OPERATING MANUAL
DFC MASS FLOW
CONTROLLER
Technical Data Sheet No. TD9805M Rev. O
Date of Issue: February 2012
TABLE OF CONTENTS
1. UNPACKING THE DFC MASS FLOW CONTROLLER........................
1.1 Inspect Package for External Damage..............................................
1.2 Unpack the Mass Flow Controller.......................................................
1.3 Returning Merchandise for Repair.....................................................
2. INSTALLATION....................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.3 Communication Parameters and Connections................................
3. PRINCIPLE OF OPERATION..................................................
4. SPECIFICATIONS..................................................................
4.1 DFC 26/36/46 Mass Flow Controllers..............................................
4.2 CE Compliance................................................................................
5. OPERATING INSTRUCTIONS.....................................................
5.1 Preparation and Warm Up................................................................
5.2 Flow Signal Output Readings..............................................................
5.3 Swamping Condition...........................................................................
5.4 Set Point Reference Signal .............................................................
5.5 Valve OFF Control ..........................................................................
5.6 Valve Open/Purge ............................................................................
5.7 Analog Interface Configuration...........................................................
6. MAINTENANCE...................................................................3
6.1 Introduction........................................................................................
6.2 Flow Path Cleaning..............................................................................
6.2.1 Restrictor Flow Element (RFE).................................................
6.2.2 DFC 26 models.........................................................................
6.2.3 DFC 36/46 models........................................................................
6.2.4 Valve Maintenance ...................................................................
7. CALIBRATION PROCEDURES....................................................
7.1 Flow Calibration...................................................................................
7.2 Calibration of DFC Mass Flow Controllers.......................................
8. TROUBLESHOOTING.............................................................
8.1 Common Conditions...........................................................................
8.2 Technical Assistance............................................................................
8.3 Troubleshooting Guide....................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................
1
1
1
1
1
1
2
2
6
6
7
8
11
11
11
11
12
12
12
13
13
13
14
14
14
14
15
15
15
16
17
17
17
18
20
APPENDIX 1 COMPONENT DIAGRAM......................................................
APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS).....................................
APPENDIX 3 DIMENSIONAL DRAWINGS..................................................
APPENDIX 4 SENDING COMMANDS TO THE DFC........................................
APPENDIX 5 SDPROC TABLES: GAS INDEPENDENT VARIABLES................
GAS DEPENDENT VARIABLES...............
APPENDIX 6 WARRANTY...........................................................................
21
25
29
31
37
39
41
1. UNPACKING THE DFC MASS FLOW CONTROLLER
1.1 Inspect Package for External Damage
Your DFC Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon
receipt, inspect the package for possible external damage. In case of external
damage to the package contact the shipping company immediately.
1.2 Unpack the Mass Flow Controller
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to your distributor or Aalborg7 directly.
When unpacking the instrument please make sure that you have all the items indicated on the Packing List. Please report any shortages promptly.
1.3 Returning Merchandise for Repair
Please contact the customer service representative of your distributor or Aalborg7
if you purchased your Mass Flow Controller directly, and request a Return
Authorization Number (RAN). Equipment returned without an RAN will not
be accepted. Aalborg7 reserves the right to charge a fee to the customer for
equipment returned under warranty claims if the instruments are tested to be free
from warrantied defects.
Shipping charges are borne by the customer. Meters returned "collect" will not be
accepted!
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
2. INSTALLATION
2.1 Primary Gas Connections
Please note that the DFC Mass Flow Controller will not operate with liquids. Only
clean gases are allowed to be introduced into the instrument. If gases are contaminated they must be filtered to prevent the introduction of impediments into the
sensor.
1
Caution: It is the users responsibility to determine if the instrument is
appropriate for their OXYGEN application, and for specifying O2
cleaning service if required. Aalborg is not liable for any damage or
personal injury, whatsoever, resulting from the use of this instrument
for oxygen.
Attitude sensitivity of the Mass Flow Controller is +15F. This means that the gas flow
path of the Flow Controller must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the DFC transducer in a stable environment, free
of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminants.
Be sure to observe the direction of gas flow as indicated by the arrow on the front
of the meter when connecting the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tubings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!
DFC transducers are supplied with standard 1/4 inch (DFC 26 and 36) or 3/8 inch
(DFC 46), or optional 1/8 inch inlet and outlet compression fittings which should not
be removed unless the meter is being cleaned or calibrated for a new flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system.
(All DFC's are checked prior to shipment for leak-
age within stated limits. See specifications in this manual.)
2.2 Electrical Connections
DFC transducers require a +15VDC and -15VDC power supply to operate.
Additionally, a readout panel meter, digital multimeter, or other equivalent device
is required to observe the flow signal in analog mode. A variable analog 0-5VDC
reference input is required for DFC models to operate in analog mode. The
Aalborg7 SDPROC accessory Command Modules offer a convenient and compact means to fulfill these needs.
2.3 Communication Parameters and Connections
Baud rate: 9600 baud Stop bit: 1
Data bits: 8 Parity: NON
RS-232 option: Crossover connection has to be established:
Pin 11 (TX) of the “D” connector has to be connected to RX
(pin 2 on the DB9 connector).
Pin 24 (RX) of the “D” connector has to be connected to TX
(pin 3 on the DB9 connector).
Pin 20 (Common) of the “D” connector has to be connected
to GND (pin 5 on the DB9 connector).
2
RS-485 option:
The RS485 converter/adapter has to be configured for: multidrop, 2 wire, half duplex
mode. The transmitter circuit has to be enabled by TD or RTS (depending on which
is available on the converter/adapter). Settings for the receiver circuit usually should
follow the selection made for the transmitter circuit in order to eliminate Echo.
Pin 11 (-) of the “D” connector has to be connected to
T- or R- on the RS-485 converter/adapter.
Pin 24 (+) of the “D” connector has to be connected to
T+ or R+ on the RS-485 converter/adapter.
Pin 20 (Common) of the “D” connector has to be connected
to GND on the RS-485 converter/adapter.
3
4
FIGURE b-1, WIRING DIAGRAM FOR DFC TRANSDUCERS.
PIN FUNCTION
1 +15 VDC Power Supply
2 0-5 VDC Flow Signal (4-20mA Option)
3 0-5 VDC Set Point Input (4-20mA Option)
4 Force Valve Open Control
5 Force Valve Closed Control
6 (Reserved)
7 (Reserved)
8 Relay No. 1 - Common Contact
9 Relay No. 1 - Normally Open Contact
10 Relay No. 2 - Normally Closed Contact
11 RS485 (-) (Optional RS232 TX)
12 (No Connection)
13 Chassis Ground
14 -15 VDC Power Supply
15 Common, Signal Ground For Pin 2
16 Common, Signal Ground For Pin 3
17 (Optional) RS232 Common
18 Common, Power Supply
19 Common
20 Common
21 Relay No. 1 - Normally Closed Contact
22 Relay No. 2 - Common Contact
23 Relay No. 2 - Normally Open Contact
24 RS485 (+) (Optional RS232 RX)
25 Return for Pin 2 (Optional 4-20 mA Only)
FIGURE b-2, DFC 25 PIN "D" CONNECTOR CONFIGURATION
Important notes:
In general, "D" Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
Make sure power is OFF when connecting or disconnecting any cables in the system.
The (+) and (-) power inputs are each protected by a 500mA M (medium time-lag)
resettable fuse. If a shorting condition or polarity reversal occurs, the fuse will cut
power to the flow transducer circuit. Disconnect the power to the unit, remove the
faulty condition, and reconnect the power. The fuse will reset once the faulty condition has been removed.
Cable length may not exceed 9.5 feet (3 meters).
Use of the DFC flow transducer in a manner other than that specified in this manual or in writing from Aalborg7, may impair the protection provided by the equipment.
5
3. PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary
conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar flow conduits are proportional to one another. Therefore, the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater sensor coils. Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit. The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass molecular based flow rates.
Additionally, DFC model Mass Flow Controllers incorporate a microprocessor and
non-volatile memory that stores all calibration factors and directly controls a proportionating solenoid valve. The digital closed loop control system of the DFC continuously compares the mass flow output with the selected flow rate. Deviations
from the set point are corrected by compensating valve adjustments, thus maintaining the desired flow parameters with a high degree of accuracy.
Free PC Software with Gas Blending and Programmable Flow functions.
4. SPECIFICATIONS
FLOW MEDIUM: Please note that DFC Mass Flow Controllers are designed to
work with clean gases only. Never try to meter or control flow rates of liquids
with any DFC.
CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70
F
F (21.1 FC)] unless otherwise requested or stated.
ENVIRONMENTAL (PER IEC 664): Installation Level II; Pollution Degree II.
6
4.1 DFC 26/36/46 Mass Flow Controllers
ACCURACY: +
1% of full scale, including linearity for gas temperatures ranging from
59
F
F to 77 FF (15 FC to 25 FC) and pressures of 10 to 60 psia (0.7 to 4.1 bars).
REPEATABILITY: +
0.15% of full scale.
TEMPERATURE COEFFICIENT: 0.1% of full scale/
F
C.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: 1.0 to 2.0 second to within ±2% of set point over 20% to 100%
of full scale.
GAS PRESSURE: 500 psig (34.5 bars) maximum; optimum pressure is 20 psig
(1.4 bars); 25 psig (1.7 bars gauge) for DFC46.
DIFFERENTIAL PRESSURES REQUIRED: 5 to 50 psig (0.35 to 3.34 bars) differential
pressures. Optimum differential pressure is 25 psid (1.7 bars). See Table IV for
pressure drops associated with various models and flow rates.
MAXIMUM PRESSURE DIFFERENTIAL: 50 psid for DFC26/DFC36, 40 psid for
DFC46.
GAS AND AMBIENT TEMPERATURE: 32
F
F to 122 FF (0 FC to 50 FC). 14 FF to 122
F
F (-10 FC to 50 FC) - Dry gases only.
RELATIVE GAS HUMIDITY: Up to 70%.
MAXIMUM INTERNAL LEAK: 0.5% FS.
LEAK INTEGRITY: 1 x 10-9sccs He maximum to the outside environment.
ATTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to verti-
cal; standard calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mA
optional (50-500 Ω loop resistance); 20 mV peak to peak max noise.
Contact your distributor or Aalborg7for optional RS232 or IEEE488 interfaces.
COMMAND SIGNAL: 0-5 VDC (200K Ω input impedance); 4-20 mA optional.
TRANSDUCER INPUT POWER: DFC - +15 +
5% VDC, 450 mA max, 6.75 watts max;
-15 +
5% VDC, 450 mA max; 6.75 watts max;
Power inputs are each protected by a 500mA M (medium time-lag) resettable
fuse, and an inverse shunt rectifier diode for polarity protection.
WETTED MATERIALS: 316 stainless steel, 416 stainless steel, VITON7 O-rings;
BUNA-N7, EPR or KALREZ7 O-rings are optional.
7
Aalborg7 makes no expressed or implied guarantees of corrosion resistance of
mass flow meters as pertains to different flow media reacting with components of
meters. It is the customers' sole responsibility to select the model suitable for a
particular gas based on the fluid contacting (wetted) materials offered in the different models.
INLET AND OUTLET CONNECTIONS: 1/4" (DFC 26/DFC36) or 3/8" (DFC46)
compression fittings standard. 1/8" (DFC26) or 3/8" (DFC26/DFC36)
compression fittings or 1/4" (DFC26/DFC36) VCR7 fittings are optional.
TRANSDUCER INTERFACE CABLE: Flat cable with 25-pin "D" connectors on the ends
is standard. Optional shielded cable is available with male/female 25-pin "D" connector ends. [Cable length may not exceed 9.5 feet (3 meters)].
FREE PC SOFTWARE WITH GAS BLENDING AND PROGRAMMABLE FLOW FUNCTIONS.
4.2 CE Compliance
Any model DFC bearing a CE marking on it, is in compliance with the below
stated test standards currently accepted.
EMC Compliance with 89/336/EEC as amended;
Emission Standard: EN 55011:1991, Group 1, Class A
Immunity Standard: EN 55082-1:1992
8
FLOW RANGES
TABLE I DFC 26 LOW FLOW MASS FLOW CONTROLLERS*
TABLE II DFC 36 MEDIUM FLOW MASS FLOW CONTROLLERS*
TABLE III DFC 46 HIGH FLOW MASS FLOW CONTROLLERS*
* Flow rates are stated for Nitrogen at STP conditions [i.e. 70 FF (21.1 FC) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
9
CODE scc/min [N2]
CODE
std liters/min [N
2
]
01 0 to 10 07 0 to 1
02 0 to 20 08 0 to 2
03
0 to 50
09
0 to 5
04 0 to 100 10
0 to 10
05
0 to 200
06 0 to 500
CODE standard liters/min [N2]
11
0 to 15
30 20
31 30
32 40
33 50
CODE standard liters/min [N2]
40 60
41 80
42 100
TABLE IV PRESSURE DROPS
TABLE V APPROXIMATE WEIGHTS
10
MODEL
FLOW RATE
[std liters/min]
MAXIMUM PRESSURE DROP
[mm H2O] [psid]
[mbar]
DFC 26
up to 10
720 1.06 75
DFC 36
15 2630 3.87 266
20
1360 2.00 138
30
2380 3.50 241
40
3740
5.50
379
50 5440 8.00 551
DFC 46
60
7480 11.00 758
100
12850 18.89 1302
MODEL WEIGHT SHIPPING WEIGHT
DFC 26 transmitter 2.20 lbs (1.00 kg) 3.70 lbs (1.68 kg)
DFC 36/46 transmitter 2.84 lbs (1.29 kg) 4.34 lbs (1.97 kg)
5. OPERATING INSTRUCTIONS
5.1 Preparation and Warm Up
It is assumed that the Mass Flow Controller or Controller has been correctly
installed and thoroughly leak tested as described in section (2). Make sure the
flow source is OFF. Power up the transducer using your own power supply (or
switch the POWER switch to the ON position at the front panel of your SDPROC
Command Module). Allow the Mass Flow Meter or Controller to warm-up for a
minimum of 15 minutes.
During initial powering of the DFC transducer, the flow output signal will be indicating a higher than usual output. This is indication that the DFC transducer has
not yet attained it's minimum operating temperature. This condition will automatically cancel within a few minutes and the transducer should eventually zero.
5.2 Flow Signal Output Readings
The flow signal output can be viewed on the panel meter, digital multimeter, or
other display device used as shown in figure b-1.
When using the accessory SDPROC Command Module the flow rate will appear
on the display at the front panel. The observed reading is a 0 to 100% indication
(direct engineering units are optional). [If using a multichannel readout, be sure
that the CHANNEL selector switch is set to the correct channel.]
Analog output flow signals of 0 to 5 VDC or optional 4 to 20 mA are attained at
the appropriate pins the 25-pin "D" connector (see Figure b-2) on the side of the
DFC transducer. The output flow signal is also available at the DATA connector on
the rear panel of the SDPROC Command Module.
Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. The full scale range and gas for which your meter has been
calibrated are shown on the flow transducer's front label.
For information on the RS485 or optional RS232 interfaces please contact your
distributor or Aalborg7.
5.3 Swamping Condition
If a flow of more than 10% above the maximum flow rate of the Mass Flow
Controller is taking place, a condition known as "swamping" may occur. Readings
of a "swamped" meter cannot be assumed to be either accurate or linear. Flow
must be restored to below 110% of maximum meter range. Once flow rates are
lowered to within calibrated range, the swamping condition will end. Operation of
the meter above 110% of maximum calibrated flow may increase recovery time.
11
Caution: If the valve is left in the AUTO (control) or OPEN mode for an
extended period of time, it may become warm or even hot to the touch.
Use care in avoiding direct contact with the valve during operation.
5.4 Set Point Reference Signal
DFC flow controllers have a built-in solenoid valve and allow the user to set the
flow to any desired flow rate within the range of the particular model installed. This
valve is normally closed when no power is applied.
The set point input in analog mode responds to an analog 0 to 5 VDC reference
voltage or 4-20mA reference current. This voltage is a linear representation of 0
to 100% of the full scale mass flow rate. Response time to set point changes are
1 second to within 2% of the final flow over 25 to 100% of full scale.
A variable 0 to 5VDC analog signal may be applied directly to the SET POINT and
COMMON connections of the DFC transducer (see Figure b-1).
If a potentiometer is used to adjust the set point reference signal its value should
be between 5K to 100K ohm and it should be capable of at least 10-turns or more
for adjustment.
5.5 Valve OFF Control
It may, at times, be desirable to set the flow and maintain that setting while being
able to turn the flow control valve off and on again. This can be accomplished via
pin 5 on the 25-pin "D" connector. When 0 VDC (LOW) signal is applied (connection
via a relay, switch or NPN open collector transistor is permissible), the solenoid
valve is not powered and therefore will remain normally closed. Conversely, when
the pin is disconnected from 0 VDC ("floating”) the solenoid valve will remain active.
The simplest means for utilizing the VALVE OFF control feature, is to connect a
toggle switch between the COMMON and FORCE VALVE CLOSED pins of the
DFC transducer. Toggling the switch on and off will allow for activating and deactivating the solenoid valve.
5.6 Valve Open /Purge
At times, it may be necessary to purge the flow system with a neutralizing gas
such as pure dry nitrogen. The DFC transducer is capable of a full open condition
for the solenoid valve, regardless of set point conditions. Connecting the FORCE
VALVE OPEN pin (pin 4 on 25-pin "D" connector) to ground will fully open the
valve. This connection can be made with a relay, switch or NPN open collector
transistor. Conversely, when the pin is disconnected from 0 VDC ("floating”) the
solenoid valve will remain active. (Note: in digital mode hardware I/O overrides
software command).
The simplest means for utilizing the VALVE OPEN control feature, is to connect a toggle switch between the COMMON and FORCE VALVE OPEN pins of the DFC transducer. Toggling the switch on will cause the valve to open fully and purge the system.
Toggling the switch off will allow the solenoid valve to resume normal activity.
12
Caution: If the valve is left in the AUTO (control) or OPEN mode for an
extended period of time, it may become warm or even hot to the touch.
Use care in avoiding direct contact with the valve during operation.
5.7 Analog Interface Configuration
The DFC can be configured for the desired range and scaling by selection of
analog board (see APPENDIX 1 on page 21) jumpers as follows:
0 to 5 V output: Jumper pins 2 and 3 of JP6.
Jumper pins 2 and 3 of JP3.
Jumper pins 2 and 3 of JP5.
Jumper pins 1 and 2 of JP12.
0 to 5 V input: Jumper pins 2 and 3 of JP2.
Jumper pins 2 and 3 of JP4.
Jumper pins 1 and 2 of JP11.
0 to 10 V output: As for 0 to 5V, but jumper pins 2 and 3 of JP12.
4 to 20 mA output:Jumper pins 1 and 2 of JP6.
Jumper pins 1 and 2 of JP3.
Jumper pins 1 and 2 of JP5.
Jumper pins 1 and 2 of JP12.
4 to 20 mA input: Jumper pins 1 and 2 of JP2.
Jumper pins 1 and 2 of JP4.
Jumper pins 1 and 2 of JP11.
By default the DFC is configured for analog input output ranges set to 0-5V
(unless ordered with special configuration).
6. MAINTENANCE
6.1 Introduction
It is important that the Mass Flow Controller is used with clean, filtered gases only.
Liquids may not be metered. Since the RTD sensor consists, in part, of a small capillary stainless steel tube, it is prone to occlusion due to impediments or gas crystallization. Other flow passages are also easily obstructed. Therefore, great care
must be exercised to avoid the introduction of any potential flow impediment. To
protect the instrument a 50 micron (DFC26) or 60 micron (DFC36/46) filter is built
into the inlet of the flow transducer. The filter screen and the flow paths may require
occasional cleaning as described below. There is no other recommended maintenance required. It is good practice, however, to keep the meter away from vibration,
hot or corrosive environments and excessive RF or magnetic interference.
If periodic calibrations are required they should be performed by qualified personnel and calibrating instruments, as described in section (7). It is recommended that units are returned to Aalborg7 for repair service and calibration.
13
CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATORY
THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY
PURGED AND NEUTRALIZED OF TOXIC, BACTERIOLOGICALLY
INFECTED, CORROSIVE OR RADIOACTIVE CONTENTS.
6.2 Flow Path Cleaning
Before attempting any disassembly of the unit for cleaning, try inspecting the flow
paths by looking into the inlet and outlet ends of the meter for any debris that may
be clogging the flow through the meter. Remove debris as necessary. If the flow
path is not unclogged, then proceed with steps below.
Do not attempt to disassemble the sensor. If blockage of the sensor tube is not
alleviated by flushing through with cleaning fluids, please return meter to Aalborg7
for servicing.
6.2.1 Restrictor Flow Element (RFE)
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths. The particular RFE used in a given Mass Flow Controller depends on
the gas and flow range of the instrument.
6.2.2 DFC 26 models
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.
Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying.
Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow
paths by flowing clean dry gas through.
Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.
It is advisable that at least one calibration point be checked after re installing the
inlet fitting - see section (7).
6.2.3 DFC 36/46 models
Unscrew the four socket head cap screws (two 10-24 and two 6-32) at the inlet
side of the meter. This will release the short square block containing the inlet compression fitting.
The 60 micron filter screen will now become visible. Remove the screen. DO NOT
remove the RFE inside the flow transducer! Clean or replace each of the removed
parts as necessary. If alcohol is used for cleaning, allow time for drying.
14
Note: Overtightening will deform and render the RFE defective.
Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow
paths by flowing clean dry gas through.
Re-install the inlet parts and filter screen. Be sure that no dust has collected on
the O-ring seal.
It is advisable that at least one calibration point be checked after re installing the
inlet fitting - see section (7).
6.2.4 Valve Maintenance (DFC)
The solenoid valve consists of 316 and 416 stainless steel, and VITON7 (or
optional EPR or KALREZ7) O-rings and seals. No regular maintenance is required
except for periodic cleaning.
Various corrosive gases may demand more frequent replacement of VITON7
O- rings and seals inside the valve. Be sure to use an elastomer material, appro-
priate for your specific gas application. Contact your distributor or Aalborg7 for
optional sealing materials available.
Set the DFC into PURGE mode, and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening the valve
is to remove the plastic cap on top of the valve, and turn the set screw counterclockwise until it stops. Set valve for the closed position. Apply an inlet pressure
of 5 psig and atmospheric pressure at the outlet. If a small flow occurs, turn the
set screw on top of the solenoid valve clockwise until the flow through the DFC
just stops.
7. CALIBRATION PROCEDURES
7.1 Flow Calibration
Aalborg7 Instruments' Flow Calibration Laboratory offers professional calibration
support for Mass Flow Meters and Controllers, using precision calibrators under
strictly controlled conditions. NIST traceable calibrations are available.
Calibrations can also be performed at customers' site using available standards.
Factory calibrations are performed using NIST traceable precision volumetric calibrators incorporating liquid sealed frictionless actuators.
Generally, calibrations are performed using dry nitrogen gas. The calibration can
then be corrected to the appropriate gas desired based on relative correction [K]
factors shown in the gas factor table see Appendix 2. A reference gas, other than
nitrogen, may be used to closer approximate the flow characteristics of certain
gases. This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration. The appro-
15
Note: Removal of the factory installed calibration seals and/or any
adjustments made to the meter, as described in this section, will void
any calibration warranty applicable.
priate relative correction factor should be recalculated see section (9).
It is standard practice to calibrate Mass Flow Meters/Controllers with dry nitrogen
gas at 70
F
F (21.1EC), 20 psig (1.4 bars) [25 psig (1.7 bars) for DFC46] inlet pressure and 0 psig (0 bar) outlet pressure. It is best to calibrate the DFC transducers
to actual operating conditions. Specific gas calibrations of non-toxic and non-corrosive gases are available at specific conditions. Please contact your distributor or
Aalborg7 for a price quotation.
It is recommended that a flow calibrator of at least four times better collective accuracy than that of the Mass Flow Controller to be calibrated be used. Equipment
required for calibration includes a flow calibration standard and a certified high
sensitivity multimeter (which together have a collective accuracy of +
0.25% or better), an insulated (plastic) screwdriver, a flow regulator (example: metering needle
valve) installed upstream from the Mass Flow Controller and a pressure regulated
source of dry filtered nitrogen gas (or other suitable reference gas).
The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.
7.2 Calibration of DFC Mass Flow Controllers
All adjustments to the DFC calibration and control loop tuning are accomplished
using the RS485 (or optional RS232) interface in conjunction with setup and calibration software available from Aalborg7. The sensor zero is automatically
adjusted internally whenever the control valve is fully closed (set point less than
2% of full scale) and the unit is warmed up.
DFC Mass Flow Meters may be field recalibrated/checked using the setup and
calibration program for the same range they were originally factory calibrated for.
Flow range changes may require a different Restrictor Flow Element (RFE).
Additionally, a different Solenoid Valve Orifice for the DFC Mass Flow Controller
(see Table VI) may also be required. Consult your distributor or Aalborg7 for more
information.
TABLE VI DFC SOLENOID VALVE ORIFICE SELECTION TABLE
16
ORIFICE PART NUMBER
FLOW RATE [N2]
OR.020
10 to 1000 sccm
OR.040 1 to 5 slpm
OR.055 5 to 10 slpm
OR.063 10 to 15 slpm
OR.094 20 to 50 slpm
OR.125 50 to 100 slpm
8. TROUBLESHOOTING
8.1 Common Conditions
Your Mass Flow Controller was thoroughly checked at numerous quality control
points during and after manufacturing and assembly operations. It was calibrated in accordance to your desired flow and pressure conditions for a given gas or
a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
Are all cables connected correctly?
Are there any leaks in the installation?
Is the power supply correctly selected according to requirements? When several
meters are used a power supply with appropriate current rating should be selected.
Were the connector pinouts matched properly? When interchanging with other
manufacturers' equipment, cables and connectors must be carefully wired for correct pin configurations.
Is the pressure differential across the instrument sufficient?
For best results it is recommended that instruments are returned to the factory
for servicing. See section 1.3 for return procedures.
8.2 Technical Assistance
Aalborg7 Instruments will provide technical assistance over the phone to qualified
repair personnel. Please call our Technical Assistance at (845) 770-3000. Please
have your Serial Number and Model Number ready when you call.
17
8.3 Troubleshooting Guide
18
Remedy
check connection of power supply
disconnect DFC transducer from power
supply; remove the shorting condition
or check polarities;
fuse resets automatically
disconnect power cord from AC
supply; remove and inspect fuses at
AC power input connector of SDPROC;
replace as necessary
REMOVE CAUSE OF SHORT CIRCUIT!
flush clean or disassemble to remove
impediments or replace
flush clean or disassemble to remove
impediments or return to factory for
replacement
return to factory for replacement
re-adjust valve (section 6.2.4)
disconnect DFC transducer from
power supply; remove the shorting
condition or check polarities; fuse
resets automatically
REMOVE CAUSE OF SHORT CIRCUIT!
apply appropriate gas pressure
flush clean or disassemble to remove
impediments or replace
signal and power supply commons are
different
apply appropriate gas pressure
check cables and all connections or
replace
re-adjust set point
re-adjust valve (section 6.2.4)
locate and correct
return to factory for replacement
Likely Reason
power supply off
fuse blown
(DFC)
fuse blown
(SDPROC)
filter screen obstructed at inlet
occluded sensor tube
pc board defect
valve adjustment wrong
fuse blown
(DFC)
inadequate gas pressure
filter screen obstructed at inlet
ground loop
inadequate gas pressure
cable or connector
malfunction
set point is too low
(<2% of full scale)
valve adjustment wrong
gas leak
pc board defective
Indication
lack of
reading
or output
output reads
at (+) or (-)
saturation
only
flow reading
does not
coincide with
the set point
(DFC models
only)
no response
to set point
(DFC models
only)
unstable or no
zero reading
19
Indication
full scale
output at
"no flow"
condition or
with valve
closed
calibration off
DFC valve
does not work
in open
position
DFC valve
does not
work in close
position
Remedy
return to factory for replacement
locate and repair
use matched calibration
see K factor tables in APPENDIX 2
locate and correct
return to factory for replacement
flush clean or disassemble to remove
impediments
flush clean or disassemble to remove
impediments or return to factory for
replacement
flush clean or disassemble to remove
impediments or replace
check for any tilt or change in the
mounting of the transducer; generally,
units are calibrated for horizontal
installation (relative to the sensor tube)
re-adjust valve (section 6.2.4)
return to factory for replacement
check cable and connectors or replace
decrease pressure to correct level
adjust appropriately
re-adjust valve (section 6.2.4)
return to factory for replacement
check cable and connectors or replace
disassemble to remove impediments
or return to factory
Likely Reason
defective sensor
gas Leak
gas metered is not the same
as what meter was calibrated
for
composition of gas changed
gas leak
pc board defective
RFE dirty
occluded sensor tube
filter screen obstructed at inlet
transducer is not mounted
properly
incorrect valve adjustment
pc board defect
cable or connectors
malfunction
differential pressure too high
insufficient inlet pressure
incorrect valve adjustment
pc board defect
cable or connectors
malfunction
orifice obstructed
20
Q
O
= Q
a
= Q
r
x K = 1000 X 0.9926 = 992.6 sccm
where K = relative K factor to reference gas (oxygen to nitrogen)
1
d X C
p
where d = gas density (gram/liter)
C
p
= coefficient of specific heat (cal/gram)
Q
a
K
a
Q
r
K
r
where Qa= mass flow rate of an actual gas (sccm)
Q
r
= mass flow rate of a reference gas (sccm)
K
a
= K factor of an actual gas
K
r
= K factor of a reference gas
=
9. CALIBRATION CONVERSIONS FROM REFERENCE
GASES
The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:
=
K
=
K
gas
Note in the above relationship that d and Cp are usually chosen at standard conditions of one atmosphere and 25
F
C.
If the flow range of a Mass Flow Controller or Controller remains unchanged, a
relative K factor is used to relate the calibration of the actual gas to the reference
gas.
For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:
2
APPENDIX 1
COMPONENTS DIAGRAMS
21
DFC Digital PC Board
(Primary Side)
APPENDIX 1
(CONTINUED)
22
DFC Digital PC Board
(Secondary Side)
APPENDIX 1
(CONTINUED)
23
DFC Analog PC Board
(Primary Side)
APPENDIX 1
(CONTINUED)
24
DFC Analog PC Board
(Secondary Side)
25
APPENDIX 2
GAS FACTOR TABLES (“K” FACTORS)
CAUTION: K-Factors at best are only an approximation. K factors should not
be used in applications that require accuracy better than +/- 5 to 10%.
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Acetylene C2H
2
.5829 .4036 1.162
Air 1.0000 .240 1.293
Allene (Propadiene) C3H
4
.4346 .352 1.787
Ammonia NH
3
.7310 .492 .760
Argon Ar
Argon AR-1 (>10 L/min)
1.4573
1.205
.1244
.1244
1.782
1.782
Arsine AsH
3
.6735 .1167 3.478
Boron Trichloride BCl
3
.4089 .1279 5.227
Boron Trifluoride BF
3
.5082 .1778 3.025
Bromine Br
2
.8083 .0539 7.130
Boron Tribromide Br
3
.38 .0647 11.18
Bromine PentaTrifluoride BrF
5
.26 .1369 7.803
Bromine Trifluoride BrF
3
.3855 .1161 6.108
Bromotrifluoromethane (Freon-13 B1) CBrF
3
.3697 .1113 6.644
1,3-Butadiene C4H
6
.3224 .3514 2.413
Butane C4H
10
.2631 .4007 2.593
1-Butene C4H
8
.2994 .3648 2.503
2-Butene C4H8 CIS
.324 .336 2.503
2-Butene C4H8TRANS
.291 .374 2.503
Carbon Dioxide CO
2
Carbon Dioxide CO2-1 (>10 L/min)
.7382
.658
.2016
.2016
1.964
1.964
Carbon Disulfide CS
2
.6026 .1428 3.397
Carbon Monoxide C0
1.00 .2488 1.250
Carbon Tetrachloride CCl
4
.31 .1655 6.860
Carbon Tetrafluoride (Freon-14)CF
4
.42 .1654 3.926
Carbonyl Fluoride COF
2
.5428 .1710 2.945
Carbonyl Sulfide COS
.6606 .1651 2.680
Chlorine Cl
2
.86 .114 3.163
Chlorine Trifluoride ClF
3
.4016 .1650 4.125
Chlorodifluoromethane (Freon-22)CHClF
2
.4589 .1544 3.858
Chloroform CHCl
3
.3912 .1309 5.326
Chloropentafluoroethane(Freon-115)C2ClF
5
.2418 .164 6.892
Chlorotrifluromethane (Freon-13) CClF
3
.3834 .153 4.660
CyanogenC2N
2
.61 .2613 2.322
CyanogenChloride CICN
.6130 .1739 2.742
Cyclopropane C3H
5
.4584 .3177 1.877
26
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Deuterium D
2
1.00 1.722 1.799
Diborane B2H
6
.4357 .508 1.235
Dibromodifluoromethane CBr2F
2
.1947 .15 9.362
Dichlorodifluoromethane (Freon-12) CCl2F
2
.3538 .1432 5.395
Dichlofluoromethane (Freon-21) CHCl2F
.4252 .140 4.592
Dichloromethylsilane (CH3)2SiCl
2
.2522 .1882 5.758
Dichlorosilane SiH2Cl
2
.4044 .150 4.506
Dichlorotetrafluoroethane (Freon-114) C2Cl2F
4
.2235 .1604 7.626
1,1-Difluoroethylene (Freon-1132A) C2H2F
2
.4271 .224 2.857
Dimethylamine (CH3)2NH
.3714 .366 2.011
Dimethyl Ether (CH3)2O
.3896 .3414 2.055
2,2-Dimethylpropane C3H
12
.2170 .3914 3.219
Ethane C2H
6
.50 .420 1.342
Ethanol C2H6O
.3918 .3395 2.055
Ethyl Acetylene C4H
6
.3225 .3513 2.413
Ethyl Chloride C2H5Cl
.3891 .244 2.879
Ethylene C2H
4
.60 .365 1.251
Ethylene Oxide C2H4O
.5191 .268 1.965
Fluorine F
2
.9784 .1873 1.695
Fluoroform (Freon-23) CHF
3
.4967 .176 3.127
Freon-11 CCl3F
.3287 .1357 6.129
Freon-12 CCl2F
2
.3538 .1432 5.395
Freon-13 CClF
3
.3834 .153 4.660
Freon-13B1 CBrF
3
.3697 .1113 6.644
Freon-14 CF
4
.4210 .1654 3.926
Freon-21 CHCl2F
.4252 .140 4.592
Freon-22 CHClF
2
.4589 .1544 3.858
Freon-113 CCl2FCClF
2
.2031 .161 8.360
Freon-114 C2Cl2F
4
.2240 .160 7.626
Freon-115 C2ClF
5
.2418 .164 6.892
Freon-C318 C4F
8
.1760 .185 8.397
Germane GeH
4
.5696 .1404 3.418
Germanium Tetrachloride GeCl
4
.2668 .1071 9.565
Helium He
Helium He-1 (>50 L/min)
Helium He-2 (>10-50 L/min)
1.454
2.43
2.05
1.241
1.241
1.241
.1786
.1786
.1786
Hexafluoroethane C2F6(Freon-116)
.2421 .1834 6.157
Hexane C6H
14
.1792 .3968 3.845
Hydrogen H2-1
Hydrogen H
2
-2 (>10-100 L)
Hydrogen H
2
-3 (>100 L)
1.0106
1.35
1.9
3.419
3.419
3.419
.0899
.0899
.0899
27
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Hydrogen Bromide HBr
1.000 .0861 3.610
Hydrogen Chloride HCl
1.000 .1912 1.627
Hydrogen Cyanide HCN
.764 .3171 1.206
Hydrogen Fluoride HF
.9998 .3479 .893
Hydrogen Iodide HI
.9987 .0545 5.707
Hydrogen Selenide H2Se
.7893 .1025 3.613
Hydrogen Sulfide H2S
.80 .2397 1.520
Iodine Pentafluoride IF
5
.2492 .1108 9.90
Isobutane CH(CH3)
3
.27 .3872 3.593
Isobutylene C4H
6
.2951 .3701 2.503
Krypton Kr
1.453 .0593 3.739
Methane CH
4
Methane CH4-1 (>=10 L/min)
.7175
.75
.5328
.5328
.715
.715
Methanol CH
3
.5843 .3274 1.429
Methyl Acetylene C3H
4
.4313 .3547 1.787
Methyl Bromide CH3Br
.5835 .1106 4.236
Methyl Chloride CH3Cl
.6299 .1926 2.253
Methyl Fluoride CH3F
.68 .3221 1.518
Methyl Mercaptan CH3SH
.5180 .2459 2.146
Methyl Trichlorosilane (CH3)SiCl
3
.2499 .164 6.669
Molybdenum Hexafluoride MoF
6
.2126 .1373 9.366
Monoethylamine C2H5NH
2
.3512 .387 2.011
Monomethylamine CH3NH
2
.51 .4343 1.386
Neon NE
1.46 .246 .900
Nitric Oxide NO
.990 .2328 1.339
Nitrogen N
2
1.000 .2485 1.25
Nitrogen Dioxide NO
2
.737 .1933 2.052
Nitrogen Trifluoride NF
3
.4802 .1797 3.168
Nitrosyl Chloride NOCl
.6134 .1632 2.920
Nitrous Oxide N2O
.7128 .2088 1.964
Octafluorocyclobutane (Freon-C318) C4F
8
.176 .185 8.397
Oxygen O
2
.9926 .2193 1.427
Oxygen Difluoride OF
2
.6337 .1917 2.406
Ozone
.446 .195 2.144
Pentaborane B5H
9
.2554 .38 2.816
Pentane C5H
12
.2134 .398 3.219
Perchloryl Fluoride ClO3F
.3950 .1514 4.571
Perfluoropropane C3F
8
.174 .197 8.388
Phosgene COCl
2
.4438 .1394 4.418
Phosphine PH
3
.759 .2374 1.517
28
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Oxychloride POCl
3
.36 .1324 6.843
Phosphorous Pentafluoride PH
5
.3021 .1610 5.620
Phosphorous Trichloride PCl
3
.30 .1250 6.127
Propane C3H
8
.35 .399 1.967
Propylene C3H
6
.40 .366 1.877
Silane SiH
4
.5982 .3189 1.433
Silicon Tetrachloride SiCl
4
.284 .1270 7.580
Silicon Tetrafluoride SiF
4
.3482 .1691 4.643
Sulfur Dioxide SO
2
.69 .1488 2.858
Sulfur Hexafluoride SF
6
.2635 .1592 6.516
Sulfuryl Fluoride SO2F
2
.3883 .1543 4.562
Tetrafluoroethane (Forane 134A) CF3CH2F
.5096 .127 4.224
Tetrafluorohydrazine N2F
4
.3237 .182 4.64
Trichlorofluoromethane (Freon-11) CCl3F
.3287 .1357 6.129
Trichlorosilane SiHCl
3
.3278 .1380 6.043
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
2
FCClF
2
.2031 .161 8.36
Triisobutyl Aluminum (C4H9)AL
.0608 .508 8.848
Titanium Tetrachloride TiCl
4
.2691 .120 8.465
Trichloro Ethylene C2HCl
3
.32 .163 5.95
Trimethylamine (CH3)3N
.2792 .3710 2.639
Tungsten Hexafluoride WF
6
.2541 .0810 13.28
Vinyl Bromide CH2CHBr
.4616 .1241 4.772
Vinyl Chloride CH2CHCl
.48 .12054 2.788
Xenon Xe
1.44 .0378 5.858
29
APPENDIX 3
DIMENSIONAL DRAWINGS
DFC 26 Mass Flow Controller
NOTES: Aalborg7 reserves the right to change designs and dimensions at its
sole discretion at any time without notice. For certified dimensions please
contact Aalborg7.
30
DFC 36/46 Mass Flow Controller
NOTES: Aalborg7 reserves the right to change designs and dimensions at its
sole discretion at any time without notice. For certified dimensions please
contact Aalborg7.
APPENDIX 4
SENDING COMMANDS TO THE DFC
RS485
The standard DFC comes with an RS485 interface. The protocol described below
allows for the unit using either a custom software program or a “dumb terminal”.
All values are sent as printable ASCII characters. The start character is always !and
the command string is terminated with a carriage return (line feeds are
automatically stripped out by the DFC:
!<Addr>, <Cmd>,Arg1,Arg2,Arg3,Arg4<CR>
WHERE:
! Start character
Addr RS485 device address in the ASCII representation of
hexadecimal (00 through FF are valid).**
Cmd The one or two character command from the table above.
Arg1 to Arg4 The command arguments from the table above.
Multiple arguments are comma delimited.
CR Carriage return character.
** Default address for all units is 11.
Several examples of commands follow.
All assume that the DFC has been configured for address 15 (0F hex) on the RS485 bus:
1. To put the unit in digital mode: !0F,M,D<CR>
The DFC will reply: !0FMD<CR>
2. To set the flow of 50% of FS: !0F,S,50.0<CR>
The DFC will reply: !0FS50.0<CR>
3. To get a flow reading: !0F,F<CR>
The DFC will reply: !0F50.0<CR>
(Assuming the flow is at 50% FS)
4. Set the high alarm limit to 5% above Set point: !0F,A,H,5.0<CR>
The DFC will reply: !0FA5.0<CR>
31
32
333435
36
37
APPENDIX 5
CALIBRATION TABLE: GAS INDEPENDENT VARIABLES
INDEX
NAME
DATA
TYPE
NOTES
0 BlankSDPROC char[10] Do not modify. For internal use only.
1 SerialNumber char[20]
2 ModelNumber char[20]
3 SoftwareVer char[10]
4 TimeSinceCalHr float Time since last calibration in hours.
5 Options uint Misc. Options.
6 AOutOffset_mA int
7 AddressRS485 char[3] Two character address for RS485 only.
8 AInScaleV float
9 AInOffsetV float
10 AInScale_mA float
11 AInOffset_mA float
12 AoutScaleV float
13 AoutScale_mA float
14 SensorZero uint
15 Klag[0] float
16 Klag[1] float
17 Klag[2] float
18 Klag[3] float
19 Klag[4] float
20 Klag[5] float
21 Reserved float
22 Reserved float
23 Reserved float
24 Reserved float
25 Reserved float
26 Reserved float
27 Kgain[0] float
28 Kgain[1] float
38
INDEX NAME
DATA
TYPE
NOTES
29 Kgain[2] float
30 Kgain[3] float
31 Kgain[4] float
32 Kgain[5] float
33 Reserved float
34 Reserved float
35 Reserved float
36 Reserved float
37 Reserved float
38 Reserved float
39 ValveTbl[0][open] float Index 0: Valve actuation. Must be 0.0.- Do Not Alter
40 ValveTbl[0][valve value] uint Index 0: Valve: D/A value - Do Not Alter
41 ValveTbl[1][flow] float Index 1: Actual valve opening in % FS. Do Not Alter
42 ValveTbl[1][valve value] uint Index 1: Valve D/A counts corresponding to flow. Do Not Alter
43 ValveTbl[2][flow] float Do Not Alter
44 ValveTbl[2][valve value] uint Do Not Alter
45 ValveTbl[3][flow] float Do Not Alter
46 ValveTbl[3][valve value] uint Do Not Alter
47 ValveTbl[4][flow] float Do Not Alter
48 ValveTbl[4][valve value] uint Do Not Alter
49 ValveTbl[5][flow] float Do Not Alter
50 ValveTbl[5][valve value] uint Do Not Alter
51 ValveTbl[6][flow] float Do Not Alter
52 ValveTbl[6][valve value] uint Do Not Alter
53 ValveTbl[7][flow] float Do Not Alter
54 ValveTbl[7][valve value] uint Do Not Alter
55 ValveTbl[8][flow] float Do Not Alter
56 ValveTbl[8][valve value] uint Do Not Alter
57 ValveTbl[9][flow] float Index 9: Valve fully open. Must be 1.0- Do Not Alter
58 ValveTbl[9][valve value] uint Index 9: D/A count for a fully open valve. Must be 4095.- Do Not Alter
59 AutoTune Time Constant uint Do Not Alter
CALIBRATION TABLE: GAS DEPENDENT VARIABLES
39
INDEX NAME
DATA
TYPE
NOTES
100 GasIdentifer char[27]
101 FullScaleRange float
102 StdTemp float
103 StdPressure float
104 StdDensity float
105 CalibrationGas char[27]
106 CalibratedBy char[20]
107 CalibratedAt char[20]
108 DateCalibrated char[10]
109 DateCalibrationDue char[10]
110 PID_Kp float
111 PID_Ki float
112 PID_Kd float
113 SensorTbl[0][Sensor Value] uint Index 0: Must be 120 (zero value)
114 SensorTbl[0][Flow] float Index 0: Must be 0.0 (zero PFS)
115 SensorTbl[1][Sensor Value] uint A/D value from sensor.
116 SensorTbl[1][Flow] float Actual Flow in PFS.
117 SensorTbl[2][Sensor Value] uint
118 SensorTbl[2][Flow] float
119 SensorTbl[3][Sensor Value] uint
120 SensorTbl[3][Flow] float
121 SensorTbl[4][Sensor Value] uint
122 SensorTbl[4][Flow] float
123 SensorTbl[5][Sensor Value] uint
124 SensorTbl[5][Flow] float
125 SensorTbl[6][Sensor Value] uint
126 SensorTbl[6][Flow] float
127 SensorTbl[7][Sensor Value] unit
128 SensorTbl[7][Flow] float
40
INDEX NAME
DATA
TYPE
NOTES
129 SensorTbl[8][Sensor Value] uint
130 SensorTbl[8][Flow] float
131 SensorTbl[9][Sensor Value] uint
132 SensorTbl[9][Flow] float
133 SensorTbl[10][Sensor Value] uint
134 SensorTbl[10][Flow] float Flow in PFS. Should be 1.0
135
136
137
Note: Values will be available for selected gas only.
APPENDIX 6
NOTE: Follow Return Procedures In Section 1.3.
41
WARRANTY
Aalborg7 Mass Flow Systems are warranted against parts and workmanship
for a period of one year from the date of purchase. Calibrations are warranted for up to six months after date of purchase, provided calibration seals
have not been tampered with. It is assumed that equipment selected by the
customer is constructed of materials compatible with gases used. Proper
selection is the responsibility of the customer. It is understood that gases
under pressure present inherent hazards to the user and to equipment, and
it is deemed the responsibility of the customer that only operators with basic
knowledge of the equipment and its limitations are permitted to control and
operate the equipment covered by this warranty. Anything to the contrary will
automatically void the liability of Aalborg7 and the provisions of this warranty. Defective products will be repaired or replaced solely at the discretion of
Aalborg7 at no charge. Shipping charges are borne by the customer. This
warranty is void if the equipment is damaged by accident or misuse, or has
been repaired or modified by anyone other than Aalborg7 or factory authorized service facility. This warranty defines the obligation of Aalborg7 and no
other warranties expressed or implied are recognized.
TRADEMARKS
Aalborg7 is a registered trademark of Aalborg7 Instruments.
Buna7 is a registered trademark of DuPont Dow Elastometers.
Kalrez7 is a registered trademark of DuPont Dow Elastomers.
VCR7 is a registered trademark of Swagelok Marketing Co.
Viton7 is a registered trademark of Dupont Dow Elastometers L.L.C.
CAUTION:
This product is not intended to be used in life support applications!
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