Aalborg AFM Data sheet

Mass Flow Meters and Controllers
20
Model AF mass flow meters and controllers are designed to indicate flow rates and control set flow rates of gases.
Each of these units incorporates an advanced straight tube sensor in conjunction with flow passage elements constructed of stainless steel.
Design Features
Rigid metallic construction.
Maximum pressure of 1000 psig (70 bars).
0-5 Vdc or 4-20mA signals.
Leak integrity 1 x 10
-9
smL/sec of helium.
Accuracy of ±1% F.S.
Totalizer option.
Circuit protection.
Principles of Operation
Metered gases are divided into two laminar flow paths, one through the primary flow conduit, and the other through a capillary sensor tube. Both flow conduits are designed to ensure laminar flows and therefore the ratio of their flow rates is constant.
Two precision temperature sensing windings on the sensor tube are heated, and when flow takes place, gas carries heat from the upstream to the downstream windings. The resultant temperature differential is proportional to the change in resist­ance of the sensor windings.
A Wheatstone bridge design is used to monitor the temperature dependent resistance gradient on the sensor windings which is linearly proportional to the instantaneous rate of flow.
Output signals of 0 to 5Vdc or 4 to 20mA are gen­erated indicating mass molecular based flow rates of the metered gas.
In AFC mass flow controllers the combined gas streams flow through a proportionating electro­magnetic valve with an appropriately selected ori-
fice. The closed loop control circuit continuously
monitors the mass flow output and maintains it at the set flow rate.
Flow rates are unaffected by temperature and
pressure variations within stated limitations.
AFM
AFC
AFC Mass Flow Controller
NIST
Traceable Calibration
WWW.AALBORG.COM - E-MAIL : INFO@AALBORG.COM - PHONE 845.770.3000 - TOLL FREE IN U.S.A. AND CANADA 1.800.866.3837 - ORANGEBURG N.Y. U.S.A.
BULLETIN FM200408 AFC / AFM
AFC and PROC Mass Flow Controllers
AFC mass flow controllers include an electromag­netic control valve that allows the flow to be set to any desired flow rate within the range of the par­ticular model. The valve is normally closed as a safety feature to ensure that gas flow is shut off in case of a power outage.
AF mass flow meters and controllers are designed to meter and control flow rates of gases.
AF mass flow meters and controllers are available with flow ranges from 10 sccm to 100LPM [N
2].
Gases are connected by means of 1/4”, 3/8”, or optional 1/8”compression fittings. These con­trollers may be used as bench top units or mount­ed by means of screws in the base.
Transducer power supply ports are fuse and polarity protected.
Leak Integrity
1 x 10-9smL/sec of helium max to outside envi­ronment.
Mass Flow Systems
Complete Mass Flow Systems include Command Modules, transducers and cables. Command mod­ules contain appropriate power supplies, digital panel meters with 3-1/2“ digit LED readouts and high precision potentiometers.External RS-232 or RS-485 are optional.
Switches in the front panels of Command Modules select LOCAL or REMOTE reference signals, ana­log outputs are accessible through convenient 9 pin D-connectors.
Mass Flow Meters and Controllers
AFM
AFC
Specifications
Accuracy : ±1% of full scale, including linearity for gas
temperatures ranging from 59
o
F to 77oF (15oC
to 25
o
C) and pressures of 10 to 60 psia (0.7 to
4.1 bars); ±2% of full scale including linearity ranging from 41
o
F to 122oF (5oC to 50oC) and
pressures of 5 to 150 psia (0.35 to 10.3 bars).
Repeatability : ±0.2% of full scale.
Time Constant :
AFM Series - 300 ms AFC2600 (Qmax = 15 sL/min) - 300 ms AFC3600 (Qmax = 50 sL/min) - 600 ms AFC4600 (Qmax = 100 sL/min) - 600 ms
Response Time : AFM Series - Approximately 1 second to within
±2% of set flow rate for 25% to 100% of full scale flow.
AFC2600 (Qmax = 15 sL/min) ­Approximately 1 second to within ±2% of set flow rate for 25% to 100% of full scale flow.
AFC3600 (Qmax = 50 sL/min) and AFC4600 (Qmax = 100 sL/min) ­Approximately 2 second to within ±2% of set flow rate for 25% to 100% of full scale flow.
Temperature Coefficient : 0.1% of full scale/
o
C.
Pressure Coefficient :
0.01% of full scale/psi (0.07 bar).
Optimum Gas Pressure : 25 psig (1.73 bars).
Maximum Gas Pressure : 1000 psig (70 bars) maximum. Standard
calibration is at 20 psig (1.4 bars) inlet pressure.
Max. Pressure Drop : Refer to Table 4 and Table 5.
[cm H2O](at full scale flow)
Gas and Ambient Temp : 41
o
F to 122oF (5oC to 50oC).
Leak Integrity : 1 x 10
-9
smL/sec of helium maximum, to the
outside environment.
Materials in Fluid
316 stainless steel, 416 stainless steel, Viton
®
Contact :
O-rings. Optional o-rings, Neoprene
®
,
or Kalrez
®
.
Attitude Sensitivity :
No greater than +15 degree rotation from horizontal
to vertical; standard calibration is in horizontal position.
Output Signals : Linear 0 - 5 Vdc (2000min. load impedance);
4 - 20 mA optional (0 - 500loop resistance);
maximum noise 20 mV peak to peak.
Connections :
AFM/AFC2600,AFM/AFC3600 -1/4” compression fittings, AFM/AFC4600 - 3/8” compression fittings. Optional - 1/8” or 3/8” compression fittings or 1/4” VCR
®
fittings.
Transducer Input Power : AFM/AFC2600 +15 ± 5% Vdc, 80 mA max,1.2W;
-15 ± 5% Vdc, 200 mA max, 3W; AFC3600/AFC4600 +15 ± 5% Vdc, 220 mA max,
3.3W; -15 ±5% Vdc, 600 mA max, 9W.
Circuit Protection :
Circuit boards have built-in polarity reversal protection. Replaceable fuses provide power input protection.
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WWW.AALBORG.COM - E-MAIL : INFO@AALBORG.COM - PHONE 845.770.3000 - TOLL FREE IN U.S.A. AND CANADA 1.800.866.3837 - ORANGEBURG N.Y. U.S.A.
BULLETIN FM200408 AFC / AFM
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