Aalborg GFC MAss Flow Controller Operating Manual
Technical Data Sheet No. TD9709M Rev. N
Date of Issue: April 2012
QUALITY SYSTEM REGISTERED
OPERATING MANUAL
GFC MASS FLOW
CONTROLLER
TABLE OF CONTENTS
1. UNPACKING THE GFC MASS FLOW CONTROLLER........................
1.1 Inspect Package for External Damage..............................................
1.2 Unpack the Mass Flow Controller.......................................................
1.3 Returning Merchandise for Repair.....................................................
2. INSTALLATION....................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.2.1 Valve Control Configuration...........................................
2.2.2 Remote LCD Readouts...................................................
2.2.3 Panel Mounting Readouts...............................................
3. PRINCIPLE OF OPERATION....................................................
4. SPECIFICATIONS..................................................................
4.1 CE Compliance................................................................................
4.2 Flow Capacities.................................................................................
5. OPERATING INSTRUCTIONS...................................................
5.1 Preparation and Warm Up................................................................
5.2 Flow Signal Output Readings..............................................................
5.3 Swamping Condition...........................................................................
5.4 Setpoint Reference Signal..................................................................
5.5 Valve OFF Control (Open Collector NPN Compatible)..........................
5.6 Valve Test/Purge.................................................................................
6. MAINTENANCE....................................................................
6.1 Introduction........................................................................................
6.2 Flow Path Cleaning..............................................................................
6.2.1 Cleaning the Inlet Filter Screen in GFC Models...............
6.2.2 Valve Maintenance for GFC17/37/47 Models.....................
7. CALIBRATION PROCEDURES....................................................
7.1 Flow Calibration...................................................................................
7.2 Calibration of GFC Mass Flow Controllers.......................................
7.2.1 Connections and Initial Warm Up...................................
7.2.2 Zero Adjustment.............................................................
7.2.3 SPAN Adjustment...........................................................
7.2.4 Linearity Adjustment......................................................
7.2.4.1 Disable Solenoid Valve in GFC17/37/47 Models..............
7.2.4.2 Open Motorized Valve in GFC57/67/77 Models...............
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7.2.5 Connections and Initial Warm Up..................................
7.2.6 ZERO Adjustment..........................................................
7.2.7 25% Flow Adjustment.....................................................
7.2.8 50% Flow Adjustment.....................................................
7.2.9 75% Flow Adjustment....................................................
7.2.10 100% Flow Adjustment..................................................
7.2.11 Valve Adjustment............................................................
7.2.11.1 Valve Adjustment for GFC17/37/47................................
7.2.11.2 Valve Adjustment for GFC57/67/77................................
7.2.12 Full Scale Flow Adjustment............................................
7.2.13 25% Flow Adjustment....................................................
7.2.14 50% Flow Adjustment....................................................
7.2.15 75% Flow Adjustment....................................................
7.2.16 100% Flow Adjustment..................................................
7.2.17 LCD Display Scaling.......................................................
7.2.17.1 Access LCD Display Circuit............................................
7.2.17.2 Adjust Scaling...............................................................
7.2.17.3 Change Decimal Point....................................................
8. TROUBLESHOOTING.............................................................
8.1 Common Conditions...........................................................................
8.2 Troubleshooting Guide.......................................................................
8.3 Technical Assistance............................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................
APPENDIX 1 COMPONENT DIAGRAM..................................................
APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS)...............................
APPENDIX 3 DIMENSIONAL DRAWINGS.............................................
APPENDIX 4 WARRANTY......................................................................
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1. UNPACKING THE GFC MASS FLOW CONTROLLER
1.1 Inspect Package for External Damage
Your GFC Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon
receipt, inspect the package for possible external damage. In case of external
damage to the package contact the shipping company immediately.
1.2 Unpack the Mass Flow Controller
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to your distributor or Aalborg7 directly.
When unpacking the instrument please make sure that you have all the items indicated on the Packing List. Please report any shortages promptly.
1.3 Returning Merchandise for Repair
Please contact the customer service representative of your distributor or Aalborg7
if you purchased your Mass Flow Controller directly, and request a Return
Authorization Number (RAN). Equipment returned without an RAN will not
be accepted. Aalborg7 reserves the right to charge an evaluation fee for equip-
ment returned under warranty claims if the instruments are tested to be free from
warrantied defects.
Shipping charges are borne by the customer. Items returned “collect” will
not be accepted!
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
2. INSTALLATION
2.1 Primary Gas Connections
Please note that the GFC Mass Flow Controller will not operate with liquids. Only
clean gases are allowed to be introduced into the instrument. Contaminated
gases must be filtered to prevent the introduction of impediments into the sensor.
Caution: GFC transducers should not be used for monitoring
OXYGEN gas unless specifically cleaned and prepared for such
application. For more information, contact your distributor or Aalborg7.
Attitude sensitivity of the Mass Flow Controller is ±15
F
. This means that the gas
flow path of the flow meter must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the GFC transducer in a stable environment,
free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminants. Be sure to observe the direction
of gas flow as indicated by the arrow on the front of the meter when connecting
the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tubings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!
Compression fittings should not be removed unless the meter is being cleaned or
calibrated for a new flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system.
(All GFC's are checked prior to shipment for leak-
age within stated limits. See specifications in this manual.)
2.2 Electrical Connection
GFC transducers require a +12VDC (+24VDC optional) power supply with a minimum current rating of 800 mA to operate. The operating power input is supplied
via the 15-pin “D” connector located at the side of the flow transducer enclosure.
On GFC's purchased without an LCD readout, a readout panel meter, digital multimeter, or other equivalent device is required to facilitate visual flow readings.
A built in SETPOINT potentiometer is used for local control of the flow. Variable
analog 0 to 5 VDC (or 4 to 20 mA) reference input is required for remote control.
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PIN FUNCTION
1 0 to 5 VDC Flow Signal Common
2 0 to 5 VDC Flow Signal Output
3 Common
4 Open (Purge)
5 Common, Power Supply
6 (unassigned)
7 +12 VDC (+24 VDC*) Power Supply
8 Remote Setpoint Input
9 4 to 20 mA (-) Flow Signal Return (use with 14)
10 Remote Setpoint Common (use with 8)
11 +5VDC Reference Output for Remote Setpoint
12 Valve Off Control
13 Auxiliary +12 VDC (+24 VDC*)
Power Output (For Loads <100 mA)
14 4 to 20 mA (+) Flow Signal Output
15 Chassis Ground
WARNING: DO NOT CONNECT 24Vdc POWER SUPPLY UNLESS YOUR
GFC CONTROLLER WAS ORDERED AND CONFIGURED FOR 24Vdc.
Important Notes:
In general, “D” Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
Power must be turned OFF when connecting or disconnecting any cables in the system.
The power input is protected by a 1600mA M (medium time-lag) resettable fuse.
If a shorting condition or polarity reversal occurs, the fuse will cut power to the
flow transducer circuit. Disconnect the power to the unit, remove the faulty condition, and reconnect the power. The fuse will reset once the faculty condition has
been removed.
Use of the GFC flow transducer in a manner other than that specified in this manual or in writing from Aalborg7, may impair the protection provided by the equipment.
FIGURE 2-1 GFC 15-PIN “D” CONNECTOR CONFIGURATION
*+24 VDC power supply configuration is optional for only GFC17/37/47 models.
5 & 7 +12 VDC (+24 VDC*) POWER SUPPLY
8 & 10 0-5 VDC OR 4-20 mA REMOTE SETPOINT
9 & 14 4-20 mA OUTPUT
10 & 11 +5 VDC CONTROL SOURCE
1 & 2 0-5 VDC OUTPUT
3 & 4 PURGE
3 & 12 VALVE OFF CONTROL
5 & 13
AUXILIARY +12 VDC (+24 VDC*) POWER
OUTPUT (FOR LOADS <100 mA)
FIGURE 2-2, POTENTIOMETER AND JUMPER LOCATIONS
2.2.1 Valve Control Configuration
There are three basic valve control options.
(a) LOCAL or REMOTE control.
(b) 0 to 5 VDC or 4 to 20 mA setpoint signal -
*Note: this only applies for the REMOTE control configuration;
(c) 2% cutoff active or not active. Note: 2% cutoff not available for GFC 57/67/77.
When active, the 2% cutoff will shut off the power to the valve when a setpoint of
less than 2% of the full scale flow range is set. Figure 2-2 shows the jumper configurations for the three basic valve control options.
The factory default jumper settings are: LOCAL control, 2% cutoff off, and 0 to 5 VDC.
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FIGURE 2-3, VALVE CONTROL CONFIGURATION JUMPERS
2.2.2 Remote LCD Readouts
GFC Mass Flow Controllers are available with optional remote reading LCD displays supplied with a three foot long wire to accommodate most applications. This
configuration includes the upper block element which serves as the LCD readout
mounting. Special lengths of remote extension wiring (up to 9.5 feet [3 meters])
are available on request.
FUNCTION NJ1A NJ1B NJ1C NJ1D NJ1E
0 to 5 VDC
4 to 20 mA
2 - 3
1 - 2
5 - 6
4 - 5
8 - 9
7 - 8
local
remote
11 - 12
10 - 11
2% cutoff on
2% cutoff off
13 - 14
14 - 15
2.2.3 Panel Mounting Readouts
Another option for the GFC Mass Flow Controller is the Panel Mounting Remote
Readout.
In this configuration the LCD readout is supplied with a three foot long extension
wire, and no aluminum housing around the LCD. The LCD readout for panel
mounting includes a bezel with two plastic screws which conveniently fit into a
rectangular cut-out for panel mounting (see Figure 2-3).
FIGURE 2-3 CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING
3. PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary
conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics flow rates of gas in two properly sized
laminar flow conduits are related to one another. Therefore, the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater-sensor coils. Heat
is transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected electronically. The measured gradient at the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.
GFC Mass Flow Controller models GFC17/37/47 also incorporate a proportionating solenoid valve and models GFC57/67/77 a motorized valve. The closed loop
control circuit of the GFC continuously compares the mass flow output with the
selected flow rate. Deviations from the setpoint are corrected by compensating
valve adjustments, thus maintaining the desired flow parameters.
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4. SPECIFICATIONS
FLOW MEDIUM: Please note that GFC Mass Flow Controllers are designed to work with
clean gases only. Never try to meter or control flow rates of liquids.
CALIBRATIONS: Supplied at Standard Conditions (14.7 psia and 70
F
F), or Normal
Conditions (0
F
C and 1.01 bar abs) unless otherwise requested or stated.
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.
ACCURACY:
REPEATABILITY: ±0.5% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale/
F
C.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: GFC17: 300ms time constant; approximately 1 second to within
±2% of set flow rate for 25% to 100% of full scale flow.
GFC 37/47: 600ms time constant; approximately 2 seconds to within
±2% of set flow rate for 25% to 100% of full scale flow.
GFC 57/67/77: 1800ms time constant; approximately 5 seconds to
within ± 2% of set flow rate for 25% to 100% of full scale flow.
MAX GAS PRESSURE: 1000 psig (69 bars) 10, 50 and 100 L/min; 500 psig (34.5 bars)
optimum pressure is 20 psig (1.4 bars).
TURNDOWN RATIO: 40:1.
MAX DIFFERENTIAL PRESSURE: 50 psid (345 kPa).
GAS TEMPERATURE: 32
F
F to 122 FF (0 FC to 50 FC).
AMBIENT TEMPERATURE:14
F
F to 122 FF (-10 FC to 50 FC).
GAS RELATIVE HUMIDITY: Up to 70%.
MAXIMUM INTERNAL LEAK: 0.5% FS.
ACCURACY % FS OPTIONAL ENHANCED ACCURACY % FS
MODEL
GFC
17, 37
GFC
47, 57, 67, 77
MODEL GFC 17
GFC
37, 47, 57, 67, 77
FLOW
RANGE
2.5-100% 20-100% 0-20%
FLOW
RANGE
2.5-100%
20-100% 0-20%
ACCURACY
±1.5% ±1.5% ±3%
ACCURACY
±1%
±1%
REF DATA
with ±1%
LEAK INTEGRITY: 1 x 10-7sccs He max to the outside environment.
ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal. Standard
calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0 to 5 VDC (1000 Ω minimum load impedance) and 4 to 20
mA (0 to 500 Ω loop resistance); 20 mV peak to peak max noise for GFC 17/37/47 and
100 mV peak to peak max noise for GFC 57/67/77.
COMMAND SIGNAL: Analog 0 to 5 VDC (100 K minimum input impedance) or 4 to 20 mA
(250 Ω input impedance).
Contact your distributor or Aalborg7 for optional RS232 or IEEE488 interfaces.
TRANSDUCER INPUT POWER: +12 VDC, 800 mA maximum; GFC17/37/47 have an
OPTION of +24 VDC, 650 mA maximum - IF SPECIFIED AT TIME OF ORDERING AND
CONFIGURED ACCORDINGLY.
WETTED MATERIALS:
GFC17/37/47/57/67/77: Anodized aluminum, brass, 416 Stainless Steel and 316 stainless
steel with VITON7 O-rings seals; BUNA-N7, EPR or KALREZ7 O-rings are optional.
GFC17S/37S/47S/57S/67S/77S: 416 Stainless Steel and 316 stainless steel with VITON7
O-rings seals; BUNA-N7, EPR or KALREZ O-rings are optional.
Aalborg7 makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers sole responsibility to select the model suitable for a particular gas based on
the fluid contacting (wetted) materials offered in the different models.
CONNECTIONS:
GFC 17 and 37: 1/4" compression fittings. Optional: 6mm compression, 1/4" VCR7,
3/8" or 1/8" compression fittings.
GFC 47: 3/8" compression fittings.
GFC 57 3/8" compression fittings.
GFC 67: 1/2" compression fittings.
GFC 77: 3/4" FNPT fittings. Optional: 3/4" compression fittings.
LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”), 0.5 inch high characters.
On GFC171, GFC371, GFC471, GFC571, GFC671, GFC771 aluminum or stainless steel models the LCD display is built into the upper block element and may be tilted over 90 degrees
for optimal viewing comfort. Remote or panel mounting remote reading is optional.
Standard readings are in direct engineering units for the given gas and flow rate (i.e.
liters/minute [slpm], standard cubic centimeters/minute [sccm], standard cubic feet/hour
[scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of order.
Contact your distributor or Aalborg7 when non-standard display settings are desired.
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the GFC
transducer 15-pin “D” connector.
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TABLE I GFC 17 LOW FLOW MASS FLOW CONTROLLER*
4.2 Flow Capacities
MODEL CODE
mL/min [N2]
CODE
liters/min [N2]
17
01 10 07 1
02 20 08 2
03 50 09 5
04 100 10 10
05 200
06 500
TABLE II GFC 37 MEDIUM FLOW MASS FLOW CONTROLLER*
TABLE III GFC 47/57/67/77 HIGH FLOW MASS FLOW CONTROLLER*
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70 FF (21.1 FC) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
MODEL CODE
liters/min [N2]
37
11
15
30 20
31 30
32 40
33 50
MODEL
CODE
liters/min [N2]
47
40 60
41 80
42 100
57
50 200
67 60 500
77 70 1000
4.1 CE Compliance
GFC Mass Flow Controllers are in compliance with CE test standards stated
below:
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991,
Group 1, Class B Immunity Standard: EN 55082-1:1992
FLOW RANGES
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