Betriebsanleitung • Operating Instructions
PT 0263 BE/A (0901)
Turbo Pumping Station
HiCube 80 Eco
2
Table of contents
Table of contents
1 About thi s ma nual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Proper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Transport and storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
4 Product descr ipti on . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5 Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.2 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.3 Connecting th e high vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.4 Connecting th e exhaust side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.5 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . 10
5.6 Connecting access or ies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6.2 Operation modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6.4 Operation with gas ballast valve . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.5 Monitoring of the operation condit ion s . . . . . . . . . . . . . . . . . . . . . . 14
6.6 Switchi ng off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7 Mainte nance / repl acem ent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . 16
7.2 Removal of component s for their maint enanc e. . . . . . . . . . . . . . . . 16
8 Decommissioning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
8.1 Shutting down for longer periods. . . . . . . . . . . . . . . . . . . . . . . . . . . 19
8.2 Re-starting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
9.1 Rectifying malfunctions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
11 Spare parts HiCube 80 Eco . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
12 Technical data and dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . 22
12.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
12.2 Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
12.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designa ted product and provides the mo st important information f or
safe use of the unit. The description follows applicable EU guidelines. All information provided in this o perating manual refer to the curren t state of the prod uct's devel opment. The documentation remains valid as long as the customer does not
make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.net.
Applicable documents
*also available via www.pfeiffer-vacuum.net
For information about other certifications, if applicable, please see the signet on
the product or:
• www.tuvdotcom.com
• TUVdotCOM-ID 0 000 021320
1.2 Conventions
Safety instructions
The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk
evaluations and hazard analyses and are oriented on international certification
standards as specified by UL, CSA, ANSI Z-535, Semi-S1, ISO 3864 and DIN 4844.
In this document, the following hazard levels and information are considered:
HiCube 80 Eco Operating instructions
Safety information for vacuum pumps "Safety Guide" PT 0300 BN*
Declaration of Conformity Part of this document
Operating instructions for components see product description*
Operating instructions for accessories see section "Accessories"*
DANGER
Immediate danger
Death or very severe injuries occur.
WARNIN G
Possible danger
Death or injuries may occur.
CAUTION
Possible danger
Medium to slight injuries may occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
4
About this manual
Pictograph
definitions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used
DCU:Display and operating unit
HPU:Handh eld programming unit
TC:Electronic drive unit for turbopump
TPS:Mains pack
Symbols used
The following symbels are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum conne ction
Electric connection
Air cooling unit
Venting connection
Seal ing gas connection
Exhaust connecti on
Prohibition of an action or activity in connection with a
source of danger, the disregarding of which may result in
serious accidents.
Warning of a displayed source of danger in connection
wit h op eration of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in
serious accidents.
H
VVFSG
5
Safety
2 Safety
2.1 Safety precautions
• Do not loosen any plug connection during operations.
• Wait for the rotor to reach standstill before peforming work on the high vacuum
flange.
• Keep leads and cables well away from hot surfaces (> 70 °C).
• Never fi ll or op erate turbo pump with c leaning agent.
• Do not carry out any unauthorised modifications or conversions to the pumps.
• The unit has been accredited with protection class IP 20. When installing into
ambient conditions, which afford higher protection classes, the necessary
measures must be taken.
2.2 Proper use
• Only use the pumping station for creating vacuum.
• Only operate the pumping station as an entire unit.
• Only use the pumping station for evacuation of dry and inert gases; other applications only after consultation with Pfeiffer Vacuum.
2.3 Improper use
Improper use will cause all claims for liabilit y and guarantees to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned
above, especially:
• Pumping of c orrosiv e or explosive me dia.
• Pumping of condensing vapors.
• Operation with improper high levels of gas loads.
• Operation with improper high fore-vacuum pressures.
• Operation with improper gas mode.
• Operation with improper high levels of insulated heat input.
• Venting with impr ope r high vent ing rat es.
• The operation of the de vices in po tential ly radioactive areas.
• The operation of the device s in systems where the turbopumps are subjected to
impact-like stress and vibrations or the effect of periodically occurring forces.
NOTE
Duty to inform
Each person involved in the installation, operation or maintenance of the pumping
station must read and observe the safety-related parts of these operating instuctions
and the components instructions.
Absolute observe the safety information for vacuum pumps (PT 0300 BN) !
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium or the entire system.
NOTE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifi es
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must
check the entire system for compliance with the valid EU directives and reassess it
accordingly.
6
Transport and storage
• The connection to a power supply with earthing of a direct voltage pole.
• The use of accessories, which are not named in this manual.
3 Transport and storage
3.1 Transport
Only transport the pumping station by hand.
Always tran sport the pumping s tation upri ghtly a nd as even as possible.
Keep the original protective covers.
3.2 Storage
Close the flange openings by using the original protective covers.
Close further connection ports by using the corr esponding prot ective covers.
Only store the pumping station indoors at an ambient temperatur e
between -25 °C and +55 °C.
In rooms with moist or aggressive atmospheres, the pumping station must be
airproof shrink-wrapped i n a plastic bag to gether with a bag of dessi cant.
Warranty void
if seal is broken
NOTE
Warranty seal
The product is sealed at the factory. Damaging or removal of the seal leads to the loss
of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
7
Product description
4 Product description
4.1 Product identification
Product features
To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.
Fig. 1: Example for a rating plate
Scope of delivery
• HiCube 80 Eco
• Protective cover for the high vacuum flange
• Operating manuals for pumping station and individual components
4.2 Function
The turbo pumping stations in the HiCube range are fully automatic pump units
which are ready for connection. The turbo pumping station consists of a portable
or mobile vacuum pumping unit with a turbopump and a specially matched backing pump.
The turbo pumping station HiCube 80 Eco is available with or without a display and
control unit. The display and control unit DCU 002 is used to control and monitor
the pumping station. The DCU can be detached from the pumping station and used
together with an interface cable M12 (accessory) as a remote control.
Feature HiCube 80 Eco Operating
instructions
High vacuum flange DN 63 ISO-K DN 63 CF DN 40 ISO-KF
Flange material Aluminium Stainless steel Aluminium
Turbopump HiPace 80 HiPace 80 HiPace 80 PT 0208 BN
Ele ctron ic dr iv e un it TC 110 TC 110 TC 110 PT 0204 BN
Ba cki g pump MV P 015- 2 MVP 015 -2 MVP 01 5-2 PU 0 012 B N
Power supply p ack TPS 110 TP S 110 TPS 110 PT 0199 BN
Display and control unit
(option)
DCU 002 DCU 002 DCU 002 PT 0250 BN
Accessories Air cooling unit Air cooling unit Air cooling unit PT 0231 BN
Order number without display and
control un it
PM S03 550 PM S03 551 PM S03 552
Order number with display and
control un it
PM S03 555 PM S03 556 PM S03 557
Mod.:
Mod.-No.:
Ser. No.:
Oil:
S(N
2
):
n,f:
Made in Germany
2007/07
HiPace 300
DN 100 ISO-K, 3P
PM P03 900
---
260 l/s
60000 1/min, 1000 Hz
Mass:
6.7 kg
D-35614 Asslar
8
Product description
Cooling
• Air cooling
• Water cooling (optional)
In the case of excess temperature the electronic drive unit reduces the drive power
automatically.
Drive
Electronic drive unit of the turbopump
4.3 Range of application
The pumping station HiCube 80 Eco must be installed and operated in the following ambient conditions.
Fig. 2: View of HiCube 80 Eco
1.1 Casin g
7 Turbopump HiPace 80
7.9 Electronic drive unit TC 110
8 Power supply pack TPS 110
9 Di spl ay an d cont rol uni t DCU 0 02 ( optio n)
10.1 Main switch
11 Backing pump: diaphragm pump MVP 015-2
12 Air cooling unit
1.1
7. 9
7
12
11
8
9
10.1
Installation location weather protected (indoors)
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Protection category IP 20
Protection class I
Relative humidity max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 40 °C
Atmospheric pressure: 77 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surrounding magnetic field ≤ 3 mT
Over vol tage categ or y II
Connection voltage TC 24 VDC ±5%
9
Installation
5 Installation
5.1 Set-up
The installation location is to be chosen so that components that need servicing are
freely accessible at all times. No special foundations or base are necessary for installation. The unit must not be used outdoors. Conditions are:
• The ambient conditions specified for the area of use.
• a level, vibration-free surfac e.
• Distance to side walls or adjacent devices: at least 50 cm.
• Dist ance to possible edges of tables : at lea st 10 cm.
• When using a casing heatin g and a wat er coolin g unit the temper ature of the
connected flange of the vacuum chamber must not exceed 120 °C.
• It is not allowed to o pera te the device in systems wher e impact-lik e st resses and
vibrations or periodically forces occur.
5.2 Preparatory work
Ensure sufficient cooling for the pumping station.
Where magnetic fields > 3 mT are involved, a suitable shielding must be used.
Check installation location and consult Pfeiffer Vacuum if needed!
The maximum permissible rotor temperature for the turbopump is 90 °C. If high
temperatures arise for process reasons, the radiated heat input must not exceed
3 W. Install suitable screening sheets, if necessary (design information on request).
5.3 Connecting the high vacuum side
The assembly of superstructure on the pumping station HiCube 80 Eco is in the operator’s responsibility. The load capacity of the high vacuum flange is specific for
the used turbopump. The gross weight of superstructure on the pumping station
HiCube 80 Eco may not exceed 50 kg!
Observe barycentric shifting by using high or lateral protruding superstructure
(e.g. vacuum chamber). Danger of tilting!
Install the high vacuum flange in accordance with the instructions in the opera-
ting manual of the turbopump.
Ensure the greatest possible cleanliness when installing any high vacuum parts.
Unclean components prolong the pump-down time.
Observe the minimum strengh of 170 N/mm
2
for the flange material.
For the installation of the flange connections the following components are available:
• The valid mounting kit of the Pfeiffer Vacuum accessories programme.
• A protective screen or splinter shield can optionally be used.
5.4 Connecting the exhaust side
CAUTION
High pressure in the exhaust line!
Danger of damage to the seals and danger of the pump bursting.
Install the line without shut-off valves on the exhaust side.
Pumpe nicht mit Überdruck am Einlass betreiben; max. zulässige Drücke und Druck-
differenzen beachten.
10
Installation
Choose the cross-section of the exhaust line to be at least the size of the nominal
connect ion diameter of the vacuum pump's exhaus t connection.
Piping to the pump must be s uspended or su ppo rted.
– Physical forces from the piping system must not be allowed to act on vacuum
pumps.
Lay piping from the pump sloping downward so that no condensate can flow
back into the pump; otherwise fit a condensate separator.
– If an air trap is created in the system, then a device for draining condensation
water must be provided at the lowest point.
5.5 Connecting to the mains power supply
Order the mains cable separatel y (see "accessories").
Plug the mains cable into the the mains connection of the relay box.
Connect the mains cable to the mains.
Voltage range of the
backing pump
The backing pump is driven by single-phase extended voltage range motors with
reversible voltage ranges.
• 180 ... 254 V, 50/60 Hz
• 90 ... 126 V, 50/60 Hz
Set the desired voltage range on the voltage selector switch using a suitable
screwdriver.
WARNIN G
Ensure safe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
Consult Pfeiffer Vacuum for special requirements.
CAUTION
Automatic start
After connecting the supply voltage and switching on the main switch, pumping stations without display and control unit will run up immediately.
Switch the mains switch to position "0" before plugging in the mains cable.
Switch on the mains supply immediately before operation.
NOTE
Overvolt age!
An incorrect voltage range setting can damage the motor.
Always check the voltage range before switching on the pumping station.
Disconnect the mains supply before changing the voltage range of the backing
pump.
11
Installation
Fig. 3: Switch position for the voltage range at the backing pump
5.6 Connecting accessories
The pumping station is equipped with air cooling as a standard accessory.
Connect additional accessories accordi ng to the operating manual of the turb o-
pump.
Switch position: "115" "230"
Voltage ranges: 90 ... 126 V; 50/60 Hz 180 ... 254 V; 50/60 Hz
115
230
115
230
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The
installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on the operating instructions of components, see "Accessories".
Use original accessory parts only.
12
Operation
6 Operation
6.1 Commissioning
The following important settings are programmed in the electronic drive unit ex
factory.
• Control max. run-up time: 8 min
• Gas mode: 0 = he avy g ases
• Rotation speed switchpoint: 80% of the nominal roation speed
• Venting rotation speed at delayed venting: 50% of the nominal rotation speed
• Venting time: 3600 s
When water cooling is used: Open cooling water supply and check the flow.
When sealing gas is used: Open the sealing gas supply and check the flow.
6.2 Operation modes
The following operation modes are available:
• Operation without operating unit
• Operation via RS485 and Pf eiffer Vacuum display and control un its or PC
6.3 Function description
Operation without
operating unit
Switch on the pumping station at the master switch.
After switching on the main swit ch, the electronic drive unit of the turbopump performs a self-test to check the supply voltage. Once the self test has been successfully completed, the turbopump and the backing pump begin to operate.
CAUTION
Danger of the pump being destroyed
Pumping of gases with the molecular mass> 39 in the wrong gas mode can lead to
destruction of the pump.
Ensure the gas mode is correctly set.
Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
WARNIN G
Danger due to open high vacuum flange
The rotor of the turbopump turns at high speed. If the high vacuum flange is open,
there is a danger of cut injuries and that the pump can be destroyed by objects fal ling
into it.
Never operate the pump with an open high vacuum flange.
CAUTION
Automatic start
After connecting the supply voltage and switching on the main switch, pumping stations without display and control unit will run up immediately.
Switch the mains switch to position "0" before plugging in the mains cable.
Switch on the mains supply immediately before operation.
13
Operation
Operation with DCU
Consider the following manuals for the operation via Pfeiffer Vacuum display
and control units:
• Operating instructions "DCU"
• Operating instructions "Electronic drive unit"
Switch on the mains supply via the main switch.
Switch on the pumping station via button "ON/OFF" on the DCU 002.
Settings are possible via the RS485 by using DCU, HPU or PC.
Use of the DCU as a remote control
The display and control unit can be removed from the pumping station and used
as a remote control.
Fig. 4: Setting up the DCU for use as a remote control
Switch off the pumping station at the master switch.
Disconnect the mains plug.
Unscrew and remove the 4 fastening screws with washers from the front panel
of the display and control unit.
Lift out the display and control unit from the housing.
– Be careful of the housing seal.
Swap the connecting cable between the display and control unit and the electro-
nic drive unit marked "RS 485" for a longer M12 interface cable (accessory).
6.4 Operation with gas ballast valve
Steam or moisture from pumped media can condense in the vacuum pump and
hence impair the suction performance.
Letting in gas ballast improves the discharge of condensate, and the pump
achieves the specified final vacuum more quickly. The gas ballast valve can be replaced with a flushing gas connection if necessary.
For operation with gas ballast, please refer to the operating manual for the ba-
cking pump.
1.1 Casin g
7.9 Electronic drive unit TC 110
9 Display and control unit
10.1 Master switch
26 Fastening screw
27 Washer
26/27
26/27
9
1.1
10.1
7. 9
14
Operation
6.5 Monitoring of the operation conditions
Operating mode display via LED
LEDs in the fro nt panel of the ele ctronic drive unit show basic operating conditi ons
of the turbopump. A differentiated malfunction and warning display is possible
only for operation with DCU or HPU.
Temperature monitoring
The drive power is reduced in case of impermissible motor temperature or impermissibly high housing temperature. This can cause falling below the rotation
speed switchpoint and so result in turning off the turbopump.
6.6 Switching off and venting
Switching off
After the turbopump is switched off, it must be vented to avoid contamination due
to particles streaming back from the fore-vacuum area.
Switching off without the DCU
Switch off the pumping station at the master switch.
Venting (possibilities, see below)
For water cooling: Shut off the water supply.
Switching off with the DCU
Switch off the pumping station via the "ON/OFF" button on the DCU.
Switch off the pumping station at the master switch.
Venting (possibilities, see below)
For water cooling: Shut off the water supply.
LED Symbol Steady OFF Flashing
(1/12 s active)
Blinking
(1/2 s active)
Steady ON
Green
insufficient
power suppl y
Pumping station
"OFF"
Rotation speed ≤ 1Hz
Pumping station
"OFF"
Rotation speed > 1 Hz
Pumping station "O N"
Yellow no warning Warning
Red
no malfunction
Malf unct ion
WARNIN G
Risk of electric shock
The pumping station is only free of voltages when the mains plug has been disconnected.
Switch off the master switch and disconnect the mains plug before all work.
15
Operation
Ventin g
Manually Venting
Open the venting screw (included) in the venting connection of the turbopump
about one turn.
Venting with Pfeiffer Vacuum Venting Valve
Enable venting via the functions of the electronic drive unit.
Settings are possible via the RS485 by using DCU, HPU or PC.
1)
When mains power is restored the venting procedure is aborted.
Basic information for the rapid venting
Venting of the vacuum chamber in two steps. Ask for details on individual solutions
fro m Pfeiffer Vacuum.
Vent for 20 seconds at a rate of pressure rise of max. 15 mbar/s.
– The valve cross section for the venting rate of 15 mbar/s must be adapted to
the size of the vacuum chamber.
– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.
Then vent with an additional venting valve of any desired size.
Venting rotation speed Switch off the pumping station Mains power failure
1)
50% of the no mi nal rot at ion
speed
Venting valve opens for 3600 s (1 h,
works setting)
Venting valve opens for
3600 s (1 h, works setting)
16
Maintenance / replacement
7 Maintenance / replacement
7.1 Maintenance intervals and responsibilities
• Clean the pumping station externally with a lint-free cloth and li ttle industrial alcohol.
• Carry out the required maintenance on the components of the pumping station
in accordance with the instructions in the individual operating manuals.
• Clarify shorter change intervals for extreme loads or impure processes with
Pfei ffer Vacuum Service .
• For all other cleaning, maintenance or repair work, please contact your Pfeiffer
Vacuum service location.
7.2 Removal of components for their maintenance
In some cases, components may need to be dismantled from the pumping station
so that customers can carry out necessary maintenance work on them (they should
the n be reassembled i n reverse orde r).
Dismantling connections
Switch off the pumping station at the master switch.
Disconnect the mains plug.
Pull out the mains cable from the relay box.
Pull out the mains supply cable ( x2) for components fr om t he relay box.
Take off the connector from the electronic drive unit TC 110.
Detach the accessory control lines from the connector and remove them.
WARNING
Contamination of parts and operating fluid by pumped media is possible.
Poisoning hazard through contact with materials that damage health.
In the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
Decontaminate affected parts before carrying out maintenance work.
NOTE
Disclaimer of liability
Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or
operating malfunctions due to improperly performed maintenance. The liability and
warranty entitlement expires.
WARNIN G
Risk of electric shock
The pumping station is only free of voltages when the mains plug has been disconnected.
Switch off the master switch and disconnect the mains plug before all work.
CAUTION
Refer to the notes on Proper Use of the unit.
The pumping station must only be operated as a complete unit. Disassembly and operation of individual pumping station components is deemed to be improper use.
• In this case the declaration of conformity will become invalid.
17
Maintenance / replacement
Overview of factory preconfigured accessory connections on the HiCube 80 Eco
Dismantling of the
turbopump
Fig. 5: Disassembly of the turbopump
Detach the fore-vacuum line from the turbopump and take it off.
– Do not kink or damage the fore-vacuum hose.
Unscrew and remove all Allen head screws 95 (7x) from the mounting plate.
– Tightening torque for the fixing screws when mounted: 10 Nm
Take off the turbopump with the mounting plate from the casing.
The opening in the mounting plate makes it easy for customers to perform maintenance work on the turbopumpturbopump (e.g. change the lubricant reservoir).
NOTE
Note the factory settings.
The accessory connections on the turbopump have been preconfigured at the factory.
If the control lines on the connector are mixed up, this can cause the pumping station
to malfunction or fail.
Do not mix up the control lines.
Accessory connections can be configured for operation with the DCU.
– For more information refer to the operating instructions for the electronic dri-
ve unit of the turbopump.
Connection to X3 Preset accessory
acc. A1 Air cooling unit
acc. B1 Venting valve
acc. DO1 Backing pump
1.1 Housing
2 Mounting plate
7 Turbopump
20 Fore-vacuum connection,
elbow union
29 Spring washer
33 Allen head screw
33/29
7 33/29
20
2
1.1
18
Maintenance / replacement
Removing the backing pump
Fig. 6: Disassembly of the pumping stand housing
Detach the fore-vacuum line from the vacuum connection of the diaphragm
pump and take it off.
– Do not kink or damage the fore-vacuum hose.
Unscrew and remove the housing screws and washers on the front and rear of
the pumping stand frame.
Take off the housing with turbopump, display and control unit and relay box
from the pumping stand frame.
Fig. 7: Disassembly of the diaphragm pump from the pumping stand frame
Unscrew and remove the fastening nuts 30 from the bottom of the frame.
Take off the mounting bracket from the diaphragm pump.
Unscrew the fastening screws 35 (Allen head) far enough from the frame until
the ba cking pump becomes detached.
Lift out the diaphragm pump above the top of the pumping station frame.
1.1 Housing
1.2 Fram e
11.1 Backing pump vacuum connection
21 Housing screw
34 Washer
36 Clamping screw
1.2 Fram e
1.4 Mounting bracket
11 Diaphragm pump MVP 015-2
30 Fa st en ing nu t
35 Fastening screw
36
21/34
21/34
1.1
11. 1
1.2
35
30
11
1.4
1.2
19
Decommissioning
8 Decommissioning
8.1 Shutting down for longer periods
If the pumping station should be shut down for longer than a year:
Remove the pumping station from the system, if necessary.
Change the operating fluid reservoir of the turbopump.
Only store the pumping station indoors at an ambient temperatur e
between -25 °C and +55 °C.
In rooms with moist or aggressive atmospheres, the pumping station must be
airproof shrink-wrapped i n a plastic bag to gether with a bag of dessi cant.
8.2 Re-starting
Check pumping station for contamination and moisture.
Clean the pumping station externally with a lint-free cloth and little industrial al-
cohol.
If necessary, have Pfeiffer Vacuum Service clean the pumping station complete-
ly.
Installation and commissioning in accordance with the operating i nstructions.
8.3 Disposal
Products or parts thereof (mechanical and electrical components, operating fluids,
etc.) may cause environmental burden.
Safely dispose of the materials according to the locally applicable regulations.
WARNING
Contamination of parts and operating fluid by pumped media is possible.
Poisoning hazard through contact with materials that damage health.
In the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
Decontaminate affected parts before carrying out maintenance work.
CAUTION
Re-starting
The serviceability of the operating fluid of the turbopump without operation is a maximum of 4 years. Before restarting after a shut-down of 4 years or longer, carry out
the following work.
Replace the operating fluid reser voir.
Replace bearings.
Follow the maintenance instructi ons and inform Pfeiffer Vacuum.
20
Malfunctions
9 Malfunctions
Malfunctions on the pumping station are usually caused by faults on individual
components. Faults are indicated by th e LEDs at the electronic drive unit of the turbopump. Alternatively, a fault code can also be output at the display and control
unit DCU.
• Please refer to the relevant operating manual f or information about troubleshooting indivi dual pump components.
• If no display and control unit is available, please contact the Pfeiffer Vacuum Service.
9.1 Rectifying malfunctions
Problem Possible causes Remedy
Pumping station will not start; none of
the integrated LEDs on the electronic
drive unit of the turbopump light up
• Electrical supply interrupted Check the plug contacts at the relay box and
the power supply unit.
Check the supply lines of the pumping stati-
on.
Check the output voltage (24 VDC) at the "DC
out" terminal of the power supply unit
Check the plug contacts on the power supp-
ly unit
• Incorrect operating voltage Apply correct operating voltage
Observe the ratings on the type plate.
• No operating voltage applied Apply the correct operating voltage.
• Electronic drive unit defective Replace the electronic drive unit.
Contact Pfeiffer Vacuum Service.
Pump not achieving the required final
pressure
• Condensate in the backing pump Open the gas ballast valve at the backing
pump.
• Gas ballast valve open Close the gas ballast valve at the backing
pump.
21
Service
10 Service
Pfeiffer Vacuum offers first-class service!
• Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService
• Maintenance / repair in the nearby Serv iceCenter or ServicePoint
• Fast replacement with exchange products in mint condition
• Advice on the most cost-efficient and quickest solution
Detailed information, addresses and forms at: www.pfeiffer-vacuum.net (Ser-
vice).
Maintenance and repair in the Pfeiffer Vacuum ServiceCenter
The following steps are necessary to ensure a fast, smooth servicing process:
Download the forms "Service Request" and "Declaration on Contamination".
1)
Fill in the "Service Request" form and send it by fax or e-mail to your service
address.
Include the confirmation on the service request from Pfeiffer Vacuum with your
shipment.
Fill in the declaration on contamination and include it in the shipment (re-
quir ed!).
Dismantle all accessories.
Drain the operating fluid (applies for turbopumps with pumping speed > 700 l/s).
Leave electronic drive on the pump.
Close the flange openings by using the original protective covers.
If possible, send pump or unit in the original packaging.
Sending of contaminated pumps or devices
No units will be acce pted if they are contaminat ed with micro-bi ologic al, expl osive
or radioactive substances. “Hazardous substances” are substances and compounds in accordance with the hazardous goods directive (current version). If
pumps are contaminated or the declaration on contamination is missing, Pfeiffer
Vacuum performs decontamination at the shipper's expense.
Neutralise th e pump by flushing it with nitrog en or dry air.
Close al l openings airtight .
Seal the pump or unit in suitable protective film.
Return the pump/unit only in a suitable and sturdy transport container and send
it in while following appli cable transport conditions.
Exchange unit
The factory operating parameters are always preset with exchange units. If you use
changed parameters for your application, you have to set these again.
Service orders
All service orders are carried out exclusively according to our repair conditions for
vacuum units and components.
11 Spare parts HiCube 80 Eco
Please also specify model number of the the rating plate when ordering accessories or spare parts.
Refer to the operating manuals for the individual components.
1)
Forms unde r ww w.pfe iffer-vacuum .net
22
Technical data and dimensions
12 Technical data and dimensions
12.1 General
Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:
• Recommendations of PNEUROP committee PN5
• ISO 21360; 2007: "Vacuum technolo gy - Standard methods f or measuring vacuum-pump perf ormance - General description"
• ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of
performance characteristiques"
• Ultimate pressure: using a test dome and a 48 hrs. period of baking out
• Gas throughput: water cooling; backing pump = rotary vane pump (10 m
3
/h)
• Cooling water consumption: at max. gas throughput, cooling water temp. 25 °C
• Integral leack rate: using a Helium concentration of 100 %, period 10 s
• Acoustic pressure: Distance 1 m to the pump
12.2 Technical data
12.3 Dimensions
Parameter HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco
Flange (in) DN 63 ISO-K DN 63 CF-F DN 40 ISO-KF
Venting connection G 1/8" G 1/8" G 1/8"
Run-up time 1.7 min 1.7 min 1.7 min
Enddruck 1·10-7 mb ar 5·10
-10
mbar 1·10-7 mbar
Cooling method, standard Luft Luft Luft
Operating voltage power supply 90-265 V AC 90-265 V AC 90-265 V AC
Relative humidity of air 5-85 non condensing % 5-85 non condensing % 5-85 non condensing %
Weight 16,6 kg 18 kg 16,6 kg
68
39.5
42
B
184.5
3.2
A
325
163
100
79
129
301
10
H
H
G
G
G
F
F
V
Maße HiCube 80 Eco, DN 63
ISO-K, MVP 015
HiCube 80 Eco, DN 63
CF-F, MVP 015
HiCube 80 Eco, DN 40
ISO-KF, MVP 015
A 347 mm 349.5 mm 352.5 mm
B 159 mm 165 mm 168 mm
Declaration of conformity
pursuant to the following EU directives:
• Machinery 98/37/EEC (Annex II B)
• Electromagnetic Compatibility 89/336/EEC
• Low Voltage 2006/95/EEC
We hereby certify that the product specified below is intended for installation in
a machine which is f orbidden to be put into operation until such time as it has
been determined that the end product is in accordance with the provision of EU
Directive 98/37/EEC.
The product specified below is in correspondence to the EU directives Machinery 98/37/EEC, Electromagnetic Compatibility 89/336/EEC and Low Voltage
2006/95/EEC.
HiCube
HiCube 80 Eco
Guidelines, harmonised standards and national standards in languages and
specifications which have been applied:
EN 1012-2 EN 1 210 0- 1 EN 12100-2 E N 13857
EN 50 081-1 EN 50 081-2 EN 55 011 EN 61010
IEC 801 1-4 VDE 0843
Signatures:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(M.Bender)
Managing Director
(Dr. M. Wiemer)
Managing Director
CE/2007
Pfeiffer Vacuum Technology AG · Headquarters/Germany
Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net
Vacuum is nothing, but everything to us!
Turbopumps
Rotary vane pumps
Roots pumps
Dry compressing pumps
Leak detectors
Valves
Components and feedthroughs
Vacuum measurement
Gas analysis
System engineering
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