O P E R A T I N G M A N U A L
XTC/C
XTC/2
XTC/C XTC/2
Thin Film Deposition Controller
IPN 074-183
O P E R A T I N G M A N U A L
XTC/C XTC/2
Thin Film Deposition Controller
IPN 074-183X
T W O T E C H N O L O G Y P L A C E |
A LT E L A N D S T R A S S E 6 |
B O N N E R S T R A S S E 4 9 8 |
E A S T S Y R A C U S E , N Y 1 3 0 5 7 - 9 7 1 4 U S A |
L I - 9 4 9 6 B A L Z E R S , L I E C H T E N S T E I N |
D - 5 0 9 6 8 C O L O G N E , G E R M A N Y |
P h o n e : + 3 1 5 . 4 3 4 . 11 0 0 |
P h o n e : + 4 2 3 . 3 8 8 . 3 111 |
P h o n e : + 4 9 . 2 2 1 . 3 4 7 . 4 0 |
F a x : + 3 1 5 . 4 3 7 . 3 8 0 3 |
F a x : + 4 2 3 . 3 8 8 . 3 7 0 0 |
F a x : + 4 9 . 2 2 1 . 3 4 7 . 4 1 4 2 9 |
E m a i l : r e a c h u s @ i n f i c o n . c o m |
E m a i l : r e a c h . l i e c h t e n s t e i n @ i n f i c o n . c o m |
E m a i l : r e a c h . g e r m a n y @ i n f i c o n . c o m |
V I S I T U S O N T H E W E B AT w w w. i n f i c o n . c o m
© 2 0 0 1 I N F I C O N 0 9 2 3 0 4
The trademarks of the products mentioned in this manual are held by the companies that produce them.
INFICON®, CrystalSix® are trademarks of INFICON Inc.
All other brand and product names are trademarks or registered trademarks of their respective companies.
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
©2001 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
DECLARATION
OF
CONFORMITY
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
2 Technology Place
East Syracuse, NY 13057
USA
meets the essential safety requirements of the European Union and is placed on the market accordingly. It has been constructed in accordance with good engineering practice in safety matters in force in the Community and does not endanger the safety of persons, domestic animals or property when properly installed and maintained and used in applications for which it was made.
Equipment Description: |
XTC/2 and XTC/C Deposition Controllers, including _ |
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the Oscillator Package and Crystal Sensor as properly |
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installed. |
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Applicable Directives: |
73/23/EEC as amended by 93/68/EEC |
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89/336/EEC as amended by 93/68/EEC |
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Applicable Standards: |
EN 61010-1 : 1993, Fixed Equipment |
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EN 55011, Group 1, Class A : 1991 |
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EN 50082-2 : 1995 |
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CE Implementation Date: |
January 3, 1995 |
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Revised to include EMC Directive: January 2, 1997 |
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Authorized Representative: |
Gary W. Lewis |
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Vice President – Quality Assurance |
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INFICON Inc. |
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ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF LEYBOLD INFICON'S PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.
04/15/97
Thank you for selecting INFICON® instrumentation.
Please fill out and return this postage paid card as soon as possible.
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Your help is very important in our continuing efforts to improve our manuals. Using the table below, please circle the appropriate rank for each aspect.
In the Importance column, please indicate the importance of each aspect.
Manual Title
Part # (see Title Page) 074-
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If you have additional comments, please contact INFICON®.
T W O T E C H N O L O G Y P L A C E |
A LT E L A N D S T R A S S E 6 |
B O N N E R S T R A S S E 4 9 8 |
E A S T S Y R A C U S E , N Y 1 3 0 5 7 - 9 7 1 4 U S A |
L I - 9 4 9 6 B A L Z E R S , L I E C H T E N S T E I N |
D - 5 0 9 6 8 C O L O G N E , G E R M A N Y |
P h o n e : + 3 1 5 . 4 3 4 . 11 0 0 |
P h o n e : + 4 2 3 . 3 8 8 . 3 111 |
P h o n e : + 4 9 . 2 2 1 . 3 4 7 . 4 0 |
F a x : + 3 1 5 . 4 3 7 . 3 8 0 3 |
F a x : + 4 2 3 . 3 8 8 . 3 7 0 0 |
F a x : + 4 9 . 2 2 1 . 3 4 7 . 4 1 4 2 9 |
E m a i l : r e a c h u s @ i n f i c o n . c o m |
E m a i l : r e a c h . l i e c h t e n s t e i n @ i n f i c o n . c o m |
E m a i l : r e a c h . g e r m a n y @ i n f i c o n . c o m |
V I S I T U S O N T H E W E B AT w w w. i n f i c o n . c o m
BUSINESS REPLY MAIL
FIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORK
POSTAGE WILL BE PAID BY ADDRESSEE
INFICON INC.
Two Technology Place
East Syracuse, New York 13057-9714
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall in no event exceed one (1) year from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON.
T W O T E C H N O L O G Y P L A C E |
A LT E L A N D S T R A S S E 6 |
B O N N E R S T R A S S E 4 9 8 |
E A S T S Y R A C U S E , N Y 1 3 0 5 7 - 9 7 1 4 U S A |
L I - 9 4 9 6 B A L Z E R S , L I E C H T E N S T E I N |
D - 5 0 9 6 8 C O L O G N E , G E R M A N Y |
P h o n e : + 3 1 5 . 4 3 4 . 11 0 0 |
P h o n e : + 4 2 3 . 3 8 8 . 3 111 |
P h o n e : + 4 9 . 2 2 1 . 3 4 7 . 4 0 |
F a x : + 3 1 5 . 4 3 7 . 3 8 0 3 |
F a x : + 4 2 3 . 3 8 8 . 3 7 0 0 |
F a x : + 4 9 . 2 2 1 . 3 4 7 . 4 1 4 2 9 |
E m a i l : r e a c h u s @ i n f i c o n . c o m |
E m a i l : r e a c h . l i e c h t e n s t e i n @ i n f i c o n . c o m |
E m a i l : r e a c h . g e r m a n y @ i n f i c o n . c o m |
V I S I T U S O N T H E W E B AT w w w. i n f i c o n . c o m
IPN 074-183X
XTC/C - XTC/2 Operating Manual
Chapter 1
Introduction and Specifications
1.1 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.1 Notes, Cautions, Warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.2 General Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.1.3 Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.1.4 Main Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.2 Introduction to the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 1.3 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.3.1 Specifications XTC/2 and XTC/C. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.3.1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.3.1.2 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.3.1.3 Source Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.3.1.4 Input/Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.3.1.5 Recorder Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.3.1.6 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.3.1.7 Process Recipe Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.3.1.8 Hardware interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.3.1.9 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.3.2 Transducer Specifications (optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.3.3 XIU (Crystal Interface Unit) Specifications . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.4 Guide to the Use of the Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10 1.5 XTC/C Users and Installers Note. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10 1.6 Related Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11 1.7 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11 1.7.1 Application Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11 1.7.2 Field Service and Repair Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12 1.7.3 Returning Your Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Chapter 2
Quick Use Guide
2.1 Unpacking, Initial Inspection and Inventory . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Unpacking and Inspection Procedures . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Inventory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2.1 XTC/2 System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.2.2 XTC/C System Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
TOC - 1
XTC/C - XTC/2 Operating Manual
2.1.2.3 Ship Kit - XTC/2 XTC/C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2 Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.3 Installation Guide and Schematic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.4 XTC/2 Front Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.4.1 XTC/2 Front Control Panel Description. . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.4.2 XTC/2 Display Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.5 XTC/C Front Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
2.6 Rear Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.6.1 Power Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.6.2 Configuration Switches 1 & 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.6.3 Grounding Stud . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.6.4 System I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
2.6.5 AUX I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
2.6.6 Sensor 1, Sensor 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
2.6.7 RS232 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26
2.6.8 Communication Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
2.6.9 Source 1,2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
2.6.10Manufacturer’s Identification and
Serial Number Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28 2.6.11 Recorder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28 2.7 Operation as a Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29 2.7.1 Monitoring - Systems Without a Source Shutter . . . . . . . . . . . . . . . . . 2-29 2.7.2 Monitoring - Systems with a Source Shutter . . . . . . . . . . . . . . . . . . . . 2-30 2.7.3 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31 2.7.4 Nontraditional Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32 2.7.4.1 Etching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32 2.7.4.2 Immersion in Liquids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32 2.7.4.3 Biological . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32 2.7.4.4 Measurement of Liquids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33 2.8 Operation as a One Layer Controller . . . . . . . . . . . . . . . . . . . . . . . . . 2-33 2.8.1 Skipping a State Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34 2.8.2 Idle State Processing Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34 2.8.3 Manual Power Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34 2.8.4 Time Power State Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35 2.8.5 Controlling the Source Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35 2.9 Operation as a Multi-Layer Controller . . . . . . . . . . . . . . . . . . . . . . . . . 2-36 2.9.1 Defining a Process Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-36
IPN 074-183X
TOC - 2
IPN 074-183X
XTC/C - XTC/2 Operating Manual
Chapter 3
Installation
3.1 Installing the Instrument - Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 3.1.1 Control Unit Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 3.2 Electrical Grounding and Shielding Requirements . . . . . . . . . . . . . . . . . 3-1 3.2.1 Verifying / Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 3.2.2 Connections to Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 3.2.3 Minimizing Noise Pickup from External Cabling . . . . . . . . . . . . . . . . . . . 3-3 3.3 Connection to Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 3.3.1 The BNC Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 3.3.2 The "D" Shell Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 3.4 Sensor Selection Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 3.5 Guidelines for Transducer Installation . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7 3.5.1 Sensor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7 3.5.2 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10 3.5.3 Check List for Transducer Installation . . . . . . . . . . . . . . . . . . . . . . . . . 3-11 3.6 Use of the Test Mode (XTC/2 Only). . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11 3.6.1 Operational Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12 3.7 Input and Output Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15 3.7.1 Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15 3.7.2 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18 3.7.3 Chart Recorder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 3.7.4 Source Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20 3.8 Computer Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20 3.8.1 Communications Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20 3.8.1.1 IEEE Settings for a National Instruments IEEE-GPIB Board . . . . . . . . 3-21 3.8.2 Basic Command Structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22 3.8.3 Service Requests and Message Available . . . . . . . . . . . . . . . . . . . . . . 3-24 3.8.4 Datalogging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25 3.8.5 Computer Command Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26 3.8.5.1 Echo Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26 3.8.5.2 Hello Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26 3.8.5.3 Query Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26 3.8.5.4 Update Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28 3.8.5.5 Status Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28 3.8.5.6 Remote Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32 3.8.6 Examples of RS232 Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34 3.8.6.1 Program Without Checksum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34 3.8.6.2 Program With Checksum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
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3.8.6.3 Example of SEMI II Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36 3.8.7 Example of IEEE488 Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38 3.9 Co-Deposition (Two Unit Interconnection) . . . . . . . . . . . . . . . . . . . . . 3-39
Chapter 4
Programming System Operation Details
4.1 State and Measurement System Sequencing . . . . . . . . . . . . . . . . . . . . 4-1
4.2 State Descriptions and Parameter Limits . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3 Alarms and Stops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.3.1 Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.3.2 Stops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.4 Recovering From "STOPS" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.5 Tuning the Control Loop . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.5.1 Tuning a Fast Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.5.2 Tuning a Slow Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
4.5.3 Setting Maximum Power. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
4.6Setting S&Q Parameters
|
(Soft Crystal Failures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-14 |
4.6.1 |
Q-Factor (Quality) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-15 |
4.6.2 |
S-Factor (Stability) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-16 |
4.6.3 |
Determining Q and S Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-17 |
4.7 |
Rate Ramps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-19 |
4.7.1 |
Rate Ramp to Zero Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-19 |
4.8 |
Use of the Hand Controller (Option) . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-19 |
4.9 |
Setting the Soak and Idle Power Levels . . . . . . . . . . . . . . . . . . . . . . . |
4-20 |
4.9.1 |
Setting Soak Power 1 Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-20 |
4.9.2 |
Setting Soak Power 2 Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-20 |
4.9.3 |
Setting Idle Power Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-21 |
4.10 |
Implementing RateWatcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-21 |
4.11 |
Crystal Fail . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-22 |
4.12 |
Completing on TIME-POWER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-22 |
4.13 |
Crystal Fail Inhibit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-23 |
4.14 |
Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-23 |
4.15 |
Crystal Switch Details. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-24 |
4.15.1 |
Sensor Shutter / CrystalSwitch Output . . . . . . . . . . . . . . . . . . . . . . . . |
4-25 |
4.16 |
Start Layer Without |
|
|
Backup Crystal Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-26 |
4.17 |
Crystal Life and Starting Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . |
4-27 |
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Chapter 5
Calibration and Measurement
5.1 Importance of Density, Tooling and Z-ratio . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4 Laboratory Determination of Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
5.5 Measurement Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5.2 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5.5.3 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.5.4 Z-Match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.5.5 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.5.6 ModeLock Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
5.6 Control Loop Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
Chapter 6
Adjustments and Problems
6.1 LCD Contrast Adjustment (XTC/2 only) . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 6.2 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 6.2.1 Powerup Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 6.2.2 Parameter Update Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2 6.2.3 Other Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2 6.3 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
6.3.1Major Instrument Components, Assemblies
and Mating Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
6.3.2 Troubleshooting the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
6.3.3 Troubleshooting Transducers/Sensors . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
6.3.4 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . 6-10
6.3.5 Leaf Spring Concerns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
6.4 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
6.4.1 Standard and Compact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
6.4.2 Shuttered and Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.4.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
6.4.4 Sputtering Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
6.4.5 Crystal Snatcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
6.4.6 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
6.5 Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2 . . . . . . . . . . 6-18
6.5.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
6.5.1.1 Measurement System Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . 6-19
6.5.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure . . . . . . . . . 6-20
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6.5.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure . . . . . . . . . . . |
6-21 |
6.5.1.4System Diagnostics Pass But
Crystal Fail Message Remains . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
6.5.2 % XTAL Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
6.5.3 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
6.5.3.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
6.5.3.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
6.5.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
Appendix A
Table of Densities and Z-ratios
Index
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XTC/C - XTC/2 Operating Manual
Chapter 1
Introduction and Specifications
When using this manual, please pay attention to the NOTES, CAUTIONS and WARNINGS found throughout. For the purposes of this manual they are defined as follows:
NOTE: Pertinent information that is useful in achieving maximum instrument efficiency when followed.
CAUTION
Failure to heed these messages could result in damage to the instrument.
WARNING
Failure to heed could result in personal injury.
WARNING
Dangerous voltages are present. Failure to heed could result in personal injury.
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WARNING
This product is not for use in a manner not specified by the manufacturer.
There are no user serviceable components within the instrument case.
Potentially lethal voltages are present when the line cord, system I/O or aux I/O are connected.
Refer all maintenance to qualified personnel.
CAUTION
This instrument contains delicate circuitry which is susceptible to transient power line voltages. Disconnect the line cord whenever making any interface connections. Refer all maintenance to qualified personnel.
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This instrument is connected to earth via a sealed three-core (three-conductor) power cable, which must be plugged into a socket outlet with a protective earth terminal. Extension cables must always have three conductors, including a protective earth conductor.
WARNING
Never interrupt the protective earth circuit.
Any interruption of the protective earth connection inside or outside the instrument, or disconnection of the protective earth terminal is likely to make the instrument dangerous.
This symbol indicates where the protective earth ground is connected inside the instrument. Never unscrew or loosen this connection.
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WARNING
This instrument has line voltage present on the primary circuits whenever it is plugged into a main power source.
Never remove the covers from the instrument during normal operation.
There are no operator serviceable items within this instrument.
Removal of the top or bottom covers must be done only by a technically qualified person.
If this instrument is installed into a rack system which contains a mains switch, this switch must break both sides of the line when it is open and it must not disconnect the safety ground. This configuration is required in order to comply with accepted European safety standards.
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The XTC/2 and XTC/C are quartz crystal transducer type deposition process controllers with three layer capability. They are readily connected to interact with and control the other instruments associated with a vacuum coating plant of moderate complexity. These instruments incorporate the patented (US #5,117,192—May 27, 1992) ModeLock measurement system. This innovative system provides process security, measurement speed and precision at a level that no active oscillator based instrument can provide.
The bright Liquid Crystal Display of the XTC/2 is easily read and keeps the operator continuously informed with pertinent deposition data including rate, thickness, phase, rate deviation and elapsed time. Special messages such as Stop, Crystal Fail or Time-Power are clearly presented to reduce operator uncertainty and eliminate the possibility of costly mistakes.
The XTC/C is a variant of the XTC/2 that has a limited front panel. Instead of an LCD display, it has 8 LED type status indicators that indicate process status and instrument functional status. It is primarily designed for use in vacuum coating plants that have a computer based central controller. The original equipment manufacturer (OEM) will design a custom user input-output system through his system controller. Once programmed and started, the XTC/C will essentially run as independent of the central controller as is desired. The deposition layer can complete without further intervention, freeing the central controller for other tasks. Status and data may be queried as frequently as is desired, however.
Interaction with the coating system for both units is multifaceted. All units come with RS232 and support data rates to 9600 baud. The SECSII protocol is supported. The optional computer interface is IEEE-488. The instrument is configured to sequentially control two separate deposition sources with 15 bit resolution using either PID or integrating type controller algorithms. Twelve relays are used to manipulate various external devices such as source and sensor shutters, heaters or valves. Lower power outputs are used to control the position of multi-hearth crucibles. There are eight input lines to provide the ability to sense and react to discrete external signals.
There are numerous special control functions for accommodating the needs of the deposition process. Full predeposit processing is provided, including shutter delay which allows the establishment of the desired rate prior to opening the substrate shutter. A Rate Ramp allows the deposition rate to be changed during the deposit phase. The RateWatcher feature allows the deposition stream to be periodically sampled, extending the life of the crystal.
These instruments are fully compatible with the complete family of INFICON transducers, including Dual and CrystalSix®.
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XTC/C - XTC/2 Operating Manual
At the time of this manual’s writing, the specifications for performance are as published below. INFICON continuously improves its products, affecting the instrument’s performance.
Usage . . . . . . . . . . . . . . . . . . . . . . Indoor use only. Altitude Range . . . . . . . . . . . . . . . . Up to 2000 m (6,561 ft) Pollution Degree . . . . . . . . . . . . . . 1—No pollution occurs
Overvoltage Category . . . . . . . . . . 2—Local level, appliances, etc.
Cleaning . . . . . . . . . . . . . . . . . . . . The unit enclosure can be safely cleaned with a mild detergent or spray cleaner designed for that purpose. Care should be taken to prevent any cleaner from entering the unit.
Crystal Range & Precision . . . . . . . 6.0 to 5.0 MHz +/- .05 Hz (per 250 msec sample)
Thickness & Rate Resolution . . . . . 0.0617Å (per 250 msec sample) Material density = 1.0; Z-Ratio = 1.0; crystal frequency = 6 MHz.
Å/S/M = Angstroms/second/measurement.
Thickness accuracy . . . . . . . . . . . . 0.5%
Measurement frequency . . . . . . . . 4 Hz
Source-Control Voltage . . . . . . . . . 0 to +/- 10 v
Number of Sources . . . . . . . . . . . . 2
Resolution . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 v)
Update Rate . . . . . . . . . . . . . . . . . 4 Hz max.
Maximum Load . . . . . . . . . . . . . . . 400 Ohm (100 Ohm internal impedance)
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Inputs . . . . . . . . . . . . . . . . . . . . . . 9 TTL inputs
Outputs
a) relay . . . . . . . . . . . . . . . . . . 12 SPST 2.5-amp relays rated
@ 30 V(dc) / 30 V(ac) / 42 V(peak) max. b) crucible select . . . . . . . . . . . 8 open collector
(5 volt DC max sink, 5 TTL loads)
Scan/Change Rate . . . . . . . . . . . . 4 Hz
Voltage . . . . . . . . . . . . . . . . . . . . . 0 to +10 v
Resolution . . . . . . . . . . . . . . . . . . 13 bits over full range (one reserved for sign)
Update Rate . . . . . . . . . . . . . . . . . 4 Hz
Function . . . . . . . . . . . . . . . . . . . . Rate / Thickness / Mass
Maximum Load . . . . . . . . . . . . . . . 2.0 KOhm (100 Ohm internal impedance)
Applies to XTC/2 only; the XTC/C provides LED annunciators.
Type . . . . . . . . . . . . . . . . . . . . . . . 4x multiplexed custom LCD with backlight.
If desired, backlight automatically dims during prolonged period of inactivity, automatically brightening when activity begins.
Thickness Resolution . . . . . . . . . . 1 Å
Rate Resolution . . . . . . . . . . . . . . .1 Å for 1 to 99.9 Å/sec 1 Å for 100 to 999 Å/sec
Update Rate . . . . . . . . . . . . . . . . . 1 Hz
Film Programs . . . . . . . . . . . . . . . 9, 30 variables per program Process layers . . . . . . . . . . . . . . . 3
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XTC/C - XTC/2 Operating Manual
Sensors
Single. . . . . . . . . . . . . . . . . . . . 2
Dual . . . . . . . . . . . . . . . . . . . . . 1
CrystalSix. . . . . . . . . . . . . . . . . 2
Sources . . . . . . . . . . . . . . . . . . . . . 2 BNC female
Crucible Locations . . . . . . . . . . . . . 8, 1 of 8 and BCD encoded I/O
Standard (inputs/outputs) . . . . . 8/12
Optional . . . . . . . . . . . . . . . . . . None Communications
Standard. . . . . . . . . . . . . . . . . . RS232C Optional . . . . . . . . . . . . . . . . . . IEEE
Chart Recorder . . . . . . . . . . . . . . . 1 BNC female
Power Requirements
"115 V" input range. . . . . . . . . . 90 to 132 V(ac), 49 to 61 Hz, 45 VA max. fused at 3/8 Amp Type T fuse
"230 V" input range . . . . . . . . . 180 to 264 V(ac), 49 to 61 Hz, 45 VA max. fused at 3/16 Amp Type T fuse
Operating Temperature . . . . . . . . . 0 to 50 °C (32 to 122 °F)
Size . . . . . . . . . . . . . . . . . . . . . . . . 3.5" H x 8" W x 12" D
(89 mm x 203 mm x 305 mm)
Weight . . . . . . . . . . . . . . . . . . . . . . 6 lb. (2.7 kg)
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XTC/C - XTC/2 Operating Manual
|
Max. Bakeout |
Size (Max. Envelope) |
Water Tube & |
Body & Holder |
IPN |
|
|
Temperature* |
|
Coax Length |
|
|
|
|
|
|
|
|
|
|
CrystalSix Sensor |
130 °C |
3.5" dia. x 2.0" high |
30" (762 mm) |
304 |
SS (plate, |
750-446-G1 |
|
|
(89 mm dia. x 51 mm high) |
|
holders, & mate- |
|
|
|
|
|
|
rial shield)** |
|
|
|
|
|
|
|
|
|
Standard Sensor |
130 °C |
1.063" x 1.33" x .69" high |
30" (762 mm) |
304 |
SS |
750-211-G1 |
|
|
(27 mm dia. x 34 mm x 17.5 mm high) |
|
|
|
|
|
|
|
|
|
|
|
Standard Sensor |
130 °C |
1.06" x 2.24" x .69" high |
30" (762 mm) |
304 |
SS |
750-211-G2 |
with Shutter |
|
(27 mm dia. x 57 mm x 17.5 mm high) |
|
|
|
|
|
|
|
|
|
|
|
Sputtering Sensor |
105 °C |
1.36" dia. x .47" high |
30" (762 mm) |
Au-plated BeCu |
007-031 |
|
|
|
(34.5 mm dia. x 11.8 mm high) |
|
|
|
|
|
|
|
|
|
|
|
Compact Sensor |
130 °C |
1.11" x 1.06" x 1.06" high |
30" (762 mm) |
304 |
SS |
750-213-G1 |
|
|
(28 mm x 27 mm x 27 mm high) |
|
|
|
|
|
|
|
|
|
|
|
Compact Sensor |
130 °C |
2.08" x 1.62" x 1.83" high |
30" (762 mm) |
304 |
SS |
750-213-G2 |
with Shutter |
|
(53 mm x 41 mm x 46 mm high) |
|
|
|
|
|
|
|
|
|
|
|
UHV Bakeable |
450 °C |
1.35" x 1.38" x .94" high |
12" (305 mm) |
304 |
SS |
007-219 |
Sensor |
|
(34 mm x 35 mm x 24 mm high) |
20" (508 mm) |
|
|
007-220 |
|
|
|
30" (762 mm) |
|
|
007-221 |
|
|
|
|
|
|
|
UHV Bakeable |
400 °C |
1.46" x 1.37" x 1.21" high |
12" (305 cm) |
304 |
SS |
750-012-G1 |
Sensor with Shutter |
|
(37 mm x 35 mm x 31 mm high) |
20" (508 cm) |
|
|
750-012-G2 |
|
|
|
30" (762 cm) |
|
|
750-012-G3 |
|
|
|
|
|
|
|
Dual Sensor |
130 °C |
1.45" x 3.45" x 1.70" high |
30" (762 mm) |
304 |
SS |
750-212-G2 |
|
|
(37 mm x 88 mm x 43 mm high) |
|
|
|
|
|
|
|
|
|
|
|
Shutter Assembly |
400 °C |
two models available |
N/A |
300-series SS |
750-210-G1 |
|
|
|
|
|
|
|
750-005-G1 |
|
|
|
|
|
|
(Sputtering) |
|
|
|
|
|
|
|
*For Bake only; waterflow is required for actual deposition monitoring. These temperatures are conservative maximum device temperatures, limited by the properties of Teflon (PTFE) at higher temperatures. In usage, the water cooling allows operation in environments that are significantly elevated, without deleterious affects.
**Aluminum body for heat transfer.
The XTC/2 Series instruments use a new type of "passive intelligent" oscillator. It is available with cable lengths of 15’ (4.572 m), 30’ (9.144 m), 50’ (15.24 m), and 100’ (30.28 m) as IPN 757-305-G15, G30, G50, or G100, respectively.
Conventional, active style oscillators do not work with these instruments. In-vacuum cable lengths to a maximum of 2 m (6.6’) are supported with this new technology.
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XTC/C - XTC/2 Operating Manual
This manual is configured to be used by both experienced and inexperienced deposition process engineers. For those with significant experience, especially on INFICON controllers, nearly all pertinent information is contained in Chapter 2, Quick Use Guide. Other sections contain the details that supplement the information in the quick use section.
Every user should read the complete manual. It is strongly suggested that the user or installer follow the following plan to gain the most information in the shortest period of time.
Register the instrument to receive updates and important information from the factory.
Read section 1.1.1, Notes, Cautions, Warnings, on page 1-1 to understand the safety related issues.
Read Chapter 2, Quick Use Guide, to become familiar with the instrument’s needs and capabilities. Use the other sections of the manual to supplement areas where you do not feel you have an adequate understanding of the material. Throughout Chapter 2 there will be frequent references to the manual sections that provide more detailed information. The final sections of the Chapter 2 build the understanding of the full use of the instrument in a logical progression, as suggested in section 2.3 on page 2-8.
The XTC/C can do anything that an XTC/2 can do, but it must be controlled through the computer interface. In order to install and use this instrument effectively, all aspects of XTC/2 operation must be understood. Because of this additional burden, it is probably not cost effective for an end-user of a single unit to purchase and install the XTC/C version.
WARNING
There are no user serviceable components within the instrument case.
Potentially lethal voltages are present when the line cord, System I/O or Aux I/O are connected.
Refer all maintenance to qualified personnel.
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XTC/C - XTC/2 Operating Manual
Transducers are covered under separate manuals.
IPN |
Transducer Type |
074-154 . . . . . . Bakeable
074-155 . . . . . . CrystalSix
074-156 . . . . . . Single/Dual/Compact
074-157 . . . . . . Sputtering
If you cannot find the answer to your question in this manual, please contact one of the following Customer Support groups after deciding whether:
your difficulty is with how you are using the instrument—in this case, contact Application Support.
or
your instrument needs repair—in this case, contact Field Service and Repair Support.
When you contact Customer Support, please have this manual at hand, along with the following information:
The serial number for your instrument.
A description of your problem.
An explanation of the corrective action that you may have already attempted.
The exact wording of any error messages that you have received from the instrument.
Within the USA, you may reach Customer Support at the following phone numbers. Please contact the location that is closest to you. If you are located outside of the USA, please contact your sales office. A complete listing of INFICON Worldwide Service Centers is available at www.inficon.com.
Austin, TX . . . . . . .ph. 512-448-0488 . . . . . . . . . fax 512-448-0398
San Jose, CA . . . .ph. 408-361-1200 ext. 125 . . fax 408-362-1556
Syracuse, NY . . . .ph. 315-434-1128 . . . . . . . . . fax 315-437-3803
If you are located outside the USA, please contact your sales office. A complete listing of INFICON Worldwide Service Centers is available at www.inficon.com.
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XTC/C - XTC/2 Operating Manual
Austin, TX . . . . . . ph. 512-448-0488. . . . . . . . . . fax 512-448-0398
San Jose, CA. . . . ph. 408-361-1200 ext. 120 . . . fax 408-362-1556
Syracuse, NY. . . . ph. 315-434-1167 . . . . . . . . . . fax 315-434-2551
If you are located outside the USA, please contact your sales office. A complete listing of INFICON Worldwide Service Centers is available at www.inficon.com.
Do not send your instrument without first speaking with a Customer Support Representative.
You must obtain an RMA (Return Material Authorization) number from the Customer Support Representative. If the delivery of a package without an RMA number is attempted, INFICON will refuse the delivery and the package will be returned to you.
If your instrument has been exposed to process materials, you will be required to complete a Declaration Of Contamination form.
IPN 074-183X
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XTC/C - XTC/2 Operating Manual
Chapter 2
Quick Use Guide
1If you haven’t removed the instrument from its shipping containers, do so now.
2Carefully examine the unit for damage that may have occurred during shipping. This is especially important if you notice signs of obvious rough handling on the outside of the cartons. Report any damage to the carrier and to INFICON, immediately.
3DO NOT discard any packing materials until you have taken inventory and have verified proper instrument operation to your satisfaction. See section 2.2 on page 2-4 for voltage selection and section 3.6 on page 3-11 for test mode operation.
Make sure you have received all of the necessary equipment by checking the contents of the shipping containers with the parts list below. INFICON ships these products on a feature-option basis. Check your order for the part number before comparing to the lists below.
IPN 074-183X
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XTC/C - XTC/2 Operating Manual
|
|
XTC/2 --- |
BASIC CONFIGURATION |
IPN # |
CODE# |
115V 50/60 Hz |
757-500-G1 |
1 |
230V 50/60 Hz |
757-500-G2 |
2 |
Computer Communications Module |
|
|
None |
757-211-G1 |
1 |
IEEE-488 Parallel |
760-142-G1 |
2 |
Remote Module |
|
|
None |
|
0 |
Hand Controller |
755-262-G1 |
1 |
Rack Mounting |
|
|
None |
|
0 |
1 Unit Mounting Kit |
757-212-G1 |
1 |
2 Unit Mounting Kit |
757-212-G2 |
2 |
XTC/C ---
BASIC CONFIGURATION |
IPN # |
CODE# |
115V 50/60 Hz |
759-500-G1 |
1 |
230V 50/60 Hz |
759-500-G2 |
2 |
Computer Communications Module |
|
|
None |
757-211-G1 |
1 |
IEEE-488 Parallel |
760-142-G1 |
2 |
Remote Module |
|
|
None |
|
0 |
Hand Controller |
755-262-G1 |
1 |
Rack Mounting |
|
|
None |
|
0 |
1 Unit Mounting Kit |
757-212-G1 |
1 |
2 Unit Mounting Kit |
757-212-G2 |
2 |
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IPN 074-183X