INFICON Q-pod User Manual

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O P E R A T I N G M A N U A L

Q-pod

Quartz Crystal Monitor

IPN 074-547-P1B

O P E R A T I N G M A N U A L

Q-pod

Quartz Crystal Monitor

IPN 074-547-P1B

®

www.inficon.com reachus@inficon.com

©2012 INFICON

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that produce them.

Q-pod™ is a trademark of INFICON GmbH.

Teflon® is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates.

Windows®, is a registered trademark of Microsoft Corporation.

All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright

©2012 All rights reserved.

Reproduction or adaptation of any part of this document without permission is unlawful.

DECLARATION

OF

CONFORMITY

This is to certify that this equipment, designed and manufactured by:

INFICON Inc.

Two Technology Place

East Syracuse, NY 13057

USA

meets the essential safety requirements of the European Union and is placed on the market accordingly. It has been constructed in accordance with good engineering practice in safety matters in force in the Community and does not endanger the safety of persons, domestic animals or property when properly installed and maintained and used in applications for which it was made.

Equipment Description:

Q-Pod Quartz Monitor

Applicable Directives:

2006/95/EC (LVD)

 

2004/108/EC (General EMC)

 

2002/95/EC (RoHS)

Applicable Standards:

Safety:

EN 61010-1:2001

Emissions:

EN 61326-1:1997/A1: 1998/A2: 2001 (Radiated & Conducted Emissions)

 

Class A: Emissions per Table 3

 

(EMC – Measurement, Control & Laboratory Equipment)

Immunity:

EN 61326-1:1997/A1: 1998/A2: 2001 (General EMC)

 

Class A: Immunity per Table A1

 

(EMC – Measurement, Control & Laboratory Equipment)

RoHS:

Fully compliant

CE Implementation Date:

 

April 2007 (Updated February 2011)

Authorized Representative:

Steve Schill

_________________________

Thin Film Business Line Manager

INFICON Inc.

ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE AUTHORIZED REPRESENTATIVE AT THE ABOVE ADDRESS.

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall not be less than two (2) years from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON.

www.inficon.com reachus@inficon.com

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Q-pod Operating Manual

Table Of Contents

Trademarks

Disclaimer

Copyright

Chapter 1

Introduction

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.2 General Cautions and Warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.3 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.3.1 Returning Your Q-pod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.6.1 Base Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.6.2 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Chapter 2

Quick Start

2.1 Install Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2 Connect the Q-pod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.3 Using the Q-pod Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3.1 Main Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3.1.1 Reading Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3.1.2 Materials Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3.2 Setup Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3.2.1 DataLog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3.2.2 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3.2.3 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3.2.4 Q-pods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3.3 Graph Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

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Chapter 3

Communications

3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 ASCII Command Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.3 QPOD.DLL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.3.1 Registering QPOD.DLL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.3.2 Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.3.3 Events . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.4 Calculating Rate and Thickness. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.5 Sample Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Chapter 4

Troubleshooting and Maintenance

4.1 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.1.1 Status LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.1.1.1 LED illuminated steady. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.1.1.2 LED flashes slowly (about 2 Hz) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.1.1.3 LED flashes rapidly (about 10 Hz) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.1.2 Troubleshooting the Q-pod. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 4.1.3 Troubleshooting Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 4.1.4 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.2 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.2.1 Front Load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9 4.2.2 Cool Drawer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 4.2.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12 4.2.4 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13 4.2.5 Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14 4.3 Crystal Sensor Emulator IPN 760-601-G2 . . . . . . . . . . . . . . . . . . . . . . . . . 4-15 4.3.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16 4.3.1.1 Measurement System Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . . 4-16 4.3.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure . . . . . . . . . . . . 4-17 4.3.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure. . . . . . . . . . . . . . . 4-18 4.3.1.4 System Diagnostics Pass But Crystal Fail Message Remains. . . . . . . . . . 4-19 4.3.2 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20 4.3.2.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20 4.3.2.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20 4.3.3 Emulator Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

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Chapter 5

Calibration Procedures

5.1 Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Chapter 6

Measurement and Theory

6.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

6.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Appendix A

Material Table

A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1

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Chapter 1

Introduction

1.1 Introduction

The INFICON Q-pod™ Transducer is a small, inexpensive and accurate way to measure thin film depositon rate and thickness. No external oscillator or power source is required.

The included Q-pod software displays rate, thickness, frequency, crystal life and a graph of rate versus time, for up to 8 Q-pods simultaneously. Q-pod readings can be logged to disk in spreadsheet friendly comma-delimited format.

There are also sample files included, written in Labview, Java and Visual Basic to help aid in the integration of the Q-pod into a system that is managed via software. See section section 3.5, Sample Programs, on page 3-4 for more details.

Figure 1-1 Q-pod

When reading this Q-pod manual, please pay particular attention to the NOTES, CAUTIONS, and WARNINGS found throughout the text. The Notes, Cautions, and Warnings are defined in section 1.2.1 on page 1-2. Also, note the general warnings in section 1.2.2, General Cautions and Warnings, on page 1-3.

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1.1.1 Related Manuals

Sensors are covered in separate manuals. PDF files of these manuals are contained in the 074-5000-G1 CD, part of the Ship Kit.

074-154 - Bakeable Sensor

074-156 - Front Load Sensor, Single/Dual

074-157 - Sputtering Sensor

147-800 - Cool Drawer Sensor, Single/Dual

1.2Instrument Safety

1.2.1 Definition of Notes, Cautions and Warnings

When using this manual, please pay attention to the NOTES, CAUTIONS and WARNINGS found throughout. For the purposes of this manual they are defined as follows:

NOTE: Pertinent information that is useful in achieving maximum instrument efficiency when followed.

CAUTION

Failure to heed these messages could result in damage to the instrument.

WARNING

Failure to heed these messages could result in personal injury.

WARNING - Risk Of Electric Shock

Dangerous voltages are present which could result in personal injury.

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1.2.2 General Cautions and Warnings

CAUTION

Do not open the instrument case! There are no user-serviceable components within the instrument case.

Refer all maintenance to technically qualified personnel.

WARNING

Failure to operate the Q-pod in the manner intended by INFICON can circumvent the safety protection provided by the instrument and may result in personal injury.

CAUTION

Q-pod may not be suitable for use with RF sputtering systems or other electrically noisy environments.

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1.3 How to Contact INFICON

Worldwide customer support information is available under Support at www.inficon.com where you can contact:

A Technical Support Engineer with questions regarding applications for and programming the Q-pod.

A Service Engineer with questions regarding troubleshooting, diagnosing or repairing a defective Q-pod.

Sales and Customer Service, to find the INFICON Sales office nearest to you.

Repair Service, to find the INFICON Service Center nearest to you.

If you are experiencing a problem with your Q-pod, please have the following information readily available:

The serial number and firmware version for your Q-pod.

A description of your problem.

An explanation of any corrective action that you may have already attempted.

The exact wording of any error messages that you may have received.

1.3.1Returning Your Q-pod

Do not return any component of your Q-pod to INFICON without first speaking with a Customer Support Representative. You must obtain a Return Material Authorization (RMA) number from the Customer Support Representative.

If you deliver a package to INFICON without an RMA number, your package will be held and you will be contacted. This will result in delays in servicing your Q-pod.

1.4 Specifications

Frequency Range. . . . . . . . . . . . . . . 1 to 6 MHz

Frequency Resolution . . . . . . . . . . . 0.05 Hz at 6 MHz @ 2 measurements per second)

Frequency Accuracy . . . . . . . . . . . . 0.002%

Frequency Stability. . . . . . . . . . . . . . ±2 ppm total, over 0º to 50ºC

Thickness & Rate Resolution . . . . . . 0.0613 Å (new crystal); 0.1091 Å (crystal @ 4.5 MHz); over 500 ms sample for material density = 1.0, Z-ratio = 1.0

Input . . . . . . . . . . . . . . . . . . . . . . . . . BNC

Interface & Power. . . . . . . . . . . . . . . USB, v2.0 or later, 15 ft. (457 cm) maximum allowable length

Size . . . . . . . . . . . . . . . . . . . . . . . . . 1 in. x 2 in. x 2.5 in. (25 mmx 50 mm x 64 mm)

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Weight . . . . . . . . . . . . . . . . . . . . . . . 2 oz. (32 gm)

Computer Requirements . . . . . . . . . Any PC running Windows® XP / 2000 / Windows 7 32-bit with one available USB port for each Q-pod

1.5 Unpacking and Inspection

1If the Q-pod has not been removed from its packaging, do so now.

2Carefully examine the card for damage that may have occurred during shipping. This is especially important if you notice obvious rough handling on the outside of the container. Immediately report any damage to the carrier and to INFICON.

3Do not discard the packing materials until you have taken inventory and have at least performed successful installation.

4Take an inventory of your order by referring to your order invoice and the information contained in section 1.6.1.

5To install the Q-pod, see Chapter 2, Quick Start.

6For additional information or technical assistance, contact INFICON, refer to section 1.3 on page 1-4.

1.6Parts and Options Overview

1.6.1 Base Configuration

Q-pod Transducer w/Software . . . . . . . . .Q-POD 10 ft. USB Cable. . . . . . . . . . . . . . . . . . . .068-0472

6 in. BNC Cable . . . . . . . . . . . . . . . . . . . .755-257-G6

Technical Manual . . . . . . . . . . . . . . . . . . .074-547 on 074-5000-G1 CD 5.5 MHz Test Crystal . . . . . . . . . . . . . . . .782-902-023

1.6.2 Sensors

Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . SL-XXXXX

Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . CDS-XXFXX

Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 750-618-G1 Front Load UHV Bakeable Sensor . . . . . . . . . . . . . . BK-AXF

NOTE: Multi-crystal (rotary) sensors & dual sensors should not be used with the Q-pod.

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Chapter 2

Quick Start

2.1 Install Software

NOTE: If this is the initial Q-pod installation on this computer, you should install the

Q-pod Software before connecting a Q-pod to the USB port.

1Place the INFICON Program Disk in the computer’s CD-ROM.

2Ignore the prompt and double-click the My Computer icon.

3Right-click the CD-ROM icon, then click Open.

4Double-click the Q-pod Transducer file.

5Double click QPOD_V#_SETUP.EXE.

6Follow the on screen directions and select the default installation options.

7When software installation is complete, exit the installation program.

2.2Connect the Q-pod

1Connect the USB cable to a computer USB port, then to the Q-pod. See Figure 2-1.

1a If you are prompted to install the Q-pod drivers, select Install the Software Automatically.

1b If you are prompted concerning Windows Logo Testing, select Continue Anyway.

Figure 2-1 Q-pod Connections

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2Use the 6 in. BNC cable provided to connect the Q-pod to the QCM sensor feedthrough.

3The status light on the Q-pod illuminates when a quartz crystal is detected.

2.3Using the Q-pod Software

Click the Q-pod desktop icon, or click Start >> Programs >> Sigma Instruments >> Q-pod. If you are prompted to assign Q-pod(s) to a channel, click Yes. Click Help to get more detailed information on materials and operation. Select Setup or Graph on the Main Screen menu to change the main screen display mode. See Figure 2-2.

Figure 2-2 Main Screen

2.3.1 Main Display

The top of the main screen is the main display. Here the Start button is used to start and record a run. Run time and run number are shown, along with the current time and date. The option to datalog during any given run is also given.

2.3.1.1 Reading Grid

The left grid displays the measured values of each connected Q-pod. Click Start to display Rate and Thickness readings. Frequency and Life readings are always displayed. Click a channel’s Zero button to zero the channel thickness reading. Shift-Click any channel Zero button to zero all thicknesses.

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2.3.1.2 Materials Grid

In the right grid, edit the Density, Z-Factor and Tooling values for the materials being deposited. Move your mouse over each setting to see a brief description.

2.3.2 Setup Display

The lower section of the main screen is where run parameters can be changed and Q-pod communication information is presented.

2.3.2.1 DataLog

Sets the file name, location and operation of disk data logging. Data log files can be set to overwrite the file name each time it is saved. It can append the data, by adding the newly recorded data to the end of the same file. It can also save each run in a new file designated by run number. Data is saved in comma delimited format for easy import into a spreadsheet.

2.3.2.2 Measurement

Sets the basic measurement parameters for all Q-pods. The values shown above are correct for most applications.

2.3.2.3 Display

Sets the display parameters.Thickness can be displayed in kÅ or Å. Mass can be displayed in ug/cm2. Rate will be changed to ng/cm2/sec if mass is the chosen option. Resolution of displayed readings may also be changed here (0.0 or 0.00). The rate reading filter can be set in this section. The Filter number represents how many measurements are averaged together to produce the displayed rate. The number of Q-pods being used is defined in this section as well.

2.3.2.4 Q-pods

Sets the name and displays the serial number of the Q-pod assigned to each measurement channel. A strike-through serial number indicates the Q-pod is not connected. The software can monitor a maximum of 8 Q-pods simultaneously.

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2.3.3 Graph Display

Figure 2-3 Graph Display

Graphs the deposition rate, thickness, or frequency of active measurement channels when Start is clicked. The graph viewed can be changed from the view option on the toolbar on the main screen. Settings to the right of the graph control basic graph functions. See the Help menu for advanced graph setup.

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