OLS3100
The name "LEXT" is formed from the words "Laser" and "Next," and means "next-generation 3D confocal laser microscopes".
CONFOCAL LASER SCANNING
MICROSCOPE
OLS3100
TM
NEW
Greater simplicity with higher precision:
The next step in the evolution of three dimensional
laser confocal metrology.
1
LEXT minimizes manual operation, improving ease of use for everyone.
Even a first-time user can operate the system like an expert, and obtain fast reliable measurement results.
The system features not only improved functionality, but also an even higher level of measurement performance.
Constantly evolving toward greater simplicity and higher precision,
LEXT meets a diverse range of needs in fine surface profile measurement.
2
Welcome to the world of LEXT 3D
Automatic operation achieves speedy, high-precision output.
Position and
magnification settings
New, Operation Navigator feature is an online wizard
that guides the user in the operation of the LEXT
The operation navigator provides
animations to guide the user through
each step of microscopic observation.
You can complete a series of steps by
simply operating the mouse in the same
way as shown in the animations
appearing on the screen.
The motorized, high-speed revolving nosepiece ensures
the safe and speedy microscopic inspections
Motorized switching between magnifications helps the user to
increase work efficiency and to keep the specimen safe; an
automatic retracting function prevents an objective lens from
coming contact with a specimen. It also
offers excellent parfocality of all
objective lenses and an automatic light
intensity adjusting function keeps
brightness levels unchanged after
magnification switching.
High-speed automatic focusing and one-push gain
enable the user to complete preparations for 3D image
capturing quickly and easily
The speed of the automatic focusing function has been made
three times faster so that the user can reach an image or a point
on an image in an instant. Additionally, one-push gain allows the
user to adjust brightness optimally and to complete preparations
for 3D image capturing with ease.
Click
3D image capturing with one click automatically
detecting upper and lower limits
With LEXT, 3D image capturing is performed by just one click of
the “3D capture button.” Upper- and lower-limit settings or other
cumbersome preparations are unnecessary. A beginner can
obtain a 3D image of the best quality easily. For experienced
users, this automated 3D image capturing feature lightens their
work load and contributes greatly to increasing their work
efficiency.
3
Auto Fine View does it all automatically
The brightness and contrast of a captured image are automatical-
ly adjusted. Image conditioning is typically a manual process
requiring an experienced operator. Using the auto fine view
function of LEXT, anybody can acquire ideal, high-quality 3D
images without special training.
Introducing the user to a new 3D world
by providing a variety of image presentation
patterns, high precision measurement and
advanced analytical techniques
A captured image is rendered to an ideal 3D image by
using LEXT’s display capabilities. High precise
measurement, high repeatability, and advanced analytical
techniques related to roughness and particle analyses
provide the user with a new dimension of microscopic
observation.
Welcome to the world of LEXT 3D
Display, measurement and
analysis
Image
capturing
Wired frame
Microlens
Image intensity
profile
Step height
measurement
Surface
roughness
analysis
After auto
processing
Before
processing
4
Wafer bump
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