AFC and PROC Mass Flow Controllers
AFC mass flow controllers include an electromagnetic control valve that allows the flow to be set to
any desired flow rate within the range of the particular model. The valve is normally closed as a
safety feature to ensure that gas flow is shut off in
case of a power outage.
AF mass flow meters and controllers are designed
to meter and control flow rates of gases.
AF mass flow meters and controllers are available
with flow ranges from 10 sccm to 100LPM [N
2].
Gases are connected by means of 1/4”, 3/8”, or
optional 1/8”compression fittings. These controllers may be used as bench top units or mounted by means of screws in the base.
Transducer power supply ports are fuse and
polarity protected.
Leak Integrity
1 x 10-9smL/sec of helium max to outside environment.
Mass Flow Systems
Complete Mass Flow Systems include Command
Modules, transducers and cables. Command modules contain appropriate power supplies, digital
panel meters with 3-1/2“ digit LED readouts and
high precision potentiometers.External RS-232 or
RS-485 are optional.
Switches in the front panels of Command Modules
select LOCAL or REMOTE reference signals, analog outputs are accessible through convenient 9
pin D-connectors.
Mass Flow Meters and Controllers
AFM
AFC
Specifications
Accuracy : ±1% of full scale, including linearity for gas
temperatures ranging from 59
o
F to 77oF (15oC
to 25
o
C) and pressures of 10 to 60 psia (0.7 to
4.1 bars); ±2% of full scale including linearity
ranging from 41
o
F to 122oF (5oC to 50oC) and
pressures of 5 to 150 psia (0.35 to 10.3 bars).
Repeatability : ±0.2% of full scale.
Time Constant :
AFM Series - 300 ms
AFC2600 (Qmax = 15 sL/min) - 300 ms
AFC3600 (Qmax = 50 sL/min) - 600 ms
AFC4600 (Qmax = 100 sL/min) - 600 ms
Response Time : AFM Series - Approximately 1 second to within
±2% of set flow rate for 25% to 100% of full
scale flow.
AFC2600 (Qmax = 15 sL/min) Approximately 1 second to within ±2% of set
flow rate for 25% to 100% of full scale flow.
AFC3600 (Qmax = 50 sL/min) and
AFC4600 (Qmax = 100 sL/min) Approximately 2 second to within ±2% of set
flow rate for 25% to 100% of full scale flow.
Temperature Coefficient : 0.1% of full scale/
o
C.
Pressure Coefficient :
0.01% of full scale/psi (0.07 bar).
Optimum Gas Pressure : 25 psig (1.73 bars).
Maximum Gas Pressure : 1000 psig (70 bars) maximum. Standard
calibration is at 20 psig (1.4 bars) inlet pressure.
Max. Pressure Drop : Refer to Table 4 and Table 5.
[cm H2O](at full scale flow)
Gas and Ambient Temp : 41
o
F to 122oF (5oC to 50oC).
Leak Integrity : 1 x 10
-9
smL/sec of helium maximum, to the
outside environment.
Materials in Fluid
316 stainless steel, 416 stainless steel, Viton
®
Contact :
O-rings. Optional o-rings, Neoprene
®
,
or Kalrez
®
.
Attitude Sensitivity :
No greater than +15 degree rotation from horizontal
to vertical; standard calibration is in horizontal position.
Output Signals : Linear 0 - 5 Vdc (2000Ω min. load impedance);
4 - 20 mA optional (0 - 500Ω loop resistance);
maximum noise 20 mV peak to peak.
Connections :
AFM/AFC2600,AFM/AFC3600 -1/4” compression
fittings, AFM/AFC4600 - 3/8” compression
fittings. Optional - 1/8” or 3/8” compression
fittings or 1/4” VCR
®
fittings.
Transducer Input Power : AFM/AFC2600 +15 ± 5% Vdc, 80 mA max,1.2W;
-15 ± 5% Vdc, 200 mA max, 3W;
AFC3600/AFC4600 +15 ± 5% Vdc, 220 mA max,
3.3W; -15 ±5% Vdc, 600 mA max, 9W.
Circuit Protection :
Circuit boards have built-in polarity reversal
protection. Replaceable fuses provide power
input protection.
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BULLETIN FM200408 AFC / AFM