Compatible)
It may be necessary or desirable to set the flow and maintain that setting while
being able to turn the flow control valve off and on again. Closing of the valve
(without changing the setpoint adjustment) can be accomplished by connecting
pin [12] of the 15-pin “D” connector to COMMON pin [3]. When pin [12] is connected to COMMON, the solenoid valve is not powered and therefore will remain
normally closed regardless of the setpoint. The Motorized valve will be given the
command to close indicated by a green light on top of the unit.
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12
,
Conversely, when the connection is left open or pin [12] remains unconnected the
valve remains active. The valve will remain active when the VALVE OFF pin
remains “floating”. This feature is compatible with open collector NPN transistor
switches, as found in DC output ports of programmable controllers and similar
devices.
The simplest means for utilizing the VALVE OFF control feature, is to connect a
toggle switch between the COMMON and VALVE OFF pins of the GFC transducer. Toggling the switch on and off will allow for activating and deactivating the solenoid valve.
5.6 Valve Test/Purge
At times, it may be necessary to purge the flow system with a neutralizing gas
such as pure dry nitrogen. The GFC transducer is capable of a full open condition
for the valve, regardless of setpoint conditions. Connecting the OPEN (PURGE)
pin (pin 4 on 15-pin “D” connector) to ground will fully open the valve.
The Motorized Valve: Connect pins [3] and [4] to OPEN the motorized control
valve. A red light on top of the valve will indicate an OPEN valve, normal for flow
conditions.
NOTE:The motorized control valve stays OPEN even if power is
no longer applied. To CLOSE the Motorized Control Valve, connect pins
[3] and [12].
6. MAINTENANCE
6.1 Introduction
It is important that the Mass Flow Controller/Controller is used with clean, filtered
gases only. Liquids may not be metered. Since the RTD sensor consists, in part,
of a small capillary stainless steel tube, it is prone to occlusion due to impediments or gas crystallization. Other flow passages are also easily obstructed.
Therefore, great care must be exercised to avoid the introduction of any potential
flow impediment. To protect the instrument a 50 micron (GFC17) or 60
micron(GFC37/47) filter is built into the inlet of the flow transducer. The filter
screen and the flow paths may require occasional cleaning as described below.
There is no other recommended maintenance required. It is good practice, however, to keep the meter away from vibration, hot or corrosive environments and
excessive RF or magnetic interference.
If periodic calibrations are required they should be performed by qualified personnel and calibrating instruments, as described in section (7). It is recommended that units are returned to Aalborg7 for repair service and calibration.
CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATORY THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY
PURGED AND NEUTRALIZED OF TOXIC, BACTERIOLOGICALLY
INFECTED, CORROSIVE OR RADIOACTIVE CONTENTS.
6.2 Flow Path Cleaning
Inspect visually the flow paths at the inlet and outlet ends of the meter for any
debris that may be clogging the flow through the meter. Remove debris carefully
using tweezers and blowing low pressure clean air or Nitrogen from the inlet side.
If the flow path is not unclogged, please return meter to Aalborg7 for servicing.
Do not attempt to disassemble the sensor.
Disassembly will invalidate calibration.
6.2.1 Cleaning the Inlet Filter Screen in GFC17 Models
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer, which splits the inlet gas flow by a fixed ratio to the sensor and main flow
paths. The particular RFE used in a given Mass Flow Controller depends on the
gas and flow range of the instrument.
Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying before re-assembling.
Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.
Note: Over tightening will deform and render the RFE defective.
It is advisable that at least one calibration point be checked after re installing the
inlet fitting - see section (7).
IT IS NOT RECOMMENDED TO ATTEMPT TO DISASSEMBLE,
OR REPAIR GFC37, GFC47, GFC57, GFC67 AND GFC77 MODELS.
DISASSEMBLY NECESSITATES RE-CALIBRATION.
6.2.2 Valve Maintenance for GFC17/37/47 Models
The solenoid valve consists of 316 and 416 stainless steel, and VITON7 (or
optional EPR or KALREZ7) O-rings and seal materials. No regular maintenance
is required except for periodic cleaning.
It is advisable that at least one calibration point be checked after re-installing the
inlet fitting - see section (7).
13
,
14
FIGURE 6-1 SOLENOID VALVE
Various corrosive gases may demand more frequent replacement of VITON7
O-rings and seals inside the valve. Be sure to use an elastomer material, appro-
priate for your specific gas application. Contact your distributor or Aalborg7 for
optional sealing materials available.
Set the GFC into PURGE mode (see Figure 2-1), and attempt to flush through
with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully
opening the valve is to remove the plastic cap on top of the valve, and turning the
set screw counterclockwise until it stops. See section 7.3 for valve adjustment, to
return the valve to functional use.]
7. CALIBRATION PROCEDURES
NOTE: Removal of the factory installed calibration seals and/or any
adjustments made to the meter, as described in this section, will void
any calibration warranty applicable.
7.1 Flow Calibration
Aalborg7 Instruments' Flow Calibration Laboratory offers professional calibration
support for Mass Flow Meters and Controllers, using precision calibrators under
strictly controlled conditions. NIST traceable calibrations are available.
Calibrations can also be performed by customers using available certified standards.
Factory calibrations are performed using state of the art NIST traceable precision
volumetric calibrators.
Calibrations are performed using dry nitrogen gas. Calibration can then be corrected to the appropriate gas desired based on relative correction [K] factors
shown in the gas factor table - see Appendix 2. A reference gas, other than nitrogen, may be used to approximate the flow characteristics of certain gases closer.
This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration. The appropriate relative correction factor should be recalculated - see section (9).
It is standard practice to calibrate Mass Flow Controllers with dry nitrogen gas. It
is best to calibrate the GFC transducers to actual operating conditions. Specific
gas calibrations of non-toxic and non-corrosive gases are available at specific
conditions. Please contact your distributor or Aalborg7 for a price quotation.
It is recommended that a flow calibrator of at least four times better collective
accuracy than that of the Mass Flow Controller to be calibrated be used.
Equipment required for calibration includes a flow calibration standard and a certified high sensitivity multimeter (which together have a collective accuracy of
±0.25% or better), an insulated (plastic) screwdriver, a flow regulator (example:
metering needle valve) installed upstream from the Mass Flow Controller and a
pressure regulated source of dry filtered nitrogen gas (or other suitable reference
gas).
The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.
15
,
16
FIGURE 7-1 CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS (BACK OF GFC)
7.2 Calibration of GFC Mass Flow Controllers
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
GFC Mass Flow Controllers may be field recalibrated/checked for the same range
they were originally factory calibrated for. When linearity adjustment is needed, or
flow range changes are being made proceed to step 7.2.4. Flow range changes
may require a different Restrictor Flow Element (RFE). Additionally, a different
Solenoid Valve Orifice may also be required (see Table VI). Consult your distributor or Aalborg7 for more information.
7.2.1 Connections and Initial Warm Up
At the 15-pin “D” connector of the GFC transducer, connect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and [14] for 4 to 20 mA) - (see Figure
2-1).
When using a remote setpoint for flow control, the appropriate reference signal
should also be connected to the 15-pin “D” connector at pins [8] and [10] - (see
Figure 2-1). Power up the Mass Flow Controller for at least 30 minutes prior to
commencing the calibration procedure.
17
7.2.2 ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage or
leak occurs into the meter, temporarily disconnect the gas source.
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively) at
zero flow.
7.2.3 SPAN Adjustment
Reconnect the gas source. Adjust the control setpoint to 100% of full scale flow.
Check the flow rate indicated against the flow calibrator. If the deviation is less
than ±10% of full scale reading, correct the SPAN potentiometer [R33] setting by
using the insulated screwdriver through the access window, to eliminate any deviation. If the deviation is larger than ±10% of full scale reading, a defective condition may be present.
LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:
✓ Occluded or contaminated sensor tube.
✓ Leaking condition in the GFC transducer or the gas line and fittings.
✓ For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table.
✓ Temperature and/or pressure correction errors.
See also section (8) TROUBLESHOOTING. If after attempting to remedy the
above conditions, a malfunction still persists, return the meter for factory service,
see section (1).
At this point the calibration is complete. However, it is advisable that several additional points between 0 and 100%, such as 25%, 50%, and 75% flow be checked.
If discrepancies are found, proceed to step 7.2.4 for Linearity Adjustment.
7.2.4 Linearity Adjustment
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
7.2.4.1 Disable Solenoid Valve in GFC17/37/47 Models
Set the valve into PURGE mode. This step essentially bypasses the flow control
properties of the transducer. The unit will now act as a Mass Flow Meter.
7.2.4.2 Open Motorized Valve in GFC57/67/77 Models
Set the valve to PURGE mode by connecting pin [4] to pin [3], at the 15 pin
D-connector.
CAUTION: FOR GFC17/37/47- If the valve is left in the AUTO (control)
or OPEN (PURGE) mode for an extended period of time, it may
become warm or even hot to the touch. Use care in avoiding direct
contact with the valve during operation.
7.2.5 Connections and Initial Warm Up
Connect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and
[14] for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1).
If calibration to a new flow range or different gas is being performed, it may be
necessary to remove any jumpers at J1A, J1B, and J1C before beginning linearizing procedure.
Power up the Mass Flow Controller for at least 30 minutes prior to commencing
the calibration procedure.
7.2.6 ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, it is good practice to temporarily disconnect the gas
source.
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively) at
zero flow.
7.2.7 25% Flow Adjustment
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25% of
full scale flow. Check the flow rate indicated against the flow calibrator. Adjust the
setting for potentiometer [R33] by using the insulated screwdriver through the
access window, until the output of the flow meter reads 1.25VDC ±63mV (or 8mA
±0.25mA).
FIGURE 7-2 CALIBRATION POTENTIOMETER AND JUMPERS
7.2.8 50% Flow Adjustment
Using the flow regulator, increase the flow rate to 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 2.50VDC ±63mV (or 12mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1A] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R38] by using the insulated screwdriver through the
access window, until reading is within specification.
18
LINEARIZER
FUNCTION
J1A (50%) J1B (75%) J1C (100%)
Decrease 1 - 2 4 - 5 7 - 8
Increase
2 - 3 5 - 6 8 - 9
7.2.9 75% Flow Adjustment
Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 3.75VDC ±63mV (or 16mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1B] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R39] by using the insulated screwdriver through the
access window, until reading is within specification.
7.2.10 100% Flow Adjustment
Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
should read 5.00VDC ±63mV (or 20mA ±0.25mA). If the reading is outside of that
range, place the jumper at [J1C] as appropriate to increase or decrease the signal. Adjust the setting for potentiometer [R40] by using the insulated screwdriver
through the access window, until reading is within specification.
Repeat steps 7.2.7 to 7.2.10 at least once more.
7.2.11. VALVE ADJUSTMENT
7.2.11.1 Valve Adjustment for GFC 17/37/47
Discontinue the PURGE mode (set valve for the closed position). Apply an inlet
pressure of 5 psig, and atmospheric pressure at the outlet. If a small flow occurs,
turn the set screw on top of the solenoid valve clockwise until the flow through the
GFC just stops
7.2.11.2 Valve Adjustment for GFC 57/67/77
DO NOT adjust the motorized valve for GFC57/67/77.
The motorized valve for these models has been pre-adjusted at the factory.
7.2.12 Full Scale Flow Adjustment
Fully open the flow regulator upstream of the GFC. Increase the inlet pressure to
20 psig (25 psig for GFC47). Apply a +5.00 VDC (100% full scale flow) setpoint
reference. Using the calibrator check the flow rate. If necessary, adjust R33 to
match the desired full scale flow rate. [In control mode, turning R33 clockwise will
decrease the flow. Conversely, turning R33 counterclockwise will increase the flow
through the GFC.]
7.2.13 25% Flow Adjustment
Change the setpoint to 1.25 VDC to control at 25% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R33], until the flow output is
correct.
19
7.2.14 50% Flow Adjustment
Change the setpoint to 2.50 VDC to control at 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R38], until the flow output is
correct.
7.2.15 75% Flow Adjustment
Change the setpoint to 3.75 VDC to control at 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R39], until the flow output is
correct.
7.2.16 100% Flow Adjustment
Change the setpoint to 5.00 VDC to control at 100% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R40], until the flow output is
correct.
Repeat steps 7.2.13 to 7.2.16 at least once more.
TABLE II GFC SOLENOID VALVE ORIFICE SELECTION TABLE
7.2.17 LCD Display Scaling
It may be desirable to re-scale the output reading on the LCD readout supplied
with certain model GFC transducers. Re-calibration for a new flow range or different engineering units are two examples of when this may be necessary.
7.2.17.1 Access LCD Display Circuit
Carefully remove the LCD from the GFC or panel mounted surface. Remove the
aluminum housing on the side of the connection cable. Slide the LCD assembly
out of the aluminum housing.
20
ORIFICE PART NUMBER FLOW RATE [N2]
OR.020 10 to 1000 sccm
OR.040 1 to 5 slpm
OR.055 5 to 10 slpm
OR.063 10 to 15 slpm
OR.094 20 to 50 slpm
OR.125 50 to 100 slpm
7.2.17.2 Adjust Scaling
Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA signal at the 15-pin “D” connector, set the flow rate on the GFC to full scale flow (5
VDC or 20mA). Maintain full scale flow, and adjust the potentiometer [R3] on the
LCD printed circuit board to desired full scale flow reading.
7.2.17.3 Change Decimal Point
To change the decimal place on the LCD display readout, simply move the
jumper to the appropriate location on the [8] pin header block. The numbers are
printed to the side of the connections. Do not attempt to place more than one
jumper for decimal setting.
8. TROUBLESHOOTING
8.1 Common Conditions
Your Mass Flow Controller was thoroughly checked at numerous quality control
points during and after manufacturing and assembly operations. It was calibrated
in accordance to your desired flow and pressure conditions for a given gas or a
mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
✓ Are all cables connected correctly?
✓ Are there any leaks in the installation?
✓ Is the power supply correctly selected according to requirements?
When several meters are used a power supply with appropriate current
rating should be selected.
✓ Were the connector pinouts matched properly? When interchanging with
other manufacturers' equipment, cables and connectors must be carefully
wired for correct pin configurations.
✓ Is the pressure differential across the instrument sufficient?
21
JUMPER POSITION
MAXIMUM SCALABLE DISPLAY READING
“0” 1999
“1”
199.9
“2”
19.99
“3” 1.999
22
8.2 Troubleshooting Guide
INDICATION LIKELY REASON REMEDY
lack of reading power supply off check connection of power supply
or output
fuse blown disconnect transducer from
power supply; remove the
shorting condition or check
polarities; fuse resets
automatically
filter screen flush clean or disassemble to
obstructed at inlet remove impediments or replace
occluded sensor tube flush clean or disassemble to
remove impediments or return to
factory for replacement
pc board defect return to factory for replacement
valve adjustment wrong re-adjust valve (section 7.2.4)
flow reading inadequate gas pressure apply appropriate gas pressure
does not
coincide with filter screen obstructed flush clean or disassemble to
the setpoint at inlet remove impediments or replace
ground loop signal and power supply
commons are different
no response inadequate gas pressure apply appropriate gas pressure
to setpoint
cable or connector malfunction check cables and all connections
or replace
setpoint is too low re adjust setpoint or disable 2%
(<2% of full scale) cutoff feature (section 2.2)
valve adjustment wrong re-adjust valve (section 7.2.4)
unstable or gas leak locate and correct
no zero reading
pc board defective return to factory for replacement
full scale output defective sensor return to factory for replacement
at “no flow”
condition or gas leak locate and repair
with valve
closed
INDICATION LIKELY REASON REMEDY
calibration off gas metered is not the same as use matched calibration
what meter was calibrated for
composition of gas changed see K factor tables in APPENDIX 2
gas leak locate and correct
pc board defective return to factory for replacement
RFE dirty flush clean or disassemble to
remove impediments
occluded sensor tube flush clean or disassemble to
remove impediments or return to
factory for replacement
filter screen obstructed flush clean or disassemble to
at inlet remove impediments or replace
transducer is not check for any tilt or change in the
mounted properly mounting of the transducer;
generally, units are calibrated for
horizontal installation
(relative to the sensor tube)
GFC valve does incorrect valve adjustment re-adjust valve (section 7.2.4)
not work
in open position pc board defect return to factory for replacement
cable or connectors check cable and connectors
malfunction or replace
differential pressure too high decrease pressure to correct level
insufficient inlet pressure adjust appropriately
GFC valve does incorrect valve adjustment re-adjust valve (section 7.2.4)
not work in
closed position pc board defect return to factory for replacement
cable or connectors check cable and connectors
malfunction or replace
orifice obstructed disassemble to remove
impediments or return to factory
23
24
Q
O2
= Q
a
= Q
r
X K = 1000 X 0.9926 = 992.6 sccm
where K = relative K factor to reference gas (oxygen to nitrogen)
1
d X C
p
where d = gas density (gram/liter)
C
p
= coefficient of specific heat (cal/gram)
Q
a
K
a
Q
r
K
r
where Qa= mass flow rate of an actual gas (sccm)
Q
r
= mass flow rate of a reference gas (sccm)
K
a
= K factor of an actual gas
K
r
= K factor of a reference gas
=
9. CALIBRATION CONVERSIONS FROM
REFERENCE GASES
The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:
=
K
=
K
gas
Note: in the above relationship that d and Cp are chosen at the same conditions
(temperature, pressure).
If the flow range of a Mass Flow Controller remains unchanged, a relative K factor is used to relate the calibration of the actual gas to the reference gas.
For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:
For best results it is recommended that instruments are returned to the factory for
servicing. See section 1.3 for return procedures.
8.3 Technical Assistance
Aalborg7 Instruments will provide technical assistance over the phone to qualified
repair personnel. Please call our Technical Assistance at 845-770-3000. Please
have your Serial Number and Model Number ready when you call.
25
aalborg
7
APPENDIX 1
COMPONENTS DIAGRAM
GFC METERING PC BOARD (TOP SIDE)
26
COMPONENTS DIAGRAM
METERING PC BOARD (BOTTOM SIDE)
27
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS)
CAUTION: K-Factors at best are only an approximation. K factors should not
be used in applications that require accuracy better than +/- 5 to 10%.
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Acetylene C2H
2
.5829 .4036 1.162
Air 1.0000 .240 1.293
Allene (Propadiene) C3H
4
.4346 .352 1.787
Ammonia NH
3
.7310 .492 .760
Argon Ar
Argon AR-1 (>10 L/min)
1.4573
1.205
.1244
.1244
1.782
1.782
Arsine AsH
3
.6735 .1167 3.478
Boron Trichloride BCl
3
.4089 .1279 5.227
Boron Trifluoride BF
3
.5082 .1778 3.025
Bromine Br
2
.8083 .0539 7.130
Boron Tribromide Br
3
.38 .0647 11.18
Bromine PentaTrifluoride BrF
5
.26 .1369 7.803
Bromine Trifluoride BrF
3
.3855 .1161 6.108
Bromotrifluoromethane (Freon-13 B1) CBrF
3
.3697 .1113 6.644
1,3-Butadiene C4H
6
.3224 .3514 2.413
Butane C4H
10
.2631 .4007 2.593
1-Butene C4H
8
.2994 .3648 2.503
2-Butene C4H8 CIS
.324 .336 2.503
2-Butene C4H8TRANS
.291 .374 2.503
Carbon Dioxide CO
2
Carbon Dioxide CO2-1 (>10 L/min)
.7382
.658
.2016
.2016
1.964
1.964
Carbon Disulfide CS
2
.6026 .1428 3.397
Carbon Monoxide C0
1.00 .2488 1.250
Carbon Tetrachloride CCl
4
.31 .1655 6.860
Carbon Tetrafluoride (Freon-14)CF
4
.42 .1654 3.926
Carbonyl Fluoride COF
2
.5428 .1710 2.945
Carbonyl Sulfide COS
.6606 .1651 2.680
Chlorine Cl
2
.86 .114 3.163
Chlorine Trifluoride ClF
3
.4016 .1650 4.125
Chlorodifluoromethane (Freon-22)CHClF
2
.4589 .1544 3.858
Chloroform CHCl
3
.3912 .1309 5.326
Chloropentafluoroethane(Freon-115)C2ClF
5
.2418 .164 6.892
Chlorotrifluromethane (Freon-13) CClF
3
.3834 .153 4.660
CyanogenC2N
2
.61 .2613 2.322
CyanogenChloride CICN
.6130 .1739 2.742
Cyclopropane C3H
5
.4584 .3177 1.877
28
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Deuterium D
2
1.00 1.722 1.799
Diborane B2H
6
.4357 .508 1.235
Dibromodifluoromethane CBr2F
2
.1947 .15 9.362
Dichlorodifluoromethane (Freon-12) CCl2F
2
.3538 .1432 5.395
Dichlofluoromethane (Freon-21) CHCl2F
.4252 .140 4.592
Dichloromethylsilane (CH3)2SiCl
2
.2522 .1882 5.758
Dichlorosilane SiH2Cl
2
.4044 .150 4.506
Dichlorotetrafluoroethane (Freon-114) C2Cl2F
4
.2235 .1604 7.626
1,1-Difluoroethylene (Freon-1132A) C2H2F
2
.4271 .224 2.857
Dimethylamine (CH3)2NH
.3714 .366 2.011
Dimethyl Ether (CH3)2O
.3896 .3414 2.055
2,2-Dimethylpropane C3H
12
.2170 .3914 3.219
Ethane C2H
6
.50 .420 1.342
Ethanol C2H6O
.3918 .3395 2.055
Ethyl Acetylene C4H
6
.3225 .3513 2.413
Ethyl Chloride C2H5Cl
.3891 .244 2.879
Ethylene C2H
4
.60 .365 1.251
Ethylene Oxide C2H4O
.5191 .268 1.965
Fluorine F
2
.9784 .1873 1.695
Fluoroform (Freon-23) CHF
3
.4967 .176 3.127
Freon-11 CCl3F
.3287 .1357 6.129
Freon-12 CCl2F
2
.3538 .1432 5.395
Freon-13 CClF
3
.3834 .153 4.660
Freon-13B1 CBrF
3
.3697 .1113 6.644
Freon-14 CF
4
.4210 .1654 3.926
Freon-21 CHCl2F
.4252 .140 4.592
Freon-22 CHClF
2
.4589 .1544 3.858
Freon-113 CCl2FCClF
2
.2031 .161 8.360
Freon-114 C2Cl2F
4
.2240 .160 7.626
Freon-115 C2ClF
5
.2418 .164 6.892
Freon-C318 C4F
8
.1760 .185 8.397
Germane GeH
4
.5696 .1404 3.418
Germanium Tetrachloride GeCl
4
.2668 .1071 9.565
Helium He
Helium He-1 (>50 L/min)
Helium He-2 (>10-50 L/min)
1.454
2.43
2.05
1.241
1.241
1.241
.1786
.1786
.1786
Hexafluoroethane C2F6(Freon-116)
.2421 .1834 6.157
Hexane C6H
14
.1792 .3968 3.845
Hydrogen H2-1
Hydrogen H
2
-2 (>10-100 L)
Hydrogen H
2
-3 (>100 L)
1.0106
1.35
1.9
3.419
3.419
3.419
.0899
.0899
.0899
29
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Hydrogen Bromide HBr
1.000 .0861 3.610
Hydrogen Chloride HCl
1.000 .1912 1.627
Hydrogen Cyanide HCN
.764 .3171 1.206
Hydrogen Fluoride HF
.9998 .3479 .893
Hydrogen Iodide HI
.9987 .0545 5.707
Hydrogen Selenide H2Se
.7893 .1025 3.613
Hydrogen Sulfide H2S
.80 .2397 1.520
Iodine Pentafluoride IF
5
.2492 .1108 9.90
Isobutane CH(CH3)
3
.27 .3872 3.593
Isobutylene C4H
6
.2951 .3701 2.503
Krypton Kr
1.453 .0593 3.739
Methane CH
4
Methane CH4-1 (>10 L/min)
.7175
.75
.5328
.5328
.715
.715
Methanol CH
3
.5843 .3274 1.429
Methyl Acetylene C3H
4
.4313 .3547 1.787
Methyl Bromide CH3Br
.5835 .1106 4.236
Methyl Chloride CH3Cl
.6299 .1926 2.253
Methyl Fluoride CH3F
.68 .3221 1.518
Methyl Mercaptan CH3SH
.5180 .2459 2.146
Methyl Trichlorosilane (CH3)SiCl
3
.2499 .164 6.669
Molybdenum Hexafluoride MoF
6
.2126 .1373 9.366
Monoethylamine C2H5NH
2
.3512 .387 2.011
Monomethylamine CH3NH
2
.51 .4343 1.386
Neon NE
1.46 .246 .900
Nitric Oxide NO
.990 .2328 1.339
Nitrogen N
2
1.000 .2485 1.25
Nitrogen Dioxide NO
2
.737 .1933 2.052
Nitrogen Trifluoride NF
3
.4802 .1797 3.168
Nitrosyl Chloride NOCl
.6134 .1632 2.920
Nitrous Oxide N2O
.7128 .2088 1.964
Octafluorocyclobutane (Freon-C318) C4F
8
.176 .185 8.397
Oxygen O
2
.9926 .2193 1.427
Oxygen Difluoride OF
2
.6337 .1917 2.406
Ozone
.446 .195 2.144
Pentaborane B5H
9
.2554 .38 2.816
Pentane C5H
12
.2134 .398 3.219
Perchloryl Fluoride ClO3F
.3950 .1514 4.571
Perfluoropropane C3F
8
.174 .197 8.388
Phosgene COCl
2
.4438 .1394 4.418
Phosphine PH
3
.759 .2374 1.517
30
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Oxychloride POCl
3
.36 .1324 6.843
Phosphorous Pentafluoride PH
5
.3021 .1610 5.620
Phosphorous Trichloride PCl
3
.30 .1250 6.127
Propane C3H
8
.35 .399 1.967
Propylene C3H
6
.40 .366 1.877
Silane SiH
4
.5982 .3189 1.433
Silicon Tetrachloride SiCl
4
.284 .1270 7.580
Silicon Tetrafluoride SiF
4
.3482 .1691 4.643
Sulfur Dioxide SO
2
.69 .1488 2.858
Sulfur Hexafluoride SF
6
.2635 .1592 6.516
Sulfuryl Fluoride SO2F
2
.3883 .1543 4.562
Tetrafluoroethane (Forane 134A) CF3CH2F
.5096 .127 4.224
Tetrafluorohydrazine N2F
4
.3237 .182 4.64
Trichlorofluoromethane (Freon-11) CCl3F
.3287 .1357 6.129
Trichlorosilane SiHCl
3
.3278 .1380 6.043
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
2
FCClF
2
.2031 .161 8.36
Triisobutyl Aluminum (C4H9)AL
.0608 .508 8.848
Titanium Tetrachloride TiCl
4
.2691 .120 8.465
Trichloro Ethylene C2HCl
3
.32 .163 5.95
Trimethylamine (CH3)3N
.2792 .3710 2.639
Tungsten Hexafluoride WF
6
.2541 .0810 13.28
Uranium Hexafluoride UF
6
.1961 .0888 15.70
Vinyl Bromide CH2CHBr
.4616 .1241 4.772
Vinyl Chloride CH2CHCl
.48 .12054 2.788
Xenon Xe
1.44 .0378 5.858
31
APPENDIX 3
DIMENSIONAL DRAWINGS
2.38
GFC17 MASS FLOW CONTROLLER
NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time
without notice. For certified dimensions please contact Aalborg7.
0.95
DIMENSIONS: INCH [mm]
32
2.38
GFC37/47 MASS FLOW CONTROLLER
NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any
time without notice. For certified dimensions please contact Aalborg7.
0.95
3.94 [99.9]
5.19 [131.8]
7.21 [183.1]
7.33 [186.2]
*
2.69 [68.3]
6-32
FOR HIGH FLOW MASS FLOW CONTROLLER ONLY
*
4.88 [123.8]
0.28 [7.1]
5.98 [151.8]
1.38 [34.9]
0.63 [15.9]
0.63 [15.9]
1.25 [31.8]
0.69 [17.5]
DIMENSIONS: INCH [mm]
33
1.39 (35,3)
GFC57 MASS FLOW CONTROLLER
1.39 (35,3)
0.18 (4,6)
2.38
7" (177,8)
9.98 (253,5)
10-24 UNC 0.25
2.72 (69,1)
0.95
6.9" (175,3)
0.875 (22,2)
1" (25,4)
12.30 (312,4)
SAE/MS SWAGELOK
3/8 TUBE CONNECTOR
2.15 (54,6)
1" (25,4)
4.69 (119,1)
34
7.55
(191.8 mm)
3.00
(76.2 mm)
3.00
(76.2 mm)
12.62 (320.5 mm)
10.42 (264.7 mm)
7.25 (184.1 mm)
2.50
(63.5 mm)
6.75 (171.5 mm)
4 x 1/4-20 UNC-2B 0.35
2 x 1/2 compression fittings
control
valve
CE
50.00
GFC67 MASS FLOW CONTROLLER
NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any
time without notice. For certified dimensions please contact Aalborg7.
35
NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any
time without notice. For certified dimensions please contact Aalborg7.
8.54
(217 mm)
4.00
(101.6 mm)
4.00 (101.6 mm)
3/4-14 NPT
(both sides)
10.47 (266 mm)
7.30 (185.4 mm)
3.00
(76.2 mm)
6.80 (172.7 mm)
1/4-20
UNC-2B 0.35
control
valve
CE
50.00
GFC77 MASS FLOW CONTROLLER
APPENDIX 4
NOTE: Follow Return Procedures In Section 1.3.
WARRANTY
Aalborg7 Mass Flow Systems are warranted against parts and
workmanship for a period of one year from the date of purchase. Calibrations
are warranted for up to six months after date of purchase, provided calibration seals have not been tampered with. It is assumed that equipment selected by the customer is constructed of materials compatible with gases used.
Proper selection is the responsibility of the customer. It is understood that
gases under pressure present inherent hazards to the user and to equipment, and it is deemed the responsibility of the customer that only operators
with basic knowledge of the equipment and its limitations are permitted to
control and operate the equipment covered by this warranty. Anything to the
contrary will automatically void the liability of Aalborg7 and the provisions of
this warranty. Defective products will be repaired or replaced solely at the dis-
cretion of Aalborg7 at no charge. Shipping charges are borne by the customer. This warranty is void if the equipment is damaged by accident or mis-
use, or has been repaired or modified by anyone other than Aalborg7 or fac-
tory authorized service facility. This warranty defines the obligation of
Aalborg7 and no other warranties expressed or implied are recognized.
TRADEMARKS
Aalborg®-is a registered trademark of Aalborg Instruments & Controls.
Buna®-is a registered trademark of DuPont Dow Elastometers.
Kalrez
®
-is a registered trademark of DuPont Dow Elastomers.
VCR
®
-is a registered trademark of Crawford Fitting Co.
Viton
®
-is a registered trademark of Dupont Dow Elastomers L.L.C.
The selection of materials of construction, is the responsibility of the customer.
The company accepts no liability.
CAUTION:
This product is not intended to be used in life support applications!
36
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