AALBORG GFC17A-VAL6-A0-3NC-07-SS, GFC17A-VAL6-A0-3NC-09-SS, GFC17A-VAL6-A0-3NC-10-SS, GFC67A-VEL2-A0-3NC-60-SS, GFC37A-VAL6-A0-3NC-32-SS User manual

OPERATING MANUAL

GFC MASS FLOW CONTROLLER

aalborg

TD9709M Rev. T Date: January 2020

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 CAUTION:

This product is not intended to be used in life support applications!

 CAUTION:

K-Factors at best are only an approximation.
K-Factors should not be used in applications that require accuracy
better than +/- 5 to 10%.

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TABLE OF CONTENTS

1. UNPACKING THE GFC MASS FLOW CONTROLLER........................

1.1 Inspect Package for External Damage..............................................

1.2 Unpack the Mass Flow Controller.......................................................

1.3 Returning Merchandise for Repair.....................................................

2. INSTALLATION....................................................................

2.1 Primary Gas Connections.................................................................

2.2 Electrical Connections......................................................................

2.2.1 Valve Control Configuration...........................................

2.2.2 Remote LCD Readouts...................................................

2.2.3 Panel Mounting Readouts...............................................

3. PRINCIPLE OF OPERATION....................................................

4. SPECIFICATIONS..................................................................

4.1 CE Compliance................................................................................

4.2 Flow Capacities.................................................................................

5. OPERATING INSTRUCTIONS...................................................

5.1 Preparation and Warm Up................................................................

5.2 Flow Signal Output Readings..............................................................

5.3 Swamping Condition...........................................................................

5.4 Setpoint Reference Signal..................................................................

5.5 Valve OFF Control (Open Collector NPN Compatible)..........................

5.6 Valve Test/Purge.................................................................................

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6. MAINTENANCE....................................................................

6.1 Introduction........................................................................................

6.2 Flow Path Cleaning..............................................................................

6.2.1 Cleaning the Inlet Filter Screen in GFC Models...............

6.2.2 Valve Maintenance for GFC17/37/47 Models.....................

7. CALIBRATION PROCEDURES....................................................

7.1 Flow Calibration...................................................................................

7.2 Calibration of GFC17/37/47 Mass Flow Controllers..........................

7.2.1 Connections and Initial Warm Up...................................

7.2.2 Zero Adjustment.............................................................

7.2.3 SPAN Adjustment...........................................................

7.2.4 Linearity Adjustment......................................................

7.2.4.1 Disable Solenoid Valve in GFC17/37/47 Models..............

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7.2.5 Connections and Initial Warm Up..................................

7.2.6 ZERO Adjustment..........................................................

7.2.7 25% Flow Adjustment Using R33 Potentiometer............

7.2.8 10% Flow Adjustment.....................................................

7.2.9 25% Flow Adjustment (using R52 potentiometer).........

7.2.10 50% Flow Adjustment....................................................

7.2.11 75% Flow Adjustment.......................................................

7.2.12 100% Flow Adjustment..................................................

7.2.13. Valve adjustment.............................................................

7.2.13.1 Valve Adjustment for GFC 17/37/47..................................

7.2.14 Close Loop Full Scale Flow Adjustment...........................

7.2.15 10% Close Loop Flow Adjustment

(using R33 potentiometer).............................................

7.2.16 25% Close Loop Flow Adjustment

(using R52 potentiometer).............................................

7.2.17 Close Loop 25% Flow Adjustment

(using R33 potentiometer).............................................

7.2.18 Close Loop 50% Flow Adjustment....................................

7.2.19 Close Loop 75% Flow Adjustment...................................

7.2.20 Close Loop 100% Flow Adjustment...................................

7.3 Calibration of GFC57/67/77 Mass Flow Controllers.........

7.3.1 Connections and Initial Warm Up...................................

7.3.2 ZERO Adjustment................................................................

7.3.3 SPAN Adjustment.............................................................

7.3.4 Linearity Adjustment.......................................................

7.3.4.1 Open Motorized Valve in GFC57/67/77 Models.................

7.3.5 Connections and Initial Warm Up...................................

7.3.6 ZERO Adjustment............................................................

7.3.7 25% Flow Adjustment.........................................................

7.3.8 50% Flow Adjustment.....................................................

7.3.9 75% Flow Adjustment.....................................................

7.3.10 100% Flow Adjustment.....................................................

7.3.11. Valve adjustment..............................................................

7.3.11.1 Valve Adjustment for GFC 57/67/77.................................

7.3.12 Full Scale Flow Adjustment.................................................

7.3.13 25% Flow Adjustment.....................................................

7.3.14 50% Flow Adjustment........................................................

7.3.15 75% Flow Adjustment.......................................................

7.3.16 100% Flow Adjustment..................................................

7.4 LCD Display Scaling.........................................................

7.4.1 Access LCD Display Circuit..............................................

7.4.2 Adjust Scaling..................................................................

7.4.3 Change Decimal Point.....................................................

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8. TROUBLESHOOTING.............................................................

8.1 Common Conditions...........................................................................

8.2 General Troubleshooting Guide.........................................................

8.3 GFC17/37/47 Valve Related Troubleshooting.....................................

8.4 Technical Assistance.........................................................................

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9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................

APPENDIX 1 COMPONENT DIAGRAM..................................................

APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS)...............................

APPENDIX 3 DIMENSIONAL DRAWINGS.............................................

APPENDIX 4 WARRANTY......................................................................

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1. UNPACKING THE GFC MASS FLOW CONTROLLER

1.1 Inspect Package for External Damage

CAUTION: Some of the IC devices used in the GFC are Electro Static



Discharge (ESD) sensitive and may be damaged by improper handling.
When wiring the interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent
inadvertent damage to the CMOS integral solid state circuitry. When 15
pins inter face D-connector is not used do not remove factory installed
ESD protection cover.

Your GFC Mass Flow Controller was carefully packed in a sturdy cardboard car­ton, with anti-static cushioning materials to withstand shipping shock. Upon
receipt, inspect the package for possible external damage. In case of external
damage to the package contact the shipping company immediately.

1.2 Unpack the Mass Flow Controller

Open the carton carefully from the top and inspect for any sign of concealed ship­ping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to your distributor directly.

When unpacking the instrument please make sure that you have all the items indi­cated on the Packing List. Please report any shortages promptly.

1.3 Returning Merchandise for Repair

Please contact the customer service representative of your distributor
if you purchased your Mass Flow Controller directly, and request a Return

Authorization Number (RAN). Equipment returned without an RAN will not
be accepted. Aalborg7 reserves the right to charge an evaluation fee for equip-

ment returned under warranty claims if the instruments are tested to be free from
warrantied defects.

Shipping charges are borne by the customer. Items returned “collect” will
not be accepted!

It is mandatory that any equipment returned for servicing be purged and neutral­ized of any dangerous contents including but not limited to toxic, bacterially infec­tious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.

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2. INSTALLATION

2.1 Primary Gas Connections

Please note that the GFC Mass Flow Controller will not operate with liquids. Only
clean gases are allowed to be introduced into the instrument. Contaminated
gases must be filtered to prevent the introduction of impediments into the sensor.

CAUTION: It is the users responsibility to determine if the instrument



is appropriate for their OXYGEN application, and for specifying O2
cleaning service if required. Aalborg7 is not liable for any damage or

personal injury, whatsoever, resulting from the use of this instrument
for oxygen gas.

Attitude sensitivity of the Mass Flow Controller is ±15
flow path of the flow meter must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be nec­essary. It is also preferable to install the GFC transducer in a stable environment,
free of frequent and sudden temperature changes, high moisture, and drafts.

Prior to connecting gas lines inspect all parts of the piping system including fer­rules and fittings for dust or other contaminants. Be sure to observe the direction
of gas flow as indicated by the arrow on the front of the meter when connecting
the gas system to be monitored.

Insert tubing into the compression fittings until the ends of the properly sized tub­ings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!

Compression fittings should not be removed unless the meter is being cleaned or
calibrated for a new flow range.

Using a Helium Leak Detector or other equivalent method perform a thorough leak
test of the entire system.
within stated limits. See specifications in this manual.)

2.2 Electrical Connection

(All GFC's are checked prior to shipment for leakage

F

. This means that the gas

CAUTION: Some of the IC devices used in the GFC are Electro Static



Discharge (ESD) sensitive and may be damaged by improper handling.
When wiring the interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent
inadvertent damage to the CMOS integral solid state circuitry. When
15 pins interface D-connector is not used do not remove factory
installed ESD protection cover.

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CAUTION: WIRING THE GFC METER OR CHANGING NJ1



JUMPERS CONFIGURATION WITH THE POWER ON MAY RESULT
IN INTERNAL DAMAGE! PLEASE MAKE ALL WIRING CONNECTIONS
AND NJ1 JUMPERS INSTALLATIONS BEFORE SWITCHING ON
THE POWER.

Based on the GFC transducers model number it may require



different power supply voltage: ether 12Vdc, 24Vdc or universal
(any voltage between 12 and 26 Vdc). Before connecting power
supply check controller power supply requirements label located
on the controller back cover. If power supply requirements label
states that power supply requirements is 12 Vdc, do not connect
power supply with voltage above 15 Vdc. Exceeding specified
maximum power supply voltage limit will result in device
permanent damage.

The operating power input is supplied via the 15-pin “D” connector located at the
side of the flow transducer enclosure. On GFC's purchased without an LCD read­out, a readout panel meter, digital multimeter, or other equivalent device is
required to facilitate visual flow readings.

A built in SETPOINT potentiometer is used for local control of the flow. Variable
analog 0 to 5 Vdc (or 4 to 20 mA) reference input is required for remote control.

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PIN FUNCTION

1 0 to 5 Vdc Flow Signal Common
2 0 to 5 Vdc Flow Signal Output
3 Common
4 Open (Purge)
5 Common, Power Supply
6 (unassigned)
7 +12 Vdc (Optional +24 Vdc*) Power Supply
8 Remote Setpoint Input
9 4 to 20 mA (-) Flow Signal Return (use with 14)
10 Remote Setpoint Common (use with 8)
11 +5 Vdc Reference Output for Remote Setpoint
12 Valve Off Control
13 Auxiliary +12 Vdc (Optional +24 Vdc*)

Power Output (For Loads <100 mA)
14 4 to 20 mA (+) Flow Signal Output
15 Chassis Ground

1 & 2 0-5 Vdc OUTPUT

3 & 4 PURGE

3 & 12 VALVE OFF CONTROL

AUXILIARY +12 Vdc (Optional +24
Vdc*) POWER OUTPUT (FOR LOADS

5 & 13

<100 mA)

FIGURE 2-1 GFC 15-PIN “D” CONNECTOR CONFIGURATION

*Do not connect +24 Vdc power supply unless your GFC controller was ordered

and configured for 24 Vdc

CAUTION: BEFORE CONNECTING THE POWER SUPPLY CHECK



YOUR CONTROLLER MODEL NUMBER AND POWER SUPPLY
REQUIREMENTS LABEL LOCATED ON THE CONTROLLER BACK
COVER. DO NOT CONNECT 24 Vdc POWER SUPPLY UNLESS
YOUR GFC CONTROLLER WAS ORDERED AND CONFIGURED
FOR 24 Vdc. EXCEEDING THE SPECIFIED MAXIMUM POWER
SUPPLY VOLTAGE LIMIT MAY RESULT IN PERMANENT DEVICE DAMAGE.

Important Notes:

In general, “D” Connector numbering patterns are standardized. There are, how­ever, some connectors with nonconforming patterns and the numbering
sequence on your mating connector may or may not coincide with the numbering
sequence shown in our pin configuration table above. It is imperative that you
match the appropriate wires in accordance with the correct sequence regardless
of the particular numbers displayed on your mating connector.

+12 Vdc (Optional +24 Vdc*) POWER

5 & 7

SUPPLY

0-5 Vdc OR 4-20 mA (FROM 3 WIRE LOOP

8 & 10

SOURCING DEVICE) REMOTE SETPOINT

4-20 mA OUTPUT (SOURCING, ONLY

9 & 14

FOR PASSIVE LOAD)

10 & 11 +5 Vdc CONTROL SOURCE

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Power must be turned OFF when connecting or disconnecting any cables in the system.

NR7
LOCAL SET POINT
POTENTIOMETER

R34 ZERO
POTENTIOMETER

R38 50%

R39 75%

R40 100%

R33
SPAN (10 or 25%)

R1 RESPONSE
TIME AJUSTMENT

NJ1 CONTROL
CIRCUT JUMPERS

R52 25 %

(IF ENABLED)

The power input is protected by a 900mA (GFC17/37/47) or 1600mA
(GFC57/67/77) M (medium time-lag) resettable fuse. If a shorting condition or
polarity reversal occurs, the fuse will cut power to the flow transducer circuit.
Disconnect the power to the unit, remove the faulty condition, and reconnect the
power. The fuse will reset once the faculty condition has been removed.

CAUTION: Fuse will not protect controller if power supply voltage

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exceeds maximum voltage specified for a particular model.

Use of the GFC flow transducer in a manner other than that specified in this manu­al or in writing from Aalborg7, may impair the protection provided by the equipment.

2.2.1 Valve Control Configuration

There are three basic valve control options.

(a) LOCAL or REMOTE control.

FIGURE 2-2, POTENTIOMETER AND JUMPER LOCATIONS

(b) 0 to 5 Vdc or 4 to 20 mA setpoint signal -

*Note: this only applies for the REMOTE control configuration;

(c) 2% cutoff active or not active. Note: 2% cutoff not available for GFC 57/67/77.

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When active, the 2% cutoff will shut off the power to the valve when a setpoint of

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691215
2581114
1471013

ABCDE

less than 2% of the full scale flow range is set. Figure 2-3 shows the jumper con­figurations for the three basic valve control options.

The factory default jumper settings are: LOCAL control, 2% cutoff off.

FUNCTION NJ1A NJ1B NJ1C NJ1D NJ1E

Remote

Local

0 to 5 Vdc 2% cutoff ON
0 to 5 Vdc 2% cutoff OFF 14 -15
4 to 20 mA 2% cutoff ON
4 to 20 mA 2% cutoff OFF 14 - 15

2% cutoff ON

2% cutoff OFF 14 - 15

2 - 3 5 - 6 8 - 9 10 - 11

1 - 2 4 - 5 7 - 8 10 - 11

2 - 3 5 - 6 8 - 9 11 - 12

13 - 14

13 - 14

13 -14

FIGURE 2-3, VALVE CONTROL CONFIGURATION JUMPERS

2.2.2 Remote LCD Readouts

GFC Mass Flow Controllers are available with optional remote reading LCD dis­plays supplied with a three foot long wire to accommodate most applications. This
configuration includes the upper block element which serves as the LCD readout
mounting. Special lengths of remote extension wiring (up to 9.5 feet [3 meters])
are available on request.

2.2.3 Panel Mounting Readouts

Another option for the GFC Mass Flow Controller is the Panel Mounting Remote
Readout.

In this configuration the LCD readout is supplied with a three foot long extension
wire, and no aluminum housing around the LCD. The LCD readout for panel
mounting includes a bezel with two plastic screws which conveniently fit into a rec­tangular cut-out for panel mounting (see Figure 2-4).

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FIGURE 2-4 CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING

3. PRINCIPLE OF OPERATION

The stream of gas entering the Mass Flow transducer is split by shunting a small por­tion of the flow through a capillary stainless steel sensor tube. The remainder of the
gas flows through the primary flow conduit. The geometry of the primary conduit and
the sensor tube are designed to ensure laminar flow in each branch. According to
principles of fluid dynamics flow rates of gas in two properly sized laminar flow con­duits are related to one another. Therefore, the flow rates measured in the sensor
tube are directly proportional to the total flow through the transducer.

In order to sense the flow in the sensor tube, heat flux is introduced at two sec­tions of the sensor tube by means of precision wound heater-sensor coils. Heat
is transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected electronically. The measured gradient at the sensor wind­ings is linearly proportional to the instantaneous rate of flow taking place.

An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.

GFC Mass Flow Controller models GFC17/37/47 also incorporate a proportionat­ing solenoid valve and models GFC57/67/77 a motorized valve. The closed loop
control circuit of the GFC continuously compares the mass flow output with the
selected flow rate. Deviations from the setpoint are corrected by compensating
valve adjustments, thus maintaining the desired flow parameters.

4. SPECIFICATIONS

FLOW MEDIUM: Please note that GFC Mass Flow Controllers are designed to work with
clean gases only. Never try to meter or control flow rates of liquids.

F

CALIBRATIONS: Supplied at Standard Conditions (14.7 psia and 70
Conditions (0

F

C and 1.01 bar abs) unless otherwise requested or stated.

F), or Normal

ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.

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ACCURACY: GFC17/37/47: ±1.0% F.S.

GFC 57/67/77: See table below.

ACCURACY % FS OPTIONAL ENHANCED ACCURACY % FS

MODEL

FLOW
RANGE

ACCURACY

GFC 57, 67, 77

20-100%

±1.5% ±3%

0-20%

MODEL GFC 57, 67, 77

FLOW
RANGE

ACCURACY

20-100%

±1%

0-20%

REF DATA with ±1%

REPEATABILITY: ±0.5% of full scale.

TEMPERATURE COEFFICIENT: 0.15% of full scale/

F

C.

PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).

RESPONSE TIME: GFC17: 300ms time constant; approximately 1 second to within

±2% of set flow rate for 25% to 100% of full scale flow.

GFC 37/47: 600ms time constant; approximately 2 seconds to within
±2% of set flow rate for 25% to 100% of full scale flow.

GFC 57/67/77: 1800ms time constant; approximately 5 seconds to
within ± 2% of set flow rate for 25% to 100% of full scale flow.

MAX GAS PRESSURE: 1000 psig (69 bars) GFC 17, 37 and 47; 500 psig (34.5 bars)
GFC 57, 67 and 77. Optimum pressure is 20 psig (1.4 bars).

TURNDOWN RATIO: 40:1.

MAX DIFFERENTIAL PRESSURE: 50 psid (345 kPa) for GFC 17/37/57/67/77 AND 40 psid

(276 kPa) for GFC 47.

GAS TEMPERATURE: 32

AMBIENT TEMPERATURE: 14

F

F to 122 FF (0 FC to 50 FC).

F

F to 122 FF (-10 FC to 50 FC).

GAS RELATIVE HUMIDITY: Up to 70%.

MAXIMUM INTERNAL LEAK: 0.5% FS.

LEAK INTEGRITY: 1 x 10

-9

sccs He max to the outside environment.

ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal. Standard
calibration is in horizontal position.

OUTPUT SIGNALS: Linear 0 to 5 Vdc (1000 W minimum load impedance) and 4 to 20
mA (0 to 500 W loop resistance, sourcing only for passive load); 20 mV peak to peak
max noise for GFC 17/37/47 and 100 mV peak to peak max noise for GFC 57/67/77.

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COMMAND SIGNAL: Analog 0 to 5 Vdc (100 K minimum input impedance) or 4 to 20 mA
(250 W input impedance, use only with 3 wire 4-20 mA loop sourcing device).

Contact your distributor for optional RS232 or RS485 interfaces.

TRANSDUCER INPUT POWER:

GFC17/37/47: Models with 12 Vdc power input 12 Vdc, 650 mA maximum;
GFC17/37/47: Models with 24 Vdc power input +24 Vdc, 650 mA maximum;
GFC57/67/77: Models with 12 Vdc power input 12 Vdc, 800 mA maximum;
GFC57/67/77: Models with 24 Vdc power input 24 Vdc, 800 mA maximum;
GFC17/37/47: Models with universal power input any voltage between +12 and +26 Vdc,

650 mA maximum;

WETTED MATERIALS:

GFC17/37/47/57/67/77: Anodized aluminum, brass, 416 Stainless Steel and 316 stainless

steel with VITON7 O-rings seals; BUNA-N7, EPR or KALREZ7 O-rings are optional.

GFC17S/37S/47S/57S/67S/77S: 416 Stainless Steel and 316 stainless steel with VITON7
O-rings seals; BUNA-N7, EPR or KALREZ O-rings are optional.

Aalborg7 makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers sole responsibility to select the model suitable for a particular gas based on
the fluid contacting (wetted) materials offered in the different models.

CONNECTIONS:

GFC 17 and 37: 1/4" compression fittings. Optional: 6mm compression, 1/4" VCR7,

3/8" or 1/8" compression fittings.

GFC 47: 3/8" compression fittings.
GFC 57 3/8" compression fittings.
GFC 67: 1/2" compression fittings.
GFC 77: 3/4" FNPT fittings. Optional: 3/4" compression fittings.

LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”), 0.5 inch high characters.

On GFC171, GFC371, GFC471, GFC571, GFC671, GFC771 aluminum or stainless steel mod­els the LCD display is built into the upper block element and may be tilted over 90 degrees
for optimal viewing comfort. Remote or panel mounting remote reading is optional.

Standard readings are in direct engineering units for the given gas and flow rate (i.e.
liters/minute [slpm], standard cubic centimeters/minute [sccm], standard cubic feet/hour
[scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of order.
Contact your distributor when non-standard display settings are desired.

TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the GFC
transducer 15-pin “D” connector.

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4.1 CE Compliance

GFC Mass Flow Controllers are in compliance with CE test standards stated below:

EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991,
Group 1, Class B Immunity Standard: EN 55082-1:1992

4.2 Flow Capacities

FLOW RANGES

TABLE I GFC 17 LOW FLOW MASS FLOW CONTROLLER*

MODEL CODE

01 10 07 1
02 20 08 2

17

TABLE II GFC 37 MEDIUM FLOW MASS FLOW CONTROLLER*

MODEL CODE

37

TABLE III GFC 47/57/67/77 HIGH FLOW MASS FLOW CONTROLLER*

MODEL

47

57
67 60 500
77 70 1000

03 50 09 5
04 100 10 10
05 200
06 500

mL/min [N2]

11

30 20
31 30

32 40
33 50

CODE

40 60
41 80

42 100
50 200

CODE

liters/min [N2]

liters/min [N2]

15

liters/min [N2]

*Flow rates are stated for Nitrogen at STP conditions [i.e. 70 FF (21.1 FC) at 1 atm].

For other gases use the K factor as a multiplier from APPENDIX 2.

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TABLE IV PRESSURE DROPS

MODEL

GFC 17 UP to 10 720 1.06 75

GFC 37

GFC 47

GFC 57 200 7031 10.00 690
GFC 67 500 8437 12.00 827

GFC 77 1000 10547 15.00 1034

5. OPERATING INSTRUCTIONS

5.1 Preparation and Warm Up

It is assumed that the Mass Flow Controller has been correctly installed and thor­oughly leak tested as described in section (2). Shut the flow source OFF. Apply
power to the unit via the 15-pin “D” connector. Before connecting the power sup­ply check the controller power supply requirements label located on the controller
back cover. If the power supply requirements label states that power supply
requirement is 12 Vdc, do not connect the power supply with voltage above 15
Vdc. Exceeding the specified maximum power supply voltage limit will result in
device permanent damage. Allow the Mass Flow Controller to warm-up for at
least 15 minutes.

FLOW RATE

[liters/min]

15 2630 3.87 266
20 1360 2.00 138

30 2380 3.50 241
40 3740 5.50 379

50 5440 8.00 551
60 7480 11.00 758

100 12850 18.89 1302

[mm H2O]

MAXIMUM PRESSURE DROP

[psid] [mbar]

During initial powering of the GFC transducer, the flow output signal will be indi­cating a higher than usual output. This is indication that the GFC transducer has
not yet attained its minimum operating temperature. This condition will automat­ically cancel within a few minutes and the transducer should eventually zero.

If after the 15 minutes warm-up period, the display still indicates a reading of less
than ± 3.0 % of F.S., readjust the ZERO potentiometer [R34] through the access
window. Before zero adjustment temporarily disconnect the gas source, to ensure
that no seepage or leak occurs in to the meter.

CAUTION: Adjusting Zero Reading more than ± 3.0% F.S. from the



factory settings may affect device calibration accuracy. If such adjustment
is required it is recommended to perform controller recalibration to pre
serve device accuracy.

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GFC 17/37/47 CAUTION

CAUTION: If the valve is left in the AUTO (control) or OPEN (PURGE)

mode for an extended period of time, it may become warm or even hot



to the touch. Use care in avoiding direct contact with the valve during
operation.

Do not run GFC 17/37/47 models for extended periods of time with the valve in
AUTO or PURGE mode without the flow of gas through the transducer. Doing so
may result in up to 2% F.S. shift in calibration.

5.2 Flow Signal Output Readings

The flow signal output can be viewed on the LCD display, remote panel meter,
digital multimeter, or other display device connected as shown in Figure 2.1.

If an LCD display has been ordered with the GFC, the observed reading is in
direct engineering units, for example, 0 to 10 sccm or 0 to 100 slpm (0 to 100%
indication is optional). Engineering units for a specific GFC are shown on the flow
transducer's front label.

Analog output flow signals of 0 to 5 Vdc and 4 to 20 mA are available at the appro­priate pins of the 15-pin “D” connector at the side of the GFC transducer (see
Figure 2-1).

Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. The full scale range and gas for which your meter has been
calibrated are shown on the flow transducer's front label.

Default calibration is performed for 0 to 5 Vdc input/output signal. If 4-20 mA out­put signal is used for flow indication on the GFC, which was calibrated against 0
to 5 Vdc input signal, the accuracy of the actual flow rate will be in the specified
range (+1.0% GFC 17/37/47, +1.5% GFC 57/67/77 ) of full scale, but the total of
the output reading may be in the range of +2.5% of full scale. Optional calibra­tion for 4-20 mA output signal is available upon request at time of order.

For optional RS232 or RS485 interfaces please contact

5.3 Swamping Condition

If a flow of more than 10% above the maximum flow rate of the Mass Flow
Controller is taking place, a temporary condition known as “swamping” may occur.
Readings of a “swamped” meter cannot be assumed to be either accurate or lin­ear. Flow must be restored to below 110% of maximum meter range. Once flow
rates are lowered to within calibrated range, the swamping condition will end.
Operation of the meter above 110% of maximum calibrated flow may increase
recovery time.

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5.4 Setpoint Reference Signal

GFC flow controllers have built-in solenoid valves (GFC 17/37/47) or motorized
valves (GFC 57/67/77), and allow the user to set the flow to any desired flow rate
within the range of the particular model installed. The solenoid valve is normally
closed (NC) when no power is applied.

The motorized valve can be in any position depending on the operation mode of
the GFC during disconnecting of the power. For example if the motorized valve
was left in the OPEN purge position after disconnecting power from the GFC it will
be in the OPEN position. It is the customers responsibility to provide a solution to
shut down the flow in case of a power outage. When power is applied to GFC 57
/67/77 models, the valve automatically closes within the first ten seconds regard­less of the set point and valve override signals.

Setpoints are controlled locally or remotely. Setpoints inputs respond to analog 0
to 5 Vdc or 4 to 20 mA reference voltages (default jumper setting is 0 to 5 Vdc).
Voltage is a linear representation of 0 to 100% of the full scale mass flow rate.
Response times to setpoint changes are 1 second (GFC 17), 2 seconds (GFC
37/47) and 5 seconds (GFC 57/67/77) within 2% of the final flow over 25 to 100%
of full scale.

For LOCAL flow control, use the built-in setpoint potentiometer located at the
same side as the solenoid valve of the GFC transducer. While applying flow to
the transducer, adjust the setpoint with an insulated screwdriver until the flow
reading is the same as the desired control point. [Display will only show actual
instantaneous flow rates. There is no separate display for setpoints].

For REMOTE control of the GFC, an analog reference signal must be supplied.
On pin [11] of the GFC transducer is a regulated and constant +5 Vdc output sig­nal. This signal may be used in conjunction with a local setpoint potentiometer for
flow setting.

FIGURE 5-1 LOCAL SETPOINT POTENTIOMETER CONNECTIONS

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It is recommended that a potentiometer between 5K to 10K ohm and capable of
at least 10-turns or more for adjustment be used. Use the control potentiometer
to command the percentage of flow desired.

Alternatively, a variable 0 to 5 Vdc or 4 to 20 mA analog signal may be applied direct­ly to the SETPOINT and COMMON connections of the GFC transducer (see Figure
2-1). Be sure to apply the appropriate signal for the designated NJ1 jumper settings.

5.5 Valve OFF Control
(Open Collector NPN Compatible)

It may be necessary or desirable to set the flow and maintain that setting while
being able to turn the flow control valve off and on again. Closing of the valve
(without changing the setpoint adjustment) can be accomplished by connecting
pin [12] of the 15-pin “D” connector to COMMON pin [3]. When pin [12] is con­nected to COMMON, the solenoid valve is not powered and therefore will remain
normally closed regardless of the setpoint. The Motorized valve will be given the
command to close indicated by a green light on top of the unit.

Conversely, when the connection is left open or pin [12] remains unconnected the
valve remains active. The valve will remain active when the VALVE OFF pin
remains “floating”. This feature is compatible with open collector NPN transistor
switches, as found in DC output ports of programmable controllers and similar
devices.

The simplest means for utilizing the VALVE OFF control feature, is to connect a
toggle switch between the COMMON and VALVE OFF pins of the GFC transduc­er. Toggling the switch on and off will allow for activating and deactivating the sole­noid valve.

5.6 Valve Test/Purge

At times, it may be necessary to purge the flow system with a neutralizing gas
such as pure dry nitrogen. The GFC transducer is capable of a full open condi­tion for the valve, regardless of setpoint conditions. Connecting the OPEN
(PURGE) pin (pin 4 on 15-pin “D” connector) to ground will fully open the valve.

The Motorized Valve: Connect pins [3] and [4] to OPEN the motorized control
valve. A red light on top of the valve will indicate an OPEN valve, normal for
flow conditions.

NOTE:The motorized control valve stays OPEN even if power is

,

no longer applied. To CLOSE the Motorized Control Valve, connect pins
[3] and [12].

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6. MAINTENANCE

6.1 Introduction

It is important that the Mass Flow Controller/Controller is used with clean, filtered
gases only. Liquids may not be metered. Since the RTD sensor consists, in part,
of a small capillary stainless steel tube, it is prone to occlusion due to impedi­ments or gas crystallization. Other flow passages are also easily obstructed.
Therefore, great care must be exercised to avoid the introduction of any potential
flow impediment. To protect the instrument a 50 micron (GFC17) or 60
micron(GFC37/47) filter is built into the inlet of the flow transducer. The filter
screen and the flow paths may require occasional cleaning as described below.
There is no other recommended maintenance required. It is good practice, how­ever, to keep the meter away from vibration, hot or corrosive environments and
excessive RF or magnetic interference.

If periodic calibrations are required they should be performed by qualified per­sonnel and calibrating instruments, as described in section (7). It is recommend­ed that units are returned to Aalborg7 for repair service and calibration.

CAUTION: TO PROTECT SERVICING PERSONNEL IT IS



MANDATORY THAT ANY INSTRUMENT BEING SERVICED IS
COMPLETELY PURGED AND NEUTRALIZED OF TOXIC,
BACTERIOLOGICALLY INFECTED, CORROSIVE OR RADIOACTIVE
CONTENTS.

6.2 Flow Path Cleaning

Inspect visually the flow paths at the inlet and outlet ends of the meter for any
debris that may be clogging the flow through the meter. Remove debris carefully
using tweezers and blowing low pressure clean air or Nitrogen from the inlet side.
If the flow path is not unclogged, please return meter to Aalborg7 for servicing.

Do not attempt to disassemble the sensor. Disassembly will



invalidate calibration.

6.2.1 Cleaning the Inlet Filter Screen in GFC17 Models

Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.

The Restrictor Flow Element (RFE) is a precision flow divider inside the trans­ducer, which splits the inlet gas flow by a fixed ratio to the sensor and main flow
paths. The particular RFE used in a given Mass Flow Controller depends on the
gas and flow range of the instrument.

Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for clean­ing, allow time for drying before re-assembling.

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Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.

Note: Over tightening will deform and render the RFE defective.

,

It is advisable that at least one calibration point be checked after re installing
the inlet fitting - see section (7).

IT IS NOT RECOMMENDED TO ATTEMPT TO DISASSEMBLE,



OR REPAIR GFC37, GFC47, GFC57, GFC67 AND GFC77 MODELS.
DISASSEMBLY NECESSITATES RE-CALIBRATION.

6.2.2 Valve Maintenance for GFC17/37/47 Models

The solenoid valve consists of 316 and 416 stainless steel, and VITON7 (or
optional EPR or Kalrez7) O-rings and seal materials. No regular maintenance is
required except for periodic cleaning.

It is advisable that at least one calibration point be checked after re-installing the
inlet fitting - see section (7).

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SPIDER SPRING

STEM

SEAT-VITON
INSERT

ORIFICE

O-RING

BLOCK

CORE

SPIRAL SPRING

COMPRESSION
SPRING

O-RING

O-RING

ADJUST. SCREW

11-20-2013

NUT

GUARD
TOP

GUARD

COIL

GUARD
BASE

VALVE
BODY

4-40
SOCKET
SCREW

FIGURE 6-1 SOLENOID VALVE

Various corrosive gases may demand more frequent replacement of VITON7
O-rings and seals inside the valve. Be sure to use an elastomer material, appro-

priate for your specific gas application. Contact your distributor for
optional sealing materials available.

Set the GFC into PURGE mode (see Figure 2-1), and attempt to flush through
with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully
opening the valve is to remove the plastic cap on top of the valve, and turning the
set screw counterclockwise until it stops. See section 7.3 for valve adjustment, to
return the valve to functional use.]

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17

7. CALIBRATION PROCEDURES

NOTE: Removal of the factory installed calibration seals and/or any
adjustments made to the meter, as described in this section, will void

,

any calibration warranty applicable.

7.1 Flow Calibration

Aalborg7 Instruments' Flow Calibration Laboratory offers professional calibration
support for Mass Flow Meters and Controllers, using precision calibrators under
strictly controlled conditions. NIST traceable calibrations are available.
Calibrations can also be performed by customers using available certified stan­dards.

Factory calibrations are performed using state of the art NIST traceable precision
volumetric calibrators.

Calibrations are performed using dry nitrogen gas. Calibration can then be cor­rected to the appropriate gas desired based on relative correction [K] factors
shown in the gas factor table - see Appendix 2. A reference gas, other than nitro­gen, may be used to approximate the flow characteristics of certain gases closer.
This practice is recommended when a reference gas is found with thermodynam­ic properties similar to the actual gas under consideration. The appropriate rela­tive correction factor should be recalculated - see section (9).

It is standard practice to calibrate Mass Flow Controllers with dry nitrogen gas. It
is best to calibrate the GFC transducers to actual operating conditions. Specific
gas calibrations of non-toxic and non-corrosive gases are available at specific
conditions. Please contact your distributor for a price quotation.

It is recommended that a flow calibrator of at least four times better collective
accuracy than that of the Mass Flow Controller to be calibrated be used.
Equipment required for calibration includes a flow calibration standard and a cer­tified high sensitivity multimeter (which together have a collective accuracy of
±0.25% or better), an insulated (plastic) screwdriver, a flow regulator (example:
metering needle valve) installed upstream from the Mass Flow Controller and a
pressure regulated source of dry filtered nitrogen gas (or other suitable reference
gas).

The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.

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NR7
LOCAL SET POINT
POTENTIOMETER

R34 ZERO
POTENTIOMETER

R38 50%

R39 75%

R40 100%

R33
SPAN (10 or 25%)

R1 RESPONSE
TIME AJUSTMENT

NJ1 CONTROL
CIRCUT JUMPERS

R52 25 %

(IF ENABLED)

FIGURE 7-1 GFC17/37/47 CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS

(BACK OF GFC)

7.2 Calibration of GFC17/37/47 Mass Flow Controllers

All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.

GFC Mass Flow Controllers may be field recalibrated/checked for the same range
they were originally factory calibrated for. When linearity adjustment is needed, or
flow range changes are being made proceed to step 7.2.4. Flow range changes
may require a different Restrictor Flow Element (RFE). Additionally, a different
Solenoid Valve Orifice may also be required (see Table VI). Consult your distribu­tor or Aalborg7 for more information.

7.2.1 Connections and Initial Warm Up

At the 15-pin “D” connector of the GFC transducer, connect the multimeter to out­put pins [1] and [2] for 0 to 5 Vdc (or pins [9] and [14] for 4 to 20 mA) - (see Figure
2-1).

When using a remote setpoint for flow control, the appropriate reference signal
should also be connected to the 15-pin “D” connector at pins [8] and [10] - (see
Figure 2-1). Power up the Mass Flow Controller for at least 30 minutes prior to
commencing the calibration procedure.

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7.2.2 ZERO Adjustment

Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage or
leak occurs into the meter, temporarily disconnect the gas source.

Using the multimeter and the insulated screwdriver, adjust the ZERO poten­tiometer [R34] through the access window for 0 Vdc (or 4 mA respectively) at zero
flow.

7.2.3 SPAN Adjustment

Reconnect the gas source. Adjust the control setpoint to 100% of full scale flow.
Check the flow rate indicated against the flow calibrator. If the deviation is less
than ±10% of full scale reading, correct the SPAN potentiometer [R33] setting by
using the insulated screwdriver through the access window, to eliminate any devi­ation. If the deviation is larger than ±10% of full scale reading, a defective condi­tion may be present.

LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:

✓ Occluded or contaminated sensor tube.
✓ Leaking condition in the GFC transducer or the gas line and fittings.
✓ For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table.
✓ Temperature and/or pressure correction errors.

See also section (8) TROUBLESHOOTING. If after attempting to remedy the
above conditions, a malfunction still persists, return the meter for factory service,
see section (1).

At this point the calibration is complete. However, it is advisable that several addi­tional points between 0 and 100%, such as 25%, 50%, and 75% flow be checked.
If discrepancies are found, proceed to step 7.2.4 for Linearity Adjustment.

7.2.4 Linearity Adjustment

All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.

7.2.4.1 Disable Solenoid Valve in GFC17/37/47 Models

Set the valve into PURGE mode. This step essentially bypasses the flow control
properties of the transducer. The unit will now act as a Mass Flow Meter.

CAUTION: FOR GFC17/37/47- If the valve is left in the AUTO (control)



or OPEN (PURGE) mode for an extended period of time, it may
become warm or even hot to the touch. Use care in avoiding direct
contact with the valve during operation.

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7.2.5 Connections and Initial Warm Up

Connect the multimeter to output pins [1] and [2] for 0 to 5 Vdc (or pins [9] and [14]
for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1).

If calibration to a new flow range or different gas is being performed, it may be
necessary to remove any jumpers at J1A, J1B, J1C and J1D before beginning lin­earizing procedure.

Power up the Mass Flow Controller for at least 30 minutes prior to commencing
the calibration procedure.

7.2.6 ZERO Adjustment

Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, it is good practice to temporarily disconnect the gas source.

Using the multimeter and the insulated screwdriver, adjust the ZERO LCD read­ing and 0 Vdc (or 4 mA respectively) analog output reading at zero flow by adjust­ing the zero potentiometer [R34] through the access window.

CAUTION: The minimum voltage on 0-5 Vdc output can be in the



range of 7 to 25 mV. Trying to reduce voltage below this level may
increase negative zero shift. This shift may be invisible on devices with­out LCD display. Stop R34 zero potentiometer adjustment if voltage on
0-5 Vdc output is in the range from 7 to 25 mV and does not decrease
any lower.

7.2.7 25% Flow Adjustment Using R33 Potentiometer

Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25% of
full scale flow. Check the flow rate indicated against the flow calibrator. Adjust the
setting for potentiometer [R33] by using the insulated screwdriver through the
access window, until the output of the flow meter reads 1.25 Vdc ±63mV (or 8mA

±0.25mA).
Using the flow regulator, adjust the flow rate until the output of the flow meter

reads 0.5 Vdc (or 5.6mA). Check the flow rate against the flow calibrator. If the
flow rate indicated by the calibrator is within 10% ± 1.0%. Then skip paragraphs

7.2.8, 7.2.9 and proceed directly to paragraph 7.2.10, if not, perform 10% flow

adjustment according to paragraph 7.2.8.

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LINEARIZER

3

6912
2
1

4

5

8
71110

ABCD

FUNCTION

J1A (10

or 25%)

J1B

(50%)

J1C

(75%)

(100%)

Decrease 1 - 2 4 - 5 7 - 8 10 - 11

J1D

Increase

2 - 3 5 - 6 8 - 9 11 - 12

FIGURE 7-2 GFC17/37/47CALIBRATION POTENTIOMETER AND JUMPERS

7.2.8 10% Flow Adjustment

Using the flow regulator, adjust the flow rate to 10% of full scale flow according to
the calibrator. Check the flow rate indicated against the flow calibrator. Adjust the
setting for potentiometer [R33] by using the insulated screwdriver through the
access window, until the output of the flow meter reads 0.5 Vdc ±63mV (or 5.6mA
±0.25mA).

7.2.9 25% Flow Adjustment (using R52 potentiometer)

Using the flow regulator, adjust the flow rate to 25% of full scale flow according to
the calibrator. Check the flow rate indicated against the flow calibrator. The output
of the flow meter should read 1.25 Vdc ±63mV (or 8.0mA ±0.25mA). If the read­ing is outside of that range, place the jumper at [J1.A] as appropriate to increase
or decrease the signal. Adjust the setting for potentiometer [R52] by using the
insulated screwdriver through the access window, until reading is within specifica­tion.

7.2.10 50% Flow Adjustment

Using the flow regulator, increase the flow rate to 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 2.50 Vdc ±63mV (or 12mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1B] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R38] by using the insulated screwdriver through the
access window, until reading is within specification.

7.2.11 75% Flow Adjustment

Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 3.75 Vdc ±63mV (or 16mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1C] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R39] by using the insulated screwdriver through the
access window, until reading is within specification.

7.2.12 100% Flow Adjustment

Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter

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should read 5.00 Vdc ±63mV (or 20mA ±0.25mA). If the reading is outside of that
range, place the jumper at [J1D] as appropriate to increase or decrease the sig­nal. Adjust the setting for potentiometer [R40] by using the insulated screwdriver
through the access window, until reading is within specification.

Repeat steps 7.2.7 to 7.2.12 at least once more.

7.2.13. VALVE ADJUSTMENT

7.2.13.1 Valve Adjustment for GFC 17/37/47

Discontinue the PURGE mode (set valve for the closed position). Apply an inlet
pressure of 5 psig, and atmospheric pressure at the outlet. If a small flow occurs,
turn the set screw on top of the solenoid valve clockwise until the flow through the
GFC just stops.

7.2.14 Close Loop Full Scale Flow Adjustment

Fully open the flow regulator upstream of the GFC. Increase the inlet pressure to
20 psig (25 psig for GFC47). Apply a +5.00 Vdc (100% full scale flow) setpoint ref­erence. Using the calibrator check the flow rate. If necessary, adjust R33 to match
the desired full scale flow rate. [In control mode, turning R33 clockwise will
decrease the flow. Conversely, turning R33 counterclockwise will increase the flow
through the GFC.]

7.2.15 10% Close Loop Flow Adjustment
(using R33 potentiometer)

If the J1A jumper is not installed in upper or lower position (paragraphs

7.2.8 and 7.2.9 were skipped) then skip this paragraph and paragraph 7.2.16.

Proceed directly to paragraph 7.2.17. Change the setpoint to 0.5 Vdc to control

at 10% of full scale flow. Check the flow rate indicated against the flow calibrator.
If the flow is not within ±0.75% of full scale, re-adjust the setting for potentiome­ter [R33], until the flow output is correct.

7.2.16 25% Close Loop Flow Adjustment

(using R52 potentiometer)

Change the setpoint to 1.25 Vdc to control at 25% of full scale flow. Check the flow
rate indicated against the flow calibrator. If the flow is not within ±0.75% of full
scale, re-adjust the setting for potentiometer [R52], until the flow output is correct.

7.2.17 Close Loop 25% Flow Adjustment

(using R33 potentiometer)

Change the setpoint to 1.25 Vdc to control at 25% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow is not within ±0.75% of full
scale, re-adjust the setting for potentiometer [R33], until the flow output is correct.

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7.2.18 Close Loop 50% Flow Adjustment

Change the setpoint to 2.50 Vdc to control at 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow is not within 0.75% of
full scale, re-adjust the setting for potentiometer [R38], until the flow output is
correct.

7.2.19 Close Loop 75% Flow Adjustment

Change the setpoint to 3.75 Vdc to control at 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R39], until the flow output is
correct.

7.2.20 Close Loop 100% Flow Adjustment

Change the setpoint to 5.00 Vdc to control at 100% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75% of full
scale, re-adjust the setting for potentiometer [R40], until the flow output is correct.

Repeat steps 7.2.15 to 7.2.20 at least once more.

ORIFICE PART NUMBER FLOW RATE [N2]

OR.020 10 to 1000 sccm

OR.040 1 to 5 slpm

OR.055 5 to 10 slpm

OR.063 10 to 15 slpm

OR.094 20 to 50 slpm

OR.125 50 to 100 slpm

TABLE II GFC SOLENOID VALVE ORIFICE SELECTION TABLE

7.3 Calibration of GFC57/67/77

Mass Flow Controllers

All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument. GFC Mass Flow Controllers may
be field recalibrated/checked for the same range they were originally factory cali­brated for. When linearity adjustment is needed, or flow range changes are being
made proceed to step 7.2.4. Flow range changes may require a different
Restrictor Flow Element (RFE). Additionally, a different Solenoid Valve Orifice
may also be required (see Table VI). Consult your distributor or Aalborg
information.

®

for more

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R34
ZERO
POTENTIOMETER

NJ1 CONTROL
CIRCUT JUMPERS

R1 RESPONSE
TIME ADJUSTMENT

R33
SPAN (25%)

R40 100%

R39 75%

R38 50%

LOCAL

SETPOINT

POTENTIOMETER

NR7

GFC 57 / 67 / 77

FIGURE 7-3 GFC 57/67/77 CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS

(BACK OF GFC)

7.3.1 Connections and Initial Warm Up

At the 15-pin “D” connector of the GFC transducer, connect the multimeter to out­put pins [1] and [2] for 0 to 5 Vdc (or pins [9] and [14] for 4 to 20 mA) - (see Figure
2-1). When using a remote setpoint for flow control, the appropriate reference sig­nal should also be connected to the 15-pin “D” connector at pins [8] and [10] ­(see Figure 2-1). Power up the Mass Flow Controller for at least 30 minutes prior
to commencing the calibration procedure.

7.3.2 ZERO Adjustment

Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, temporarily disconnect the gas source. Using the
multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34]
through the access window for 0 Vdc (or 4 mA respectively) at zero flow.

7.3.3 SPAN Adjustment

Reconnect the gas source. Adjust the control setpoint to 100% of full scale flow.
Check the flow rate indicated against the flow calibrator. If the deviation is less
than ±10% of full scale reading, correct the SPAN potentiometer [R33] setting by
using the insulated screwdriver through the access window, to eliminate any devi­ation. If the deviation is larger than ±10% of full scale reading, a defective condi­tion may be present.

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LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:

✓ Occluded or contaminated sensor tube.
✓ Leaking condition in the GFC transducer or the gas line and fittings.
✓ For gases other than nitrogen, recheck appropriate “K” factor from Gas Factor Table.
✓ Temperature and/or pressure correction errors.

See also section (8) TROUBLESHOOTING. If after attempting to remedy the
above conditions, a malfunction still persists, return the meter for factory service,
see section (1). At this point the calibration is complete. However, it is advisable
that several additional points between 0 and 100%, such as 25%, 50%, and 75%
flow be checked. If discrepancies are found, proceed to step 7.3.4 for Linearity
Adjustment.

7.3.4 Linearity Adjustment

All adjustments in this section are made from the outside of the meter, there is
no need to disassemble any part of the instrument.

7.3.4.1 Open Motorized Valve in GFC57/67/77 Models

Set the valve to PURGE mode by connecting pin [4] to pin [3], at the 15 pin
D-connector.

7.3.5 Connections and Initial Warm Up

Connect the multimeter to output pins [1] and [2] for 0 to 5 Vdc (or pins [9] and
[14] for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1). If calibration to
a new flow range or different gas is being performed, it may be necessary to
remove any jumpers at J1A, J1B, and J1C before beginning linearizing procedure.

Power up the Mass Flow Controller for at least 30 minutes prior to commencing
the calibration procedure.

7.3.6 ZERO Adjustment

Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, it is good practice to temporarily disconnect the gas
source. Using the multimeter and the insulated screwdriver, adjust the ZERO
potentiometer [R34] through the access window for 0 Vdc (or 4 mA respectively)
at zero flow.

7.3.7 25% Flow Adjustment

Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25% of
full scale flow. Check the flow rate indicated against the flow calibrator. Adjust the
setting for potentiometer [R33] by using the insulated screwdriver through the
access window, until the output of the flow meter reads 1.25 Vdc ±63mV (or 8mA
±0.25mA).

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LINEARIZER

FUNCTION

Decrease 1 - 2 4 - 5 7 - 8

J1A (50%) J1B (75%) J1C (100%)

Increase

FIGURE 7-4 GFC57/67/77 CALIBRATION POTENTIOMETER AND JUMPERS

7.3.8 50% Flow Adjustment

Using the flow regulator, increase the flow rate to 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 2.50 Vdc ±63mV (or 12mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1A] as appropriate to increase or decrease the signal.
Adjust the setting for potentiometer [R38] by using the insulated screwdriver
through the access window, until reading is within specification.

7.3.9 75% Flow Adjustment

Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 3.75 Vdc ±63mV (or 16mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1B] as appropriate to increase or decrease the signal.
Adjust the setting for potentiometer [R39] by using the insulated screwdriver
through the access window, until reading is within specification.

7.3.10 100% Flow Adjustment

Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
should read 5.00 Vdc ±63mV (or 20mA ±0.25mA). If the reading is outside of that
range, place the jumper at [J1C] as appropriate to increase or decrease the sig­nal. Adjust the setting for potentiometer [R40] by using the insulated screwdriver
through the access window, until reading is within specification. Repeat steps

7.2.7 to 7.2.10 at least once more.

2 - 3 5 - 6 8 - 9

7.3.11. VALVE ADJUSTMENT

7.3.11.1 Valve Adjustment for GFC 57/67/77

Discontinue the PURGE mode (set valve for the Auto position). DO NOT adjust
the motorized valve for GFC57/67/77. The motorized valve for these models has
been pre-adjusted at the factory.

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7.3.12 Full Scale Flow Adjustment

Fully open the flow regulator upstream of the GFC. Increase the inlet pressure to
20 psig. Apply a +5.00 Vdc (100% full scale flow) setpoint reference. Using the
calibrator check the flow rate. If necessary, adjust R33 to match the desired full
scale flow rate. [In control mode, turning R33 clockwise will decrease the flow.
Conversely, turning R33 counterclockwise will increase the flow through the
GFC.]

7.3.13 25% Flow Adjustment

Change the setpoint to 1.25 Vdc to control at 25% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R33], until the flow output is
correct.

7.3.14 50% Flow Adjustment

Change the setpoint to 2.50 Vdc to control at 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R38], until the flow output is correct.

7.3.15 75% Flow Adjustment

Change the setpoint to 3.75 Vdc to control at 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R39], until the flow output is correct.

7.3.16 100% Flow Adjustment

Change the setpoint to 5.00 Vdc to control at 100% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R40], until the flow output is correct.

Repeat steps 7.3.13 to 7.3.16 at least once more.

7.4 LCD Display Scaling

It may be desirable to re-scale the output reading on the LCD readout supplied
with certain model GFC transducers. Re-calibration for a new flow range or dif­ferent engineering units are two examples of when this may be necessary.

7.4.1 Access LCD Display Circuit

Carefully remove the LCD from the GFC or panel mounted surface. Remove the
aluminum housing on the side of the connection cable. Slide the LCD assembly
out of the aluminum housing.

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7.4.2 Adjust Scaling

Using a digital multimeter connected to either the 0 to 5 Vdc or 4 to 20 mA signal
at the 15-pin “D” connector, set the flow rate on the GFC to full scale flow (5
Vdc or 20mA). Maintain full scale flow, and adjust the potentiometer [R3] on the
LCD printed circuit board to desired full scale flow reading.

7.4.3 Change Decimal Point

To change the decimal place on the LCD display readout, simply move the
jumper to the appropriate location on the [8] pin header block. The numbers are
printed to the side of the connections. Do not attempt to place more than one
jumper for decimal setting.

JUMPER POSITION

“0” 1999

“3”

“2”

“1” 1.999

8. TROUBLESHOOTING

8.1 Common Conditions

Your Mass Flow Controller was thoroughly checked at numerous quality control
points during and after manufacturing and assembly operations. It was calibrated
in accordance to your desired flow and pressure conditions for a given gas or a
mixture of gases.

It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following com­mon conditions first:

MAXIMUM SCALABLE DISPLAY READING

199.9

19.99

✓ Are all cables connected correctly?

✓ Are there any leaks in the installation?

✓ Is the power supply correctly selected according to requirements?

When several meters are used a power supply with appropriate current
rating should be selected.

✓ Were the connector pinouts matched properly? When interchanging with

other manufacturers' equipment, cables and connectors must be carefully
wired for correct pin configurations.

✓ Is the pressure differential across the instrument sufficient?

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8.2 General Troubleshooting Guide

INDICATION LIKELY REASON REMEDY

lack of reading
or output

flow reading
does not
coincide with
the setpoint

power supply off check connection of power supply

fuse blown disconnect transducer from

power supply; remove the
shorting condition or check
polarities; fuse resets
automatically

filter screen
obstructed at inlet

occluded sensor tube flush clean or disassemble to

pc board defect return to factory for replacement

GFC17/37/47 valve adjustment
wrong

inadequate gas pressure apply appropriate gas pressure

filter screen obstructed
at inlet

ground loop signal and power supply

flush clean or disassemble to
remove impediments or replace

remove impediments or return to
factory for replacement

re-adjust valve (section 8.3.3)

flush clean or disassemble to
remove impediments or replace

commons are different

no response
to setpoint

unstable or no
zero reading

inadequate gas pressure apply appropriate gas pressure

cable or connector malfunction check cables and all connections

or replace

setpoint is too low
(<2% of full scale)

GFC17/37/47 valve adjustment
wrong

gas leak locate and correct

pc board defective return to factory for replacement

GFC17/37/47 valve adjustment
wrong

re adjust setpoint or disable 2%
cutoff feature (section 2.2)

re-adjust valve
(section 8.3.3 below)

re-adjust valve (see section 8.3.2
below)

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INDICATION LIKELY REASON REMEDY

full scale output
at “no flow”

condition or
with valve
closed

calibration off

defective sensor return to factory for replacement

gas leak locate and repair

GFC17/37/47 valve
adjustment wrong

gas metered is not the same as
what meter was calibrated for

composition of gas changed see K factor tables in APPENDIX 2

gas leak locate and correct

pc board defective return to factory for replacement

RFE dirty

occluded sensor tube

filter screen obstructed
at inlet

transducer is not
mounted properly

re-adjust valve (section

8.3.1 below)

use matched calibration

flush clean or disassemble to
remove impediments

flush clean or disassemble to
remove impediments or return to
factory for replacement

flush clean or disassemble to
remove impediments or replace

check for any tilt or change in the
mounting of the transducer;
generally, units are calibrated for
horizontal installation (relative to
the sensor tube)

GFC valve does

not work

in open position

GFC17/37/47 incorrect valve
adjustment

pc board defect return to factory for replacement

cable or connectors
malfunction

differential pressure too high

insufficient inlet pressure adjust appropriately

re-adjust valve (section 8.3.3)

check cable and connectors
or replace

decrease pressure to correct level

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INDICATION LIKELY REASON REMEDY

GFC valve not
not work in
closed position

8.3 GFC17/37/47 Valve Related Troubleshooting

8.3.1 INDICATION: LIKELY REASON: REMEDY:

With “no flow
conditions” (gas pipes
are not connected to the
GFC) and valve closed
(pins 3 and 12 are
connected together)
LCD reading is zero,
but when 20 PSIG inlet
pressure is applied the
LCD reads more than

0.5% of full scale.

GFC17/37/47 incorrect valve
adjustment

pc board defect

cable or connectors check cable and connectors

orifice obstructed disassemble to remove

Valve is out of
adjustment and
leaking.

1. Adjust control set point to zero. Set

2. Apply 20 PSIG inlet pressure.

3. See operating manual page 17

4. Using a screwdriver readjust adjustment

5. This is not a shut off valve. It is normal

6. Adjust hex nut cover on the top of the

7. Disable Valve “Close” mode,

re-adjust valve (section 8.3.1)

return to factory for replacement

or replace

impediments or return to factory

Valve mode to “CLOSE” position
(connect pins 3 and 12 on the 15 pins
D-connector together). This step is very

important!

(Figure 6-1). Unscrew hex nut cover on
the top of the solenoid valve.

screw on the top of the valve to CW
(clock wise) direction until zero reading
on the display. Be very careful during
adjustment: make only 15 degree turn
each time and wait one minute due
to the sensor’s response time. If reading
is still high make another 15 degree turn.
Do not over adjust valve. If you made
more than 5 complete (360 degree)
turns and leakage still exists stop
adjustment. In this case unit has to be
returned to the factory for servicing.

to observe up to 0.5 % of F.S. leakage.

solenoid valve.

apply 100% control set point and check
if reading can reach 100% reading.

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8.3.2 INDICATION: LIKELY REASON: REMEDY:

Differential pressure
across the GFC
controller is within
specification but LCD
reading and actual flow
are not stable (oscillate
1-4 times per second).

Valve
compression
spring is over
adjusted and PID
control cannot
handle stable
flow.

1. Make sure differential pressure across
the GFC is within specification.

2. Install control set point to 100% F.S.
This should remedy the oscillation
conditions.

3. See operating manual page 17
(Figure 6-1). Unscrew hex nut cover on
the top of the solenoid valve.

4. Using screwdriver readjust adjustment
screw on the top of the valve to CCW
(counter clock wise) direction until
reading on the display will be stable. Be
very careful during adjustment: make
only 15 degree turn each time and
wait about 15 seconds due to sensor’s
response time. If reading oscillates
make another 15 degree turn. Do not
over adjust valve. If you noticed that
flow rate is constant and more than
105% of full scale, it means you over
adjusted valve and it has leakage. In this
case make adjustment to CW (clock
wise) in order to fix this problem until
reading will go back to 100% full scale.

5. Adjust zero set point (or valve close
command), wait about 3 minutes and
check if valve is able to close.

6. This is not a shut off valve. It is normal
to observe up to 0.5 % of F.S. leakage.

7. Install hex nut cover on the top of the
solenoid valve.

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8.3.3 INDICATION: LIKELY REASON: REMEDY:

Differential pressure
across the GFC
controller is within
specification but flow
rate reading is more
than 1% F.S. below set
point value when 100%
set point is applied.

Valve
compression
spring is over
adjusted and
controller does
not have enough
power to open
valve and reach
100% F.S. flow.

1. Make sure differential pressure across

the GFC is within specification.

2. Adjust control set point to 100% F.S.

This should remedy initial fault
conditions (flow reading is less than set
point value and difference is more than

1% F.S.).

3. See operating manual page 17

(Figure 6-1). Unscrew hex nut cover on
the top of the solenoid valve.

4. Using screwdriver readjust adjustment

screw on the top of the valve to CCW
(counter clock wise) direction until
reading on the display will be equal to
the set point value. Be very careful
during adjustment: make only 15

degree turn each time and wait about
15 seconds due to sensors responds time.

If reading still below 100% make
another 15 degree turn. Do not over
adjust valve. If you noticed that flow
rate is constant and more than 105%
of full scale, it means you over adjusted
valve and it has leakage. In this case
make adjustment to CW (clock wise) in
order to fix this problem until reading
will go back to 100% full scale.

5. Install zero set point (or valve close

command), wait about 3 minutes and
check if valve is able to close.

6. This is not a shut off valve. It is normal

to observe up to 0.5 % of F.S. leakage.

7. Install hex nut cover on the top of the

solenoid valve.

NOTE: One common reason for proportional solenoid valve to be out of

,

adjustment: keeping control set point even very small (2% for example)
while disconnecting inlet pressure. In this case the valve becomes
overheated within 15 minutes and mechanical characteristics of the seat
insert and compression spring are compromised. Avoid this mode of
operation in the future.

For best results it is recommended that instruments are returned to the factory for
servicing. See section 1.3 for return procedures.

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8.4 Technical Assistance

Aalborg7 Instruments will provide technical assistance over the phone to qualified
repair personnel. Please call our Technical Assistance at 845-770-3000. Please
have your Serial Number and Model Number ready when you call.

9. CALIBRATION CONVERSIONS FROM
REFERENCE GASES

The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:

gas

d X C

p

1

=

K

where d = gas density (gram/liter)
C

= coefficient of specific heat (cal/gram)

p

Note: in the above relationship that d and Cp are chosen at the same conditions
(temperature, pressure).

If the flow range of a Mass Flow Controller remains unchanged, a relative K fac­tor is used to relate the calibration of the actual gas to the reference gas.

Q

a

=

K

Q

r

K

a

=

K

r

where Qa= mass flow rate of an actual gas (sccm)
Q

r

K

a

K

r

= mass flow rate of a reference gas (sccm)
= K factor of an actual gas
= K factor of a reference gas

For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:

Q

= Q

= Q

O2

a

X K = 1000 X 0.9926 = 992.6 sccm

r

where K = relative K factor to reference gas (oxygen to nitrogen)

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APPENDIX 1

COMPONENTS DIAGRAM

GFC17/37/47 CONTROLLER PC BOARD (TOP SIDE)

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COMPONENTS DIAGRAM

GFC17/37/47 CONTROLLER PC BOARD (BOTTOM SIDE)

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APPENDIX 2

GAS FACTOR TABLE (“K” FACTORS)

 CAUTION: K-Factors at best are only an approximation. K factors should not

be used in applications that require accuracy better than +/- 5 to 10%.

Acetylene C2H

ACTUAL GAS

2

K FACTOR

Relative to N

.5829 .4036 1.162

Cp

[Cal/g]

2

Density

[g/I]

Air 1.0000 .240 1.293
Allene (Propadiene) C3H
Ammonia NH

3

4

Argon Ar
Argon AR-1 (>10 L/min)

Arsine AsH
Boron Trichloride BCl
Boron Trifluoride BF
Bromine Br
Boron Tribromide Br
Bromine PentaTrifluoride BrF
Bromine Trifluoride BrF

3

3

3

2

3

5

3

Bromotrifluoromethane (Freon-13 B1) CBrF
1,3-Butadiene C4H
Butane C4H
1-Butene C4H

6

10

8

2-Butene C4H8 CIS
2-Butene C4H8TRANS
Carbon Dioxide CO

2

Carbon Dioxide CO2-1 (>10 L/min)
Carbon Disulfide CS

2

Carbon Monoxide C0
Carbon Tetrachloride CCl
Carbon Tetrafluoride (Freon-14)CF
Carbonyl Fluoride COF

4

4

2

Carbonyl Sulfide COS
Chlorine Cl
Chlorine Trifluoride ClF
Chlorodifluoromethane (Freon-22)CHClF
Chloroform CHCl

2

3

2

3

Chloropentafluoroethane(Freon-115)C2ClF
Chlorotrifluromethane (Freon-13) CClF
CyanogenC2N

2

3

CyanogenChloride CICN
Cyclopropane C3H

5

.4346 .352 1.787
.7310 .492 .760

1.4573

1.205

.1244

.1244
.6735 .1167 3.478
.4089 .1279 5.227
.5082 .1778 3.025
.8083 .0539 7.130
.38 .0647 11.18
.26 .1369 7.803
.3855 .1161 6.108

.3697 .1113 6.644

3

.3224 .3514 2.413
.2631 .4007 2.593
.2994 .3648 2.503
.324 .336 2.503
.291 .374 2.503
.7382

.658

.2016

.2016

.6026 .1428 3.397

1.00 .2488 1.250
.31 .1655 6.860
.42 .1654 3.926
.5428 .1710 2.945
.6606 .1651 2.680
.86 .114 3.163
.4016 .1650 4.125
.4589 .1544 3.858
.3912 .1309 5.326
.2418 .164 6.892

5

.3834 .153 4.660
.61 .2613 2.322
.6130 .1739 2.742
.4584 .3177 1.877

1.782

1.782

1.964

1.964

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ACTUAL GAS

Deuterium D
Diborane B2H
Dibromodifluoromethane CBr2F

2

6

2

Dichlorodifluoromethane (Freon-12) CCl2F
Dichlofluoromethane (Freon-21) CHCl2F
Dichloromethylsilane (CH3)2SiCl
Dichlorosilane SiH2Cl

2

2

Dichlorotetrafluoroethane (Freon-114) C2Cl2F
1,1-Difluoroethylene (Freon-1132A) C2H2F
Dimethylamine (CH3)2NH
Dimethyl Ether (CH3)2O
2,2-Dimethylpropane C3H
Ethane C2H

6

12

Ethanol C2H6O
Ethyl Acetylene C4H

6

Ethyl Chloride C2H5Cl
Ethylene C2H

4

Ethylene Oxide C2H4O
Fluorine F
Fluoroform (Freon-23) CHF

2

3

Freon-11 CCl3F
Freon-12 CCl2F
Freon-13 CClF
Freon-13B1 CBrF
Freon-14 CF

2

3

3

4

Freon-21 CHCl2F
Freon-22 CHClF
Freon-113 CCl2FCClF
Freon-114 C2Cl2F
Freon-115 C2ClF
Freon-C318 C4F
Germane GeH
Germanium Tetrachloride GeCl

2

2

4

5

8

4

4

Helium He (=<10/Lmin)
Helium He-1 (>50 L/min)
Helium He-2 (>10-50 L/min)

Hexafluoroethane C2F6(Freon-116)
Hexane C6H

14

Hydrogen H2-1 (=<10/Lmin)
Hydrogen H
Hydrogen H

-2 (>10-100 L)

2

-3 (>100 L)

2

K FACTOR

Relative to N

Cp

[Cal/g]

2

1.00 1.722 1.799
.4357 .508 1.235
.1947 .15 9.362
.3538 .1432 5.395

2

.4252 .140 4.592
.2522 .1882 5.758
.4044 .150 4.506
.2235 .1604 7.626

4

.4271 .224 2.857

2

.3714 .366 2.011
.3896 .3414 2.055
.2170 .3914 3.219
.50 .420 1.342
.3918 .3395 2.055
.3225 .3513 2.413
.3891 .244 2.879
.60 .365 1.251
.5191 .268 1.965
.9784 .1873 1.695
.4967 .176 3.127
.3287 .1357 6.129
.3538 .1432 5.395
.3834 .153 4.660
.3697 .1113 6.644
.4210 .1654 3.926
.4252 .140 4.592
.4589 .1544 3.858
.2031 .161 8.360
.2240 .160 7.626
.2418 .164 6.892
.1760 .185 8.397
.5696 .1404 3.418
.2668 .1071 9.565

1.454

2.43

2.05

1.241

1.241

1.241
.2421 .1834 6.157
.1792 .3968 3.845

1.0106

1.35

1.9

3.419

3.419

3.419

39

Density

[g/I]

.1786
.1786
.1786

.0899
.0899
.0899

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ACTUAL GAS

Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H2Se
Hydrogen Sulfide H2S
Iodine Pentafluoride IF
Isobutane CH(CH3)
Isobutylene C4H

5

3

8

Krypton Kr
Methane CH

4

Methane CH4-1 (>10 L/min)
Methanol CH
Methyl Acetylene C3H

3

4

Methyl Bromide CH3Br
Methyl Chloride CH3Cl
Methyl Fluoride CH3F
Methyl Mercaptan CH3SH
Methyl Trichlorosilane (CH3)SiCl
Molybdenum Hexafluoride MoF
Monoethylamine C2H5NH
Monomethylamine CH3NH

3

6

2

2

Neon NE
Nitric Oxide NO
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF

2

2

3

Nitrosyl Chloride NOCl
Nitrous Oxide N2O
Octafluorocyclobutane (Freon-C318) C4F
Oxygen O
Oxygen Difluoride OF

2

2

Ozone
Pentaborane B5H
Pentane C5H

9

12

Perchloryl Fluoride ClO3F
Perfluoropropane C3F
Phosgene COCl
Phosphine PH

8

2

3

K FACTOR

Relative to N

Cp

[Cal/g]

2

1.000 .0861 3.610

1.000 .1912 1.627
.764 .3171 1.206

.9998 .3479 .893
.9987 .0545 5.707
.7893 .1025 3.613
.80 .2397 1.520
.2492 .1108 9.90
.27 .3872 3.593
.2951 .3701 2.503

1.453 .0593 3.739
.7175

.75

.5328
.5328

.5843 .3274 1.429
.4313 .3547 1.787
.5835 .1106 4.236
.6299 .1926 2.253
.68 .3221 1.518
.5180 .2459 2.146
.2499 .164 6.669
.2126 .1373 9.366
.3512 .387 2.011
.51 .4343 1.386

1.46 .246 .900
.990 .2328 1.339

1.000 .2485 1.25
.737 .1933 2.052
.4802 .1797 3.168
.6134 .1632 2.920
.7128 .2088 1.964

8

.176 .185 8.397
.9926 .2193 1.427
.6337 .1917 2.406
.446 .195 2.144
.2554 .38 2.816
.2134 .398 3.219
.3950 .1514 4.571
.174 .197 8.388
.4438 .1394 4.418
.759 .2374 1.517

Density

[g/I]

.715
.715

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ACTUAL GAS

Phosphorous Oxychloride POCl
Phosphorous Pentafluoride PH
Phosphorous Trichloride PCl
Propane C3H
Propylene C3H
Silane SiH

8

6

4

Silicon Tetrachloride SiCl
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfuryl Fluoride SO2F

2

6

2

3

5

3

4

4

Tetrafluoroethane (Forane 134A) CF3CH2F
Tetrafluorohydrazine N2F

4

Trichlorofluoromethane (Freon-11) CCl3F
Trichlorosilane SiHCl

3

1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl

FCClF

2

2

Triisobutyl Aluminum (C4H9)AL
Titanium Tetrachloride TiCl
Trichloro Ethylene C2HCl

4

3

Trimethylamine (CH3)3N
Tungsten Hexafluoride WF

6

Vinyl Bromide CH2CHBr
Vinyl Chloride CH2CHCl
Xenon Xe

K FACTOR

Relative to N

Cp

[Cal/g]

2

.36 .1324 6.843
.3021 .1610 5.620
.30 .1250 6.127
.35 .399 1.967
.40 .366 1.877
.5982 .3189 1.433
.284 .1270 7.580
.3482 .1691 4.643
.69 .1488 2.858
.2635 .1592 6.516
.3883 .1543 4.562
.5096 .127 4.224
.3237 .182 4.64
.3287 .1357 6.129
.3278 .1380 6.043

.2031 .161 8.36

.0608 .508 8.848
.2691 .120 8.465
.32 .163 5.95
.2792 .3710 2.639
.2541 .0810 13.28
.4616 .1241 4.772
.48 .12054 2.788

1.44 .0378 5.858

Density

[g/I]

41

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APPENDIX 3

6.29

(159.8)

4.27

(108.5)

3.66
(93.0)

4.61

(117.1)

5.72 (145.3)

1.00 (25.4)

1.13 (28.6)

0.50 (12.7)

1.00

(25.4)

0.50

(12.7)

0.53

(13.5)

2.69

(68.3)

0.69 (17.5)

0.16 (4.0)

6-32 UNC - 2B 0.13

0.95 (24.1)

2.38 (60.4)

1.25 (31.8)

i

DIMENSIONAL DRAWINGS

GFC17 MASS FLOW CONTROLLER

NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time

without notice. For certified dimensions please contact

42

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5.195

(132.0)

7.21 (183.1)

*7.33 (186.2)

2.38 (60.4)

0.95 (24.1)

4.03

(102.3)

4.99

(126.7)

1.25 (31.8)

0.63 (15.9)

0.63

(15.9)

1.29 (32.8)

6-32 UNC - 2B 0.09

0.28 (7.1)

0.69 (17.5)

6.10 (154.9)

1.38 (34.9)

1.03

(26.2)

2.69 (68.3)

i

GFC37/47 MASS FLOW CONTROLLER

NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any

time without notice. For certified dimensions please contact

43

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0.95

SAE/MS SWAGELOK
3/8 TUBE CONNECTOR

2.38

7" (177,8)

9.98 (253,5)

12.30 (312,4)

10-24 UNC 0.25

0.18 (4,6)

1.39 (35,3)

1.39 (35,3)

1" (25,4)

4.69 (119,1)

2.15 (54,6)

2.72 (69,1)

6.9" (175,3)

1" (25,4)

0.875 (22,2)

i

GFC57 MASS FLOW CONTROLLER

NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any

time without notice. For certified dimensions please contact

44

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7.55

(191.8 mm)

3.00

(76.2 mm)

3.00

(76.2 mm)

12.62 (320.5 mm)

10.42 (264.7 mm)

7.25 (184.1 mm)

2.50

(63.5 mm)

6.75 (171.5 mm)
4 x 1/4-20 UNC-2B 0.35

i

2 x 1/2 compression fittings

control

valve

CE

50.00

GFC67 MASS FLOW CONTROLLER

NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any

time without notice. For certified dimensions please contact

45

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8.66

(219.9 mm)

4.00

(101.6 mm)

4.00 (101.6 mm)

3/4-14 NPT

(both sides)

10.47 (266 mm)

7.30 (185.4 mm)

3.00

(76.2 mm)

6.80 (172.7 mm)

1/4-20
UNC-2B 0.35

i

control

valve

CE

50.00

GFC77 MASS FLOW CONTROLLER

NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any

Find Quality Products Online at: [e-mail]

time without notice. For certified dimensions please contact

www.GlobalTestSupply.com

46

APPENDIX 4

WARRANTY

Aalborg7 Mass Flow Systems are warranted against parts and
workmanship for a period of one year from the date of purchase. Calibrations
are warranted for up to six months after date of purchase, provided calibra­tion seals have not been tampered with. It is assumed that equipment select­ed by the customer is constructed of materials compatible with gases used.
Proper selection is the responsibility of the customer. It is understood that
gases under pressure present inherent hazards to the user and to equip­ment, and it is deemed the responsibility of the customer that only operators
with basic knowledge of the equipment and its limitations are permitted to
control and operate the equipment covered by this warranty. Anything to the

contrary will automatically void the liability of Aalborg7 and the provisions of
this warranty. Defective products will be repaired or replaced solely at the dis-

cretion of Aalborg7 at no charge. Shipping charges are borne by the cus­tomer. This warranty is void if the equipment is damaged by accident or mis-

use, or has been repaired or modified by anyone other than Aalborg7 or fac­tory authorized service facility. This warranty defines the obligation of

Aalborg7 and no other warranties expressed or implied are recognized.

NOTE: Follow Return Procedures In Section 1.3.

TRADEMARKS

Aalborg®-is a registered trademark of Aalborg Instruments & Controls.
Buna®-is a registered trademark of DuPont Dow Elastometers.
Kalrez®-is a registered trademark of DuPont Dow Elastomers.

®

VCR

-is a registered trademark of Crawford Fitting Co.

Viton®-is a registered trademark of Dupont Dow Elastomers L.L.C.

47

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