Silicon Piezoresistive
Relative Pressure Sensor
Features
•Low pressure and temperature hysteresis
•Fast response
•High sensitivity and linearity
•Fatigue free monocrystaline silicon diaphragm giving high load cycle stability
•High long term stability
•Built in silicon temperature sensor
•Media compatible stainless housing
KPY 51-R
KPY 56-R
Stainless Steel Package
Type and |
Symbol |
Pressure Range |
Unit |
Ordering Code |
|
Marking |
|
|
|
|
|
|
|
|
|
|
|
KPY 51 R |
P0 ¼ PN |
0 ¼ 0.25 |
bar |
Q62705-K174 |
|
|
|
|
|
|
|
KPY 52 R |
|
0 |
¼ 0.6 |
|
Q62705-K171 |
|
|
|
|
|
|
KPY 53 R |
|
0 |
¼ 1.6 |
|
Q62705-K176 |
|
|
|
|
|
|
KPY 54 R |
|
0 |
¼ 4 |
|
Q62705-K178 |
|
|
|
|
|
|
KPY 55 R |
|
0 |
¼ 10 |
|
Q62705-K180 |
|
|
|
|
|
|
KPY 56 R |
|
0 |
¼ 25 |
|
Q62705-K182 |
|
|
|
|
|
|
Pin Configuration
1 |
Capillary tube |
|
|
2 |
+ VIN |
|
|
3 |
- VOUT |
4 |
Temperature sensor |
|
(typ. R25 = 2 kW) |
|
|
5 |
Temperature sensor |
|
|
6 |
- VIN |
|
|
7 |
+ VOUT |
8 |
Not connected |
|
|
Semiconductor Group
1 |
02.97 |
KPY 51-R
KPY 56-R
Absolute Maximum Ratings
Parameter |
Symbol |
|
Limit Values1) |
Unit |
|
|
|
|
|
||
|
|
Frontside |
Rearside |
|
|
|
|
|
|
|
|
Pressure overload |
PMAX |
|
|
2 |
bar |
KPY 51 R |
|
2 |
|
|
|
KPY 52 R |
|
6 |
|
6 |
|
KPY 53 R |
|
10 |
|
10 |
|
KPY 54 R |
|
16 |
|
16 |
|
KPY 55 R |
|
30 |
|
30 |
|
KPY 56 R |
|
75 |
|
40 |
|
|
|
|
|
|
|
Operating temperature range |
TA |
|
- 40 ¼ + 125 |
˚C |
|
Storage temperature range |
Tstg |
|
- 50 ¼ + 130 |
˚C |
|
Supply voltage |
VIN |
|
12 |
V |
1)Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter |
Symbol |
|
Limit Values |
Unit |
||
|
|
|
|
|
|
|
|
|
min. |
|
typ. |
max. |
|
|
|
|
|
|
|
|
Bridge resistance |
RB |
4 |
|
- |
8 |
kW |
Sensitivity |
s |
|
|
|
|
mV/ |
KPY 51 R |
|
16.8 |
|
24.0 |
32.0 |
Vbar |
KPY 52 R |
|
11.0 |
|
15.0 |
24.0 |
|
KPY 53 R |
|
5.6 |
|
8.8 |
12.5 |
|
KPY 54 R |
|
4.0 |
|
6.0 |
9.0 |
|
KPY 55 R |
|
1.8 |
|
2.6 |
4.0 |
|
KPY 56 R |
|
0.88 |
|
1.2 |
2.0 |
|
|
|
|
|
|
|
|
Output voltage |
Vfin |
|
|
|
|
mV |
KPY 51 R |
|
21 |
|
30 |
40 |
|
KPY 52 R |
|
33 |
|
45 |
72 |
|
KPY 53 R |
|
45 |
|
70 |
100 |
|
KPY 54 R |
|
80 |
|
120 |
180 |
|
KPY 55 R |
|
90 |
|
130 |
200 |
|
KPY 56 R |
|
110 |
|
150 |
250 |
|
|
|
|
|
|
|
|
Offset voltage |
V0 |
- 25 |
|
- |
+ 25 |
mV |
P = P0 |
|
|
|
Semiconductor Group |
2 |