Olympus Microscope User Manual

4 (1)

MICROSCOPE

COMPONENTS GUIDE

Choosing The Ideal UIS2 Optics Components For Your Equipment

2 0 0 6 - 1 1

Olympus Microscope User Manual

The wide range of Olympus components introduced here

allows users in such diverse fields as research, inspection and production to take advantage of the quality, flexibility and

outstanding optical performance of the UIS2 Optical System. That's why installing Olympus microscope components is, quite simply, the right choice for your equipment.

1

CONTENTS

WELCOME TO UIS2/UIS OPTICS ----------------------------------------------

 

3 — 4

SYSTEM DIAGRAM ---------------------------------------------------------------

 

5 — 6

UIS2/UIS OBJECTIVE LENSES -----------------------------------------------

 

7 — 18

M Plan SemiApochromat

MPLFLN series --------------------------------

8

Long WD M Plan SemiApochromat LMPLFLN series ------------------------------

9

M Plan Achromat

MPLN series ---------------------------------

10

LCD Long WD M Plan SemiApochromat

 

 

LCPLFLN-LCD series -------------------------

11

M Plan Apochromat

MPlanApo series -----------------------------

12

Super Long WD M Plan Achromat

SLMPlan series -------------------------------

12

IR Long WD M Plan SemiApochromat

 

 

LMPlan-IR series -----------------------------

13

IR M Plan SemiApochromat

MPlan-IR -------------------------------------

13

M Plan SemiApochromat BD

MPLFLN-BD series ---------------------------

14

M Plan SemiApochromat BDP

MPLFLN-BDP series --------------------------

15

Long WD M Plan SemiApochromat BD

 

 

LMPLFLN-BD series --------------------------

16

M Plan Achromat BD

MPLN-BD series ------------------------------

17

M Plan Apochromat BD

MPlanApo-BD --------------------------------

18

MICROSCOPE SYSTEM BXFM ----------------------------------------------

 

19 — 22

BXFM frame

BXFM-F --------------------------------------

19

BXFM

BXFM-F+BXFM-ILH+BXFM-ILHSPU----------

20

BXFM-S

BXFM-F+BXFM-ILHS ------------------------

21

Universal stand type 2

SZ2-STU2 -----------------------------------

22

Compact stand

U-ST -----------------------------------------

22

Large stand

SZ-STL --------------------------------------

22

ILLUMINATION UNITS ---------------------------------------------------------

 

23 — 25

Reflected light illuminator for BF/DF

 

 

BX-RLA2 -------------------------------------

23

Universal reflected light illuminator BX-URA2 ------------------------------------

23

Reflected light illuminators for BF

BX-KMA/BX-KMA-ESD -----------------------

24

Reflected light illuminator for BF

U-KMAS -------------------------------------

25

LAMP HOUSING & ACCESSORIES -----------------------------------------

 

26 — 28

75W xenon apo lamp housing

U-LH75XEAPO -------------------------------

26

100W mercury apo lamp housing

U-LH100HGAPO -----------------------------

26

100W mercury lamp housing

U-LH100HG ----------------------------------

26

100W halogen lamp housings

U-LH100-3/U-LH100IR/U-LH100L-3 --------

26

External power supply

TH4-100/200 --------------------------------

27

Hand switch

TH4-HS --------------------------------------

27

Extension cord

U-RMT ---------------------------------------

27

DF converter for BX-URA2

U-RCV ---------------------------------------

27

Fiber adapter for reflected light observation

 

 

U-LGAD --------------------------------------

27

Transmitted light guide adapter

SZX-TLGAD ----------------------------------

27

Light source

LG-PS2 --------------------------------------

28

Light guide

LG-SF ----------------------------------------

28

Double lamp house adapter

U-DULHA ------------------------------------

28

OBSERVATION TUBES --------------------------------------------------------

 

29 — 30

Widefield binocular tube

U-TR30-2 ------------------------------------

29

Widefield binocular tube for IR

U-TR30IR ------------------------------------

29

Widefield erect image trinocular tube

 

 

U-ETR-4 -------------------------------------

29

Single port tube with lens

U-TLU ----------------------------------------

29

Single port tube with lens for IR

U-TLUIR -------------------------------------

29

Super widefield trinocular tube

U-SWTR-3 -----------------------------------

30

Super widefield erect image trinocular tube

 

 

U-SWETR ------------------------------------

30

Super widefield erect image tilting trinocular tube

 

 

MX-SWETTR ---------------------------------

30

INTERMEDIATE TUBES & ACCESSORIES -------------------------------

31 — 32

Magnification changer

U-CA -----------------------------------------

31

Magnification changer 2x

U-ECA ---------------------------------------

31

Trinocular intermediate attachment

 

 

U-TRU ---------------------------------------

31

Dual port

U-DP -----------------------------------------

32

Dual port 1x

U-DP1xC -------------------------------------

32

Eyepoint adjuster

U-EPA2 --------------------------------------

32

Arrow pointer

U-APT ---------------------------------------

32

EYEPIECES/FILAR MICROMETER EYEPIECE ---------------------------------

33

Widefield eyepieces

WHN10x, WHN10x-H,

 

 

CROSSWHN10x, WH15x ---------------------

33

Super widefield eyepieces

SWH10x-H, MICROSWH10x,

 

 

CROSSSWH10x ------------------------------

33

Filar micrometer eyepiece

U-OSM ---------------------------------------

33

REVOLVING NOSEPIECES ----------------------------------------------------

 

34 — 35

Quintuple revolving nosepiece

U-5RE-2--------------------------------------

34

Sextuple revolving nosepiece with slider slot for DIC

 

 

U-D6RE---------------------------------------

34

Sextuple revolving nosepiece with slider slot for DIC with ESD treatment

 

 

U-D6RE-ESD ---------------------------------

34

Septuple revolving nosepiece with slider slot for DIC

 

 

U-D7RE --------------------------------------

34

Centerable quadruple revolving nosepiece with slider slot for DIC

 

 

U-P4RE --------------------------------------

34

Centerable sextuple revolving nosepiece with slider slot for DIC

 

 

U-P6RE --------------------------------------

34

Quintuple revolving nosepiece for BF/DF

 

 

U-5BDRE ------------------------------------

35

Quintuple revolving nosepiece for BF/DF with slider slot for DIC

 

 

U-D5BDRE -----------------------------------

35

Sextuple revolving nosepiece for BF/DF with slider slot for DIC/

 

 

U-D6BDRE -----------------------------------

35

Centerable quintuple revolving nosepiece

 

 

U-P5BDRE -----------------------------------

35

Adapter to mount BF objectives

 

 

 

BD-M-AD ------------------------------------

35

VIDEO CAMERA ADAPTERS -------------------------------------------------

 

36 — 37

C-mount video camera ports

U-TV0.25xC, U-TV0.35xC-2,

 

 

U-TV0.5xC-3, U-TV0.63xC -------------------

36

Video camera mount adapters

U-CMAD3, U-BMAD, U-SMAD,

 

 

U-TMAD, U-FMT -----------------------------

37

Video camera port

U-TV1x-2 ------------------------------------

37

MOTORIZED UNITS-------------------------------------------------------------

 

38 — 41

Motorized BF/DF reflected light illuminator+motorized Nomarski DIC sextuple

revolving nosepiece+100W halogen lamp housing

 

 

BX-RLAA+U-D6REMC+U-LH100-3 ----------

38

Motorized universal reflected light illuminator

 

 

BX-RFAA -------------------------------------

38

Motorized quintuple BD revolving nosepiece with slider slot for DIC

 

 

U-D5BDREMC -------------------------------

39

Motorized sextuple revolving nosepiece with slider slot for DIC

 

 

U-D6REMC ----------------------------------

39

Motorized centerable quintuple revolving nosepiece with slider slot for DIC

 

 

U-P5REMC -----------------------------------

39

Control unit

BX-UCB --------------------------------------

39

Hand switch

U-HSTR2 ------------------------------------

39

Control box for motorized nosepiece and BF/DF illuminator

 

 

BX-REMCB ----------------------------------

39

AC adapter for BX-REMCB

U-ACAD4515 --------------------------------

39

Active auto focus unit

U-AFA1M ------------------------------------

40

Motorized reflected filter wheel

U-FWR ---------------------------------------

40

Motorized illumination with power focus

 

 

BXFMA-F ------------------------------------

41

DEEP ULTRAVIOLET OBSERVATION SYSTEM --------------------------------

42

UV248 compatible intermediate tube

 

 

U-UVF248IM ---------------------------------

42

UV quartz light guide

U-UVF2FV/5FB -------------------------------

42

UV248 compatible light source box + Mercury Xenon lamp housing

 

 

U-UVF248LB+U-LH80HBXE -----------------

42

OPTICAL TERMINOLOGY ----------------------------------------------------

 

43 — 46

2

WELCOME TO UIS2/UIS OPTICS

UIS2/UIS:

The System That Maximizes The Advantage Of Infinity-Corrected Optics

What's infinity-corrected optics?

UIS2/UIS optics is an infinity-corrected optical system — in other words, a system in which light passes from the specimen through the objective lens without forming an image along the way. Instead, it travels in the form of infinity parallel rays to the tube lens. The tube lens is where the intermediate image is formed, whereas in finitecorrected optics, this is done by the objective lens.

Figure 1 Infinity-corrected and

 

 

finite-corrected optical system principles

Infinity-corrected optical system

 

 

Parallel light beam

Eyepiece

 

 

UIS/UIS2

Tube lens

Intermediate

objective lens

image

Finite-corrected optical system

Eyepiece

 

 

Objective

 

Intermediate

lens

 

image

Advantages of infinity-corrected optics

This system, known as "infinity-corrected optics", offers a number of advantages:

light between the objective lens and tube lens, allowing the creation of user-specific or taskspecific optical systems. To establish real flexibility with such a system, it is necessary to eliminate the occurrence of coma aberration.

*In UIS2/UIS objective lenses, the parfocal distance is designed

at 45mm and the focal length of the tube lens is 180mm.

Figure 2 Advantages of Infinity-corrected

optical system

Infinity-corrected optical system

Finite-corrected optical system

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective

Tube lens

Objective

lens

 

lens

Basic dimensions of UIS2/UIS optical system

The UIS2/UIS optical system optimally corrects aberration with a dedicated telan lens and an eyepiece so that the coma aberration and flatness are not degraded even when the telan lens exit pupil position is changed by changing the objective lens and telan distance. This makes it possible to use a distance of 50mm to 170mm from objective lens mounting position to the single port tube with lens.

*Coma aberration: refer to the optical terminology at the end of

There is no change in magnification even when the distance between the objective lens and tube lens is altered.

With the total magnification remaining constant, there is no image aberration — even when prisms or sliders are interposed between the objective lens and the tube lens.

As thousands of users have found by experience, these advantages are crucial to composing the ideal microscope optical system. What's more, it is even possible to freely insert or remove intermediate attachments in the parallel rays of

this document.

Figure 3 Basic dimensions of UIS2/UIS2

optical system

U-TLU

(Single port tube with lens)

Objective lens

Image

 

 

 

 

 

 

 

 

 

 

 

 

45mm

* 40mm

* 84mm

 

 

 

Recommended distance

57.6mm

102mm

 

 

50-170mm

 

 

*Basic dimensions when our revolving nosepiece and illuminator are combined. When the position of the illuminator above is changed, illumination performance cannot be maintained.

3

WELCOME TO UIS2/UIS OPTICS

Features of UIS2 objective lenses

UIS2 objective lenses ensure compatibility (screw diameter, optical performance) with the UIS optical system and have the following features compared to conventional objective lenses.

1.Wavefront aberration control

The Olympus UIS2 objective lenses set a new standard, with wavefront aberration control in addition to common performance standards of N.A. and W.D. Olympus challenges farther highest order optics which has not been fulfilled by the conventional standards. We offer excellent performance objective lenses by minimizing the aberrations that lower resolution.

*Wave front aberration: refer to the optical terminology at the

end of this document.

2.Objective lenses with excellent image parcentricity

High power SemiApochromatic UIS2 objective lenses make the centration tolerance between objective lenses on the microscope nosepiece keep the image within the enter of the field of view even with digital cameras. (50x or higher power in both MPLFLN and LMPLFLN series)

3.Improvement of color reproducibility

UIS2 objective lenses realize natural color reproduction without any chromatic shifts using stringently selected high transmittance glass and advanced coating technology that provides high transmittance which is flat over an ultrawide band wavelength. In addition, since the total optical system, including the tube lens is designed to reproduce a natural color, clear images faithful to the specimen are obtained even with digital imaging.

4.Lightening

Weight has been reduced to approximately 2/3 that of conventional products by using an aluminum objective lens barrel cover. This has the effect of lightening the load on the devices at objective lens up/down, suppressing vibrations by lowering the inertial force at objective lens switching, etc. (MPLFLN series, LMPLFLN series)

5.Adoption of eco-lens

The glass materials of UIS2 objective lenses are all leadand cadmium-free eco-glass.

Based on our conviction that the UIS2/UIS system is the best way to maximize the advantages of infinity-corrected optical systems, we confidently recommend the UIS2/UIS-featured Olympus microscope units for all your high-precision needs in research, inspection and production equipment.

*Refer to the Olympus home page for detailed objective lenses specifications.

4

SYSTEM DIAGRAM

BXFM SYSTEM DIAGRAM

Video system

 

 

 

 

 

Refer to pages 36-37

 

Video camera

 

Video camera

Video camera

Video camera

 

 

C-mount

 

B mount 2/3"

S mount 2/3"

F mount

 

 

 

 

 

 

 

U-FMT

 

 

 

U-CMAD3

U-BMAD

U-SMAD

 

U-TMAD

 

 

 

 

 

 

 

 

U-TV0.25xC

U-TV0.35xC-2

U-TV0.5xC-3

U-TV0.63xC

 

U-TV1x-2

 

Observation/single tubes

 

 

 

 

Refer to pages 29-30

and eyepieces

 

 

 

 

 

 

 

WHN

 

 

SWH

 

 

 

 

Eyepieces

Widefield trinocular

Eyepieces

Super widefield trinocular

U-TLU

 

 

observation tubes

 

observation tubes

 

U-TLUIR

 

Illumination systems and power supply

 

 

 

 

 

 

 

 

 

U-25ND6, U-25ND25,

 

 

U-AN360-3

U-AN

U-PO3

U-POTP3

U-25LBD, U-25IF550,

Revolving nosepiece

U-25L42, U-25FR,

 

U-AN360IR

 

U-POIR

 

U-BP1100IR, U-BP1200IR

(Refer to pages 34-35)

 

 

 

 

 

 

Refer to pages 23-28

BX-RLA2

 

BX-URA2

U-KMAS

SZX-TLGAD

 

 

 

BX-KMA/

 

 

 

 

 

 

 

BX-KMA-ESD

 

 

 

 

 

 

U-RCV

 

 

LG-SF

 

 

 

 

 

 

 

 

LG-PS2

 

 

 

 

 

U-LGAD

 

 

Focusing units

 

 

Refer to pages 19-21

U-DULHA

 

 

 

 

 

 

 

 

 

 

 

 

 

BXFM-ILHS

 

U-LH100-3

TH4-100

TH4-HS

 

 

 

 

U-LH100L-3

 

 

BXFM-ILH

 

 

 

U-LH100IR

 

 

 

 

 

 

 

 

U-LH100HGAPO

 

 

 

 

 

 

 

U-LH100HG

 

 

BXFM-ILHSPU

 

 

 

 

 

 

 

 

 

 

 

U-LH75XEAPO

 

 

 

 

BXFM-F

 

 

 

 

Stands

 

 

 

 

 

Refer to page 22

SZ-STL

 

 

U-ST

SZ2-STU2

 

 

 

*Different types may be offered in each area.

5

SYSTEM DIAGRAM

MOTORIZED UNIT SYSTEM DIAGRAM

U-AN

U-AN360-3

U-PO3

U-POTP3

U-25ND6,

U-25ND25

U-25LBD

U-25IF550

U-25L42

U-25FR

U-DICR

U-DICRH

U-DICRHC

Observation tubes

Refer to pages 38-40

(Refer to pages 29-30)

 

 

U-AFA1M

Intermediate tubes

U-FWO

(Refer to pages 31-32)

U-AN360RAF

 

Refer to page 26

U-LH75XEAPO

U-LH100HGAPO

U-LH100HG

Mirror units

U-LH100-3

 

 

U-LH100L-3

 

U-FWR

BX-RFAA

BX-RLAA

 

Refer to

Refer to pages 7-18

BX-UCB*

U-D6REMC

 

page 35

 

 

 

 

BF objective lenses

U-HSTR2

 

 

 

 

BD-M-AD

 

 

U-D5BDREMC

 

 

U-ZPCB

 

 

 

Z board

 

 

BF/DF objective lenses

PC

 

 

 

BX2BSW

 

 

 

Control software

* BX-REMCB is also available for BX-RLAA + motorized revolving nosepiece control (refer to page 39)

BXFM-A SYSTEM DIAGRAM

 

 

 

 

Refer to page 41

 

 

 

Refer to page 26

 

 

ø32filter

 

 

 

Video system

 

 

 

 

(Refer to pages 37-38)

 

 

 

 

Observation tubes

Auxiliary lens

 

U-LH100HG

Power source

(Refer to pages 29-30)

(provided with the BXFMA-F)

U-LH75XEAPO

 

 

 

 

 

 

 

 

 

Refer to pages 27-28

U-AFA1M

 

 

 

 

 

 

LG-SF

 

LG-PS2

 

U-LGAD

 

 

 

BXFMA-F

 

Refer to pages 26-27

 

 

U-FWR

U-LH100-3

U-RMT

 

PC

 

 

 

 

 

 

 

U-LH100L-3

 

 

 

U-D6REMC

 

 

 

 

U-P5REMC

 

 

 

 

U-D5BDREMC

U-IFFH

 

 

 

 

 

 

BX-UCB

 

Objective lenses

U-FH

U-ZPCB

U-HSTR2

Z board

 

 

 

 

6

 

 

 

UIS2/UIS OBJECTIVE LENSES

Meaning of abbreviations shown on objective lens

M P L (Plan) F L N - 1 0 0 B D

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

M:

Metallurgical (no cover)

PL: Plan/

 

 

 

 

 

 

 

 

 

 

None: UIS

Number:

None: Brightfield

LM:

Long working distance

Corrects field

 

 

 

 

 

 

 

 

 

of

N:

UIS2

Objective lens

BD:

Brightfield/darkfield

 

metallurgical use

curvature of

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

magnification

BDP: Brightfield/darkfield/

SLM: Super long working

the periphery of

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

polarizing

the image plane

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

distance metallurgical use

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

IR:

IR

LC:

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Observation through

 

 

 

 

 

 

APO: Apochromat/

 

 

 

 

 

 

 

 

LCD: LCD

 

substrate

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Optimally corrects chromatic aberration in the entire visible band (violet~red)

Objective lens notation

Objective lenses series abbreviation (PL: Plan)

Magnification

N.A. (Numerical Aperture)

Infinity-corrected optical system

For brightfield observation

Cover glass thickness (no cover)

Field Number

 

Series

Magnification

BF

DF

DIC*1

POL

FL

F.N. (Field Number)

Remarks

UIS2

MPLFLN

1.25/2.5

\

 

 

 

 

1.25x: 22 / 2.5x: 26.5

Use together with polarizer and analyzer

 

 

 

 

 

 

 

 

 

recommended

 

 

5/10/20/50/100

\

 

\U

\

\*2

26.5

 

 

LMPLFLN

5/10/20/50/100

\

 

\L

\

\

26.5

 

 

MPLN

5/10/20/50/100

\

 

 

 

 

22

 

 

LCPLFLN-LCD

20/50/100

\

 

\L

 

 

26.5

For LCD

UIS

MPlanApo

20/50/100

\

 

\*3 U

\

 

26.5

 

 

SLMPlan

20/50

\

 

 

 

 

26.5

 

 

LMPlanIR/MPlanIR

5/10/20/50/100 *4

\

 

 

 

 

22

For near-IR observation

UIS2

MPLFLN-BD

5/10/20/50/100/150

\

\

\U

\

\*2

26.5

 

 

MPLFLN-BDP

5/10/20/50/100

\

\

aU

a

\*2

26.5

 

 

LMPLFLN-BD

5/10/20/50/100

\

\

\L

\

\

26.5

 

 

MPLN-BD

5/10/20/50/100

\

\

 

 

 

22

 

UIS

MPlanApo-BD

100

\

\

\U

\

 

26.5

 

*1

DIC prism U-DICR: UM/LM position, U-DICRHC: LM position fixed, U-DICRH: UM position fixed. *2 5~20x: U excitation also possible

*3

50x: DIC observation not applicable

*4 MPlanIR: available 100x only \: Responds a: Optimally responds BF: Brightfield DF: Darkfield

DIC: Differential Interference Contrast

POL: Polarized light FL: Fluorescence

Features of objective lens series

a MPLFLN series: M Plan SemiApochromat — P 8

Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration. The lineup consists of 7 objective lenses ranging from 1.25x to 100x, and secures a W.D. of 1mm or longer. Since the exit pupil position of the 5x-100x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification. For ultra low magnifications (1.25x, 2.5x), use together with analyzer and polarizer of the reflected light illuminator.

a LMPLFLN series: Long WD M Plan SemiApochromat — P 9

Long working distance Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration. Suitable with samples having a height difference and in preventing collision, as the working distance is long. Also, since the exit pupil position of the 5x-100x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification.

a MPLN series: M Plan Achromat — P 10

Plan Achromat objective lenses providing excellent image flatness up to F.N. 22.

a LCPLFLN-LCD series: LCD Long WD M Plan SemiApochromat — P 11

Perfect objective lens series for observation of LCD panels and other samples through a glass substrate. Aberration correction matched to the glass thickness is accomplished using a correction ring.

a MPlanApo series: M Plan Apochromat — P 12

Highest class Plan Apochromat objective lenses that maximize performance in brightfield observation. All aberrations are corrected at the highest level, while providing high N.A.

a SLMPlan series: Super Long WD M Plan Achromat — P 12

Plan Achromat objective lenses with high magnification and super long working distance. Two magnifications, 20x and 50x are available. For 5x or 10x objective lenses, select from the LMPLFLN Series.

a LMPlan-IR series: IR Long WD M Plan SemiApochromat — P 13

MPlan-IR: IR M Plan SemiApochromat — P 13

IR objective lenses which compensate for aberrations from visible to near infrared light. Ideal for the observations of semiconductor interiors and the back surface of a chip package as well as CSP bump inspection.

a MPLFLN-BD series: M Plan SemiApochromat BD — P 14

Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration. The series secures a W.D. of 1mm or longer. Since the exit pupil position of the 5x-150x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification.

a MPLFLN-BDP series: M Plan SemiApochromat BDP — P 15

Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration. The series secures a W.D. of 1mm or longer. Since the exit pupil position of the 5x-100x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification. The BDP series optimizing brightfield/darkfield and polarized light characteristics is perfect for Nomarski DIC and polarized light observations.

a LMPLFLN-BD series: Long WD M Plan SemiApochromat BD — P 16

Long working distance Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration. Suitable with samples having a height difference and in preventing collision, as the working distance is long. Also, since the exit pupil position of the 5x-100x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification.

a MPLN-BD series: M Plan Achromat BD — P 17

Plan Achromat objective lenses providing excellent image flatness up to F.N. 22.

a MPlanApo BD: Plan Apochromat BD — P 18

Highest class Plan Apochromat objective lens that maximize performance in brightfield and darkfield observations. All aberrations are corrected at the highest level, while providing high N.A.

7

UIS2 OBJECTIVE LENSES

M Plan SemiApochromat

MPLFLN series

Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration. The lineup consists of 7 objective lenses ranging from 1.25x to 100x, and secures a W.D. of 1mm or longer. Since the exit pupil position of the 5x-100x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification.

For ultra low magnifications (1.25x, 2.5x), use together with analyzer and polarizer of the reflected light illuminator.

 

 

MPLFLN1.25x*

 

 

MPLFLN2.5x*

 

 

ø28

 

 

ø28

 

 

ø20.32

 

 

ø20.32

4.9

 

 

4.9

 

 

45

(41.5)

41.2

45

(34.3)

31.6

WD=3.5

ø28.6

WD=10.7

ø24.5

ø29

ø29

 

ø30

 

ø30

 

 

MPLFLN20x

 

 

ø20.32

4.5

 

 

45

(41.9)

35.1

 

 

ø12.1

 

WD=3.1

ø26

 

 

 

 

 

 

MPLFLN50x

 

 

 

 

ø20.32

4.8

 

 

 

 

45

(44)

41.78

40.8

36.8

 

 

 

 

ø10.7

 

WD=1

 

 

ø15.2

 

 

 

ø17.8

 

 

 

 

 

 

 

 

ø26

 

 

 

 

MPLFLN5x

 

 

 

 

ø20.32

 

 

4.5

 

 

 

 

 

(25)

22.55

 

 

45

 

 

 

 

 

 

ø20.9

 

 

 

WD=20

ø26

 

 

 

 

 

 

 

 

MPLFLN100x

 

 

 

 

ø20.32

4.8

 

 

 

 

45

(44)

42.61

42.4

38.4

 

 

 

 

ø7.8

 

WD=1

 

 

ø15.2

 

 

 

ø17.8

 

 

 

 

 

 

 

 

ø26

 

MPLFLN10x

 

ø20.32

4.5

 

(34)

28.41

45

 

 

ø14.5

WD=11

ø26

 

Unit: mm

 

 

UIS2 objective lenses

 

 

Widefield eyepiece WHN10x

Super widefield eyepiece SWH10x

 

 

 

 

Field Number 22

Field Number 26.5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

Numerical

Working distance

Focal distance

Weight

Total

Practical field

Depth of

Total

Practical field

Depth of

(magnification)

Aperture

(mm)

f (mm)

(g)

magnifications

of view (mm)

focus (µm)

magnifications

of view (mm)

focus (µm)

MPLFLN

1.25x*

0.04

3.5

145

122

12.5

17.6

870

MPLFLN

2.5x*

0.08

10.7

72

106

25

8.8

220

25

10.6

220

MPLFLN

5x

0.15

20.0

36

51.5

50

4.4

59

50

5.3

59

MPLFLN

10x

0.30

11.0

18

68.1

100

2.2

15

100

2.7

15

MPLFLN

20x

0.45

3.1

9

70.4

200

1.1

5.2

200

1.3

5.1

MPLFLN

50x

0.80

1.0

3.6

89.9

500

0.44

1.3

500

0.53

1.3

MPLFLN

100x

0.90

1.0

1.8

90.9

1000

0.22

0.73

1000

0.27

0.73

 

 

 

 

 

 

 

 

 

 

 

Screw: W20.32x0.706 (0.8"x1/36")

 

 

 

 

 

* To be available in the beginning of 2007

8

UIS2 OBJECTIVE LENSES

Long WD M Plan SemiApochromat

(WD: Working Distance)

LMPLFLN series

Long working distance Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration. Suitable with samples having a height difference and in preventing collision, as the working distance is long.

Also, since the exit pupil position of the 5x-100x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification.

 

LMPLFLN5x

 

ø20.32

4.9

 

(22.5)

22.2

45

 

WD=22.5

ø25.4

ø26

 

 

LMPLFLN50x

 

ø20.32

4.9

 

(34.4)

30.4

45

 

WD=10.6

ø18.2

ø26

 

 

LMPLFLN10x

 

ø20.32

4.5

 

(24)

22.1

45

 

 

ø15.2

WD=21

ø22.4

ø26

 

 

 

 

LMPLFLN100x

 

 

 

ø20.32

4.7

 

 

 

45

(41.6)

41.1

37.26

 

 

 

ø12.5

 

WD=3.4

 

ø15

 

 

ø18.1

 

 

 

 

 

 

ø26

 

LMPLFLN20x

 

ø20.32

4.8

 

(33)

29.31

45

 

 

ø17

WD=12

ø26

 

Unit: mm

 

UIS2 objective lenses

 

 

Widefield eyepiece WHN10x

Super widefield eyepiece SWH10x

 

 

 

Field Number 22

Field Number 26.5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

Numerical

Working distance

Focal distance

Weight

Total

Practical field

Depth of

Total

Practical field

Depth of

(magnification)

Aperture

(mm)

f (mm)

(g)

magnifications

of view (mm)

focus (µm)

magnifications

of view (mm)

focus (µm)

 

 

 

 

 

 

 

 

 

 

 

LMPLFLN 5x

0.13

22.5

36

50

50

4.4

70

50

5.3

70

 

 

 

 

 

 

 

 

 

 

 

LMPLFLN 10x

0.25

21.0

18

54

100

2.2

18

100

2.7

18

 

 

 

 

 

 

 

 

 

 

 

LMPLFLN 20x

0.40

12.0

9

73

200

1.1

6.1

200

1.3

6.1

 

 

 

 

 

 

 

 

 

 

 

LMPLFLN 50x

0.50

10.6

3.6

77

500

0.44

2.5

500

0.53

2.5

 

 

 

 

 

 

 

 

 

 

 

LMPLFLN 100x

0.80

3.4

1.8

94

1000

0.22

0.87

1000

0.27

0.87

 

 

 

 

 

 

 

 

 

 

 

Screw: W20.32x0.706 (0.8"x1/36")

9

UIS2 OBJECTIVE LENSES

M Plan Achromat

MPLN series

Plan Achromat objective lenses providing excellent image flatness up to F.N. 22.

 

MPLN5x

 

ø20.32

4.5

 

(25)

23.4

45

 

WD=20

ø21

ø24

 

 

 

 

 

MPLN50x

 

 

 

 

ø20.32

4.5

 

 

 

 

45

(44.62)

42.62

41.3

37.2

 

WD=0.38

 

 

ø6

 

 

 

ø11.9

 

 

 

ø15.8

 

 

 

 

 

 

 

 

ø24

 

 

 

 

MPLN10x

 

 

 

 

ø20.32

4.5

 

 

 

 

45

(34.4)

33.6

32.71

28.8

 

WD=10.6

 

 

ø10.5

 

 

 

ø12

 

 

 

ø16

 

 

 

 

 

 

 

 

ø24

 

 

 

 

MPLN100x

 

 

 

 

ø20.32

4.5

 

 

 

 

45

(44.79)

43.16

42.8

38.7

 

WD=0.21

 

 

ø4.4

 

 

 

ø11.6

 

 

 

ø15.6

 

 

 

 

 

 

 

 

ø24

 

 

 

 

MPLN20x

 

 

 

 

ø20.32

4.5

 

 

 

 

45

(43.7)

42.4

41.3

37.2

 

WD=1.3

 

 

ø6

 

 

 

ø11.9

 

 

 

 

 

 

 

 

ø15.8

 

 

 

 

ø24

Unit: mm

 

 

 

UIS2 objective lenses

 

 

Widefield eyepiece WHN10x

 

 

 

 

 

 

Field Number 22

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

Numerical

Working distance

Focal distance

Weight

Total

Practical field of

Depth of focus

(magnification)

Aperture

(mm)

f (mm)

(g)

magnifications

view (mm)

(µm)

MPLN

5x

0.10

20.0

36

64

50

4.4

98

 

 

 

 

 

 

 

 

 

MPLN

10x

0.25

10.6

18

80

100

2.2

18

 

 

 

 

 

 

 

 

 

MPLN

20x

0.40

1.3

9

111

200

1.1

6.1

 

 

 

 

 

 

 

 

 

MPLN

50x

0.75

0.38

3.6

113

500

0.44

1.4

 

 

 

 

 

 

 

 

 

MPLN

100x

0.90

0.21

1.8

116

1000

0.22

0.73

 

 

 

 

 

 

 

 

 

Screw: W20.32x0.706 (0.8"x1/36")

10

UIS2 OBJECTIVE LENSES

LCD Long WD M Plan SemiApochromat

LCPLFLN-LCD series

Perfect objective lens series for observation of LCD panels and other samples through a glass substrate.

Aberration correction matched to the glass thickness is accomplished using a correction ring.

 

 

 

 

 

 

LCPLFLN20xLCD***

 

 

 

 

 

 

ø20.32

 

4.5

 

 

 

 

 

 

4.8

45.238 *

(36.738)

36.55

34.75

24.5

20

 

45.238 *

 

 

 

 

 

 

ø15

t=0.7

 

WD=7.8

 

 

 

 

ø25

 

 

 

 

 

ø29.5

 

 

 

 

 

 

 

 

 

 

 

 

 

ø31

 

 

 

 

LCPLFLN50xLCD***

 

 

 

ø20.32

 

 

 

25

20

 

(42.038)

40.45

38.65

 

 

 

 

 

ø12.77

t=0.7

WD=2.5

 

 

ø17.84

 

 

ø25

 

 

 

 

 

 

 

ø29.5

 

 

 

 

ø31

 

* Value at glass thickness 0.7mm observation

 

 

 

 

 

LCPLFLN100xLCD***

 

 

 

 

 

 

ø20.32

 

 

4.5

 

 

 

 

 

 

 

45.238 *

(43.638)

43.4

41.6

27.5

20

 

 

 

WD=0.9

 

 

 

ø15.2

t=0.7

 

 

 

 

 

ø25

 

 

 

 

 

 

 

 

 

 

 

 

 

ø29.5

 

 

 

 

 

 

 

ø31

 

Unit: mm

Objective lens

 

 

LCPLFLN20xLCD

 

 

LCPLFLN50xLCD

 

 

LCPLFLN100xLCD

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Corresponding glass thickness (mm)

 

 

0-1.2

 

 

 

 

 

0-1.2

 

 

 

 

 

0-0.7

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Correction ring indication

 

0

0.7

 

1.2

 

0

 

0.7

 

1.2

 

0

 

0.5

 

0.7

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Working distance (mm)

 

 

8.3

7.8

 

7.4

 

3.0

 

2.5

 

2.2

 

1.2

 

0.98

 

0.9

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Correction system

 

 

Correction ring

 

 

Correction ring

 

 

Correction ring

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

UIS2 objective lenses

 

 

 

 

Widefield eyepiece WHN10x

Super widefield eyepiece SWH10x

 

 

 

 

 

 

 

Field Number 22

Field Number 26.5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

 

Numerical

Working distance**

Focal distance

Weight

Total

Practical field

Depth of

Total

Practical field

Depth of

(magnification)

 

Aperture

 

(mm)

f (mm)

(g)

magnifications

of view (mm)

focus (µm)

magnifications

of view (mm)

focus (µm)

LCPLFLN 20xLCD***

 

0.45

7.8

9

 

146

 

200

1.1

 

5.2

 

200

 

1.3

 

5.2

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

LCPLFLN 50xLCD***

 

0.70

2.5

3.6

 

170

 

500

0.44

 

1.6

 

500

 

0.53

 

1.6

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

LCPLFLN 100xLCD***

 

0.85

0.9

1.8

 

185

 

1000

0.22

 

0.79

 

1000

 

0.27

 

0.79

Screw: W20.32x0.706 (0.8"x1/36")

**The figure shown here is the value when the correction ring indication is 0.7. *** To be available in the beginning of 2007

11

UIS OBJECTIVE LENSES

M Plan Apochromat

MPlanApo series

Highest class Plan Apochromat objective lens that maximize performance in brightfield observation.

All aberrations are corrected at the highest level, while providing high N.A.

MPlanApo20x

MPlanApo50x

MPlanApo100x

 

 

 

 

ø20.32

4.5

 

 

 

 

45

(44.1)

40.1

38.7

34.7

 

 

 

 

ø5.6

 

WD=0.9

 

 

ø16.5

 

 

 

ø20

 

 

 

 

ø28

 

 

 

 

ø20.32

4.5

 

 

 

 

45

(44.7)

41.7

40.7

36.8

 

 

 

 

ø8

 

WD=0.3

 

 

ø16.6

 

 

 

ø20.2

 

 

 

 

 

 

 

 

ø28

4.5

 

 

 

 

45

(44.65)

41.5

40.7

36.8

WD =0.35

ø20.32

ø5.3

 

ø16.5

 

ø20.2

 

ø28

Unit: mm

 

 

UIS objective lenses

 

 

Widefield eyepiece WHN10x

Super widefield eyepiece SWH10x

 

 

 

Field Number 22

Field Number 26.5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

Numerical

Working distance

Focal distance

Weight

Total

Practical field

Depth of

Total

Practical field

Depth of

(magnification)

Aperture

(mm)

f (mm)

(g)

magnifications

of view (mm)

focus (µm)

magnifications

of view (mm)

focus (µm)

MPlanApo 20x

0.60

0.9

9

150

200

1.1

3.7

200

1.3

3.7

MPlanApo 50x

0.95

0.3

3.6

150

500

0.44

1.0

500

0.53

1.0

MPlanApo 100x

0.95

0.35

1.8

150

1000

0.22

0.67

1000

0.27

0.67

Screw: W20.32x0.706 (0.8"x1/36")

Super Long WD M Plan Achromat

SLMPlan series

Plan Achromat objective lenses with high magnification and super long working distance.

Two magnifications, 20x and 50x are available. For 5x or 10x objective lenses, select from the LMPLFLN series.

SLMPlan20x

SLMPlan50x

ø20.32

4.9

(23.95)

23.7

22.7

45

 

ø17.8

WD=21.05

ø24.2

ø26

4.9

 

 

 

 

45

(29.96)

29

28.1

26.4

WD=15.04

ø20.32

ø17

 

ø19.3

 

ø22.7

 

ø26

Unit: mm

 

 

UIS objective lenses

 

 

Widefield eyepiece WHN10x

Super widefield eyepiece SWH10x

 

 

 

 

Field Number 22

Field Number 26.5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

Numerical

Working distance

Focal distance

Weight

Total

Practical field

Depth of

Total

Practical field

Depth of

(magnification)

Aperture

(mm)

f (mm)

(g)

magnifications

of view (mm)

focus (µm)

magnifications

of view (mm)

focus (µm)

 

 

 

 

 

 

 

 

 

 

 

 

SLMPlan

20x

0.35

21.0

9

73

200

1.1

7.2

200

1.3

7.2

SLMPlan

50x

0.45

15.0

3.6

91

500

0.44

2.9

500

0.53

2.9

 

 

 

 

 

 

 

 

 

 

 

 

Screw: W20.32x0.706 (0.8"x1/36")

12

UIS OBJECTIVE LENSES

IR Long WD M Plan SemiApochromat/IR M Plan SemiApochromat

LMPlan-IR series/MPlan-IR

IR objective lenses which compensate for aberrations from visible to near infrared light.

Ideal for the observations of semiconductor interiors and the back surface of a chip package as well as CSP bump inspection.

 

LMPlan5xIR

 

 

LMPlan10xIR

 

ø20.32

 

 

ø20.32

4.5

 

4.5

 

 

(25)

22.5

(26.5)

25

23

45

 

45

 

 

 

ø21

 

 

WD=20

ø26

WD=18.5

ø12.4

 

ø15

ø22

ø26

 

 

 

 

LMPlan50xIR

 

 

 

LMPlan100xIR

 

 

 

 

ø20.32

 

 

 

ø20.32

4.5

 

 

 

 

4.7

 

 

 

45

(39)

37.5

36.9

32.9

45

(41.6)

40.8

36.8

WD=6

ø12.5

WD=3.4

ø12.5

ø18

ø18.12

 

ø15.6

 

ø15

 

ø26

 

ø26

LMPlan20xIR

ø20.32

4.5

 

 

 

45

(36.9)

34.3

30.3

WD=8.1

ø10.4

ø18

 

ø26

MPlan100xIR

ø20.32

4.5

 

 

 

 

45

(44.7)

43.4

42.6

37

WD=0.3

ø4.95

ø14.8

 

ø12.2

 

ø26

Unit: mm

 

 

 

UIS objective lenses

 

 

Widefield eyepiece WHN10x

 

 

 

 

 

 

Field Number 22

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

Numerical

Working distance

Focal distance

Weight

Total

Practical field of

Depth of focus

(magnification)

Aperture

(mm)

f (mm)

(g)

magnifications

view (mm)

(µm)

LMPlan

5xIR

0.10

20.0

36

73

50

4.4

98

 

 

 

 

 

 

 

 

 

LMPlan

10xIR

0.25

18.5

18

73

100

2.2

18

 

 

 

 

 

 

 

 

 

LMPlan

20xIR

0.40

8.1

9

110

200

1.1

6.1

 

 

 

 

 

 

 

 

 

LMPlan

50xIR

0.55

6.0

3.6

115

500

0.44

2.2

 

 

 

 

 

 

 

 

 

LMPlan

100xIR

0.80

3.4

1.8

122

1000

0.22

0.87

 

 

 

 

 

 

 

 

 

MPlan

100xIR

0.95

0.3

1.8

130

1000

0.22

0.67

 

 

 

 

 

 

 

 

 

Screw: W20.32x0.706 (0.8"x1/36")

13

UIS2 OBJECTIVE LENSES

M Plan SemiApochromat BD

(BD:Brightfield/Darkfield)

MPLFLN-BD series

Plan SemiApochromat objective lenses, giving high-level correction for chromatic aberration.

The series secures a W.D. of 1mm or longer. Since the exit pupil position of the 5x-150x objective lenses is standardized, the position of the DIC prism does not have to be switched when changing the magnification.

 

 

 

MPLFLN5xBD

 

 

 

ø26

4.5

 

 

 

(33)

31.5

31

30.25

45

 

 

 

 

 

 

ø16

WD=12

 

 

ø22.4

 

 

ø29.5

 

 

 

 

 

 

ø32

 

 

 

MPLFLN50xBD

 

 

 

ø26

 

4.5

 

 

 

45

(44)

41

 

 

 

ø20

 

 

WD=1

ø27.2

 

 

ø32

 

 

 

 

 

 

 

MPLFLN10xBD

 

 

 

 

ø26

4.5

 

 

 

 

45

(38.5)

37

36.5

34.1

 

 

 

 

ø16.8

 

WD=6.5

 

 

ø22

 

 

 

ø26.2

 

 

 

 

 

 

 

 

ø27

 

 

 

 

ø32

 

 

 

 

MPLFLN100xBD

 

 

 

 

ø26

 

 

4.5

 

 

 

 

45

(44)

41

 

 

 

WD=1

ø20

 

 

 

ø27.2

 

 

 

 

 

 

 

 

ø32

 

 

 

 

MPLFLN20xBD

 

 

 

 

ø26

4.5

 

 

 

 

45

(42)

39.5

39

35.97

 

 

 

 

ø17

 

WD=3

 

 

ø22

 

 

 

ø27.5

 

 

 

 

 

 

 

 

ø28.5

 

 

 

 

ø32

 

 

 

 

MPLFLN150xBD

 

 

 

 

ø26

 

 

4.5

 

 

 

 

45

(44)

41

 

 

 

WD=1

ø20

 

 

 

ø27.2

 

 

 

 

 

 

 

 

ø32

Unit: mm

 

 

UIS2 objective lenses

 

 

Widefield eyepiece WHN10x

Super widefield eyepiece SWH10x

 

 

 

 

Field Number 22

Field Number 26.5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Objective lens

Numerical

Working distance

Focal distance

Weight

Total

Practical field

Depth of

Total

Practical field

Depth of

(magnification)

Aperture

(mm)

f (mm)

(g)

magnifications

of view (mm)

focus (µm)

magnifications

of view (mm)

focus (µm)

MPLFLN

5xBD

0.15

12.0

36

95.5

50

4.4

59

50

5.3

59

 

 

 

 

 

 

 

 

 

 

 

 

MPLFLN

10xBD

0.30

6.5

18

82.8

100

2.2

15

100

2.7

15

 

 

 

 

 

 

 

 

 

 

 

 

MPLFLN

20xBD

0.45

3.0

9

87.7

200

1.1

5.2

200

1.3

5.2

 

 

 

 

 

 

 

 

 

 

 

 

MPLFLN

50xBD

0.80

1.0

3.6

99.8

500

0.44

1.3

500

0.53

1.3

 

 

 

 

 

 

 

 

 

 

 

 

MPLFLN

100xBD

0.90

1.0

1.8

98.9

1000

0.22

0.73

1000

0.27

0.73

 

 

 

 

 

 

 

 

 

 

 

 

MPLFLN

150xBD

0.90

1.0

1.2

104.8

1500

0.15

0.6

1500

0.18

0.6

 

 

 

 

 

 

 

 

 

 

 

 

Screw: W26x0.706

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